JPH0138509Y2 - - Google Patents
Info
- Publication number
- JPH0138509Y2 JPH0138509Y2 JP18123583U JP18123583U JPH0138509Y2 JP H0138509 Y2 JPH0138509 Y2 JP H0138509Y2 JP 18123583 U JP18123583 U JP 18123583U JP 18123583 U JP18123583 U JP 18123583U JP H0138509 Y2 JPH0138509 Y2 JP H0138509Y2
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- diaphragm
- span
- comparison
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 50
- 239000012530 fluid Substances 0.000 claims description 19
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18123583U JPS6088247U (ja) | 1983-11-24 | 1983-11-24 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18123583U JPS6088247U (ja) | 1983-11-24 | 1983-11-24 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6088247U JPS6088247U (ja) | 1985-06-17 |
| JPH0138509Y2 true JPH0138509Y2 (US08080257-20111220-C00005.png) | 1989-11-17 |
Family
ID=30392772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18123583U Granted JPS6088247U (ja) | 1983-11-24 | 1983-11-24 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6088247U (US08080257-20111220-C00005.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4542397B2 (ja) * | 2004-09-02 | 2010-09-15 | キヤノンアネルバ株式会社 | 静電容量型圧力センサの製造方法 |
| US8704538B2 (en) * | 2010-07-01 | 2014-04-22 | Mks Instruments, Inc. | Capacitance sensors |
-
1983
- 1983-11-24 JP JP18123583U patent/JPS6088247U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6088247U (ja) | 1985-06-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5186054A (en) | Capacitive pressure sensor | |
| SU593674A3 (ru) | Датчик давлени | |
| US5424650A (en) | Capacitive pressure sensor having circuitry for eliminating stray capacitance | |
| CA1230496A (en) | Differential pressure sensor | |
| US3805150A (en) | Environment immune high precision capacitive gauging system | |
| US5561247A (en) | Pressure sensor | |
| US3706919A (en) | Capacitive gauge | |
| JP2871381B2 (ja) | 圧力センサー | |
| US20020194921A1 (en) | Capacitive differential pressure sensor | |
| JPS5829862B2 (ja) | 圧力測定装置 | |
| KR20010032103A (ko) | 마이크로-기계적 차압 감응 장치 | |
| JP2815279B2 (ja) | 圧力センサー | |
| JP2004524545A (ja) | 容量型差圧センサ | |
| JPH0138509Y2 (US08080257-20111220-C00005.png) | ||
| JPS61222178A (ja) | 電界効果型圧力センサ | |
| US6370960B1 (en) | Capacitive sensor | |
| CN114046927B (zh) | 一种闭环气压传感器 | |
| JPH03123814A (ja) | 静電容量式変位センサ | |
| JPH06109568A (ja) | 真空センサ | |
| JP3385392B2 (ja) | 真空センサ | |
| JPH07174652A (ja) | 半導体圧力センサ及びその製造方法並びに圧力検出方法 | |
| JPS6182104A (ja) | 静電容量型距離計 | |
| JPH0666658A (ja) | 静電容量型圧力センサ | |
| JPH03239938A (ja) | 容量型圧力センサ | |
| JPH0894468A (ja) | 静電容量型圧力センサ |