JPH01320620A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH01320620A
JPH01320620A JP15528788A JP15528788A JPH01320620A JP H01320620 A JPH01320620 A JP H01320620A JP 15528788 A JP15528788 A JP 15528788A JP 15528788 A JP15528788 A JP 15528788A JP H01320620 A JPH01320620 A JP H01320620A
Authority
JP
Japan
Prior art keywords
film
recording medium
magnetic recording
ferromagnetic metal
hard carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15528788A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15528788A priority Critical patent/JPH01320620A/en
Publication of JPH01320620A publication Critical patent/JPH01320620A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a recording medium having stable and good regeneration output by providing a heat resistant diamond-like hard carbon film and a polyimide film on a polyester film and further laminating a ferromagnetic metal film thereon. CONSTITUTION:The diamond-like hard carbon film 2 and polyimide film 3 are formed by high frequency sputtering on the polyester film 1. Then the ferromagnetic metal film 4 such as Co-Ni, Co-O, etc., is laminated on the film 3 by high frequency sputter. Then a protective layer of a plasma polymerized film is formed to constitute the recording medium. When fast high-density recording is performed with an alloy magnetic head, the mechanical properties of the film 1 can be protected by heat insulation of the film 2 even if the surface temperature is raised. Therefore, good output characteristics can be maintained and the medium can be stably recorded/regenerated by the cushion effect of the poliymide film.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する強磁性金属薄膜を磁気
記録層とする磁気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording.

従来の技術 強磁性金属薄膜層を磁気記録層とする磁気記録媒体は、
通常、金属もしくは、それらの合金などを真空蒸着、ス
パッタリング等によって高分子フィルム上に薄膜化して
配することでつくられ、高密度記録に適した特性を有す
るが、反面磁気ヘッドとの摩擦係数が大きくて、走行性
が悪く、摩耗や損傷を受は易い。このため、従来から強
磁性金属薄膜上に種々の保護層を設けるなどして走行性
及び耐久性を改善することが行われており、たと2えば
、高級脂肪酸やフッ素系化合物等の潤滑剤を配すること
が行われている(特開昭53−88704号公報、特開
昭58−94130号公報)。
Conventional technology A magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film layer is
It is usually made by depositing a thin film of metal or an alloy thereof on a polymer film by vacuum evaporation, sputtering, etc., and has characteristics suitable for high-density recording, but on the other hand, the coefficient of friction with the magnetic head is low. They are large, have poor running performance, and are easily subject to wear and damage. For this reason, various protective layers have been provided on the ferromagnetic metal thin film to improve running performance and durability.For example, lubricants such as higher fatty acids and fluorine compounds have been used. (JP-A-53-88704, JP-A-58-94130).

ところがこれらの潤滑剤層は磁気ヘッドとの摺接によっ
て比較的短時間で剥離、破壊してしまい、効果の持続性
に乏しいことから、強磁性金属薄膜に微細な凹凸を設け
ることでの改善が提案され(特開昭58−100221
号公報、特開昭69−121631号公報)ている。
However, these lubricant layers peel off and break in a relatively short period of time due to sliding contact with the magnetic head, and their effects are not long-lasting.Therefore, it has been proposed to improve this by creating fine irregularities in the ferromagnetic metal thin film. It was proposed (Japanese Unexamined Patent Publication No. 58-100221
(Japanese Patent Application Laid-open No. 121631/1982).

発明が解決しようとする課題 しかしながら、磁気ヘッドが合金系の複合材料で構成さ
れるようになってきたことから、上記した構成の磁気記
録媒体でも十分な出力特性が得られないといった課題が
あり改善が望まれていた。
Problems to be Solved by the Invention However, since magnetic heads have come to be composed of alloy-based composite materials, there is a problem that sufficient output characteristics cannot be obtained even with magnetic recording media of the above configuration, and improvements are needed. was desired.

本発明は上記した事情に鑑みなされたもので、合金系ヘ
ッドを用いた高密度記録に適した良好な出力特性を維持
できる磁気記録媒体を提供するものである。
The present invention was made in view of the above circumstances, and it is an object of the present invention to provide a magnetic recording medium that can maintain good output characteristics suitable for high-density recording using an alloy head.

課題を解決するための手段 上記した課題を解決するため、本発明の磁気記録媒体は
、ポリエステルフィルム上にダイアモンド状硬質炭素薄
膜、ポリイミド膜等の耐熱高分子膜、強磁性金属薄膜を
積層したものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a diamond-like hard carbon thin film, a heat-resistant polymer film such as a polyimide film, and a ferromagnetic metal thin film laminated on a polyester film. It is.

作用 本発明の磁気記録媒体は、上記した構成により、高速で
磁気ヘッドと特に合金系ヘッドとの摺動した時に表面温
度があがってもポリエステルフィルムの機械物性は、ダ
イアモンド状硬質炭素薄膜で熱絶縁されるので、変化し
ない。従って、合金ヘッドと一定の摺接条件を保てるの
で良好な出力特性を保てるのと、ポリイミド膜のクソン
ヨノ効果によって、ヘッドのダメージも小さくなり短波
長での安定な記録再生ができることになる。
Effect The magnetic recording medium of the present invention has the above-described structure, so that even if the surface temperature rises when the magnetic head and especially the alloy head slide at high speed, the mechanical properties of the polyester film remain thermally insulated by the diamond-like hard carbon thin film. It does not change because it is Therefore, since a constant sliding contact condition with the alloy head can be maintained, good output characteristics can be maintained, and the damage to the head is also reduced due to the Kusonyono effect of the polyimide film, allowing stable recording and reproduction at short wavelengths.

実施例 以下、図面を参照しながら本発明の一実施例について詳
しく説明する。図は、本発明の一実施例に係る磁気記録
媒体の拡大断面図で、図で1Viポリエチレンテレフタ
レート、ポリエチレンナフタレート等のポリエステルフ
ィルムで、磁気記録媒体用のフィルムとして最もバラン
スのとれたものである。2はダイアモンド状硬質炭素薄
膜で、高周波スパッタリング法、イオンブレーティング
法。
EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings. The figure is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and the figure shows a polyester film such as 1Vi polyethylene terephthalate or polyethylene naphthalate, which is the most balanced film for magnetic recording media. . 2 is a diamond-shaped hard carbon thin film using high frequency sputtering method and ion blating method.

イオンビームデポジンヨン法、プラズマ加速法等により
形成されるもので、膜厚ば200人から2oO○人が好
ましく、2oOÅ以下では熱絶縁性が不十分なため、本
発明の効果が十分でなくなるだめで、2oO0Å以上で
は、磁気記録媒体のしなやかさがなくなってきて磁気ヘ
ッドとの接触状態が不安定になり出力低下を起すように
なるからである。
It is formed by an ion beam deposition method, a plasma acceleration method, etc., and preferably has a film thickness of 200 to 200 Å, and if it is less than 200 Å, the thermal insulation properties will be insufficient, so the effect of the present invention will not be sufficient. If the thickness exceeds 2000 Å, the flexibility of the magnetic recording medium will be lost, and the contact state with the magnetic head will become unstable, resulting in a decrease in output.

3はポリイミド膜、ポリアミド膜、ポリパラパニック酸
膜等の耐熱高分子膜でモノマーをイオンブレーティング
する方法、スパッタリング法等で形成でき、膜厚はクツ
ション効果を得るに必要な下限の値として350八で、
上限は経済性、製膜速度から高々1000人までで設計
するのがよい。4はCo−Ni 、Cio −0、Go
−Or 、 Go −Mo 、Go−3m 。
3 is a heat-resistant polymer film such as a polyimide film, a polyamide film, or a polyparapanic acid film, which can be formed by ion-blating monomers, sputtering, etc., and the film thickness is 350 mm as the lower limit value necessary to obtain a cushioning effect. At eight,
The upper limit should be designed to 1000 people at most from the viewpoint of economy and film production speed. 4 is Co-Ni, Cio-0, Go
-Or, Go-Mo, Go-3m.

Go−Ti 、 Co −P 、Go−Ni −P 、
 Go−Or−Nb等の強磁性金属薄膜でメツキ法、イ
オンブレーティング法、スパッタリング法、電子ビーム
蒸着法等により形成される500人から3000人の薄
膜で磁化容易軸の方向は特に限定されるものではない。
Go-Ti, Co-P, Go-Ni-P,
A ferromagnetic metal thin film such as Go-Or-Nb is formed by a plating method, an ion blating method, a sputtering method, an electron beam evaporation method, etc., and the direction of the axis of easy magnetization is particularly limited. It's not a thing.

5は保護層で、SiO2膜、プラズマ重合膜、アモルフ
ァスカーボン膜、脂肪酸、フッ素オイル等の適切な組み
合わせで膜厚はスペーシング損失全考慮して50人から
300への範囲で構成するのが好ましい。
5 is a protective layer, which is preferably composed of an appropriate combination of SiO2 film, plasma polymerized film, amorphous carbon film, fatty acid, fluorine oil, etc., and has a film thickness in the range of 50 to 300, taking all spacing losses into account. .

以下、更に具体的に本発明の実施例について、比較例と
の対比で説明する。
Examples of the present invention will be described in more detail below in comparison with comparative examples.

厚み10μmのポリエチレンテレフタレートフィルム上
に直径150へのTiOx徽粒子を10ケ/(11m)
2塗布したフィルムを用いて、高周波スパッタリング法
でグラフフィトをターゲットにして、ダイアモンド状硬
質炭素薄膜を、更にその上に高周波スパッタリング法で
ポリイミド膜を配し、その上にco−Or垂直磁化膜を
高周波スパッタリング法で1200人配し、その上にテ
トラメチルシクロジシラザンをモノマーガスとして高周
波グロー放電による重合膜を1oO人配し、更に真空蒸
着法でパーフルオロステアリン酸を50人配した8ミリ
幅の磁気テープを準備した。一方比較例は、フィルム上
に直接Go−Cr垂直磁化膜を配したものと(比較例人
)、高周波スパッタリング法によりT1薄膜を550人
配してからCo−0r垂直磁化膜を配した比較例Bで、
他の条件は実施例と同じものを準備した。
10 TiOx particles/(11m) with a diameter of 150 on a 10μm thick polyethylene terephthalate film
2. Using the coated film, a diamond-shaped hard carbon thin film was formed using a high frequency sputtering method using graphite as a target, and then a polyimide film was placed on top of that using a high frequency sputtering method, and a co-Or perpendicular magnetization film was placed on top of that using a high frequency sputtering method. 1200 layers were deposited using high frequency sputtering method, 100 layers of polymer film was deposited using high frequency glow discharge using tetramethylcyclodisilazane as a monomer gas, and 50 layers of perfluorostearic acid were deposited using vacuum evaporation method, making it 8 mm wide. A magnetic tape was prepared. On the other hand, the comparative examples are one in which a Go-Cr perpendicularly magnetized film is directly placed on the film (comparative example), and a comparative example in which a Co-0r perpendicularly magnetized film is placed after 550 T1 thin films are deposited by high-frequency sputtering method. At B,
Other conditions were the same as in the example.

夫々のテープにアモルファスヘッドによシ、記録波長0
.4μm を記録し、再生出力波形のエンベロープ平坦
率を比較した。
Each tape has an amorphous head, recording wavelength is 0.
.. 4 μm was recorded, and the envelope flatness ratio of the reproduced output waveform was compared.

C以下余白) 発明の効果 以上のように本発明によれば、合金系磁気ヘッドを用い
て高密度記録を行った時、再生出力を安定にかつ、良好
な値として得ることができるといったすぐれた効果があ
る。
(Blank below C) Effects of the Invention As described above, according to the present invention, when high-density recording is performed using an alloy magnetic head, the reproduction output can be stably obtained and a good value can be obtained. effective.

【図面の簡単な説明】[Brief explanation of the drawing]

図は、本発明の一実施例に係る磁気記録媒体の拡大断面
図である。 1・・・・・・ポリエステルフィルム、2・・・・・・
ダイアモンド状硬質炭素膜、3・・・・・・ポリイミド
膜、4・・・・・・強磁性金属薄膜。
The figure is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. 1...Polyester film, 2...
Diamond-like hard carbon film, 3... polyimide film, 4... ferromagnetic metal thin film.

Claims (1)

【特許請求の範囲】[Claims] ポリエステルフィルム上にダイアモンド状硬質炭素膜、
耐熱高分子膜、強磁性金属薄膜を積層したことを特徴と
する磁気記録媒体。
Diamond-like hard carbon film on polyester film,
A magnetic recording medium characterized by laminating a heat-resistant polymer film and a ferromagnetic metal thin film.
JP15528788A 1988-06-23 1988-06-23 Magnetic recording medium Pending JPH01320620A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15528788A JPH01320620A (en) 1988-06-23 1988-06-23 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15528788A JPH01320620A (en) 1988-06-23 1988-06-23 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH01320620A true JPH01320620A (en) 1989-12-26

Family

ID=15602600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15528788A Pending JPH01320620A (en) 1988-06-23 1988-06-23 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH01320620A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1029660A1 (en) * 1999-02-17 2000-08-23 Alusuisse Technology & Management AG Multilayered film and process for its manufacture
EP1029661A1 (en) * 1999-02-17 2000-08-23 Alusuisse Technology & Management AG Composite film and process for its manufacture

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1029660A1 (en) * 1999-02-17 2000-08-23 Alusuisse Technology & Management AG Multilayered film and process for its manufacture
EP1029661A1 (en) * 1999-02-17 2000-08-23 Alusuisse Technology & Management AG Composite film and process for its manufacture
US6352781B1 (en) 1999-02-17 2002-03-05 Alusuisse Technology & Management Ltd. Composite film and process for its manufacture

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