JPH01310555A - Wafer housing case - Google Patents

Abstract

PURPOSE:To facilitate a single wafer treatment and to contrive a reduction in defectives by a method wherein a wafer housing case is constituted in such a way that one sheet of the wafers can be housed and is provided with a rotatable cover and a stopper for making it possible to separate the cover. CONSTITUTION:A wafer housing case is constituted in such a way that one sheet of a wafer 2 can be housed in a pair of V-shaped grooves 16 formed in a 1/4 circular wafer housing main body 15. Moreover, a cover 17 for interrupting the wafer 2 from the exterior is mounted on the main body 15 rotatably centering around a rotating shaft 18 and a stopper 19 for fixing the cover 17 on the main body 15 in case the cover 17 is shut is formed into a spiral spring. In such a way, one sheet of the wafer 2 is housed in the wafer housing case 25 and the wafer 2 is interrupted from the exterior by the rotatable cover 17. Thereby, the single wafer treatment is facilitated and defectives can be reduced.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a wafer storage case for processing eight sea urchin leaves.

[Conventional technology]

FIG. 5 is a perspective view showing a conventional wafer supply device. In the figure, (1) is a wafer cassette that can store a plurality of wafers (2), and can be mounted on a wafer cassette installation stand (31). The wafer cassette installation stand (3) is attached to be able to slide up and down along a guide rail (5) fixed to a guide plate (4).The wafer cassette installation stand (3) is attached to a ball screw (6 ) is attached and can be moved up and down along the guide rail (5) by driving the servo motor (7) and rotating the ball screw (6). (8) is the wafer (2). This processing equipment is equipped with a stage (9) for mounting the wafer (2) in a predetermined position. In order to supply the wafer (2) to the stage (9), two supply belts (G) are connected to the supply motor (2).
It can be rotated via the pulley (6) by driving the . (to) the wafer (
2) The discharge belt for discharging the material, α fathom is the discharge motor.

Next, the operation will be explained. The wafer (
In order to supply 2), first, wafer cassette) (1) t-
The wafer cassette is installed at a predetermined position on the wafer cassette installation stand +31.

Next, the servo motor (7) is driven to lower the wafer cassette installation stand +31 until the lowest wafer (2) stored in the wafer cassette (1) can be transported by the supply belt α0. Thereafter, the wafer (2) is supplied to the stage (9) by driving the supply morph (6) and rotating the two supply belts αQ. After the processing device (8) completes the predetermined processing of the wafer (2), the ejection motor α is driven to rotate the two ejection belts (to) to move the wafer (2) onto the stage (9). ).

[Problem to be solved by the invention]

Conventional wafer supply equipment was configured as described above, making it difficult to process single wafers and causing problems such as dust adhering to the surface of the wafer during transportation in the unihachi cassette or during stagnation, causing defects. there were.

This invention was made to solve the above-mentioned problems, and aims to provide a wafer storage case that facilitates single wafer processing and reduces defects.

[Means to solve the problem]

The wafer storage case according to the present invention is capable of storing one wafer, and is provided with a rotatable cover and a stopper for making the cover detachable.

[For production]

The wafer storage case of this invention stores one wafer and shields the wafer from the outside world with a rotatable cover.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, (g) is a 74 circular wafer storage body, (4
) is a pair of 7-shaped grooves formed in this wafer storage body (to), which can store one wafer (2). The α force is a cover for isolating the wafer (2) from the outside world, and is attached to the wafer storage body (A) so as to be rotatable around the rotation axis (G). aI is a stopper for fixing it to the wafer storage body (toward) when the cover α force is closed, and as shown in FIG. 2, it becomes a spiral spring A. The hook is a hook A formed on the cover (B), and is used to connect the rotating member (21) connected to the motor.
Rotate J to engage stopper 4 and fix cover (B) in the closed state. In addition, the handle in Figure i3 is a spiral spring, and by lowering the tension bar Yu, the cover αη is made rotatable, and a force is applied in the direction of opening the cover (17
) open. An example is a vacuum bin set, which can adsorb the wafer (2) onto a stage (9) and supply it from a wafer storage case (85).

Next, the operation will be explained. The wafer (
In order to supply 2), first, the wafer storage case (25) is mounted on the wafer storage case installation stand (3). Next, the cover (B) is rotated and opened by lowering the pull rod (support), the vacuum bin set (241) is moved, the wafer (2) is sucked and pulled out from the wafer storage case (25), and the stage ( After the processing device (8) completes the specified processing of the wafer (2), the wafer (2) is supplied to the vacuum Vincera).
The wafer (2) is transferred from the stage (9) to the wafer storage case (25) by (24), and the cover αη is closed by rotating the rotating member @υ.

In the above embodiment, a spiral spring is used for the stopper α, but a button switch (26) type via a compression spring (27) as shown in FIG. 4 may be used.

TFC, wafer (
Although the case in which 2) is supplied has been described, other wafer gripping tools may also be used, and the same effect as in the above embodiment will not be achieved.

〔Effect of the invention〕

As described above, according to the present invention, the wafer storage case is structured so that one wafer can be stored therein, and is also provided with a rotatable cover and a storage space for making the cover detachable. It has the effect of making it easier to clean sea urchins and reduce defects.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a wafer feeding device using a wafer storage case according to an embodiment of the present invention, FIG. 2 is an enlarged perspective view of a stopper portion, and FIG. 3 is a sectional view of a spiral spring portion.
FIG. 41 is a perspective view of a stopper portion showing another embodiment of the present invention, and FIG. 5 is a perspective view of a conventional wafer feeding device. In the figure, (4) shows the wafer storage main body, (4) shows the 7-shaped groove, α force shows the cover, (II shows the stopper), and (25) the wafer storage case.

Claims (1)

[Claims] A wafer storage body that has a pair of V-shaped grooves and can store one wafer between the V-shaped grooves, a rotatable cover attached to this wafer storage body, and a stopper for making this cover detachable. A wafer storage case characterized by: