JPH01305200A - Super-high speed oil diffusion pump - Google Patents

Abstract

PURPOSE:To prevent the breakage of the lower end of a jet pipe main body on transferring so as to maintain smooth evaporation of oil by connecting the lower end of the jet pipe main body to the lower end of a cylinder and providing an intercommunicating passage on a heating part near the connection part so as to recirculating liquefied oil dropped on the inner wall of the cylinder. CONSTITUTION:On rising inside respective steam introducing pipes B1, B2 of a jet pipe main body B, boiled and evaporated oil is liquefied. Inside the thinner steam pipe B1, the liquefied oil is temporarily collected in an expansion part 11 and the oil collected to some extent is smoothly dropped along the wall surface of the steam pipe, without preventing the steamed oil from rising. Further, the steam jet of oil (O) jetting out of the upper end of respective steam introducing pipes B1, B2 is cooled with a water jacket 19 and liquefied through the contact with the inner wall of a cylinder A. Then the liquefied oil is dropped along the inner wall and recirculated from an intercommunicating pipe 5 to a heating part C so as to be evaporated.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ultra-high speed oil diffusion bomb for obtaining high vacuum.

(Prior art) Conventionally, vertical type oil diffusion pumps that utilize oil vapor (for example, Japanese Patent Publication No. 47-971, Japanese Patent Publication No. 54-312)
07, Utility Model Publication No. 44-13976, etc.), and horizontal types such as the Hickman type pump.

The applicant attempted to improve the vertical type, and filed a patent application in 1983.
-50366 was proposed. To explain the invention on the right with reference to FIG.
') to make the inside of the cylinder (A') vacuum to a certain extent. Next, there is a heating section (C') at the bottom of the cylinder (A').
) is installed to heat and evaporate oil, etc.
The heated and evaporated steam jet flows through the steam conduit (B') constituting the jet tube body (B') disposed in the cylinder (A').
1', B2') from the upper end thereof through the umbrella part (56) and carries the gas molecules to the exhaust pipe (52) to perform the action of a vacuum pump. The heated and evaporated steam jet partially liquefies as it rises through the steam conduits (Bl', B2'). This liquefied oil may block the inside of the steam pipe when it flows back, and in this case, it obstructs the rise of the steam jet, so a new bulge ( 57) so that the liquefied oil can be stored in the enlarged portion (57), so that the steam jet can rise smoothly.

In addition, the upper part of the cylinder (A') is a removable lid body (D').
), a female tapered surface is formed on the lid (D'), and a male tapered surface that comes into close contact with this is formed on the top of the cylinder (A'), and these two surfaces are rubbed together to bond. The jet tube main body (B') has its lower end connected to the container (A').
It is elastically supported by being engaged with a step (60) formed in the lid body (D') and fitting its upper end into a recess (58) formed in the lid body (D') via a spring (59). ing.

In addition, an insertion tube (61) that enters the heating section (C') from the outer wall of the cylinder (A') is provided so that the oil temperature can be measured with a temperature sensor (not shown) inserted into this insertion tube (61). It is composed.

By the way, the heating temperature of vacuum oil should be changed from 230°C to 240°C.
When the temperature is set at .degree. C., a bumping phenomenon of oil occurs within the heating section (C'). This oil bumping phenomenon generates unstable vapor pressure, leading to a decrease in the degree of vacuum and, in some cases, failure of vacuum measuring equipment (vacuum gauges, electrodes, etc.). Conventionally, as a means for preventing the oil bumping phenomenon, a partition wall has been provided as in Japanese Patent Publication No. 45-6897.

(Problem to be solved by the invention) However, in Japanese Patent Application No. 63-50366, the lid body (D
') and the upper part of the cylinder (A') are sealed by rubbing together with an adhesive, and the jet tube body (B'
) is engaged with a step (60) formed in the container (A'), and its upper end is inserted into a recess (58) formed in the lid (D') via a spring (59). Since the jet tube body (B') was inserted into the cylinder (A')
The operation of storing the steam inside the cylinder (A') is a difficult task, as is the positioning of the steam injection port (62) at the bottom of the cylinder (A').
Furthermore, since the lower end of the jet tube body (B') was only locked to the stepped portion (60) formed in the container (A'), the jet tube body (B') was previously attached to the cylinder (A').
When the jet tube body (B'
) was often damaged at the bottom end.

In addition, the cooled reflux oil is transferred from the step section (60) to the heating section (C
′), which prevented smooth evaporation of the oil.

Furthermore, the oil in the heating section (C') and the cylinder (A') are replaced.
Cleaning could not be carried out without removing the lid (D') from the cylinder (A') and pulling out the jet tube body (B').

Further, there was a lack of means for suppressing oil vapor that is unnecessary for the formation of a vacuum state and rising near the insertion tube (61).

Furthermore, the oil bumping prevention means disclosed in Japanese Patent Publication No. 45-6897 was not simple in structure and could not ensure a sufficiently stable vacuum state.9 (Means for Solving the Problems) Therefore, the technical problems of the present invention are solved. The purpose of the present invention is to provide an ultra-high-speed oil diffusion pump that is easy to handle, has a high degree of vacuum, and is stable.The technical means of the present invention to solve this technical problem is to provide an auxiliary pump connected to the exhaust pipe (4). Oil, etc. is heated and evaporated in the cylinder (A) which is evacuated to a certain extent by the cylinder (A), and the heated and evaporated steam jet is transferred to the steam conduit (Bl) constituting the jet tube body (B) disposed in the cylinder (A). ), the umbrella part (7) from the upper end of (B2),
(8) in which gas molecules are ejected downward through the exhaust pipe (4) to perform a pumping action, the lower part of the jet pipe body (B) is joined to the vicinity of the lower end of the cylinder (A); A communication path, for example, a communication pipe (5) is provided from the vicinity of the joint to the heating part (C), so that the liquefied oil that has fallen down the inner wall of the cylinder (A) is not prevented from evaporating smoothly in the heating part. This is an ultra-high-speed oil diffusion pump that allows reflux.

Further, a side pipe (15) is provided in the heating section (C), and the side pipe (15)
) is provided with an insertion tube (16) that can be attached and detached to enable temperature control of the heating section (C), oil replenishment/exchange, and cleaning of the inside of the oil diffusion pump.

In addition, there is a bumping prevention wheel (32) above the oil level of the heating section (C).
was installed to calm down the splashing of oil.

Note that the bumping prevention wheel is not limited to an umbrella-shaped one, and may be, for example, a plate-shaped one.

(Function) Next, the function of the ultrahigh-speed oil diffusion pump of the present invention configured as described above will be explained.

First, the auxiliary pump (P) connected to the exhaust pipe (4) is operated to evacuate the inside of the vacuum chamber (not shown) in front of the cylinder (A) and the intake pipe (1) to a certain extent.

Next, the band heater (14) of the heating section (C) is energized to heat and evaporate the oil (0) in the cylinder (A).

Then, this heated and evaporated steam jet rises inside each steam conduit (B1), (B2) of the jet tube main body (B), and reaches the umbrella portions (7), (8), ampullae portions (11), ( 1
2) It passes between the upper surface parts (11') and (12') and is vigorously ejected downward in a film layer, and is also ejected from the ejection hole (13) toward the exhaust pipe (4).

At this time, the boiled and vaporized oil (0) is transferred to the jet tube body (
During the rise in each steam pipe (Bl) and (B2) of B), a phenomenon of liquefaction occurs on the inner wall of the steam pipe, but the jet pipe main body (B
), inside the narrowest steam conduit (B1),
This liquefied oil (0) is temporarily collected in the ampullae (11), and when it accumulates in a certain amount, it smoothly flows down along the steam pipe wall surface due to its own weight, and does not prevent the vaporized oil from rising.

On the other hand, a vacuum chamber (not shown) in front of the ocular trachea (1)
The gas molecules inside are carried to the exhaust pipe (4) as a heated and evaporated steam jet is ejected from the jet pipe body (B), and a pumping action is performed.

Note that the steam jet of oil (0) ejected from the upper end of each steam conduit (Bl) and (B2) flows through the water jacket (19
), it liquefies when it hits the inner wall of the cylinder (A), falls downward along the inner wall of the cylinder (A), is returned to the heating part (C) through the communication pipe (5), and is heated and evaporated again.

By the way, the oil in the heating section (C) is heated from 230°C to 2°C.
It is heated after 40°CN, but in this temperature range, bumping splash phenomenon often occurs and violent splashing occurs, but the bumping oil hits the lower surface of the bumping prevention vehicle (32) and subsides, and most of it is The bonded body (36) is passed through the groove (35) and falls downward. On the other hand, the vapor in the bumped oil passes through the groove (35) and rises. Also, the oil vapor jet tries to rise from between the insertion pipe (16) and the side pipe (15), but it is cooled by the water jacket (17) in the center of the side pipe (15) and reaches the heating part ( C) is refluxed.

(Example) The present invention will be explained in detail below.

In Fig. 1, (A) is a cylinder, (B) is a jet tube body disposed inside this container (A), and (C) is a heating section formed at the bottom of the cylinder (A). , contains oil (0) used for oil diffusion pumps.

(1) is the intake pipe, and the vacuum chamber in front of it (
(not shown) are allowed to enter the cylinder (A). The intake pipe (1) is detachable from the upper part of the cylinder (A), and has a female tapered surface (2) formed on the intake pipe (1) and the upper part of the cylinder (A). The tapered surface (3) of the male mold is rubbed together with a vacuum hot adhesive applied in the form of a film to seal the cylinder (A).

(4) is an exhaust pipe connected to the auxiliary pump (P),
It is connected slightly diagonally upward with respect to the cylinder (A).

A jet tube body (B) is installed inside the cylinder (A). The jet tube body (B) is the steam conduit (Bl)
, (B2), and the steam conduit (B1) extends upwardly through the steam conduit (B2). At the top of the steam conduits (Bl), (B2) are umbrella parts (7), (
8) are provided, respectively, and the umbrella part (7),
The sides of the steam conduits (B 1 ) and (B2) are connected to the upper part of (8). Below the umbrella parts (7) and (8), enlarged parts (11) and (12) are provided, and the upper surface parts (11' and 12') of the umbrella parts (7) and (8) are provided below. It is formed into a tapered shape parallel to the Each umbrella part (7
), (8) and the ampullae (11), (12) are provided with a large number of steam holes (9), (10) in the steam conduits (B1), (B2) through which steam can pass. It looks like this. With this configuration, the direction of the jetted steam of oil (0) is directed downward. In addition, the umbrella part (7),
Expansion parts (7') and (8') are provided at the upper part of (8), and the oil vapor jet ejected from the steam holes (9) and (lO) is transmitted to (8'), the upper surface of the ampulla (11'), (12') and the umbrella part (7), (8').
) is narrowed down by a part of the parallel taper between the cylinder (A) and is sprayed violently against the inner wall of the cylinder (A). Further, a narrow part (22) is extended below the steam conduit (B2) to narrow down the oil vapor jet from the heating part (C) and send it to the umbrella part (8).

Further, a jet hole (13) toward the exhaust pipe (4) is provided at the lower part of the steam conduit (B2). The lower end of the jet tube main body (B) is explosively bonded to the lower inner wall of the cylinder (A), but during this bonding, the rod (6) extending above the steam conduit (B1) is By using this method, explosive bonding can be achieved extremely easily, especially in the case of glass processing.

On the other hand, the oil vapor jet sprayed onto the inner wall of the cylinder (A) from the steam holes (9) and (10) hits the inner wall of the cylinder (A) cooled by the water jacket (19) and liquefies, causing the cylinder to cool down. A connecting pipe (5) passes along the inner wall of the cylinder (A) and collects in the lower part of the cylinder (A), but the oil collected in the lower part of the cylinder (A) is returned to the heating part (C).
The communicating pipe (5) passes through the upper part of the heating part (C), and its lower end opening reaches the bottom of the heating part (C). That is, if cooled oil is poured into the upper part of the heating section (C), smooth evaporation of the oil will be hindered, so in order to prevent this, the lower end opening of the communication pipe (5) is connected to the heating section (
It was installed at the bottom of C). In addition, the connecting pipe (5) is
It is not necessarily limited to a tubular shape, and in short, any shape may be used as long as it returns the oil accumulated in the lower part of the cylinder (A) to the heating part (C).

On the other hand, a band heater (14) is wrapped around the heating part (C), and a suitable t is applied to the band heater (14).
A current is applied to heat the oil (0).

A side tube (15) is provided on the upper side of the heating section (C) so as to face upward, and an insertion tube (16) is installed inside the side tube (15). The insertion tube (16) can measure the temperature of the oil (0) by inserting a temperature sensor (not shown), and can keep the oil (0) at an appropriate temperature by controlling the voltage value applied to the band heater (14). can be kept.

In addition, in accordance with the oil for the oil diffusion pump used in the example,
The temperature was controlled at 230-240°C.

The insertion tube (16) is detachable from the upper part of the open tube (15), and the female tapered surface (16') formed on the insertion tube (, 16) and the side tube (15) are connected to each other. The tapered surface (15') of the male mold formed on the upper part is rubbed together with a vacuum heat welding agent applied in the form of a film, and the heated part (C
) is designed to be sealed. As a result, oil (○)
To replenish or replace the cylinder (A), etc., heat the adhesive applied between the tapered surface (16') and the tapered surface (15') with a hair dryer, melt it, and insert the tube. This can be done by removing (16). In addition, to replenish or replace the oil (0), it is possible to bring the oil to room temperature, insert a vinyl pipe from the side pipe (15) into the heating part (C), and perform suction and injection operations.

A water jacket (1
7) is ring-encased, and the water jacket (17
) is connected to the water jacket (19), which is surrounded by a large part of the outer wall of the cylinder (A), via the connecting pipe (18).
).

Thereby, the side pipe (15) and the cylinder (A) can be cooled integrally. Furthermore, the water jacket (17) allows the side'! (15) is cooled and the tapered surface (16')
This prevents the heat-welding agent applied between the tapered surface (15') and the tapered surface (15') from heating and melting, thereby preventing leakage at this portion. Note that (20) is a water supply port, and (21) is a drain port.

Furthermore, a tube (30) with a hole (31) provided in its lower part is erected in the center of the inner bottom surface of the heating part (C), and a bumping tube is provided on the outer peripheral surface of the upper end of the skeleton (30). It is preferable that the anti-bumping wheel (32) is ring-mounted, and that the anti-bumping wheel (32) is located above the oil level, and that its inner diameter is close to the inner diameter of the upper part of the heating section (C). By the way, the skeleton (30) is open upward, so when attaching the skeleton (30) to the inner bottom surface of the heating section (C), inserting a support into the tube (30) will make the work easier. Easy to remove. The conduit (30) itself also serves as a passage for oil (0). Furthermore, the bumping prevention wheel (32) has a concave shape, and the upper surface is a disk (33), and a side plate (34) is placed along the edge of the disk (33). ) along the side plate (34), grooves (35
) is provided. The bottom end of the valley groove (35) is
A granular bonded body (36) is provided so as to straddle 5).

ing. By configuring in this way, the heating section (C)
The violently bumping oil splashes hit the underside of the bumping prevention vehicle (32) and are shattered, falling as they are or crashing into a disk (33).
) and the groove (35) and fall downward through the bonded body (36). At this time, the joined body (36) allows the oil to fall intermittently. On the other hand, the oil vapor that violently collided with the bottom surface of the bumping prevention vehicle (32) strongly formed the groove (35).
From there, the steam is rectified and rises toward the steam conduits (B1) and (B2).

The conjugated body (36) is the bumping prevention wheel (32) f! which is not provided with the clearance (35). : Reinforced. In addition, the oil vapor splashed by bumping passes through the groove (35) and rises, but the bumping prevention vehicle (
The oil vapor calmed by step 32) is diffused through the space between the groove (35) and the heating section (C), and high-pressure steam with little pulsation can be supplied to the jet tube body (B).

In addition, in the example, the cylinder (A), the jet tube main body (
B) and the heating section (C) are all made of glass to facilitate visual observation from the outside and to prevent gas leaks.

Figure 3 shows the results of a comparative test between the ultra-high-speed oil diffusion pump of the present invention and a conventional product. This clearly shows that the final high vacuum value itself is high. Furthermore, the ultrahigh-speed oil diffusion pump of the present invention is disclosed in Japanese Patent Application No. 63-50366.
A vacuum level close to 10'torr, which is an order of magnitude higher, has been achieved.

(Effects) In the invention of claim 1 of the present case, the work of positioning the steam injection port (62) at the lower part of the cylinder (A) is eliminated, making handling easier, and preventing misalignment of the jet pipe body (B) during transportation. Also, the lower end of the main body is no longer damaged. Furthermore, since the cooled oil is poured into the heating section (C) from the communication path, smooth evaporation of the oil is no longer hindered.

Furthermore, in the invention of claim 2, the heating part (C) oil replacement/
Refilling, cleaning, and cleaning the cylinder ('A) can now be done easily.

Moreover, in the invention of claim 3, the structure of the oil bumping prevention means is simple, and a sufficiently stable vacuum state can be ensured.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view showing an embodiment of the present invention.
A perspective view showing an example of a bumping prevention vehicle, FIG. 3 is a graph showing the results of a comparison test of the degree of vacuum attainment between the ultra-high speed oil diffusion pump of the present invention and a conventional product, and FIG. FIG. 2 is a side view showing a conventional example. A... Cylinder B... Jet tube bodies B1, B2... Steam conduit C... Heating section 4... Exhaust pipe 5... Connecting pipe 7.8... Umbrella section 15... Side pipe 16 ... Plug pipe 32 ... Bumping prevention vehicle patent applicant Yoshio Kinoshita Fig. 2 Fig. 4

Claims (1)

[Scope of Claims] 1. A jet pipe body in which oil, etc. is heated and evaporated in a cylinder that is evacuated to a certain extent by an auxiliary pump connected to an exhaust pipe, and the heated and evaporated steam jet is disposed in the cylinder. The lower part of the jet pipe body is joined to the vicinity of the lower end of the cylinder, and the lower part of the jet pipe body is joined to the vicinity of the lower end of the cylinder, and the lower part of the jet pipe body is joined to the vicinity of the lower end of the cylinder. An ultra-high-speed oil diffusion pump characterized in that a communication path is provided from the vicinity of the heating section to the heating section so that the liquefied oil that has fallen down the inner wall of the cylinder is refluxed so that smooth evaporation of the oil in the heating section is not hindered. 2. Heat and evaporate oil, etc. in a cylinder that has been evacuated to a certain extent by an auxiliary pump connected to the exhaust pipe, and send the heated and evaporated steam jet to the steam conduit constituting the jet pipe body disposed within the cylinder. In a device that performs a pumping action by ejecting gas molecules from the upper end downward through an umbrella part and carrying them to the exhaust pipe, a side pipe is provided in the heating part, and an insertion pipe is provided in the side pipe so that it can be attached to and removed from the side pipe. , ultra-high-speed oil diffusion pump 3, which is characterized by being able to control the temperature of the heating part, replenish and replace oil, and clean the inside of the oil diffusion pump, and an auxiliary pump connected to the exhaust pipe to create a vacuum to a certain extent. Oil, etc. is heated and evaporated in the cylinder, and the heated and evaporated steam jet is ejected downward from the upper end of the steam conduit constituting the jet tube body disposed in the cylinder through the umbrella part, and gas molecules are In the device that performs a pumping action by being carried to the exhaust pipe, the heating part is provided with a bumping prevention umbrella above the oil level, so that high-pressure steam with less pulsation can be supplied in which the oil splashed by bumping has subsided. Ultra high speed oil diffusion pump