JPH01303772A - Manufacture of thin film polymer piezoelectric transducer - Google Patents
Manufacture of thin film polymer piezoelectric transducerInfo
- Publication number
- JPH01303772A JPH01303772A JP63134254A JP13425488A JPH01303772A JP H01303772 A JPH01303772 A JP H01303772A JP 63134254 A JP63134254 A JP 63134254A JP 13425488 A JP13425488 A JP 13425488A JP H01303772 A JPH01303772 A JP H01303772A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric material
- material layer
- piezoelectric
- solvent
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920000642 polymer Polymers 0.000 title claims abstract description 14
- 239000010409 thin film Substances 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 239000000463 material Substances 0.000 claims abstract description 92
- 230000010287 polarization Effects 0.000 claims abstract description 35
- 239000002904 solvent Substances 0.000 claims abstract description 24
- 238000012856 packing Methods 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000001704 evaporation Methods 0.000 claims abstract description 10
- 230000008020 evaporation Effects 0.000 claims abstract description 8
- 230000005686 electrostatic field Effects 0.000 claims abstract description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims 1
- 230000002452 interceptive effect Effects 0.000 claims 1
- 229920006254 polymer film Polymers 0.000 claims 1
- 239000002861 polymer material Substances 0.000 claims 1
- 230000008054 signal transmission Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 abstract 2
- 239000007767 bonding agent Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 11
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 208000028659 discharge Diseases 0.000 description 5
- 239000002033 PVDF binder Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229920002620 polyvinyl fluoride Polymers 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 244000171726 Scotch broom Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012943 hotmelt Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000013017 mechanical damping Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Landscapes
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は溶剤に溶かして液状にした高分子圧電材料を基
台上に所望厚さになるまで塗布し、溶剤を蒸散させて膜
状の圧電物質層を得る高分子薄膜圧電トランスデユーサ
の製造方法に関する。Detailed Description of the Invention (Industrial Field of Application) The present invention involves applying a polymer piezoelectric material that has been liquefied by dissolving it in a solvent onto a base to a desired thickness, and then evaporating the solvent to form a film. The present invention relates to a method of manufacturing a polymer thin film piezoelectric transducer that obtains a layer of piezoelectric material.
（従来の技術）
超音波探触子に用いる圧電材料には水晶、水溶性結晶、
圧電セラミック、高分子圧電材料等があるが、成形性が
よく、フィルム状にすることができ、又、可撓性がある
などの利点からポリ弗化ビニリデン（ＰＶＤＦ）や弗化
ビニリデン−３弗化工チレン共重合体（Ｐ （ＶＤＦ−
ＴｒＦＥ））に代表される高分子圧電材料が医用超音波
探触子に応用され始めている。(Prior art) Piezoelectric materials used in ultrasonic probes include quartz, water-soluble crystals,
There are piezoelectric ceramics, polymeric piezoelectric materials, etc., but polyvinylidene fluoride (PVDF) and vinylidene fluoride-3 fluoride have good moldability, can be made into a film, and are flexible. Chemically modified tyrene copolymer (P (VDF-
Polymer piezoelectric materials such as TrFE) are beginning to be applied to medical ultrasound probes.
これらのポリ塩化ビニル（ＰＶＣ）、ポリ弗化ビニル（
ＰＶＦ）、ＰＶＤＦ等の仲間の高分子圧電材料はジメチ
ルホルムアミド（ＤＭＦ）のような適当な溶媒に溶ける
が、分極されて圧電性を呈し得るためには１軸又は２軸
の伸延を必要として、折角溶媒に溶けるという性質があ
っても効果的に利用することができなかった。These polyvinyl chloride (PVC), polyvinyl fluoride (
Similar polymeric piezoelectric materials such as PVF and PVDF are soluble in suitable solvents such as dimethylformamide (DMF), but require uniaxial or biaxial stretching in order to be polarized and exhibit piezoelectric properties. Even though it has the property of being soluble in solvents, it has not been possible to utilize it effectively.
しかし、Ｐ （ＶＤＦ−ＴｒＦＥ） は溶液化シテ成型
された薄膜を分極処理するだけで圧電性が発現するとい
う特徴を持っている。従ってスピンコード法等の手法で
比較的自由な形で保持台又はパッキング材に被着するこ
とができ、圧電素子にすることができる。However, P (VDF-TrFE) has the characteristic that piezoelectricity is exhibited simply by polarizing a thin film formed by solution molding. Therefore, it can be applied to a holding table or packing material in a relatively free form using a technique such as a spin cord method, and can be made into a piezoelectric element.
（発明が解決しようとするｉ題）
しかし、作るときの形の自由さと、作った後の分極作業
等のやり易さとは必ずしもうまく整合しない。というの
は保持台又はパッキング材等の物体の上に被着した膜が
固まってから分極しようとした場合、最終目的の形状に
仕上げた後電極も取り付け、その上で分極用の直流電圧
を加えることになるので、単に別途に膜を作って空中又
は油中で分極した場合に比べて十分な分極ができない。(Problem to be solved by the invention) However, the freedom of shape during production and the ease of polarization work after production do not necessarily match well. This is because if you try to polarize the film after it has hardened on an object such as a holding table or packing material, after finishing it in the final shape, attach the electrode and then apply the DC voltage for polarization. Therefore, sufficient polarization cannot be achieved compared to simply forming a separate film and polarizing in air or oil.
又、分極を十分にしようとすると放電破壊を起こしてし
まう。従って、膜だけを作り、分極して放電破壊を起こ
さなかった部分だけを切り取って使うという方法に比べ
て良品率が悪く非常に不利である。Furthermore, if polarization is attempted to be sufficient, discharge breakdown will occur. Therefore, compared to the method of making only a film and cutting out and using only the portions that do not cause discharge breakdown due to polarization, the yield rate is low and it is very disadvantageous.
本発明は上記の点に鑑みてなされたもので、その目的は
、保持台又はパッキング等の物体の上に溶液を被着する
という溶剤型の製法でできる高分子圧電薄膜の分極効率
、又は分極の成功率を向上させた高分子薄膜圧電トラン
スデユーサの製造方法を実現することにある。The present invention has been made in view of the above points, and its purpose is to improve the polarization efficiency or polarization of a polymer piezoelectric thin film produced by a solvent-based manufacturing method in which a solution is deposited on an object such as a holding table or packing. The purpose of this invention is to realize a method for manufacturing a polymer thin film piezoelectric transducer with improved success rate.
（ｌＲｆｆｌを解決するための手段）
前記の課題を解決する本発明は溶剤に溶かして液状にし
た高分子圧電材料を基台上に所望厚さになるまで塗布し
、溶剤を蒸散させて膜状の圧電物質層を得る高分子Ｎ膜
圧型トランスデユーサの製造方法において、前記圧電物
質層を溶解させている溶剤の蒸散が未了で、前記圧電物
質が粘性を有し又は流動性を呈している時点に前記圧電
物質に分極用の静電界を印加することを特徴とするもの
である。(Means for solving lRffl) The present invention, which solves the above-mentioned problems, applies a polymeric piezoelectric material made into a liquid by dissolving it in a solvent on a base to a desired thickness, and then evaporates the solvent to form a film. In the method for manufacturing a polymeric N-film transducer that obtains a piezoelectric material layer of The method is characterized in that an electrostatic field for polarization is applied to the piezoelectric material at a certain point in time.
（作用）
基台上に高分子圧電材料を溶かした液状の圧電物質を塗
布し、所望の厚さに達したならば網状又は縞状の電極を
取り付け、圧電物質層からの溶剤の蒸散が終わらない中
に電圧を印加して分極処理を行う。(Function) A liquid piezoelectric material containing dissolved polymeric piezoelectric material is applied onto the base, and when the desired thickness is reached, a mesh or striped electrode is attached, and the evaporation of the solvent from the piezoelectric material layer is completed. Polarization is performed by applying a voltage inside the cell.
圧電物質層の上に導電性多孔質のパッキング材を接着し
、溶剤の蒸散と分極電圧の印加を行う。A conductive porous packing material is bonded onto the piezoelectric material layer, and the solvent is evaporated and a polarization voltage is applied.
（実施例）
以下、図面を参照して本発明の製造方法の実施例を詳細
に説明する。(Example) Hereinafter, an example of the manufacturing method of the present invention will be described in detail with reference to the drawings.
第１図は本発明の製造方法の一実施例の模式的説明図で
ある。図中（イ）図、（ロ）図、（ハ）図は工程の順に
描いた図である。図において、１は圧電振動子の後面に
貼り付けて、機械的ダンピングを行い、周波数帯域を広
くするための例えばエポキシ樹脂で作られているパッキ
ング材である。FIG. 1 is a schematic explanatory diagram of an embodiment of the manufacturing method of the present invention. In the figure, (a), (b), and (c) are diagrams drawn in the order of the steps. In the figure, reference numeral 1 denotes a packing material made of, for example, epoxy resin, which is attached to the rear surface of the piezoelectric vibrator to perform mechanical damping and widen the frequency band.
２は圧電物質層３の後面にパッキング材１との間に接着
により設ける電極である。パッキング材１が胴、アルミ
ニウム、銀にッケル、金等を添加）のような導電性材料
で作られているときは電極２は不要である。圧電物質層
３はＰ （ＶＤＦ−ＴｒＦＥ）のＤＭＦ溶剤による溶液
を塗布して作ったものである。４は圧電物質層３の上に
載せた金網である。５は電極２と金網４とに直流電圧Ｅ
ｐを印加する電池、６は金網４の上に設ける絶縁物製の
保護膜又は音響インピーダンス整合層である。Reference numeral 2 denotes an electrode provided on the rear surface of the piezoelectric material layer 3 and the packing material 1 by adhesion. If the packing material 1 is made of an electrically conductive material such as aluminum, silver doped with nickel, gold, etc., the electrode 2 is not necessary. The piezoelectric material layer 3 is made by applying a solution of P (VDF-TrFE) in a DMF solvent. 4 is a wire mesh placed on the piezoelectric material layer 3. 5 is a DC voltage E applied to the electrode 2 and the wire mesh 4.
A cell 6 to which p is applied is a protective film or an acoustic impedance matching layer made of an insulating material provided on the wire mesh 4.
次に第１図に示された実施例の製造方法を説明する。パ
ッキング材１上に電極２を接着等により取り付ける。パ
ッキング材１が導体であればこの工程は不要である。こ
の電極２の上に圧電物質の溶液を塗布して圧電物質層３
を作る（（イ）図）。Next, a method of manufacturing the embodiment shown in FIG. 1 will be explained. Electrode 2 is attached onto packing material 1 by adhesive or the like. This step is unnecessary if the packing material 1 is a conductor. A piezoelectric material solution is applied onto this electrode 2 to form a piezoelectric material layer 3.
(Figure (a)).
所定の厚さが得られたらその上に金網４を載せる。When a predetermined thickness is obtained, a wire mesh 4 is placed on top of it.
金網４に引き出し１ａ６が取り付けである。電極２とを
引き出し線６間に電池５を繋ぎ、分極用電圧Ｅｐを印加
する。分極用電圧を掛けている間に溶剤は圧電物質２か
ら金網４の網目を通して蒸散しつづけ、圧電物質２は金
網４を抱き込んだまま乾燥して固化する。この時点では
電池５による分極電圧Ｅｐの印加で分極が終わっている
（（０）図）。金網４の上に保１１１１７（又は音響イ
ンピーダンス整合Ｍ）を付ける（（ハ）図）。A drawer 1a6 is attached to the wire mesh 4. A battery 5 is connected between the electrode 2 and the lead wire 6, and a polarization voltage Ep is applied. While the polarization voltage is applied, the solvent continues to evaporate from the piezoelectric material 2 through the mesh of the wire mesh 4, and the piezoelectric material 2 dries and solidifies while enclosing the wire mesh 4. At this point, polarization has been completed by application of polarization voltage Ep by battery 5 (Figure (0)). A guard 11117 (or acoustic impedance matching M) is attached on top of the wire mesh 4 (Figure (C)).
この状態で金網４と電極２とが電気端子として用いられ
、分極の終わった振動子（探触子）としての機能は完備
している。金網４は剥がして別に電極をつけてもよく、
又、金網４の目を塞ぐようにその上に別の電極をつけて
もよい。この金網の目の細かさや、線の太さは可成り重
要で、分極処理や振動子の電極としての使用には十分に
平面−様な電極と等価に見えなければならないので、十
分に細い線でできた十分に細い目の金網である必要があ
る。目の細かさとしては圧電物質２の厚みの数分の１以
下であることが好ましい。しかし孔の占積率が余りに小
さく、密なものであると溶剤の蒸散に時間が掛るので、
占積率は５０％位がよい。In this state, the wire mesh 4 and the electrode 2 are used as electrical terminals, and the function as a polarized vibrator (probe) is complete. The wire mesh 4 may be peeled off and an electrode attached separately.
Further, another electrode may be attached on top of the wire mesh 4 so as to cover the mesh. The fineness of the wire mesh and the thickness of the wires are quite important.For polarization processing and use as an electrode for a vibrator, it must look equivalent to a flat-like electrode, so the wire must be thin enough. It must be made of sufficiently thin wire mesh. The fineness of the mesh is preferably a fraction of the thickness of the piezoelectric material 2 or less. However, if the pore space factor is too small and dense, it will take time for the solvent to evaporate.
The occupancy rate should be around 50%.
印加する分極電圧Ｅｐは完成した圧電膜の事後分極のた
めに掛ける場合の５０〜７０％で十分効果がある。それ
は主として生乾きで、未だ分子配列が固定化しないで、
分子が比較的容易に動き得る間に分極を行うからである
。従って、圧電物質ＷＪ３が放電破壊を起こすことはな
い。An applied polarization voltage Ep of 50 to 70% of that applied for post-polarization of a completed piezoelectric film is sufficiently effective. It is mainly half-dried, and the molecular arrangement has not yet been fixed.
This is because polarization occurs while the molecules can move relatively easily. Therefore, the piezoelectric material WJ3 will not be destroyed by discharge.
第２図は本発明の製造方法の他の実施例の模式図である
。図において、第１図と同等な部分には同一の符号を付
しである。図中、８はその上に振動子を形成するための
仮作乗台で、作業が終われば取り除（ものである。９は
微小な金属導体粉末又はメタライズされたプラスチック
粉末を固めて導電性を持たせ、通気性があるように多孔
質にしたパッキング材である。FIG. 2 is a schematic diagram of another embodiment of the manufacturing method of the present invention. In the figure, parts equivalent to those in FIG. 1 are given the same reference numerals. In the figure, 8 is a temporary mounting platform on which a vibrator is formed, and it is removed when the work is completed. 9 is a temporary mounting base on which a vibrator is formed. It is a packing material that is porous and has breathability.
次に第２図の実施例の製造方法を説明する。この実施例
は第１図の場合とは逆順である点が異なっている。仮作
乗台８の上に保護膜７となるプラスチック膜を置く。こ
の取り付けは侵に仮作乗台８から剥がすことができる程
度にホットメルト法等により仮接着する。保護膜７の上
に電極２を接着等により取り付け、その上に溶液にした
圧電物質を塗布して圧電物質層３を作る。圧電物質の材
料は前例と同じである（（イ）図）。Next, a method of manufacturing the embodiment shown in FIG. 2 will be explained. This embodiment differs from that of FIG. 1 in that the order is reversed. A plastic film that will become the protective film 7 is placed on the temporary board 8. This attachment is done by temporarily adhering it by hot-melt method or the like to such an extent that it can be easily removed from the temporary mounting base 8. The electrode 2 is attached on the protective film 7 by adhesive or the like, and a piezoelectric material layer 3 is formed by applying a solution of piezoelectric material thereon. The material of the piezoelectric substance is the same as in the previous example (Figure (A)).
圧電物質層３の上に導電性多孔質パッキング材９を押し
付けるか接着する。圧電物質ｌ！！３はまだ乾いていな
くて軟らかいので押し付けることによってくっつけば好
都合であるるが、くっつかない場合には接着する。この
導電性多孔質パッキング材９は導電性があるので、圧電
物質ＪＩ３との間に電極を取り付ける必要はない。導電
性多孔質パッキング材９は通気性があるので圧電物質Ｗ
４３の溶剤は導電性多孔質パッキング材９を通って蒸散
し、圧電物質３は乾燥する（（ロ）図）。A conductive porous packing material 9 is pressed or glued onto the piezoelectric layer 3 . Piezoelectric material! ! 3 is not dry yet and is soft, so it is convenient to stick it together by pressing it, but if it does not stick, then glue it. Since this conductive porous packing material 9 is conductive, there is no need to attach an electrode between it and the piezoelectric material JI3. Since the conductive porous packing material 9 is breathable, the piezoelectric material W
The solvent 43 evaporates through the conductive porous packing material 9, and the piezoelectric material 3 dries (see (b)).
電極２と多孔質パッキング材との間に電池５を接続し分
極用電圧、Ｅｐを印加して分極処理を行う（（ハ）図）
。次いで仮作乗台８を剥がして振動子として使用する（
（ニ）図）。この例でも分極処理は圧電物質層３が未硬
化時点で行っているので、分極電圧Ｅｐは事後分極電圧
に比べて５０〜７０％でよい。A battery 5 is connected between the electrode 2 and the porous packing material, and a polarization voltage, Ep, is applied to perform polarization treatment (Figure (C)).
. Next, the temporary riding platform 8 is peeled off and used as a vibrator (
(D) Figure). In this example as well, the polarization treatment is performed before the piezoelectric material layer 3 is cured, so the polarization voltage Ep may be 50 to 70% of the post-polarization voltage.
第３図は圧電物質にＰＺＴ （ジルコン酸〜チタン酸鉛
）粉末を使用したい場合に前記の高分子薄膜゛のトラン
スデユーサを製造する方法の応用例の説明図である。図
において、第１図と同等の部分には同一の符号を付しで
ある。図中、１０は超音波信号の送受波が行われる振動
子の正面の正面板を兼ねた筐体である。１１は熱可塑性
か、熱硬化性の物質をマトリクスとして、ＰＺＴ粉末を
フィラーとして入れた複合物を用いた圧電物質による圧
電物質層、１２は圧電物質［１１１の上に載せたパッキ
ング材である。FIG. 3 is an explanatory diagram of an application example of the method for manufacturing a transducer of the above-mentioned polymer thin film when it is desired to use PZT (zirconate-lead titanate) powder as the piezoelectric material. In the figure, parts equivalent to those in FIG. 1 are given the same reference numerals. In the figure, reference numeral 10 denotes a housing that also serves as a front plate in front of the vibrator through which ultrasonic signals are transmitted and received. 11 is a piezoelectric material layer made of a piezoelectric material using a composite containing a thermoplastic or thermosetting material as a matrix and PZT powder as a filler; 12 is a packing material placed on the piezoelectric material [111].
次に、この応用例の製造方法を説明する。筐体１０の正
面板の部分に作られた空間に未硬化の前記の圧電物質を
詰込んで圧電物質層１１を作る。Next, a manufacturing method for this application example will be explained. A piezoelectric material layer 11 is formed by filling the uncured piezoelectric material into the space created in the front plate of the casing 10.
パッキング材１２を上に載せ、上から力を掛けて圧電物
質層１１を押し付けて接着され硬化するのを持つ。その
硬化する間に圧電物質層１１の電極２に引き出し線６を
介して分極電圧を掛ける。このように圧電物質が硬化中
にガスを出さないものに対しては通気性は不要である。The packing material 12 is placed on top, and force is applied from above to press the piezoelectric material layer 11 so that it is bonded and hardened. During the curing, a polarization voltage is applied to the electrode 2 of the piezoelectric material layer 11 via the lead wire 6. Air permeability is not necessary for piezoelectric materials that do not emit gas during curing.
以上のようにすれば分極のための印加電圧が低くてよく
、放電破壊を起こすおそれがなくなり、良品率が上昇す
る。By doing the above, the applied voltage for polarization may be low, eliminating the risk of discharge breakdown and increasing the yield rate.
尚、本発明は上記実施例に限定されたものではなく、次
ぎのような場合も当然可能である。Incidentally, the present invention is not limited to the above-mentioned embodiments, and the following cases are naturally possible.
（１）完成した振動子を細かく切り刻んで、アレイ又は
バッチ式大量生産品としてもよいことは勿論である。(1) It goes without saying that the completed vibrator may be cut into pieces to produce an array or batch-type mass-produced product.
（ｉｉ）曲面の振動子を作ってもよい。(ii) A vibrator with a curved surface may be made.
（ｉｉｌ ）圧電物質としてＰＺＴ粉末等の圧電セラミ
ックをフィラーとして入れたプラスチック材のような混
合物を用いる場合に本発明の方法を応用することができ
るる。この場合は第１図又は第２図の説明において生乾
きの時に行う分極処理に代わって、母材となるプラスチ
ック材が未硬化の時に分極処理を行うようにすればよい
。(iii) The method of the present invention can be applied when a mixture such as a plastic material containing a piezoelectric ceramic such as PZT powder as a filler is used as the piezoelectric material. In this case, instead of the polarization treatment performed when the plastic material is partially dry in the explanation of FIG. 1 or 2, the polarization treatment may be performed when the plastic material serving as the base material is uncured.
（発明の効果）
本発明によれば、圧電物質層を硬化させながら分極処理
を行う方法、又は分極処理をしながら硬化させる方法が
確立できて、比較的低電圧で分極処理をすることができ
、十分な分極を放電破壊するおそれがなく行うことがで
きるようになって実用上の効果は大きい。(Effects of the Invention) According to the present invention, a method of performing polarization treatment while curing a piezoelectric material layer, or a method of curing the piezoelectric material layer while performing polarization treatment, can be established, and polarization treatment can be performed at a relatively low voltage. , it is now possible to perform sufficient polarization without fear of discharge damage, which has a great practical effect.
第１図は本発明の製造方法の一実施例の模式的説明図、
第２図は本発明の製造方法の他の実施例の模式的説明図
、第３図は本発明の製造方法の応用例の説明図である。
１．１２・・・パッキング材 ２・・・電極３．１１・
・・圧電物質層 ４・・・金網５・・・電池
６・・・引き出し線７・・・保１１！Ｉ
８・・・仮作集合９・・・多孔質パッキング
材 １０・・・筺体特許出願人 横河メディカルシステ
ム株式会社第１図
箒２図
第］ＸＩ
／り材
ＵａFIG. 1 is a schematic explanatory diagram of an embodiment of the manufacturing method of the present invention,
FIG. 2 is a schematic explanatory diagram of another embodiment of the manufacturing method of the present invention, and FIG. 3 is an explanatory diagram of an application example of the manufacturing method of the present invention. 1.12... Packing material 2... Electrode 3.11.
...Piezoelectric material layer 4...Wire mesh 5...Battery
6...Leader line 7...Main 11! I
8... Temporary work set 9... Porous packing material 10... Housing patent applicant Yokogawa Medical Systems Co., Ltd. Figure 1 Broom Figure 2] XI / Packing material Ua
Claims (5)
上に所望厚さになるまで塗布し、溶剤を蒸散させて膜状
の圧電物質層を得る高分子薄膜圧電トランスデューサの
製造方法において、前記圧電物質層を溶解させている溶
剤の蒸散が未了で、前記圧電物質が粘性を有し又は流動
性を呈している時点に前記圧電物質に分極用の静電界を
印加することを特徴とする高分子薄膜圧電トランスデュ
ーサの製造方法。(1) In a method for manufacturing a thin polymer film piezoelectric transducer, a piezoelectric polymer material made into a liquid by dissolving it in a solvent is coated on a base to a desired thickness, and the solvent is evaporated to obtain a film-like piezoelectric material layer. , applying an electrostatic field for polarization to the piezoelectric material at a time when the solvent dissolving the piezoelectric material layer has not yet evaporated and the piezoelectric material has viscosity or fluidity. A method for manufacturing a polymer thin film piezoelectric transducer.
少なくとも１つの電極が、前記圧電物質層の溶剤の蒸散
を妨げないような金網状又は縞状のものであることを特
徴とする請求項１記載の高分子薄膜圧電トランスデュー
サの製造方法。(2) At least one electrode for applying a polarization voltage to the film-like piezoelectric material layer has a wire mesh shape or a striped shape so as not to impede evaporation of the solvent in the piezoelectric material layer. A method for manufacturing a polymer thin film piezoelectric transducer according to claim 1.
電物質層の面に設けられた網状または縞状の電極のその
１部又は全部が、前記圧電物質層からの蒸散が終わって
分極、乾燥の後も信号授受用の電極として用いられるこ
とを特徴とする請求項２記載の高分子薄膜圧電トランス
デューサの製造方法。(3) Part or all of the net-like or striped electrode provided on the surface of the piezoelectric material layer so as not to impede evaporation of the solvent from the piezoelectric material layer becomes polarized after evaporation from the piezoelectric material layer is completed. 3. The method of manufacturing a polymer thin film piezoelectric transducer according to claim 2, wherein the polymer thin film piezoelectric transducer is used as an electrode for signal transmission and reception even after drying.
圧電物質層の面に設けられた網状又は縞状の電極のピッ
チが前記圧電物質層の完成時の厚みより有意に小さいこ
とを特徴とする請求項２記載の高分子薄膜圧電トランス
デューサの製造方法。(4) The pitch of the mesh or striped electrodes provided on the surface of the piezoelectric material layer is significantly smaller than the completed thickness of the piezoelectric material layer so as not to impede the evaporation of the solvent from the piezoelectric material layer. A method for manufacturing a polymer thin film piezoelectric transducer according to claim 2.
て分極用電圧を印加するために、導電性の多孔質パッキ
ング材を前記圧電物質層上に設け、前記多孔質パッキン
グにより溶剤の蒸散を行わせると共に分極用電圧印加の
一極とすることを特徴とする請求項１記載の高分子薄膜
圧電トランスデューサの製造方法。(5) In order to apply a polarization voltage without interfering with evaporation of the solvent from the piezoelectric material layer, a conductive porous packing material is provided on the piezoelectric material layer, and the porous packing evaporates the solvent. 2. The method of manufacturing a polymer thin film piezoelectric transducer according to claim 1, wherein the polarization voltage is applied to one pole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63134254A JPH01303772A (en) | 1988-05-31 | 1988-05-31 | Manufacture of thin film polymer piezoelectric transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63134254A JPH01303772A (en) | 1988-05-31 | 1988-05-31 | Manufacture of thin film polymer piezoelectric transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01303772A true JPH01303772A (en) | 1989-12-07 |
Family
ID=15124000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63134254A Pending JPH01303772A (en) | 1988-05-31 | 1988-05-31 | Manufacture of thin film polymer piezoelectric transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01303772A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008036202A (en) * | 2006-08-08 | 2008-02-21 | Konica Minolta Medical & Graphic Inc | Piezoelectric material, ultrasonic probe, piezoelectric material manufacturing method and ultrasonic probe manufacturing method |
| JP2012100043A (en) * | 2010-11-01 | 2012-05-24 | Nec Corp | Oscillator and method for manufacturing piezoelectric element |
| JP2017201782A (en) * | 2016-04-29 | 2017-11-09 | キヤノン株式会社 | Ultrasonic transducer and manufacturing method of the same |
-
1988
- 1988-05-31 JP JP63134254A patent/JPH01303772A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008036202A (en) * | 2006-08-08 | 2008-02-21 | Konica Minolta Medical & Graphic Inc | Piezoelectric material, ultrasonic probe, piezoelectric material manufacturing method and ultrasonic probe manufacturing method |
| JP2012100043A (en) * | 2010-11-01 | 2012-05-24 | Nec Corp | Oscillator and method for manufacturing piezoelectric element |
| JP2017201782A (en) * | 2016-04-29 | 2017-11-09 | キヤノン株式会社 | Ultrasonic transducer and manufacturing method of the same |
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