JPH01301030A - Feeding device in xy direction - Google Patents

Feeding device in xy direction

Info

Publication number
JPH01301030A
JPH01301030A JP12921088A JP12921088A JPH01301030A JP H01301030 A JPH01301030 A JP H01301030A JP 12921088 A JP12921088 A JP 12921088A JP 12921088 A JP12921088 A JP 12921088A JP H01301030 A JPH01301030 A JP H01301030A
Authority
JP
Japan
Prior art keywords
drive shaft
driving shaft
moved
motor
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12921088A
Other languages
Japanese (ja)
Inventor
Ryoichi Suzuki
亮一 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP12921088A priority Critical patent/JPH01301030A/en
Publication of JPH01301030A publication Critical patent/JPH01301030A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

PURPOSE:To elongate storoke length and to improve a positioning accuracy by eliminating play by arranging a Y direction driving shaft and X direction driving shaft so as to contact each other by rolling by intersecting each other at right angles and giving pressurization to each driving shaft. CONSTITUTION:The rotation of the driving shaft 21 for an X direction functions as the feeding roller roll-contacting with the driving shaft 11 for Y direction and is made to be moved in the axial direction of the driving shaft 11 with it as a feeding bar. However, the driving shaft 11 is not moved in the axial direction, so an X table 3 is moved in the X direction by reaction and the Y table 5 located on the X table 3 is also moved in the X direction. Similarly a Y table 5 is moved in Y direction by the rotation of the Y direction driving shaft 11. The Y table 5 is moved in the selected direction by the selection of driving motors 7, 17 and moved in the direction composed by the simultaneous driving. The stroke can therefore be elongateed because of the feeding by the roll contact being utilized and the positioning accuracy is improved because of play being eliminated on the driving shafts 11, 21 by pressurization.

Description

【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野〕 本発明は半導体製品やＯＡ機器の製造装置等に使用され
るＸＹ方向送り装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an XY direction feeding device used in manufacturing equipment for semiconductor products and OA equipment.

（従来の技術〉 一般に、自動組立て装置等に使用される送り機構には、
ねじ、ラックとピニオン、油圧や空圧のシリンダ、ベル
ト、ピエゾアクチュエータ、摩擦駆動機構が用いられて
いる。(Prior art) In general, the feeding mechanism used in automatic assembly equipment, etc.
Screws, racks and pinions, hydraulic or pneumatic cylinders, belts, piezo actuators, and friction drive mechanisms are used.

しかし、ねじやラックとピニオンによる送り機構ではバ
ックラッシェの問題があり、高精度の送り作用が期待で
きない。ねじ送り方式でストロークの長い場合にはその
ねじの持つ慣性モーメントが犬きくなり、俊敏な動作が
できない。油圧や空圧のシリンダによる送り機構も正確
な位置決めを行なうには適さない。ｉた。ベルト（よる
送り機構ではベルトの伸縮や振動等忙よシ送り動作が不
安定になシ易いとともに発塵の問題かめる。一方、ピエ
ゾアクチエエータを用いる送り機構では確かに高精度で
はあるが、送りのストロークがきわめて小さくストロー
ク不足となる。However, feeding mechanisms using screws or racks and pinions have the problem of backlash and cannot be expected to provide highly accurate feeding action. When using a screw feed method with a long stroke, the moment of inertia of the screw becomes too large, making it impossible to operate quickly. Feeding mechanisms using hydraulic or pneumatic cylinders are also not suitable for accurate positioning. It was. A feeding mechanism that relies on a belt (belt) is prone to unstable feeding operations due to belt expansion, contraction, vibration, etc., as well as the problem of dust generation.On the other hand, a feeding mechanism that uses a piezo actuator is highly accurate, but The feed stroke is extremely small and the stroke is insufficient.

以上のような問題点を改善するものとして大きなストロ
ークで送れるとともに微少な位置決め精度がでる摩擦駆
動機構が提案されている（昭和５９年度梢機学会春期大
会学術講演会論文集第８１９負参照）。この摩擦駆動機
構はスライダに対してビニオンローラを確実に転接する
ために与圧を加えるためのバッファラグローラという部
品が必要不可欠な要素となる。このため、システムの部
品点数が増加し、また、小形化にも限度があった０ （発明が解決しようとする問題点ン つｉシ、この摩擦、駆ｍ機構は各種の長所があるにも拘
らず、システムの部品点数が増加し、また、大形化する
欠点があった。To improve the above-mentioned problems, a friction drive mechanism has been proposed that can feed with a large stroke and has minute positioning accuracy (see Proceedings of the 1981 Spring Conference of the Japanese Society of Tree Mechanics, No. 819). An essential element of this friction drive mechanism is a component called a buffer lug roller for applying pressurization in order to reliably roll the pinion roller into contact with the slider. As a result, the number of parts in the system increased, and there was a limit to miniaturization. However, the system has the disadvantage of increasing the number of parts and increasing the size of the system.

本発明は上記問題点に着目してなされたもので、その目
的とするところは摩擦駆動機構の長所を生かしながらＸ
Ｙ方向に送ることができるとともに、そのシステムの部
品点数を少なくシ、かつコンパクトな構成とすることが
できるＸＹ方向送）装置を提供することにある。The present invention has been made in view of the above-mentioned problems, and its purpose is to take advantage of the advantages of the friction drive mechanism while
It is an object of the present invention to provide an XY direction feeding device which can feed in the Y direction, and which can reduce the number of parts of the system and have a compact configuration.

［発明の構成コ （問題点を解決するための手段〉 上記問題点を解決するために本発明のＸＹ方方向クシ装
置、チーグルペースと、このテーブルベース上でのＸＹ
方向の一方の方向に移動自在に設置された第１のテーブ
ルと、この第１のテーブルに対してｘＹ方向の他方の方
向に移動自在に支持され九第２のテーブルと、上記第１
のテーブルに軸支されＸＹ方向の上記他方の方向に沿っ
て配置されその軸方向に直動自在忙支持されるとともに
送り用ローラと送り俸を兼ねた帛１の駆動軸と、上記第
２のテーブルに軸支されＸＹ方向の上記−方の方向に沿
って配置され上記第１の駆動軸に交差して互いに転接す
る送り用ローラと送）俸を兼ねた１１Ｅ２の駆動軸と、
上記テーブルベースに上記ＸＹ方向の上記他方の方向に
移動自在に支持された設置用テーブルと、この設置用テ
ーブルに設置され上記第１０駆ｍａｔ−軸支する軸受と
、上記第１の駆動軸を回転駆動する正逆回転自在な第１
のモータと、上記第１の駆動軸を回転駆動する正逆とを
具備したものである。[Structure of the Invention (Means for Solving the Problems)] In order to solve the above problems, the XY direction comb device of the present invention, the Cheagle Pace, and the
a first table installed movably in one direction; a second table supported movably in the other direction in the x and y directions relative to the first table;
a drive shaft for the fabric 1 which is rotatably supported on the table, arranged along the other direction of the XY directions, and is freely movable linearly in the axial direction, and also serves as a feed roller and a feed bale; a drive shaft 11E2 that is pivotally supported on the table and is arranged along the negative direction of the XY direction, intersects the first drive shaft and serves as a feed roller and a feed shaft;
an installation table supported by the table base so as to be movable in the other direction of the XY direction, a bearing installed on the installation table and supporting the tenth drive shaft, and the first drive shaft. The first rotary drive unit can be rotated in forward and reverse directions.
The motor is equipped with a forward and reverse motor for rotationally driving the first drive shaft.

（作用） しかして、上記構成によれば、各駆動軸相互の＠接によ
る送りを利用するから、充分長いスト四−りで送れる。(Function) According to the above-mentioned configuration, since the feed by the mutual contact between the drive shafts is utilized, it is possible to feed with a sufficiently long stroke.

また、各車ａＩ１１１１には予圧が与えられ、遊びがな
いので、正確な位置決め精度で送れる。そして、この送
夛機構部分の構成が簡略化できるとともにシステムの構
成が薄型で小形化できることになる。Further, each car aI1111 is given a preload and has no play, so it can be fed with accurate positioning accuracy. The structure of this feeding mechanism can be simplified, and the system structure can be made thinner and smaller.

（実施例） 第１図ないし第４図は本発明の一実施例を示すものでる
る、第１図および第２図に示す概略的な構成において、
１はテーブルベースであシ、このテーブルベース１の上
面にはクロスローラガイド２を介して第１のテーブルと
してのＸテーブル３がＸ方向に移動自在に設置されてい
る。また、Ｘテーブル３にはクロスローラガイド４を介
して第２のテーブルとしてのＸテーブル５がＹ方向に移
動自在に設置されている。つまシ、Ｘテーブル３がＸ方
向に移動自在で、このＸテーブル３の上面にＸテーブル
５がＹ方向に移動自在に設置されているため、そのＸテ
ーブル５はＸＹＹ方向に移動することができる。(Embodiment) FIGS. 1 to 4 show an embodiment of the present invention. In the schematic configuration shown in FIGS. 1 and 2,
1 is a table base, and an X table 3 as a first table is installed on the upper surface of the table base 1 via a cross roller guide 2 so as to be movable in the X direction. Further, an X table 5 as a second table is installed on the X table 3 via a cross roller guide 4 so as to be movable in the Y direction. The X table 3 is movable in the X direction, and the X table 5 is installed on the top surface of the X table 3 so as to be movable in the Y direction, so the X table 5 can be moved in the XYY direction. .

’さらＫ、テーブルベース１にはその側方部位に位置し
てＹ方向にスライド自在なりロスローラチーｆル６が設
置され、このクロスローラテーブル６にはＹ方向駆動用
モータ７が取シ付けられている。このＹ方向駆動用モー
タ７０回転軸８はカッブリング９を介してＹ方向用駆動
軸１１に連結されている。そして、このＹ方向用駆動軸
１ノの一端は上記りｐスローラテーブル６に取着された
軸受１２に軸支されている。この軸受ノ２はプラケット
１３によって支持されている。また、Ｙ方向用駆動軸１
１の他端側部分は上記Ｙテーブル５に取着された軸受１
４に軸支されている。この軸受１４はブラケット１５に
よりてＹテーブル５ＶＣ固定的に支持されている。この
軸受１４はたとえばポールプッシエからなシ、Ｙ方向用
駆動軸１１をその軸方向（Ｘ方向に一致する）に対して
相対的に移動自在（直動自在ンに支持している。Furthermore, a cross roller table 6 is installed on the side of the table base 1 and is slidable in the Y direction, and a motor 7 for driving in the Y direction is attached to the cross roller table 6. There is. This Y-direction drive motor 70 rotation shaft 8 is connected to a Y-direction drive shaft 11 via a coupling 9. One end of this Y-direction drive shaft 1 is supported by a bearing 12 attached to the P-slow roller table 6 described above. This bearing 2 is supported by a placket 13. In addition, the drive shaft 1 for the Y direction
The other end of the bearing 1 is attached to the Y table 5.
It is pivoted on 4. This bearing 14 is fixedly supported by a bracket 15 on the Y table 5VC. This bearing 14 is, for example, a pole pusher, and supports the Y-direction drive shaft 11 so as to be movable (directly movable) relative to the axial direction (coinciding with the X direction).

また、上記Ｘテーブル３にはＹテーブル５の側方に位置
してＸ方向駆動用モータ１２が取シ付けられている。こ
のＸ方向駆動用モータ１２の回転軸１８はカップリング
１９を介してＸ方向用駆動軸２１１１Ｃ連結されている
。そして、このＸ方向用駆動軸２１の一端は上記Ｘテー
ブル３に取着された軸受２２に軸支されている。この軸
受２２はブラケット２３によって支持されている。また
、Ｘ方向用駆動軸２１の他端側部分は上記Ｘテーブル３
に取着された軸受２４に軸支されている。この軸受２４
はブラケット２５によりてＸテーブル３に固定的に支持
されている。そして、このようにしてそれぞれ支持され
た各方向用駆動軸１１゜２）は第１図で示すように直交
するとともにＹ方向用駆動軸１ノを下側にして互いに転
接するように配置される。この互いに転接する各方向用
駆動軸１１．２１の部分は少なくともそれぞれの転接部
分の全長にわたシ等径の回転伝達用ローラとして機能す
るとともに、他方のものは送り俸として機能してその軸
方向に移動する。つまシ、この各駆動軸１１．２１は送
りローラと送り俸としての機能を兼ねるものである。Further, an X-direction driving motor 12 is attached to the X-table 3 and located on the side of the Y-table 5. The rotating shaft 18 of this X-direction drive motor 12 is connected to an X-direction drive shaft 2111C via a coupling 19. One end of this X-direction drive shaft 21 is pivotally supported by a bearing 22 attached to the X table 3. This bearing 22 is supported by a bracket 23. In addition, the other end side portion of the drive shaft 21 for the X direction is connected to the X table 3.
It is pivotally supported by a bearing 24 attached to. This bearing 24
is fixedly supported on the X table 3 by a bracket 25. The drive shafts 11°2) for each direction supported in this way are orthogonal to each other as shown in FIG. . The portions of the drive shafts 11 and 21 for each direction that are in rolling contact with each other function as rotation transmitting rollers having equal diameters over the entire length of the respective rolling contact portions, and the other portion functions as a feed ball and rotates the shaft. move in the direction. The drive shafts 11 and 21 serve as both a feed roller and a feed payload.

一方、第３図で示すようにＹ方向用駆動軸１ノの軸受１
２を支持する上記クロスローラテーブル６は受は台３１
上でＹ方向にスライド自在に支持されている。この受は
台３１の各端部の下面は斜めに切除された傾斜面３２と
して形成され、この各煩斜ｄｉＪ３２とテーブルベース
１との間にはそれぞれくさび３３．３３が嵌め込まれて
その受は台３ノの高さが設定されるようになっている。On the other hand, as shown in Fig. 3, the bearing 1 of the drive shaft 1 for the Y direction
The said cross roller table 6 which supports 2 is a support stand 31
It is supported on the top so that it can slide freely in the Y direction. The lower surface of each end of the stand 31 is formed as a sloped surface 32 cut diagonally, and wedges 33 and 33 are fitted between each oblique diJ 32 and the table base 1, and the support is The height of the third platform is set.

そして、この受は台３１は締結ねじ３４でその高さの位
置に固定される。そして、受は台３ノの高さを調節する
場合には締結ねじ３４を緩め、くさび３３．３３の押込
み量を調節してその高さを設定するようになっている。The support base 31 is fixed at the same height using fastening screws 34. When adjusting the height of the stand 3, the height of the receiver is set by loosening the fastening screw 34 and adjusting the amount by which the wedges 33 and 33 are pushed.

また、Ｙ方向用駆動軸１１の他方の軸受１４を支持する
ブラケット１５も同様な構成でその高さが調節できるよ
うに支持されている。すなわち、このような構成によシ
上記Ｙ方向用駆動軸１１の高さを調節し、各方向用駆動
軸１１．２１が確実に転接でき与圧を与える手段を構成
している。そして１．使用する前に上記くさび３３．３
３で軸受１２，１４の高さを調節し、各駆動軸１１，２
１の転接圧力が所定与圧になるように設定する。Further, the bracket 15 that supports the other bearing 14 of the Y-direction drive shaft 11 is also supported in a similar manner so that its height can be adjusted. That is, such a configuration constitutes a means for adjusting the height of the drive shaft 11 for the Y direction, ensuring that the drive shafts 11 and 21 for each direction are in rolling contact, and applying pressurization. And 1. Wedge 33.3 above before use
3 to adjust the height of the bearings 12 and 14, and
The rolling contact pressure of No. 1 is set to a predetermined pressurization.

そこで、第１のモータとしてのＸ方向駆動モータ１７を
作動させると、この回転軸１８の回転力がカップリング
１９を介して第１の駆動軸としてのＸ方向用駆動軸２１
に伝達され、とのＸ方向用駆動軸２１は第２の駆動軸と
してのＹ方向用駆動軸１ノに転接する送りローラとして
機能し、そのＹ方向用駆動軸１１を送ｐ俸としてその軸
方向に移動しようとする。しかし、Ｙ方向用駆動軸１１
はその軸方向には移動しないから、この反作用でＸテー
ブル３の方がＸ方向に移動する。この移動する向きはＸ
方向用駆動軸２１を駆動するモータ１７０回転する向き
で定まる。Therefore, when the X-direction drive motor 17 as the first motor is operated, the rotational force of the rotating shaft 18 is transferred to the X-direction drive shaft 21 as the first drive shaft via the coupling 19.
The X-direction drive shaft 21 functions as a feed roller that rolls into contact with the Y-direction drive shaft 1 serving as a second drive shaft, and the Y-direction drive shaft 11 serves as a feed roller for that axis. Try to move in the direction. However, the drive shaft 11 for the Y direction
does not move in its axial direction, this reaction causes the X table 3 to move in the X direction. The direction of this movement is
It is determined by the direction in which the motor 170 that drives the direction drive shaft 21 rotates.

そして、Ｘテーブル３がＸ方向に移動することによシこ
のＸテーブル３の上に設置されているＹテーブル５も同
じくＸ方向に移動する。また、このときＹ方向用駆動軸
１１の先端側部分を支持する軸受１４はそのＹ方向用駆
動軸１ノを回転自在に支持するだけでなく、そのＹ方向
に自由にスライドさせるから、Ｘテーブル３およびＹテ
ーブル５のＸ方向の移動を阻害することはない。When the X table 3 moves in the X direction, the Y table 5 installed on the X table 3 also moves in the X direction. Further, at this time, the bearing 14 that supports the distal end portion of the Y-direction drive shaft 11 not only rotatably supports the Y-direction drive shaft 1 but also allows it to slide freely in the Y direction, so that the X table 3 and Y table 5 in the X direction.

一方、第２のモータとしてのＹ方向駆動用モータ７を作
動させると、とのモータ７の回転ｓ８の回転力がカップ
リング９を介してＹ方向用駆動軸１１に伝達され、この
Ｙ方向用駆動軸１１は送ｐローラとしてこれに転接する
送り棒としてのＸ方向用駆動軸２１ｔ−その軸方向に移
動させようとする。しかし、Ｘ方向用駆動軸２１はその
軸方向には移動しないから、この反作用でＹ方向用駆動
軸１ノの方がＹ方向に移動する。そして、この軸受１５
を介してＹテーブル５’ｆｆ：Ｙ方向だ移動する。On the other hand, when the Y-direction drive motor 7 as the second motor is operated, the rotational force of the rotation s8 of the motor 7 is transmitted to the Y-direction drive shaft 11 via the coupling 9. The drive shaft 11 is intended to be moved in the axial direction of the X-direction drive shaft 21t, which is a feed rod that is in rolling contact with the drive shaft 11 as a feed p roller. However, since the X-direction drive shaft 21 does not move in the axial direction, the Y-direction drive shaft 1 moves in the Y direction due to this reaction. And this bearing 15
Y table 5'ff: moves in the Y direction via .

なお、軸受１２側のクロスローラテーブル６は受は台３
１上をＹ方向に摺動するのみである。Note that the cross roller table 6 on the bearing 12 side is
1 in the Y direction.

また、このときの移動する向きはＹ方向用駆動軸１ノを
駆動するモータ７の回転する向きで定まる。Further, the direction of movement at this time is determined by the rotating direction of the motor 7 that drives the Y-direction drive shaft 1.

そこで、駆動するモータ７．１７を選択すれば、その選
択した方向にＹテーブル５を移動することができる。ま
た、上記両モータ７．１７を同時に駆動すれば、その合
成した向きに移動する。Therefore, by selecting the motor 7.17 to be driven, the Y table 5 can be moved in the selected direction. Furthermore, if both the motors 7.17 are driven simultaneously, the robot will move in the combined direction.

なお、各テーブル３，５を停止させておく場合には各モ
ータ７．１７がＤＣモータあるいハノ’？ルスモータを
サー？ロックして用いることが考えられるが、たとえば
これにハーモニックドライブ減速機構を備えたものであ
れば、サーボをかけずにそのテーブル３，５を停止させ
ておくことができる。In addition, when each table 3, 5 is stopped, each motor 7.17 is a DC motor or a DC motor. Sir motor? Although it is conceivable to use the table in a locked state, for example, if it is equipped with a harmonic drive deceleration mechanism, the tables 3 and 5 can be stopped without applying the servo.

しかして、上記構成によれば、駆動軸１１゜２１の転接
による送力を利用するから、充分長いストロークで送れ
る。また、各駆動軸１１．２１は与圧が与えられ、遊び
がないので、正確な位置決め精度で送ることができる。According to the above configuration, since the feeding force generated by the rotation of the drive shaft 11.degree. 21 is utilized, feeding can be achieved with a sufficiently long stroke. Further, each drive shaft 11.21 is pressurized and has no play, so it can be fed with accurate positioning accuracy.

さらに、この送り機＃Ｉｔ部分の構成が簡略化できると
ともにシステム構成が薄型で小形化できる・ ［発明の効果コ 以上説明したように本発明によれば、充分長いストロー
クで送れるとともに遊びがなく、正確な送り精度がでる
。さらに、その送り機構部分の構成の簡略小形化ができ
る・Furthermore, the configuration of the feeder #It portion can be simplified, and the system configuration can be made thinner and more compact. [Effects of the Invention] As explained above, according to the present invention, the feeder can be fed with a sufficiently long stroke and there is no play. Accurate feeding accuracy is achieved. Furthermore, the configuration of the feeding mechanism can be simplified and downsized.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ないし第４図は本発明の一実施例を示し、第１図
はＸＹ方方向クシ装置概略的な構成の平面図、第２図は
同じくその正面図、第３図は駆動軸に与圧を与える機構
部分の側面図、第４図は同じく駆動軸に与圧を与える機
構部分の正面図である。 １・・・テーブルベース、３・・・Ｘテーブル、５・・
・Ｙテーブル、６・・・クロスローラテーブル、２・・
・Ｙ方向駆動用モータ、８・・・回転軸、１）・・・Ｙ
方向用駆動軸、１２・・・軸受、１４・・・軸受、１７
・・・Ｘ方向駆動用モータ、１８・・・回転軸、２１・
・・Ｘ方向用駆動軸、２２・・・軸受、２４・・・軸受
、３１・・・受は台、３３・・・くさび（予圧手段）。 出願人代理人　　弁理士　鈴　江　武　彦第３図 第４図1 to 4 show one embodiment of the present invention, FIG. 1 is a plan view of the schematic configuration of the XY direction comb device, FIG. 2 is a front view thereof, and FIG. 3 is a drive shaft. FIG. 4 is a side view of a mechanism section that applies pressurization, and FIG. 4 is a front view of a mechanism section that also applies pressurization to the drive shaft. 1...Table base, 3...X table, 5...
・Y table, 6...Cross roller table, 2...
・Y direction drive motor, 8...rotation axis, 1)...Y
Directional drive shaft, 12... Bearing, 14... Bearing, 17
... X-direction drive motor, 18... Rotating shaft, 21.
...X-direction drive shaft, 22...Bearing, 24...Bearing, 31...Base is stand, 33...Wedge (preload means). Applicant's agent Patent attorney Takehiko Suzue Figure 3 Figure 4

Claims (1)

【特許請求の範囲】[Claims] テーブルベースと、このテーブルベース上でのＸＹ方向
の一方の方向に移動自在に設置された第１のテーブルと
、この第１のテーブルに対してＸＹ方向の他方の方向に
移動自在に支持された第２のテーブルと、上記第１のテ
ーブルに軸支されＸＹ方向の上記他方の方向に沿って配
置されその軸方向に直動自在に支持されるとともに送り
用ローラと送り棒を兼ねた第１の駆動軸と、上記第２の
テーブルに軸支されＸＹ方向の上記一方の方向に沿って
配置され上記第１の駆動軸に交差して互いに転接する送
り用ローラと送り棒を兼ねた第２の駆動軸と、上記テー
ブルベースに上記ＸＹ方向の上記他方の方向に移動自在
に支持された設置用テーブルと、この設置用テーブルに
設置され上記第１の駆動軸を軸支する軸受と、上記第１
の駆動軸を回転駆動する正逆回転自在な第１のモータと
、上記第１の駆動軸を回転駆動する正逆回転自在な第２
のモータと、互いに転接する上記第１および第２の駆動
軸に所定の転接圧力を加える与圧手段とを具備したこと
を特徴とするＸＹ方向送り装置。a table base; a first table installed on the table base so as to be movable in one direction of the XY directions; and a first table supported so as to be movable in the other direction of the XY directions with respect to the first table. a second table, and a first table that is pivotally supported by the first table, is arranged along the other direction of the XY direction, is supported so as to be movable linearly in the axial direction, and also serves as a feeding roller and a feeding rod. a second drive shaft that is rotatably supported by the second table, is arranged along one of the XY directions, intersects the first drive shaft, and serves as a feed roller and a feed rod. a drive shaft; an installation table supported by the table base so as to be movable in the other direction of the XY direction; a bearing installed on the installation table and pivotally supporting the first drive shaft; 1st
a first motor that can freely rotate in forward and reverse directions to rotationally drive the drive shaft; and a second motor that can freely rotate in forward and reverse directions to rotationally drive the first drive shaft.
An XY direction feeding device comprising: a motor; and pressurizing means for applying a predetermined rolling contact pressure to the first and second drive shafts that roll into contact with each other.
JP12921088A 1988-05-26 1988-05-26 Feeding device in xy direction Pending JPH01301030A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12921088A JPH01301030A (en) 1988-05-26 1988-05-26 Feeding device in xy direction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12921088A JPH01301030A (en) 1988-05-26 1988-05-26 Feeding device in xy direction

Publications (1)

Publication Number Publication Date
JPH01301030A true JPH01301030A (en) 1989-12-05

Family

ID=15003857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12921088A Pending JPH01301030A (en) 1988-05-26 1988-05-26 Feeding device in xy direction

Country Status (1)

Country Link
JP (1) JPH01301030A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109873A (en) * 1991-04-12 1993-04-30 Goldstar Electron Co Ltd Aligning method for semiconductor chip and target for laser repair

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109873A (en) * 1991-04-12 1993-04-30 Goldstar Electron Co Ltd Aligning method for semiconductor chip and target for laser repair

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