JPH01300441A - Production of substrate for optical recording medium - Google Patents
Production of substrate for optical recording mediumInfo
- Publication number
- JPH01300441A JPH01300441A JP13042688A JP13042688A JPH01300441A JP H01300441 A JPH01300441 A JP H01300441A JP 13042688 A JP13042688 A JP 13042688A JP 13042688 A JP13042688 A JP 13042688A JP H01300441 A JPH01300441 A JP H01300441A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- light
- irradiated
- base material
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 33
- 230000003287 optical effect Effects 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000011347 resin Substances 0.000 claims abstract description 64
- 229920005989 resin Polymers 0.000 claims abstract description 64
- 239000000463 material Substances 0.000 claims abstract description 24
- 239000012298 atmosphere Substances 0.000 claims abstract description 6
- 239000011261 inert gas Substances 0.000 claims abstract description 6
- 230000001678 irradiating effect Effects 0.000 claims abstract description 3
- 239000000428 dust Substances 0.000 abstract description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 6
- 239000001301 oxygen Substances 0.000 abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 33
- 229910052757 nitrogen Inorganic materials 0.000 description 17
- 238000000034 method Methods 0.000 description 16
- 239000013307 optical fiber Substances 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000005764 inhibitory process Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光ビームにより記録・再生を行なうことが可能
な光学的記録媒体に用いる、案内溝付き基板の製造方法
に関する。より詳しくは、2P(Photo poly
mer(光硬化樹脂)〕法と呼ばれる、基板の製造法の
改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a substrate with guide grooves used for an optical recording medium capable of recording and reproducing information using a light beam. For more details, please refer to 2P (Photo poly
This invention relates to an improvement in a substrate manufacturing method called the mer (photocurable resin) method.
光学的記録媒体の基板は、高密度記録を実施するために
、その表面に光学的案内溝を形成しておく必要がある。In order to perform high-density recording, it is necessary to form optical guide grooves on the surface of the substrate of an optical recording medium.
その形成方法として従来からいくつかの方法が知られて
いる。その一つの方法として、案内溝の形状に対応する
凹凸が設けられた型(スタンパ−と呼ばれる)のHに硬
化型の樹脂を塗布した後、この上に基材を載置し、次い
で光照射等によって樹脂を硬化させて、案内溝を基材に
固着させる方法がある。この方法は、案内溝形状の転写
性に優れ、他の案内溝形成法に比較すると、基板の光学
的ひずみを少なくすることが可能であるという利点を有
する。Several methods have been conventionally known as methods for forming the same. One method is to apply a hardening resin to a mold (called a stamper) that has unevenness corresponding to the shape of the guide groove, place the base material on top of this, and then irradiate it with light. There is a method in which the guide groove is fixed to the base material by hardening the resin. This method has excellent transferability of the guide groove shape, and has the advantage that optical distortion of the substrate can be reduced compared to other guide groove forming methods.
しかし、次に示す問題点が未解決であった。第2図は、
上記従来法により案内溝を形成する場合の樹脂硬化後の
状態を示す図である。この方法では、樹脂3は、硬化前
には流動性があるため、基板2の最端部からはみ出して
しまうことがあり、このはみ出し部分が光照射等によっ
て硬化し、基材2の外側で図に示すような尖頭状の端部
を有するパリとなることが少なくなかった。また、スタ
ンパ−4の中心に配設された中心軸1と基材2との嵌合
部には微小な間隙が存在するので、この部分にも樹脂が
はみ出て硬化し、小5なパリとなったり、案内溝の固着
した基材2とスタンパ−4との離型を困難ならしめてい
た。However, the following problems remained unsolved. Figure 2 shows
It is a figure which shows the state after resin hardening when forming a guide groove by the said conventional method. In this method, since the resin 3 has fluidity before curing, it may protrude from the outermost edge of the substrate 2, and this protruding portion is cured by light irradiation, etc., and is exposed to the outside of the substrate 2. It was not uncommon for the blade to have a pointed end as shown in the figure. In addition, since there is a minute gap in the fitting part between the central shaft 1 located at the center of the stamper 4 and the base material 2, the resin will also protrude from this part and harden, resulting in small cracks. This makes it difficult to release the stamper 4 from the base material 2 to which the guide grooves are fixed.
ハリの発生した案内溝付き基板とスタンパ−4との離型
を行なう際に、尖頭状の端部を有するパリは欠けやすい
。欠けたパリは静電気が発生している基板表面に、剥離
帯電でゴミとして(=f着してしまうことが多かった。When the stamper 4 is released from the substrate with guide grooves in which firmness has occurred, the edges having the pointed ends are likely to be chipped. The chipped particles were often deposited as dust (=f) on the surface of the substrate where static electricity was generated due to peeling charge.
またパリを除去する際にも、−旦除去されたパリがゴミ
となり基板表面に付着してしまう場合があった。このゴ
ミは記録媒体の欠陥、記録のエラーの原因の一つとなっ
ていた。また、このゴミの付着した案内溝上に記録層を
積層すると、ゴミの部分には段差があるため積層した膜
によって完全にカバーできずにピンホールとなり、次の
ような問題も発生していた。即ち、ピンホールから水分
や酸素が侵入して記録層を腐食させることによって、そ
の記録特性を劣化させてしまうという問題である。上記
問題を解決する方法として、特開昭61−222727
号「光学的記録媒体の基板の製造方法」にはマスクを用
いて基板の内、外周端部での樹脂のはみ出しを防止する
方法が開示されている。また、集光された光を基板の内
、外周端部に沿って照射し、樹脂のはみ出しを防止する
方法も考えられる。かかる方法は上記問題点を解決する
ためにかなり有効である。しかしながら、この方法では
、基材とマスクもしくは集光された光の位若合わせの問
題や、光の回折により樹脂の停止位置の精度が悪くなる
という問題の他に、樹脂層の厚みを厚くした場合、樹脂
の厚さ方向で硬化レベルは異なり、集光された光に近い
樹脂は硬化するが、遠い所では未硬化のままになる。こ
のため未硬化の樹脂が流れ停止位置の精度を悪くする問
題や、樹脂の粘性が低い場合、樹脂が基板全面に拡がる
スピードが速く、内・外周端面でも、集合された光が照
射されてから次に照射されるまでの間に樹脂が流れ出し
、樹脂の停止位置精度が悪くなるという問題や、更に樹
脂の特性として、嫌気性の強い場合、希望する樹脂の停
止位置に樹脂が硬化する光が照射されていても、空気中
の酸素により硬化が阻害されてはみ出してしまうなど、
困難な問題も残されていた。Further, when removing paris, the removed paris sometimes becomes dust and adheres to the surface of the substrate. This dust was one of the causes of defects in recording media and recording errors. Furthermore, when a recording layer is laminated on the guide groove to which the dust has adhered, the dust cannot be completely covered by the laminated film due to the step difference, resulting in pinholes, which causes the following problems. That is, the problem is that moisture and oxygen enter through the pinholes and corrode the recording layer, thereby degrading its recording characteristics. As a method to solve the above problem, Japanese Patent Application Laid-Open No. 61-222727
No. ``Method for manufacturing a substrate for an optical recording medium'' discloses a method for preventing resin from extruding from the inner and outer peripheral edges of a substrate using a mask. Another possible method is to irradiate the condensed light along the inner and outer peripheral edges of the substrate to prevent the resin from protruding. Such a method is quite effective in solving the above problems. However, with this method, there are problems with alignment between the base material and the mask or the focused light, and the accuracy of the stopping position of the resin deteriorates due to light diffraction. In this case, the curing level differs in the thickness direction of the resin, and the resin close to the focused light is cured, but the resin far away remains uncured. For this reason, there is a problem that the uncured resin flows and the accuracy of the stop position is deteriorated, and if the resin has low viscosity, the resin spreads quickly over the entire surface of the board, and even the inner and outer peripheral edges are irradiated with the collected light. There is a problem that the resin will flow out before the next irradiation and the accuracy of the resin stop position will deteriorate. Furthermore, if the resin has strong anaerobic characteristics, the light that hardens the resin will be placed at the desired resin stop position. Even if it is irradiated, the curing is inhibited by oxygen in the air and it sticks out.
Difficult issues remained.
本発明は以上の問題点に鑑み成されたものであり、その
目的はスタンパ−を用いて案内溝付きの基板を製造する
際のパリの発生を抑制することによって、基板表面への
ゴミの付着を防止することのできる光学的記録媒体用基
板の製造方法を提供することにある。The present invention has been made in view of the above-mentioned problems, and its purpose is to prevent dust from adhering to the surface of the substrate by suppressing the occurrence of flash when manufacturing substrates with guide grooves using a stamper. An object of the present invention is to provide a method for manufacturing a substrate for an optical recording medium that can prevent the above problems.
上記の目的は、案内溝や情報の形状に対応した凹凸を有
する型の上に、光硬化性の樹脂と中心孔を有する基材と
を順次積置し、該樹脂を固化させると共に基材に付着さ
せて、案内溝または情報付きの光学的記録媒体用の基板
を製造する方法において、次の■と■、または■と■の
各それぞれの工程を順に実施することにより達成できる
。The above purpose is to sequentially stack a photocurable resin and a base material with a central hole on a mold with unevenness corresponding to the shape of guide grooves and information, solidify the resin, and harden the base material. In a method of manufacturing a substrate for an optical recording medium with guide grooves or information by adhering, this can be achieved by sequentially carrying out the following steps (1) and (2) or (2) and (2).
■ 基材の内縁部および外縁部に、集光された光(集光
レンズによる光や光ファイバー等による光)をそれぞれ
の縁に沿って照射するとともに、前記光が照射される所
に、不活性ガスを圧送して、光が照射された位置にまで
広げられた該樹脂を硬化する工程。■ Irradiate the inner and outer edges of the base material with condensed light (light from a condensing lens, light from an optical fiber, etc.) along each edge, and place an inert A step of hardening the resin that has been spread to the position irradiated with light by pumping gas.
この不活性カスを圧送することにより、前記光が照射さ
れる所の樹脂の表面は不活性ガス雰囲気になり、酸素に
よる樹脂の硬化阻害が減少する。By pumping this inert scum, the surface of the resin where the light is irradiated becomes an inert gas atmosphere, which reduces the inhibition of hardening of the resin due to oxygen.
更に、外周端部においては、不活性ガスの圧力による樹
脂を内周側に押しもどす力と、周方向に広げる力によっ
て、樹脂のはみ出しがなくなり、停正位置がコントロー
ルしやすくなる。Furthermore, at the outer peripheral end, the force of pushing the resin back toward the inner peripheral side due to the pressure of the inert gas and the force of spreading it in the circumferential direction prevent the resin from protruding, making it easier to control the stop position.
■ 該樹脂全体に光を照射して該樹脂全体を硬化する工
程。(2) A step of curing the entire resin by irradiating the entire resin with light.
■ 前記(1)の工程を、不活性ガス雰囲気のチャンバ
ー内で行なう工程。(2) A step of carrying out the step (1) above in a chamber with an inert gas atmosphere.
これにより、酸素による硬化阻害の影響はなくなり、集
光された光の位置合わせや、停止位置のコントロールが
容易になる。This eliminates the effect of oxygen on curing inhibition, making it easier to align the focused light and control the stopping position.
以下、本発明を実施例により詳細に説明する。 Hereinafter, the present invention will be explained in detail with reference to Examples.
実施例1
次のようにして光学的記録媒体用基板を製造した(第1
図(a) 、 (b)参照)。Example 1 An optical recording medium substrate was manufactured as follows (first
(See Figures (a) and (b)).
まず、スタンパ−4上に紫外線硬化型の樹脂3をドーナ
ツ状に塗布した。この樹脂3上に外径130mm 、厚
さ1.2mm 、内径15mmのガラス基材2を積置し
た。そして、ガラス基材の内縁部、外縁部の上方にそれ
ぞれ紫外線スポット照射装置(商品名:トスキュア20
0PN、東芝電材製)の紫外線ランプ6につながる光フ
ァイバー5を配置した。このとき、光ファイバー5の端
面と基材2表面の間隔を1ml11にして、基材2に対
して光ファイバー5は垂直となるようにした。なお、各
光ファイバー5は、樹脂3をそれ以上拡げたくない位置
の真上に配した。そして、外周部にスタンパ−と約30
°傾けて前記ファイバーの光の照射位置に窒素が吐出す
るように窒素ノズル7を配した。また、内周部は軸lに
、外周と同様に光ファイバーの光が照射される位置に窒
素が吐出するように窒素ノズル8を配した。また、この
窒素の圧力は3kg/cm’とした。First, the ultraviolet curing resin 3 was applied onto the stamper 4 in a donut shape. A glass substrate 2 having an outer diameter of 130 mm, a thickness of 1.2 mm, and an inner diameter of 15 mm was stacked on this resin 3. Then, an ultraviolet spot irradiation device (product name: Toscure 20
An optical fiber 5 connected to an ultraviolet lamp 6 made by 0PN (manufactured by Toshiba Denzai) was arranged. At this time, the distance between the end face of the optical fiber 5 and the surface of the base material 2 was set to 1 ml11, so that the optical fiber 5 was perpendicular to the base material 2. Note that each optical fiber 5 was placed directly above a position where the resin 3 was not desired to spread further. And about 30 stampers on the outer periphery.
A nitrogen nozzle 7 was arranged so as to be tilted at an angle so that nitrogen was discharged at the light irradiation position of the fiber. Further, a nitrogen nozzle 8 was disposed on the inner circumference along the axis l so that nitrogen was discharged at a position where the light from the optical fiber was irradiated in the same way as on the outer circumference. Further, the pressure of this nitrogen was 3 kg/cm'.
次いで、光ファイバー5の端面より1cmの距離で紫外
線強度が500mW/am’となるような条件下で、基
材の内縁部、外縁部とに紫外線を照射するとともに、窒
素ノズル7.8より窒素を吐出した。その後、スタンパ
−を回転させると、基材2の内縁部、外縁部の一部のみ
に円周状に紫外線が照射され、一方、樹脂3は押し拡げ
られていった。Next, the inner and outer edges of the base material are irradiated with ultraviolet rays under conditions such that the intensity of ultraviolet rays is 500 mW/am' at a distance of 1 cm from the end face of the optical fiber 5, and nitrogen is injected from the nitrogen nozzle 7.8. I spat it out. Thereafter, when the stamper was rotated, ultraviolet rays were irradiated circumferentially only on a part of the inner edge and outer edge of the base material 2, while the resin 3 was pushed and spread.
樹脂3は光が照射されている位置までくると窒素の圧力
により広がりが押えられ、紫外線により硬化し、基材2
端部からはみ出ない状態になった。その後、基材2全体
に光強度230mW/crn’の紫外線を30秒照射し
、樹脂3を硬化させた。続けてスタンパ−4から硬化一
体止した案内溝を有する樹脂3の層と基材2を剥離し、
光学的記録媒体用基板とした。When the resin 3 reaches the position where the light is irradiated, its spread is suppressed by the pressure of nitrogen, and it is cured by ultraviolet rays, forming the base material 2.
It is now in a state where it does not protrude from the edge. Thereafter, the entire base material 2 was irradiated with ultraviolet rays with a light intensity of 230 mW/crn' for 30 seconds to harden the resin 3. Subsequently, the layer of resin 3 having guide grooves and the base material 2 which have been cured and fixed are peeled off from the stamper 4,
It was used as a substrate for optical recording media.
実施例2
光ファイバーおよび窒素ノズルを内縁部、外縁部に対し
て2本づつ用い、それぞれを円の中心を通る1つの直線
上に配置した以外は、実施例1と同様にして光学的記録
媒体用基板を製造した。なお、内周の2本とも、それ以
上樹脂を拡げたくない位置の真上に配した。外周の2木
の光ファイバーおよび窒素ノズルも同様に配した。Example 2 An optical recording medium was prepared in the same manner as in Example 1, except that two optical fibers and two nitrogen nozzles were used for the inner edge and two for the outer edge, and each was arranged on a straight line passing through the center of the circle. The substrate was manufactured. Note that both of the inner circumferential wires were placed directly above the position where the resin was not desired to spread any further. Two optical fibers on the outer periphery and nitrogen nozzles were arranged in the same way.
光ファイバー、窒素ノズルを内、外縁部に対して2木づ
つ用いることにより、内、外縁部の樹脂か光に照射され
る時間間隔が短くなる。この時間間隔が長くなると、次
に光が照射されるまでに樹脂か停止させたい位置より拡
がって停止位置精度が悪くなる。By using two optical fibers and two nitrogen nozzles for the inner and outer edges, the time interval at which the resin at the inner and outer edges is irradiated with light becomes shorter. If this time interval becomes longer, the resin will spread beyond the desired stop position by the time the light is irradiated next time, and the accuracy of the stop position will deteriorate.
実施例3.4
集光させた光を基板に対して垂直ではなく、外周側は外
側へ、内周側は内側へ各約10°傾けた状態で照射し、
外周窒素ノズルはスタンパ−に対して約60°傾けた状
態に配した以外は、実施例1.2と同様に光学的記録媒
体用基板を製造した。集光させた光を外周側を外側に傾
けることにより、光は外側に流れるので、樹脂が拡がっ
て来る内周への回折光が押えられる。さらに、窒素ノズ
ルを傾けることにより、樹脂の受ける窒素圧の分布か変
わり、特に樹脂の粘性が低い場合、基板の内周側へ押さ
れる力が強くなると、その力で逆に樹脂がまきかえりは
み出してしまうことがある。そのため、圧力分布を変え
て、そのまきかえりによるはみ出しを抑制できる。Example 3.4 The condensed light was irradiated not perpendicularly to the substrate, but at an angle of approximately 10 degrees to the outer circumferential side outward and inward to the inner circumferential side, and
An optical recording medium substrate was manufactured in the same manner as in Example 1.2, except that the outer nitrogen nozzle was arranged at an angle of about 60 degrees with respect to the stamper. By tilting the outer circumferential side of the condensed light outward, the light flows outward, thereby suppressing the diffracted light toward the inner circumference where the resin spreads. Furthermore, by tilting the nitrogen nozzle, the distribution of nitrogen pressure applied to the resin changes. Especially when the viscosity of the resin is low, when the force pushing it toward the inner circumference of the board becomes strong, the resin curls up and protrudes due to that force. Sometimes it happens. Therefore, by changing the pressure distribution, it is possible to suppress the protrusion caused by the curling up.
実施例5〜8
請求項2に係る例としてチャンバーの中に、スタンパ−
1基板、光ファイバー、窒素ノズルを入れて、チャンバ
ー内を窒素雰囲気にした以外は実施例1〜4各同様にし
て光学的記録媒体用基板を製造した。上記実施例の方法
により、嫌久住の強い紫外線硬化樹脂でも酸素による硬
化阻害が少なく、希望した所に前記樹脂を停止させるこ
とができる。Examples 5 to 8 As an example according to claim 2, a stamper is placed in the chamber.
A substrate for an optical recording medium was manufactured in the same manner as in Examples 1 to 4 except that a substrate, an optical fiber, and a nitrogen nozzle were placed in the chamber to create a nitrogen atmosphere. By the method of the above-mentioned embodiment, even if the ultraviolet curable resin has a strong curing property, there is little inhibition of curing by oxygen, and the resin can be stopped at a desired location.
本発明は上記の実施例に何ら限定されるものでない。例
えば、基材としてカラス基材の代わりにポリカーボネー
ト、アクリル、エポキシ樹脂などの基材が利用できる。The present invention is in no way limited to the above embodiments. For example, a base material such as polycarbonate, acrylic, or epoxy resin can be used instead of a glass base material.
なお、硬化樹脂として硬化性の高い樹脂を用いる場合に
は、わずかの光の回折でそれは硬化してしまうため樹脂
の停止位置精度は悪くなる傾向にある。かかる場合には
、光ファイバーや集光レンズの端面と基板表面との間隔
を小さくすることや、集光径を小さくして光の回折を押
えることにより、停止位置精度を向上できる。また、窒
素の圧力を変えることにより、樹脂にあたえる力も変わ
り拡かりスピードかコントロールでき、停止位置精度を
向上できる。Note that when a highly curable resin is used as the curable resin, it will be cured by a slight diffraction of light, so the accuracy of the resin stopping position tends to deteriorate. In such a case, the accuracy of the stopping position can be improved by reducing the distance between the end face of the optical fiber or condensing lens and the substrate surface, or by reducing the condensing diameter to suppress light diffraction. In addition, by changing the nitrogen pressure, the force applied to the resin changes, allowing control of the spreading speed and improving stopping position accuracy.
以上説明したように、本発明によれば、樹脂が基板の内
側および外側の最端部に到達する以前に、それを所望の
位置で硬化させることができ、基板の内、外周から樹脂
がはみ出ず、ゴミの主な発生源となるパリが生じなくな
る。そのため、案内溝付き基板のゴミの付着を大幅に減
少でき、信頼性の高い光学的記録媒体用基板を製造する
ことができる。As explained above, according to the present invention, it is possible to harden the resin at a desired position before the resin reaches the innermost and outermost edges of the substrate, and the resin protrudes from the inner and outer periphery of the substrate. This eliminates the formation of dust, which is the main source of garbage. Therefore, the adhesion of dust to the substrate with guide grooves can be significantly reduced, and a highly reliable substrate for an optical recording medium can be manufactured.
第1図は本発明の方法の一実施例を示す図である。 第2図は従来法による樹脂硬化後の断面図である。 1:中心軸 2:基板 3:硬化性樹脂 4ニスタンパ 5:光ファイバー 6:UVランプ 7.8:窒素吐出ノズル 第1図 第2図 FIG. 1 is a diagram showing an embodiment of the method of the present invention. FIG. 2 is a sectional view after the resin is cured by the conventional method. 1: Central axis 2: Substrate 3: Curable resin 4 Nistampa 5: Optical fiber 6: UV lamp 7.8: Nitrogen discharge nozzle Figure 1 Figure 2
Claims (1)
に、光硬化性の樹脂と中心孔を有する基材とを順次積層
し、該樹脂を硬化させると共に基材に付着させて、案内
溝または情報付きの光学的記録媒体用の基板を製造する
方法において、次の(1)と(2)の工程を順に行うこ
とを特徴とする製造方法。 (1)基材の内縁部、外縁部に、集光された光をそれぞ
れの縁に沿って照射するとともに、該光が照射される所
に、不活性ガスを局所的に圧送して、光が照射された位
置にまで広げられた該樹脂を硬化する工程 (2)該樹脂全体に光を照射して該樹脂全体を硬化する
工程 2)前記(1)の工程を不活性ガス雰囲気のチャンバー
内で行なうことを特徴とする請求項1に記載の製造方法
。[Claims] 1) A photocurable resin and a base material having a center hole are sequentially laminated on a mold having unevenness corresponding to the shape of guide grooves and information, and the resin is cured and the base material is cured. A manufacturing method for manufacturing a substrate for an optical recording medium with guide grooves or information by adhering it to a material, characterized in that the following steps (1) and (2) are performed in order. (1) The inner and outer edges of the base material are irradiated with focused light along each edge, and an inert gas is locally pumped into the area where the light is irradiated. (2) Curing the resin that has been spread to the irradiated position (2) Curing the entire resin by irradiating the entire resin with light 2) The step (1) is carried out in a chamber with an inert gas atmosphere. 2. The manufacturing method according to claim 1, wherein the manufacturing method is carried out within a chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13042688A JPH01300441A (en) | 1988-05-30 | 1988-05-30 | Production of substrate for optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13042688A JPH01300441A (en) | 1988-05-30 | 1988-05-30 | Production of substrate for optical recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01300441A true JPH01300441A (en) | 1989-12-04 |
Family
ID=15033962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13042688A Pending JPH01300441A (en) | 1988-05-30 | 1988-05-30 | Production of substrate for optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01300441A (en) |
-
1988
- 1988-05-30 JP JP13042688A patent/JPH01300441A/en active Pending
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