JPH01298161A - Sputter jig for optical disk - Google Patents

Abstract

PURPOSE:To remove the adhesion of dust to the rear of an optical disk substrate by providing a spacer between a substrate holder and an optical disk substrate. CONSTITUTION:In a sputter jig for optical disk, an optical disk substrate 1 is supported and fixed to a substrate holder 2 by means of an inside-peripheral supporting medium 4 and a screw 6 on the inside peripheral side with a spacer 8 in between. The inside diameter of the spacer 8 is set up so that it is practically equal to the inside diameter of the optical disk substrate 1, and the outside diameter of the spacer 8 is set up so that it is smaller than the innermost peripheral diameter of a groove. A substrate-setting hole 3 is regulated so that the size of the recording film plane of the optical disk substrate 1 is equal to that of the substrate holder 2 plane in consideration of the thickness of the spacer 8. The outside periphery of the optical disk substrate 1 is supported by means of an outside-peripheral supporting medium 5 and a screw 7 and fixed. The setting of the optical disk substrate 1 is carried out by the procedure consisting of a step of dropping the optical disk substrate 1 and the spacer 8 into the inside-peripheral supporting medium 4 in the order named, a step of screwing the above on the substrate holder 2 in the above state, and a step of attaching the outside-peripheral supporting medium 5 to the above.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention is a sputtering jig for optical discs, particularly for use in the production of optical disc media used as mass storage media for computers, and for forming recording films. The present invention relates to an optical disk sputtering jig used for sputtering.

[Conventional technology]

Conventional sputtering jigs for optical disks consist of a substrate holder,
It was configured to include an inner peripheral support and an outer peripheral support.

FIG. 2 is a longitudinal sectional view showing an example of the conventional technology.

In the optical disk sputtering jig shown in FIG. 2, the optical disk substrate 1 has a substrate setting hole 3 formed in the substrate holder 2' in order to facilitate substrate installation and reduce disturbance of the electric field at the edge.
' is set.

Further, the optical disc substrate 1 is supported and fixed to the substrate holder 2' by an inner peripheral support 4', an outer peripheral support 5, and screws 6' and 7.

Dust is an important problem in the manufacturing process of optical disk media.

Therefore, optical disk media are usually manufactured in a clean room comparable to that used for ICs and LSIs.

However, the generation of dust due to dust brought in by people or peeling off of a film attached to the inside of the film forming apparatus is unavoidable.

For example, if there is dust on the recording surface during film formation, the recording film will not be formed on that part, resulting in a fatal defect.

For this reason, consideration has been taken, such as performing N2 blowing again after mounting on the sputtering jig. Note that in optical disk media, writing and reading are normally performed from the surface opposite to the recording film surface (hereinafter referred to as the back surface), so ultimately dust must not adhere to the back surface.

[Problem to be solved by the invention]

However, in such conventional sputtering jigs for optical disks, the back side of the optical disk substrate is pressed against the substrate holder, so if there is relatively hard dust on the back side of the optical disk substrate when the board is attached, the dust may be pushed onto the back side of the optical disk substrate. As a result, the product is pushed in, resulting in the adhesion of solid dust that cannot be removed by subsequent N2 blowing, etc., which has the disadvantage of lowering the manufacturing yield.

[Means to solve the problem]

The optical disc sputtering jig of the present invention includes a substrate holder for setting an optical disc substrate, an inner peripheral support for supporting the inner periphery of the optical disc substrate, an outer peripheral support for supporting the outer periphery of the optical disc substrate, and the substrate holder. and a spacer having an outer diameter smaller than the diameter of the innermost periphery of the group, between the inner periphery support and the inner periphery support.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention.

In the optical disc sputtering jig shown in FIG. 1, an optical disc substrate 1 is supported and fixed to a substrate holder 2 on the inner peripheral side by an inner peripheral support 4 and screws 6 with a spacer 8 in between.

The inner diameter of the spacer 8 is approximately equal to the inner diameter of the optical disc substrate 1, and the outer diameter of the spacer 8 is set smaller than the diameter of the innermost periphery of the group. Therefore, even if dust is deposited on the back surface of the optical disc substrate 1, the part into which the dust is pushed is only the part that contacts the spacer 8, and the recording and reproducing characteristics are not affected at all.

The substrate setting hole 3 is formed so that the recording film surface of the optical disk substrate 1 is approximately the same as the surface of the substrate holder 2, taking into consideration the thickness of the spacer 8.

Furthermore, the outer periphery of the optical disc substrate 1 is supported and fixed by an outer periphery support 5 and screws 7.

The procedure for setting the optical disk substrate 1 using such an optical disk sputtering jig is to drop the optical disk substrate 1 and the spacer 8 into the inner peripheral support 4 in this order, screw them into the substrate holder 2 as they are, and then attach the outer peripheral support 5. Attach.

〔Effect of the invention〕

The sputtering jig for optical disks of the present invention has the effect of improving the yield by providing a spacer between the substrate holder and the optical disk substrate to prevent dust from firmly adhering to the back surface of the optical disk substrate.

[Brief explanation of the drawing]

FIG. 1 is a vertical cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view showing an example of the conventional technology. 1.1'...Optical disk board, 2,2'...Board holder, 3,3'...Board setting hole, 4
, 4'... Inner periphery support, 5... Outer periphery support, 6.6', 7... River/Screw, End... Spacer. Agent Patent Attorney Susumu Uchihara

Claims (1)

[Claims] a substrate holder having a substrate setting hole for setting an optical disk substrate; an inner circumference support that supports the inner circumference of the optical disk substrate; an outer circumference support that supports the outer circumference of the optical disk substrate; 1. A sputtering jig for an optical disc, comprising: a spacer provided between the circumferential support and a spacer.