JPH01278240A - Uninterruptible power source for apparatus for manufacture of semiconductor - Google Patents

Abstract

PURPOSE:To effectively supply a predetermined power to a secondary side by comparing an output voltage with a preset value, and generating an alarm when the voltage is the set value or less. CONSTITUTION:A voltage comparator 3 compares a voltage from an external power source 6 with the voltage of a power source 2, supplies the output voltage of a high voltage side to a secondary side while monitoring it, and always holds a predetermined secondary side voltage even at the time of the momentary stop of the power source 6. When the power source 6 is interrupted due to a power interruption, the power source is switched to the internal power source 2 and supplied to the secondary side. When the secondary side load is increased due to the voltage drop of the power source 2 or any cause so that the drop of the secondary side voltage from the set value is detected, a signal is fed to an alarm driver 5. Thus, the driver 5 is operated, an alarm lamp 8 is lit, and an alarm unit 7 generates an alarm of voice.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention can be applied to semiconductor manufacturing equipment such as diffusion equipment and low-pressure CVD equipment. Regarding power supply.

[Prior Art] Semiconductor manufacturing equipment such as diffusion equipment and low-pressure CVD equipment usually has
It is equipped with a small computer for setting conditions, automatic control, etc., and these small computers use a normal 100V power supply.
Alternatively, a 200V AC power source converted to DC is used.

However, these regular power sources are not only at risk of power outages;
Power outages, known as instantaneous power outages, occur frequently in the order of a few tenths of a second. Therefore, in order to avoid such a power outage situation,
Conventionally, uninterruptible power supplies have been used for power backup. This kind of uninterruptible power supply is ffi as shown in Figure 2.
The voltage comparator circuit 3 includes a source section 2' and a voltage comparator circuit 3'.
' is the voltage from the external power supply 6 and f4. It is configured to compare the voltage of the power source 2'' and supply the power with the higher voltage to the secondary side, so that even if there is a power outage of the external power supply, the specified power can always be supplied to the secondary side. There is.

[Problems to be solved by the invention] By the way, in such conventional uninterruptible power supplies, when the voltage decreases due to changes over time in the built-in power supply (fl! pond), the voltage on the secondary side also decreases. In other words, the power supplied to electronic equipment such as small computers that use this power supply decreases, and these electronic equipment cannot operate normally. There is also the possibility that this may have an impact on the environment, leading to a decrease in yield and work efficiency. In addition, even if the voltage on the negative side is normal, the load on the secondary side increases for some reason, the voltage on the secondary side decreases, and electronic equipment in use may not operate properly. For example, in the case of plasma CVD, if the plasma generation voltage fluctuates, plasma generation stops and the desired film thickness cannot be obtained.

Conventionally, there are devices that display the voltage of the built-in power supply using a built-in voltmeter, but these require the operator to constantly check the display, making them unsuitable for the semiconductor manufacturing sector, where many processes are unmanned. . Furthermore, if the voltage drops due to a cause on the secondary side, it cannot be dealt with.

The present invention solves these conventional problems and provides an uninterrupted [f! ! The purpose is to provide a source.

[Means for Solving the Problems] The uninterruptible power supply of the present invention that achieves the above object has an external 1! !
The higher output voltage of the power source and the internal power source is output as the power source of the semiconductor manufacturing equipment, and this output voltage is compared with a preset value, and an alarm is issued when the output voltage is less than the preset value. .

[Function] By detecting the secondary side output, it is possible to detect either a voltage drop in the built-in power supply or an increase in the load on the secondary side and issue an alarm. Since the alarm can be detected by the operator even in the case of remote control, the operator can quickly check the power supply or other issues by using the alarm, and can also prevent errors in judgment due to malfunction of electronic equipment. can.

[Embodiments] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

As shown in FIG. 1, an uninterruptible power supply 1 includes an internal source 2, a voltage comparator circuit 3. It consists of a voltage determination circuit 4 that determines whether the output voltage of this circuit 3 is within a predetermined tolerance, and an alarm drive circuit 5 that outputs a signal based on the determination of this circuit 4.

The internal type g2 is a power source capable of supplying approximately the same amount of power as the external power source 6, and is composed of a battery such as a secondary battery. The voltage comparison circuit 3 compares the voltage (minus voltage) from the external power supply circuit 6 and the voltage of the power supply section 2, and outputs the power of the higher voltage to a predetermined electric circuit system, that is, a secondary tooth. The voltage determination circuit 4 is.

Compare the voltage on the secondary side with a preset value (for example, a value set to about 90% of the maximum voltage on the secondary side), and when the secondary side voltage falls below the set value, an alarm signal is activated. The signal is sent to circuit 5. The alarm drive circuit 5 is activated by a signal from the voltage determination circuit 4.

A warning device such as an audio alarm 7, a warning lamp 8, etc. is activated. Drive power for the alarm drive circuit 5 can be supplied by the power supply section 2.

The operation in the above configuration will be explained.

In normal operating conditions, the voltage comparison circuit 3 monitors the voltage from the external power supply 6 by comparing it with the voltage of the power supply section 2, and supplies the output voltage on the high voltage side to the secondary side. A predetermined secondary voltage is always maintained even during momentary power outages.

Further, when the power supply from the external power supply 6 is cut off due to a power outage, the a source is automatically switched to the internal power supply 2 and supplied to the secondary side. This secondary side output is used in semiconductor manufacturing equipment such as C
It is connected as a drive source for electric circuit systems such as control circuits for VD, etching equipment, heat treatment furnaces, ion implantation equipment, and sputtering equipment. At this time, the current determination circuit 4 constantly monitors the secondary side voltage by comparing it with a preset value.

When it detects that the secondary voltage has fallen below the set value due to a drop in the voltage of the internal power supply 2 or an increase in the load on the secondary side for some reason, a signal is sent to the alarm drive circuit 5.
Send to. This activates the alarm drive circuit 5, which lights up the alarm lamp 8 and issues an audible alarm, for example.

Based on these alarms, the operator should replace the battery of the internal power supply 2,
It is possible to promptly inspect the equipment used on the secondary side. Prepare a spare battery for power supply 2, display a warning lamp, and switch to this spare battery.
Needless to say, by replacing the battery, the semiconductor manufacturing process can be continued without interruption.

[Effects of the Invention] As is clear from the above description, according to the present invention, stability of the processing period is extremely important for improving yield in semiconductor manufacturing equipment.

Since the operator can quickly know the voltage drop of various devices, it is possible to prevent further voltage drop and the adverse effects associated with the voltage drop, and to reliably supply a predetermined amount of power to these devices. Furthermore, even if an accident occurs on the secondary side, although it is rare, it can be dealt with promptly.

[Brief explanation of the drawing]

Fig. 1 is a diagram showing an embodiment of the uninterruptible m power supply of the present invention;
The figure shows a conventional uninterruptible W1 power supply. 1...... Uninterruptible power supply 2... Internal power supply 3... Voltage comparison circuit 4... Voltage judgment circuit 5...・Police I! l Beating circuit 6...External power supply 7...Alarm device 8...Alarm lamp agent Patent attorney Moritani -O

Claims (1)

[Claims] For semiconductor manufacturing equipment, which outputs the higher output voltage of an external power supply and an internal power supply as a power supply for semiconductor manufacturing equipment, compares this output voltage with a preset value, and issues an alarm when the output voltage is less than the set value. Uninterruptible power supply.