JPH01272921A - Flow rate converting device - Google Patents

Flow rate converting device

Info

Publication number
JPH01272921A
JPH01272921A JP63103641A JP10364188A JPH01272921A JP H01272921 A JPH01272921 A JP H01272921A JP 63103641 A JP63103641 A JP 63103641A JP 10364188 A JP10364188 A JP 10364188A JP H01272921 A JPH01272921 A JP H01272921A
Authority
JP
Japan
Prior art keywords
hole
pressure receiving
receiving plate
flow
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63103641A
Other languages
Japanese (ja)
Other versions
JPH0512646B2 (en
Inventor
Yoshifumi Uchiyama
義史 内山
Atsushi Tsuchiya
篤 土屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cosmo Instruments Co Ltd
Original Assignee
Cosmo Instruments Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cosmo Instruments Co Ltd filed Critical Cosmo Instruments Co Ltd
Priority to JP63103641A priority Critical patent/JPH01272921A/en
Publication of JPH01272921A publication Critical patent/JPH01272921A/en
Publication of JPH0512646B2 publication Critical patent/JPH0512646B2/ja
Granted legal-status Critical Current

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  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)

Abstract

PURPOSE:To remove the vibration of a cantilever type pressure receiving plate and to take a measurement stably in any flow rate range by providing a laminar flow plate which has many capillaries on the downstream side of the pressure receiving plate. CONSTITUTION:A main body 5 has a wall 7 in the center, through holes 8A and 8B constituting by-passes on both sides of the wall 7, and a though hole 9 for measurement penetrating the wall 7. The through hole 9 is in a slit shape and the cantilever type pressure receiving plate 11 is provided on its downstream side. The pressure receiving plate 11 is composed of a spring material made of a magnetic body and its displacement quantity is detected by a detection coil 12. The through holes having many capillaries communicated with the through holes 8A and 8B are formed in the flat laminar flow plate 6 provided on the downstream side of the main body 5 and a hole 16 is formed on the downstream side of the through hole 9. Then fluid is made laminar by flowing through the capillaries and no vortex is generated, so the flow rate is transduced into an electric signal stably without vibrating the pressure receiving plate 11.

Description

【発明の詳細な説明】 「産業上の利用分野」 この発明は例えば空気等の気体の流量を測定することに
用いる流量変換装置に関する。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a flow rate conversion device used for measuring the flow rate of a gas such as air.

「従来の技術」 本出願人は「特願昭61−6958号及び特願昭62−
.91548号」(二よって片持梁形の受圧板を用いた
流量変換装置を提案した。特願昭62−91548号は
片持梁形の受圧板(二上って流体の流量を測定する構造
に加えて流体の流路Cニバイパス路を設け、このバイパ
ス路に片持梁形の弁を設けて可変オリフィス構造とし、
流体の流量に応じてバイパス路を流れる流体の量を制御
させ、低流量域から大流量域までの測定レンジを広くで
きる構造とし、更に測定レンジの変更をバイパス路の直
径を変更するだけで行なうことができる構造とした点を
特徴とするものである。
“Prior Art” The applicant has submitted “Japanese Patent Application No. 61-6958 and Japanese Patent Application No. 62-
.. No. 91548 (2) Therefore, a flow rate conversion device using a cantilever-shaped pressure receiving plate was proposed. In addition, a fluid flow path C double bypass path is provided, and a cantilever-shaped valve is provided in this bypass path to create a variable orifice structure.
The structure controls the amount of fluid flowing through the bypass path according to the fluid flow rate, allowing a wide measurement range from low flow areas to large flow areas, and the measurement range can be changed simply by changing the diameter of the bypass path. It is characterized by a structure that allows it to

「発明が解決しようとする課題」 先に提案した流量変換器はバイパス路(二片持梁形弁を
設けた構造としたから、この弁が流体の流れに応じて振
動することがあり、この弁の振動が被測定流体を振動さ
せ、この振動が測定用の片持梁形受圧仮に伝わり安定な
測定を行なうことができない現象が発生する欠点がある
``Problem to be Solved by the Invention'' The previously proposed flow rate converter had a structure with a bypass path (two cantilever valves), so this valve could vibrate in response to the flow of fluid. There is a drawback that the vibration of the valve causes the fluid to be measured to vibrate, and this vibration is transmitted to the measuring cantilever pressure-receiving pressure, making it impossible to perform stable measurements.

この発明の目的はバイパス路における弁の振動を除去し
、どの流量域でも安定した測定を行なうことができる流
量変換装置を提供するにある。
An object of the present invention is to provide a flow rate conversion device that can eliminate valve vibration in a bypass path and perform stable measurements in any flow rate range.

「課題を解決するための手段」 この発明では被測定流体が流れる流路に測定用孔とバイ
パス用孔を設けると共に、測定用孔の下流側にこの孔を
通過した流体が板面にほぼ直交する向(−当るように配
置した片持梁形受圧板な設け、バイパス用孔(二流体の
aLれを層流化する細管を多数装着した構成としたもの
である。
"Means for Solving the Problem" In this invention, a measurement hole and a bypass hole are provided in the flow path through which the fluid to be measured flows, and the fluid that has passed through the hole is placed downstream of the measurement hole so that the fluid passes approximately perpendicularly to the plate surface. It has a configuration in which a cantilever-shaped pressure receiving plate is arranged so as to be in the opposite direction, and a large number of bypass holes (to make the aL flow of the two fluids into a laminar flow) are installed.

この発明の構成によればバイパス路を構成する孔を通過
する流体は多数の細管を通じて層流化されて流れる。こ
の層流は流計が小流量から大流量に至る広い範囲にわた
って維持されるため、流体の流れに振動か発生すること
がない。
According to the configuration of the present invention, the fluid passing through the holes constituting the bypass path flows in a laminar flow through a large number of thin tubes. This laminar flow is maintained over a wide range from small flow rates to large flow rates, so no vibrations occur in the fluid flow.

よって小流量から大流量に至る広い範囲にわたって安定
に測定を行なうことができるth量変換装置を得ること
ができる。
Therefore, it is possible to obtain a th quantity converting device that can stably perform measurements over a wide range from small flow rates to large flow rates.

「実施例」 第1図乃至第4図にこの発明の一実施例を示す。"Example" An embodiment of the present invention is shown in FIGS. 1 to 4.

第] IJ+において1は被測定流体の流入口、2は被
測定流体の流出口を示し、被測定流体(気体)は矢印X
方向に流れる。
In IJ+, 1 indicates the inlet of the fluid to be measured, 2 indicates the outlet of the fluid to be measured, and the fluid to be measured (gas) is indicated by the arrow X.
flow in the direction.

3及び4は配管接続具、5は流量変換器本体、6は層流
プレートを示す。
3 and 4 are piping connectors, 5 is a flow rate converter main body, and 6 is a laminar flow plate.

流計変換器本体5は第2図に示すよう(二中夫に壁7を
有し、壁7の両側にバイパス路を構成する一対の三ケ月
状の透孔8A、8Bが形成され、壁7を貫通して測定用
透孔9が形成される。
As shown in FIG. 2, the flowmeter converter main body 5 has a wall 7 at the second center, and a pair of crescent-shaped through holes 8A and 8B forming a bypass path are formed on both sides of the wall 7. A measuring through hole 9 is formed through the.

測定用透孔9はヌリノト状とされ、この透孔9の下流側
に片持梁形受圧板11が設けられる。この片持梁形受圧
板11は磁性体から成るバネ祠によって形1戊され、そ
の偏位量は検出コイル12によって検出される。尚受圧
板11の他方の遊端側には補償コイル13が配置され、
温度補償が行なえるようにしている。また14は受圧板
11を1呆護するヌトノパープレートを示す。
The measurement through-hole 9 is shaped like a thread, and a cantilever-shaped pressure receiving plate 11 is provided on the downstream side of the through-hole 9 . This cantilever-shaped pressure receiving plate 11 is shaped by a spring sheath made of a magnetic material, and the amount of displacement thereof is detected by a detection coil 12. A compensation coil 13 is arranged on the other free end side of the pressure receiving plate 11,
Temperature compensation is possible. Further, numeral 14 indicates a nutoper plate that protects the pressure receiving plate 11.

この発明の特徴とする構造は層流プレート6にある。層
流プレート6は第3図に示すように全体が平板状(−形
成され、この平板状の層流プレート6にバイパス用孔8
A、8B+二連通する六角形状の透孔15Aと15Bを
形成する。また流量変換器本体5に設けた測定用透孔9
の下流側に孔16を形成する。
The characteristic structure of this invention is the laminar flow plate 6. As shown in FIG.
A, 8B+Two communicating hexagonal through holes 15A and 15B are formed. In addition, the measurement through hole 9 provided in the flow rate converter main body 5
A hole 16 is formed on the downstream side of the hole 16 .

バイパス路を構成する透孔15A、15Bには流体の流
れを層流化するために多数の細管18を装着する。細管
18の直径は例えば1鵡程度とされる。この細管18を
流体が流れることによって流体の流れは層流化される。
A large number of thin tubes 18 are attached to the through holes 15A and 15B constituting the bypass passage in order to make the flow of fluid laminar. The diameter of the thin tube 18 is, for example, approximately one centimeter. As the fluid flows through this thin tube 18, the fluid flow becomes laminar.

透孔]、 5 A 、 15 Bはそれぞれ六角形状と
した場合を示す。このように六角形状とすることによっ
て直径の小さい細管を安定(二収納させることができる
。つまり多数の管を束ねると、束ねた管の外周は自然に
六角形状(二なる。このため(皿孔15Aと15Bを六
角形に選定したものである。
The through holes], 5A, and 15B each have a hexagonal shape. This hexagonal shape allows thin tubes with small diameters to be stored stably.In other words, when many tubes are bundled, the outer periphery of the bundled tubes naturally becomes hexagonal. 15A and 15B are selected to be hexagonal.

「発明の効果」 思」−説明し定ようにこの発明によればバイパス路に多
数の細管18を設け、バイパスする流体は全てこの細管
18を通過する。流体が細W18を流れることによって
流体の流れは層流化され渦等の発生が抑えられ、流体が
振動することはない。
``Effects of the Invention'' As explained above, according to the present invention, a large number of thin tubes 18 are provided in the bypass path, and all the fluid to be bypassed passes through the thin tubes 18. As the fluid flows through the narrow W18, the flow of the fluid becomes laminar, the generation of vortices, etc. is suppressed, and the fluid does not vibrate.

よって受圧板11が振動することがなく安定に流量を電
気信号に変換することができる。
Therefore, the flow rate can be stably converted into an electrical signal without causing the pressure receiving plate 11 to vibrate.

然もこの発明によれば層流プレートの層流化動作は低流
量域ぶら大流量域(−至る広い範囲にわたって作用する
から、広い範囲(二わたって流量測定が可能な流量変換
器を提供することができる。
However, according to this invention, the laminar flow operation of the laminar flow plate acts over a wide range from low flow range to high flow range (-), so it is possible to provide a flow rate transducer that can measure flow rate over a wide range (2). be able to.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例を説明するための断面図、
第2図はこの発明に用いた流量変換器本体の構造を説明
するための斜視図、第3図はこの発明に用いた層流プレ
ートの構造を説明するための斜視図、第4図は流量変換
器本体の要部の構造を説明するための拡大断面図である
。 1:被測定流体の流入口、2:出口、5:流量変換器本
体、6:層流プレート、7:壁、8A。 8B=バイパス用孔、9:測定用孔、11:片持梁形受
圧板、12:検出コイル、18:細管。 特許出願人  株式会社コスモ計器 代  理  人   草   野      卓へ  
                       N1
手続補正吉: (自  発  ) 1、事件の表示  特願昭63−103641号2、発
明の名称  流量変換装置 3、補正をする老 事件との関係   特許出願人株式
会社 二1スモΔ]器 4、代 理 人  東京都新宿区新宿四丁目2番21号
相模ヒル (’n:h  03−350−6156)5
、補正の対象  明細書中発明の詳細な説明の欄お、J
−び図面 ンス補償」と訂正する。 (2)明細書5頁6行「細管18の直径は例えばl m
m 」を「細管18の内径は例えば(1,5mm 」と
aj止−Jる。 (3)図面第1図乃至第4図を添付図に訂正する。 以  」ニ
FIG. 1 is a sectional view for explaining one embodiment of the present invention;
Fig. 2 is a perspective view for explaining the structure of the flow converter main body used in this invention, Fig. 3 is a perspective view for explaining the structure of the laminar flow plate used in this invention, and Fig. 4 is a perspective view for explaining the structure of the flow rate converter body used in this invention. FIG. 3 is an enlarged sectional view for explaining the structure of the main part of the converter main body. 1: Inlet of measured fluid, 2: Outlet, 5: Flow rate converter main body, 6: Laminar flow plate, 7: Wall, 8A. 8B = bypass hole, 9: measurement hole, 11: cantilever pressure receiving plate, 12: detection coil, 18: thin tube. Patent applicant: Cosmo Keiki Co., Ltd. Managing Director: Taku Kusano
N1
Procedural amendments: (spontaneous) 1. Indication of the case Japanese Patent Application No. 63-103641 2. Name of the invention Flow rate conversion device 3. Relation to the case Patent applicant Co., Ltd. 21 Smo Δ] device 4 , Agent Sagami Hill, 4-2-21 Shinjuku, Shinjuku-ku, Tokyo ('n:h 03-350-6156) 5
, Subject of amendment Detailed explanation column of the invention in the specification O, J
- and drawing performance compensation.” (2) Page 5, line 6 of the specification “The diameter of the thin tube 18 is, for example, l m.
For example, the inner diameter of the thin tube 18 is (1.5 mm). (3) Figures 1 to 4 are corrected to the attached drawings.

Claims (1)

【特許請求の範囲】[Claims] (1)A、被測定流体が流れる流路に設けた測定用孔及
びバイパス用孔と、 B、上記測定用孔の下流側に設けられ、透孔を通過した
流体が板面にほぼ直交する向に当るように配置した片持
梁形受圧板と、 C、この受圧板の変位量を測定する変位検出器と、 D、上記バイパス用孔に装着され、この透孔を通過する
流体の流れを層流化する複数の細管と、 によって構成した流量変換装置。
(1) A: A measurement hole and a bypass hole provided in the channel through which the fluid to be measured flows; B: A measurement hole and a bypass hole provided on the downstream side of the measurement hole, so that the fluid passing through the through hole is almost perpendicular to the plate surface. C. A displacement detector for measuring the amount of displacement of this pressure receiving plate; D. A displacement detector installed in the above-mentioned bypass hole to detect the flow of fluid passing through the through hole. A flow rate conversion device consisting of multiple thin tubes that convert the flow into laminar flow.
JP63103641A 1988-04-25 1988-04-25 Flow rate converting device Granted JPH01272921A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63103641A JPH01272921A (en) 1988-04-25 1988-04-25 Flow rate converting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63103641A JPH01272921A (en) 1988-04-25 1988-04-25 Flow rate converting device

Publications (2)

Publication Number Publication Date
JPH01272921A true JPH01272921A (en) 1989-10-31
JPH0512646B2 JPH0512646B2 (en) 1993-02-18

Family

ID=14359394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63103641A Granted JPH01272921A (en) 1988-04-25 1988-04-25 Flow rate converting device

Country Status (1)

Country Link
JP (1) JPH01272921A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49148075U (en) * 1973-04-20 1974-12-20
JPS5283254A (en) * 1975-12-30 1977-07-12 Tokyo Keiso Kk Flowmeter
JPS5954926A (en) * 1982-09-22 1984-03-29 Esutetsuku:Kk Manufacture of laminar flow element
JPS6014121A (en) * 1983-07-05 1985-01-24 Esutetsuku:Kk Laminar flow element
JPS62165121A (en) * 1986-01-16 1987-07-21 Cosmo Keiki:Kk Flow rate conversion device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49148075U (en) * 1973-04-20 1974-12-20
JPS5283254A (en) * 1975-12-30 1977-07-12 Tokyo Keiso Kk Flowmeter
JPS5954926A (en) * 1982-09-22 1984-03-29 Esutetsuku:Kk Manufacture of laminar flow element
JPS6014121A (en) * 1983-07-05 1985-01-24 Esutetsuku:Kk Laminar flow element
JPS62165121A (en) * 1986-01-16 1987-07-21 Cosmo Keiki:Kk Flow rate conversion device

Also Published As

Publication number Publication date
JPH0512646B2 (en) 1993-02-18

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