JPH01271477A - Abrasive grain and its production - Google Patents
Abrasive grain and its productionInfo
- Publication number
- JPH01271477A JPH01271477A JP63098299A JP9829988A JPH01271477A JP H01271477 A JPH01271477 A JP H01271477A JP 63098299 A JP63098299 A JP 63098299A JP 9829988 A JP9829988 A JP 9829988A JP H01271477 A JPH01271477 A JP H01271477A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- abrasive grains
- silica
- heat treatment
- abrasive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000006061 abrasive grain Substances 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 49
- 239000002245 particle Substances 0.000 claims abstract description 32
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 238000000926 separation method Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 11
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 230000037303 wrinkles Effects 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims 1
- 238000011282 treatment Methods 0.000 claims 1
- 239000011230 binding agent Substances 0.000 abstract description 10
- 238000010292 electrical insulation Methods 0.000 abstract description 10
- 229910052681 coesite Inorganic materials 0.000 abstract description 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 4
- 229910052682 stishovite Inorganic materials 0.000 abstract description 4
- 229910052905 tridymite Inorganic materials 0.000 abstract description 4
- 238000010791 quenching Methods 0.000 abstract description 3
- 230000000171 quenching effect Effects 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 239000010408 film Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000008119 colloidal silica Substances 0.000 description 6
- 229910052582 BN Inorganic materials 0.000 description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 239000003082 abrasive agent Substances 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229930014626 natural product Natural products 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- PAAZPARNPHGIKF-UHFFFAOYSA-N 1,2-dibromoethane Chemical compound BrCCBr PAAZPARNPHGIKF-UHFFFAOYSA-N 0.000 description 1
- 229920001875 Ebonite Polymers 0.000 description 1
- 229910020219 SiOw Inorganic materials 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 229910021418 black silicon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000002087 whitening effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野J
本発明は、表面特性を改良した新規な研磨材粒子に関す
る。さらに詳しくは表面に亀甲状のシリカの薄膜で被覆
された研磨材粒子に関し、種々の結合剤との親和性が高
く、かつ電気絶縁性に優れているため電着砥石に使用す
るには特に好適な研磨材粒子に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application J] The present invention relates to novel abrasive particles with improved surface properties. More specifically, it relates to abrasive particles whose surfaces are coated with a thin film of tortoiseshell silica, which has a high affinity with various binders and excellent electrical insulation properties, making them particularly suitable for use in electroplated grindstones. relating to abrasive particles.
[従来の技術]
物質のカタサの大きい鉱物を利用して、ものを削りまた
は摩耗させる作業をするための材料として研磨材かあり
、初めの内は天然品を利用していたが、N近はこのカタ
サを求めてその大部分が人工の物質を利用する様になっ
て来た。(本願に右いては研削と研磨の両者を研磨と称
す、)この開発された物質中には天然品を高純度にした
もの或は天然にない立方晶形窒化硼素(以下CBNと称
す、)など優れたカタサ、靭性を有する研磨材が提供さ
れる様になった。[Prior art] Abrasive materials are used as materials for scraping or abrading objects by using minerals with large lumps, and at first natural products were used, but in N. In search of this katata, most of the materials have come to be made of man-made materials. (In this application, both grinding and polishing are referred to as polishing.) The developed materials include highly purified natural products and non-natural cubic boron nitride (hereinafter referred to as CBN). Abrasives with excellent flatness and toughness are now available.
しかし粒子がいかに優れていても、粒子を結合して製造
される研磨工具の品質は、達成される結合強度に大部分
依存する。つまり研磨粒子の卓越性が研磨工具に発現す
るには、粒子が適所に強固に保持されることがきわめて
重要であり、これは当然高い結合強度が要求される。事
実、研磨粒子が固く、したがって耐久性があればあるほ
ど、結合強度への要求は大となる。つまり極度の硬さが
存在する際には、粒子は破砕または摩耗する傾向をほと
んどもたないので、研削の間の苛酷な力の下でその結合
から引き離れる傾向が大となるからである。したがって
研磨材粒子は、硬さの最大利益を達成させようとする際
には粒子と結合剤間の結合強度を高度に要求する。However, no matter how good the particles are, the quality of the abrasive tool produced by bonding the particles depends in large part on the bond strength achieved. In other words, for the quality of the abrasive particles to be expressed in the abrasive tool, it is extremely important that the particles are firmly held in place, which naturally requires high bond strength. In fact, the harder and therefore more durable the abrasive particles, the greater the demands on bond strength. That is, when extreme hardness is present, the particles have less tendency to fracture or abrade and therefore have a greater tendency to pull away from their bonds under the severe forces during grinding. Abrasive particles therefore require a high degree of bond strength between the particles and the binder in order to achieve maximum benefits in hardness.
このため、例えばCBNについていえば、その結合剤と
の親和性を改善する目的で、先ず砥粒を空気中で775
℃の条件で熱処理して表面にB。For this reason, for example, in the case of CBN, in order to improve its affinity with the binder, the abrasive grains are first heated at 775°C in the air.
B on the surface by heat treatment at ℃ conditions.
03IIIをつくり、さらにオルガノシリコン化合物溶
液に浸してから約500℃で加熱して表面にほうけい酸
液膜をつくる方法(特公昭48−23589)がある。There is a method (Japanese Patent Publication No. 48-23589) in which 03III is prepared, further immersed in an organosilicon compound solution, and then heated at about 500°C to form a borosilicate liquid film on the surface.
また、金属硼素を含有するため電気絶縁性が低下した立
方晶窒化硼素砥粒を酸処理して表面の硼素を除去し、絶
縁性を付与する方法(特開昭57−149811)が知
られている。Additionally, there is a known method (Japanese Patent Application Laid-Open No. 149811/1983) in which cubic boron nitride abrasive grains, which contain metallic boron and have reduced electrical insulation properties, are treated with acid to remove the boron on the surface and impart insulation properties. There is.
一方、多数の凹孔な設けた金属被覆の研磨粒子の提案(
特開昭59−30671)がある。On the other hand, a proposal for metal-coated abrasive particles with a large number of concave holes (
JP-A-59-30671).
これとは別に本発明者等は、S i −5iO□系の圧
粉体を真空加熱することにより、表面にSiOx(2≧
χ≧0)の薄膜で被覆された砥粒を提案(特願昭63−
以下先願と称す)した。Separately, the present inventors vacuum-heated an Si-5iO□-based green compact to form SiOx (2≧
Proposed abrasive grains coated with a thin film of χ≧0 (Patent application 1986-
(hereinafter referred to as the "first application").
しかし、前述の特公昭48−23589の発明は、CB
N以外の砥粒については応用できず、また砥粒を二回熱
処理することは砥粒強度の低下を来し、経済的観点から
も好ましくない、特開昭57−149811についても
、適用が酸可溶酸 ′分が含有されている砥粒に限定
される。特開昭59−30671の発明は、金属被覆研
磨砥粒に限定され、この砥粒は電着砥石には使用できな
い、したがって、先願においてこれらの問題点のない、
すべての結合剤に適応できる研磨剤粒子ならびに研磨材
粒子の種類上よび結合剤の種類に制限を受けない研磨材
粒子の製造法の提案をなした。However, the invention of the aforementioned Japanese Patent Publication No. 48-23589, CB
JP-A-57-149811 cannot be applied to abrasive grains other than N, and heat-treating the abrasive grains twice reduces the strength of the abrasive grains, which is undesirable from an economic point of view. It is limited to abrasive grains that contain soluble acid content. The invention of JP-A-59-30671 is limited to metal-coated abrasive grains, and these abrasive grains cannot be used in electrodeposited grindstones. Therefore, the invention in the earlier application does not have these problems.
We have proposed an abrasive particle that can be applied to all types of binders and a method for producing abrasive particles that is not limited by the type of abrasive particle or binder.
L発明が解決しようとするff1ll
前記先願において得られるSiOx(2≧χ≧0)II
Iの厚さはおおよそ0.1μ程度である。結合剤との親
和性のみを問題とする場合にはこれで十分であるが、さ
らに結合体としての強度を向上させるためには表面を!
M雑な形状とすることが好ましい。ff1ll that the L invention seeks to solve SiOx (2≧χ≧0) II obtained in the previous application
The thickness of I is approximately 0.1 μm. This is sufficient if the only issue is affinity with the binder, but in order to further improve the strength of the binder, the surface!
It is preferable to have a rough shape.
一方、電着砥石を電解法によってつくる場合においては
、SiOx(2≧χ≧0)膜の厚さはおおよそ膜の耐電
圧はio’V/c園程度であるので蒸着法のみで十分で
あるが、蒸着膜の場合局部的に<0.1μとなることも
ありうるので、さらにこの上にもう一層の絶縁皮膜を付
けてあくことが好ましい。On the other hand, when making an electrodeposited grindstone by the electrolytic method, the thickness of the SiOx (2≧χ≧0) film is approximately the same, and the withstand voltage of the film is about io'V/c, so the vapor deposition method alone is sufficient. However, in the case of a vapor-deposited film, the thickness may locally become <0.1 μm, so it is preferable to further coat another insulating film on top of this.
また、単一層であれば、膜厚は最低の部分で0.1μ以
上としておくことが好ましい。Moreover, if it is a single layer, it is preferable that the film thickness is 0.1 micrometer or more at the lowest part.
[課題を解決するための手段]
前記先願で述べた如く、SiO2は研磨材粒子の結合剤
との親和性が良く、かつ高い電気絶縁性を有する。[Means for Solving the Problems] As stated in the previous application, SiO2 has good affinity with the binder of the abrasive particles and has high electrical insulation properties.
これを塗布することにより、物品の表面にSi Oを皮
膜を作るのに適切な材料としてコロイダルシリカ(セラ
ミック赳[4]、28G+’851)が市販されており
、これを塗布剤として用いた場合、塗膜の基材への密着
性がよ(、丈夫であり、透明であるため、基材が本来持
っている色合や、透明度が損なわれない等の優れた特徴
を有する。Colloidal silica (Ceramic 赳[4], 28G+'851) is commercially available as a suitable material for forming a SiO film on the surface of an article by coating it, and when this is used as a coating agent, It has excellent characteristics such as good adhesion of the coating film to the base material, strong and transparent properties, and the inherent color and transparency of the base material are not impaired.
しかし、これを細粒状の集合体である砥粒の被覆に適用
することは一般に困難であり、細粒への塗布方法、5i
nsのみからなる細粒の混入していない砥粒の取得方法
などがきわめて重要な問題となってくる。However, it is generally difficult to apply this to coating abrasive grains, which are aggregates of fine grains.
A very important issue is how to obtain abrasive grains made only of ns and not mixed with fine grains.
本発明に右いてはこれを次のごとく解決した。The present invention solves this problem as follows.
つまり、研削砥粒をコロイダルシリカ(21!度には特
に制限がない、市販品の約20%溶液またはそれを適宜
稀釈して用いる。)中へ分散させ、ついでこの分散体を
蒸発乾固して水分を完全に除去した後、ほぼもとの砥粒
の粒度まで解砕し、シリカの単独粒子を重液分畦法によ
って除去する。That is, grinding abrasive grains are dispersed in colloidal silica (21 degrees Celsius is not particularly limited; use a commercially available approximately 20% solution or appropriate dilution thereof), and then this dispersion is evaporated to dryness. After completely removing moisture, the abrasive is crushed to approximately the original particle size, and single particles of silica are removed by a heavy liquid separation method.
以上により複雑な形状を有するシリカを付着した砥粒が
得られるわけであるが、電気絶縁性を問題とする場合に
は、更に熱処理することが好ましい、熱処理温度は30
0℃の如く比較的低温から効果はでるが、十分な電気絶
縁性を得るためには700℃以上が必要である。しかし
、1100℃を越えた高温熱処理はSiO□被覆の強度
が劣化するので強度を要しないとぎ以外は避けるべきで
ある。Through the above steps, abrasive grains with silica attached having a complicated shape can be obtained, but if electrical insulation is an issue, it is preferable to further heat treat the abrasive grains.The heat treatment temperature is 30°C.
Although it is effective at a relatively low temperature such as 0°C, a temperature of 700°C or higher is required to obtain sufficient electrical insulation. However, high-temperature heat treatment exceeding 1100° C. deteriorates the strength of the SiO□ coating, so it should be avoided except for sharpening that does not require strength.
尚、シリカゾル処理済の乾燥砥粒は、熱処理後解砕1重
液分離してもほぼ同様の品質の砥粒が得られる。It should be noted that dry abrasive grains that have been treated with silica sol can be crushed and separated from a heavy liquid after heat treatment to obtain abrasive grains of almost the same quality.
この後、直ちに大気中で急冷するとSi Owの結晶化
が防止でき、ガラス状のS i Ov−被覆された砥・
粒を(することが出来る。Immediately after this, quenching in the atmosphere can prevent the crystallization of SiOw, resulting in a glassy SiOv-coated abrasive.
grains (can be)
砥粒が本質的に疎水性の場合には、界面活性剤の添加に
よって、これを克服することができるが、あらかじめS
iと5iOzの圧粉体の真空然着法によってSiOx(
2≧χ≧0)の皮膜(後酸化したものも含む)をつけて
から本発明方法を適用すれば、強く接着したS i O
w被覆のある砥粒が得られる。特に、真空蒸着法の被覆
と異なって本発明方法によって得らhる砥粒の皮膜は1
表面に割れ目またはシワが多く、また砥粒の形状も解砕
による凹凸の多い破砕面を有するものであって、ボンド
との結合性を機械的な面から一層高めな砥粒である。If the abrasive grains are hydrophobic in nature, this can be overcome by the addition of surfactants, but S
SiOx (
2≧χ≧0) If the method of the present invention is applied after applying a film (including post-oxidized films), strongly bonded S i O
W-coated abrasive grains are obtained. In particular, unlike the vacuum deposition method, the abrasive grain coating obtained by the method of the present invention is
The abrasive grains have many cracks or wrinkles on the surface, and the shape of the abrasive grains has a fractured surface with many irregularities due to crushing, and the abrasive grains have even higher bondability with the bond from a mechanical point of view.
さらに本発明方法によるとき、蒸着法に比し。Furthermore, when using the method of the present invention, compared to the vapor deposition method.
数倍〜数十倍の厚みのあるS i Oz皮膜の砥粒を得
ることが出来る。It is possible to obtain abrasive grains with a SiOz coating several times to several tens of times thicker.
[作 用]
シリカゾルは10mμオーダーのシリカの微粒子が水中
に分散したものであり、含有されるシリカは微粒子であ
るためその比表面積は30〜500 m ” / gと
非常に大きく、他物質の表面に吸着されやすいものと推
定される。被覆されるべき物質が疎水性等の理由でこの
シリカが吸着されにくい場合にはSiOx(2≧χ≧0
)を蒸着することにより、SiOx(2≧χ≧0)が中
立ち〔ボンディング・コート〕となって吸着が促進され
る。[Function] Silica sol is made up of fine particles of silica on the order of 10 mμ dispersed in water.Since the silica contained is fine particles, its specific surface area is extremely large, 30 to 500 m''/g, and the surface of other substances is very large. It is estimated that silica is easily adsorbed to SiOx (2≧χ≧0
), SiOx (2≧χ≧0) becomes neutral [bonding coat] and adsorption is promoted.
次に被覆されたシリカは乾燥によってその微粒子間に介
在する水分子を失うため複雑な形状の表面が生じると考
えられる。Next, it is thought that the coated silica loses the water molecules interposed between the fine particles as it dries, resulting in a surface with a complex shape.
加熱処理により電気絶縁性が向上する原因としては、被
覆表面に100℃程度の乾燥ではとれないシラノール基
(〉s i−OH)が存在し、これが電気伝導に関与す
るが700℃以上の熱処理によりほぼ失われると推定さ
れる。The reason why the electrical insulation properties are improved by heat treatment is that there are silanol groups (〉si-OH) on the coating surface that cannot be removed by drying at about 100℃, and these are involved in electrical conduction, but heat treatment at 700℃ or higher It is estimated that most of it will be lost.
[実施例] 以下実施例により本発明を具体的に説明する。[Example] The present invention will be specifically explained below using Examples.
(参考例)
コロイダルシリカの電気比抵抗を測定するため、砥粒を
入れずコロイダルシリカのみを蒸発乾固し、解砕してか
ら302μ〜127uの部分を節分して取りだし、大気
中で所定の温度まで加熱した後直ちに炉外へ取りだして
、その電気比抵抗を測定したものである。測定法はlO
φ×IOのシンチュウの栓をした300DX10IDX
20の硬質ゴムの8冨に試料0.2gを入れ栓と同じ材
質、サイズのプランジャーを装入して軽く押し付けなが
ら50Vの電圧を白化して測定した結果を表1に示す。(Reference example) In order to measure the electrical resistivity of colloidal silica, only the colloidal silica was evaporated to dryness without adding any abrasive grains, crushed, and then a portion of 302 μ to 127 μ was taken out, and a predetermined amount was placed in the atmosphere. After being heated to a certain temperature, it was immediately taken out of the furnace and its electrical resistivity was measured. The measurement method is lO
300DX10IDX with φ×IO plug
Table 1 shows the results of measurements by inserting 0.2 g of a sample into 8 volumes of No. 20 hard rubber, inserting a plunger of the same material and size as the stopper, and applying a light pressure of 50 V to whitening.
表1から、十分な電気絶縁性を得るためには700℃以
上の熱処理が必要であることが分かる。また、熱処理温
度の上限は被覆の強度が劣化するため、約1100℃と
なる。From Table 1, it can be seen that heat treatment at 700° C. or higher is necessary to obtain sufficient electrical insulation. Further, the upper limit of the heat treatment temperature is approximately 1100° C. since the strength of the coating deteriorates.
表1 コロイダルシリカ熱処理品の電気比抵抗(実施例
1)
]00+nJ2のビーカーに黒色炭化珪素質研削材Cm
80を0.5g取り、固形分20%のコロイダルシリカ
約2meを添加した。よく撹拌した後、フッチエ上で吸
引中の濾紙に移し、薄く広げ、余分のシリカゲルを除去
してから濾紙と共に乾燥器へ移し、100℃で60分乾
燥した。Table 1 Electrical specific resistance of heat-treated colloidal silica products (Example 1) ]00+nJ2 beaker with black silicon carbide abrasive material Cm
0.5 g of 80 was taken and about 2 me of colloidal silica with a solid content of 20% was added. After stirring thoroughly, the mixture was transferred to a filter paper under suction on a futschier, spread thinly, excess silica gel was removed, and the mixture was transferred to a dryer together with the filter paper, and dried at 100° C. for 60 minutes.
冷却後、シリカゾルの付着したCm80を濾紙よりはぎ
落し、アルミナ質乳鉢で解砕後、ふるいわけして302
〜151μの部分を採取した。ついでこの粒度部分をエ
チレンブロマイド(比重2.18)約50rrF2と共
にl OO,m 1.のビーカーに取り、撹拌してシリ
カゲル単独粒子をけん濁液として除去した。After cooling, Cm80 with silica sol attached was peeled off from the filter paper, crushed in an alumina mortar, and sieved to obtain 302
A ~151μ section was taken. This particle size portion was then mixed with ethylene bromide (specific gravity 2.18) about 50rrF2 to 1 OO,m 1. The mixture was placed in a beaker and stirred to remove individual silica gel particles as a suspension.
ビーカーの底に沈降した部分はエタノールで洗浄した後
、乾燥し、ついでアルミナボートへ移し、マツフル炉中
で700℃に加熱した後急冷した。The portion settled at the bottom of the beaker was washed with ethanol, dried, transferred to an alumina boat, heated to 700° C. in a Matsufuru furnace, and then rapidly cooled.
こうして得られたサンプル0.2gにつき、前述の方法
で電気比抵抗を測定したところ、50Vt’5.0XI
O”Ω−cw (原試料C#80は7.4X10“Ω・
Cm)と被覆効果が明らかにされた。When the electrical resistivity of 0.2 g of the sample thus obtained was measured using the method described above, it was found to be 50Vt'5.0XI.
O"Ω-cw (original sample C#80 is 7.4X10"Ω・
Cm) and the coating effect were clarified.
(実施例2)
硼素を過剰に含む立方晶窒化硼素砥粒(粒度#80)0
.5gをMo板上に広げ、このMoJN上約50mm上
方にタングステンバスケットをセットしてS i Oz
とStとの等モル混合物圧粉体の蒸発源を約100mg
、バスケットに充填して10−’〜IQ−’Torrの
真空下、約1750℃で通常の方法で真空操作を行なっ
た。(Example 2) Cubic boron nitride abrasive grains containing excessive boron (particle size #80) 0
.. Spread 5g on a Mo board, set a tungsten basket about 50mm above this MoJN, and place SiOz
Approximately 100 mg of the evaporation source of the equimolar mixture green compact of
The mixture was filled into a basket and subjected to vacuum operation at about 1750°C under a vacuum of 10-' to IQ-' Torr in a conventional manner.
1回の操作は約1分で、この操作を8回繰り返した。ま
た、操作が1回終了するごとにMo板上の立方晶窒化硼
素は薬包紙上に回収して再び広げ直した。One operation took about 1 minute, and this operation was repeated 8 times. In addition, each time the operation was completed, the cubic boron nitride on the Mo plate was collected on the medicine wrapper paper and spread again.
このようにして、蒸着によりSiO膜で被覆した後、実
施例1と同様にしてSiO□で被覆し、SiO膜のみの
ものと絶縁性の比較をした結果を表2に示す6表2によ
り本発明品の耐電圧特性が改善されていることがわかる
。After coating with a SiO film by vapor deposition in this way, it was coated with SiO It can be seen that the withstand voltage characteristics of the invented product are improved.
(以下余白)
(実施例3)
実施例2によって得られたコート滴粒を用い、約lOφ
の台金(545G)にニッケル電着を行なうテストをし
た。電解液はスルファミン酸ニッケル液、液温60℃、
電圧1vで60分行なったが、粒表面のNiメツキにニ
ッケルボールの析出等は生じなかった。これに対し、コ
ートを全く施さない硼素を過剰に含む立方晶窒化硼素砥
粒にはニッケルボールが無数観察された。(Left below) (Example 3) Using the coated droplets obtained in Example 2, approximately lOφ
A test was conducted by electrodepositing nickel on the base metal (545G). The electrolyte is a sulfamate nickel solution, liquid temperature is 60℃,
Although the test was carried out at a voltage of 1 V for 60 minutes, no nickel balls were deposited on the Ni plating on the grain surface. On the other hand, numerous nickel balls were observed in the cubic boron nitride abrasive grains containing an excessive amount of boron and which were not coated at all.
[効 果]
砥粒を砥石等の工具として用いる場合、その表面を複雑
な形状としてその結合剤との結合性を高めることはよく
行なわれており(例えば前述の特開昭59−30671
)、ここでは特に説明を要しないが、本発明においては
このような表面性状をシリカのコーティングをすること
により達成したものである。[Effect] When abrasive grains are used as a tool such as a whetstone, it is common practice to make the surface of the abrasive grains into a complex shape to improve the bondability with the binder (for example, as described in JP-A-59-30671 mentioned above).
), although no particular explanation is required here, in the present invention such surface properties are achieved by coating with silica.
シリカをコートした場合の表面性状は拡大写真に示す如
くである。The surface properties when coated with silica are as shown in the enlarged photograph.
更に、本発明によるシリカのコーティング法の特徴は比
較的に簡単に数ミクロン−数十ミクロンの厚膜が得られ
ることである。したがって、このようなコーティングを
施した粒子は一般に高い電気絶縁性を要する用途に応用
できる。Furthermore, a feature of the silica coating method according to the present invention is that a thick film of several microns to several tens of microns can be obtained relatively easily. Therefore, such coated particles can generally be used in applications requiring high electrical insulation.
Claims (4)
研磨材粒子。(1) Abrasive particles having a thin film of silica with tortoise-shell-like wrinkles on the surface.
離した後乾燥し、ほぼもとの砥粒の粒度まで解砕し、重
液分離法によってシリカ単独粒子を除去し、ついで大気
中700℃〜1100℃で熱処理して急冷することを特
徴とする研磨材粒子の製造方法。(2) Abrasive grains are soaked in silica sol, excess silica sol is separated, dried, crushed to almost the original grain size, silica single particles are removed by heavy liquid separation method, and then heated to 700°C in the atmosphere. A method for producing abrasive particles, characterized by heat treatment at ~1100°C and rapid cooling.
離した後乾燥し、700℃〜1100℃で熱処理し、急
冷し、解砕し、ついで重液分離法によってシリカ単独粒
子を除去することを特徴とする研磨材粒子の製造方法。(3) Soaking the abrasive grains in silica sol, separating excess silica sol, drying, heat treatment at 700°C to 1100°C, rapid cooling, crushing, and then removing single silica particles by heavy liquid separation method. Characteristic method for producing abrasive particles.
トした砥粒に上記第2項および第3項の処理を施すこと
を特徴とする研磨材粒子の製造方法。(4) A method for producing abrasive particles, characterized in that abrasive grains coated with SiO_χ (2≧χ≧0) by a vapor deposition method are subjected to the treatments described in items 2 and 3 above.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63098299A JP2652192B2 (en) | 1988-04-22 | 1988-04-22 | Abrasive particles and method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63098299A JP2652192B2 (en) | 1988-04-22 | 1988-04-22 | Abrasive particles and method for producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01271477A true JPH01271477A (en) | 1989-10-30 |
JP2652192B2 JP2652192B2 (en) | 1997-09-10 |
Family
ID=14216041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63098299A Expired - Lifetime JP2652192B2 (en) | 1988-04-22 | 1988-04-22 | Abrasive particles and method for producing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2652192B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007088461A1 (en) * | 2006-02-02 | 2007-08-09 | Element Six (Production) (Proprietary) Limited | Glass coated hard and ultra-hard abrasive particles and a method of making them |
JP2007229848A (en) * | 2006-02-28 | 2007-09-13 | Saitama Univ | MOLDED BODY AND GRINDING WHEEL CONTAINING SiOx POWDER, AND GRINDING METHOD USING THE SAME |
US9193631B2 (en) | 2008-03-21 | 2015-11-24 | Saint-Gobain Centre De Recherches Et D'etudes Europeen | Fused and coated silica grains |
CN106661426A (en) * | 2014-07-01 | 2017-05-10 | 戴蒙得创新股份有限公司 | Glass coated cbn abrasives and method of making them |
-
1988
- 1988-04-22 JP JP63098299A patent/JP2652192B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007088461A1 (en) * | 2006-02-02 | 2007-08-09 | Element Six (Production) (Proprietary) Limited | Glass coated hard and ultra-hard abrasive particles and a method of making them |
JP2007229848A (en) * | 2006-02-28 | 2007-09-13 | Saitama Univ | MOLDED BODY AND GRINDING WHEEL CONTAINING SiOx POWDER, AND GRINDING METHOD USING THE SAME |
US9193631B2 (en) | 2008-03-21 | 2015-11-24 | Saint-Gobain Centre De Recherches Et D'etudes Europeen | Fused and coated silica grains |
CN106661426A (en) * | 2014-07-01 | 2017-05-10 | 戴蒙得创新股份有限公司 | Glass coated cbn abrasives and method of making them |
Also Published As
Publication number | Publication date |
---|---|
JP2652192B2 (en) | 1997-09-10 |
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