JPH01268079A - Sealed co2 laser oscillator tube - Google Patents

Abstract

PURPOSE:To prevent the decrease in laser output due to unstable discharge and discharge transfer of cathode electrodes caused for a long period, by forming an oxide layer or layer an insulating film layer comprising glass, enamel and the like on the surfaces of a supporting leads for supporting the cathode electrodes. CONSTITUTION:In a sealed type CO2 laser oscillator tube, supporting flanges 6 and 7, bellows 8 and 9, cathode electrodes 4 and 5 and mirrors 10 and 11 are arranged at both ends of an insulating tube 1 comprising glass and the like, and an anode electrode 12 is provided at the central part. In this oscillating tube, an oxide layers or insulating film layers 14 comprising glass, enamel and the like are formed on the surfaces of supporting leads 2 and 3 for supporting the cathodes 4 and 5. Even if discharging is generated between the anode 12 and the cathodes 4 and 5, the discharging parts on the cathodes 4 and 5 are not transferred to the supporting lead parts since the surfaces of the supporting leads 2 and 3 are covered with the insulating film layers 14. Therefore, the discharge is stable for a long period, and the decreases in laser output due to the outflow or adsorption of the gas caused by the discharge transfer to the supporting lead parts is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a sealed CO2 laser oscillation tube, and more particularly to extending the life of the same.

BACKGROUND OF THE INVENTION FIG. 4 shows the structure of a conventional sealed CO2 laser oscillation tube. In the figure, 1 has CO2 inside. N2. It is a hermetically sealed insulating tube made of glass or the like in which a mixed gas such as He is sealed. At both ends of the insulating tube 1 are cathode electrodes 4, 6 supported by support leads 2.3, supports 7 and 6.7, and flexible Optical components such as a total reflection mirror 10 and an output mirror 11 are installed via a metal bellows 8.9, forming an optical resonator. Reference numeral 12 denotes an anode electrode installed in the center of the insulating cylinder 1, which excites the sealed mixed gas with A4 discharge between the cathode electrodes 4 and 6 to generate laser oscillation. Reference numeral 13 denotes cooling water for cooling the outer peripheral portion of the insulating cylinder 1 which generates heat due to the discharge excitation. Generally, in this type of sealed CO2 laser oscillation tube, CO2 is emitted by discharge as shown in equation (1).
It is dissociated into o and 02, and the laser output is reduced to an equilibrium state.

CO2: CO + -K) 2. In response to the reaction from the right term to the right term, the recombination reaction from the right term to the left term is promoted, thereby preventing a decrease in C02 and a decrease in laser output.

Problems to be Solved by the Invention However, in the long term, the discharge site of the cathode electrode section is initially on the cathode surface, but gradually supports the cathode electrode due to wear and deterioration or oxidation of the cathode electrode 4.5. A state in which the support lead 2.3 shifts occurs, and as a result, the discharge becomes unstable and the support lead 2.3
Problems such as impurity gas being generated from the inside as the temperature rises and O2 being consumed due to surface oxidation of the support lead 2.3 occur, resulting in a decrease in laser output.

The present invention aims to prevent a decrease in laser output caused by unstable discharge and discharge transition of the cathode electrode that occurs over a long period of time in the conventional sealed CO2 laser.

Means for Solving the Problems The present invention is therefore characterized in that an insulating film layer such as an oxide layer or glass enamel is formed on the surface of the support lead that supports the cathode electrode.

Effect: With the above means, the discharge site of the cathode electrode does not move to the support lead portion, the discharge is stable, there is no release or adsorption of gas from the support lead portion, and a decrease in laser output is prevented.

Example Embodiments according to the present invention are shown in FIGS. 1 to 3.

Note that the same numbers as in FIG. 4 indicate the same members.

In Figure 1, 1 contains CO□+N 21 He
It is a sealed insulating cylinder made of glass etc. filled with a mixed gas such as
Cathode electrodes 4, 5 supported by support 7 langes 6.7
Optical components such as a total reflection mirror 10 and an output mirror 11 are installed via a flexible metal bellows 8.9, forming an optical resonator. Reference numeral 12 denotes an anode electrode installed in the center of the insulating cylinder 1, which discharge-excites the sealed mixed gas between the cathode electrodes 4 and 6 to generate laser oscillation.

Furthermore, the outer peripheral portion of the insulating cylinder 1, which generates heat due to the discharge excitation, is cooled by cooling water 13. Oxide N (insulating film layer) 14 is formed on the surfaces of support leads 2 and 30 that support cathode electrode 4.6, respectively. FIG. 2 shows an enlarged view of that part.

In this configuration, even if a discharge occurs between the anode electrode 12 at the center and the cathode electrodes 4 and 5 at both ends, the cathode electrodes 4. The discharge site on ε does not migrate to the support lead portion because the surface of the supporting lead 2.3 is covered with an insulating film layer 14 made of an oxide film.

Further, in FIG. 3, the surface of the support lead 2 or 30 supporting the cathode electrode 4 or 6 is glass-enameled, and the same effect can be obtained by forming a glass insulating film layer 16.

Effects of the Invention As described above, the present invention provides a highly reliable sealed CO2 in which discharge is stable over a long period of time and there is no reduction in laser output due to gas release or adsorption due to discharge transfer to the support lead portion. A laser oscillation tube can be realized.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a sealed C02 laser oscillator tube showing a first embodiment of the present invention, FIG. 2 is an enlarged sectional view of the cathode electrode and support lead portion, and FIG. FIG. 4 is an enlarged cross-sectional view of the cathode electrode and support lead portion of a sealed CO2 laser oscillation tube according to an embodiment of the present invention, and FIG. 4 is a cross-sectional view of a conventional sealed CO2 laser oscillation tube. 1... Insulating cylinder, 2.3... Support lead, 4, 6... Cathode electrode, 6.7...
・Support 7 langes, 8.9...Metal bellows, 1
0... Total reflection mirror, 11... Output mirror, 1
2... Anode electrode, 14... Oxide layer (insulating film layer), 16... Glass insulating film layer.

Claims (1)

[Claims] In a sealed CO_2 laser oscillation tube in which a support flange, a bellows, a cathode electrode, and a mirror are arranged at both ends of an insulating cylinder made of glass or the like, and an anode electrode is provided in the center, the surface of the support lead that supports the cathode electrode. A sealed CO_2 laser oscillation tube characterized in that an oxide layer or an insulating film layer such as glass enamel is formed on the surface.