JPH01266462A - Omnidirectional uniform air flow outlet - Google Patents

Omnidirectional uniform air flow outlet

Info

Publication number
JPH01266462A
JPH01266462A JP9464588A JP9464588A JPH01266462A JP H01266462 A JPH01266462 A JP H01266462A JP 9464588 A JP9464588 A JP 9464588A JP 9464588 A JP9464588 A JP 9464588A JP H01266462 A JPH01266462 A JP H01266462A
Authority
JP
Japan
Prior art keywords
air
delivery surface
uniform
preliminary
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9464588A
Other languages
Japanese (ja)
Other versions
JPH0796952B2 (en
Inventor
Kunio Suzuki
鈴木 国夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RYOWA CHIYOUON KOGYO KK
Original Assignee
RYOWA CHIYOUON KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RYOWA CHIYOUON KOGYO KK filed Critical RYOWA CHIYOUON KOGYO KK
Priority to JP63094645A priority Critical patent/JPH0796952B2/en
Publication of JPH01266462A publication Critical patent/JPH01266462A/en
Publication of JPH0796952B2 publication Critical patent/JPH0796952B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To obtain the purity recovering characteristics exceeding the theoretical value of instant uniform diffusion by providing a semi-spherical delivery surface and a preliminary diffuser within the afore-said for supplying preliminarily diffused air to the entire delivery surface so as to produce a quasi-uniform pressure flow. CONSTITUTION:The omnidirectional uniform air flow outlet 7 having in it an air filter comprises a short round column at the base of the outlet body proper and a concentric semi-spherical air delivery surface which is connected to said column and extends downwardly. Inside the air delivery surface 8, a preliminary diffuser 9 concentric to the air delivery surface 8 is disposed. The air passing through the air filter hits the preliminary diffuser 9 for preliminary diffusion. The air is then supplied to the air delivery surface 8 for delivery through its air holes into a room as a quasi-uniform pressure flow. The column part of the delivery surface 8 increases the air flow in the lateral direction, and the air is delivered uniformly from the semi-spherical part omnidirectionally. Since the delivery surface presents a relatively large uniform resistance, the delivered air velocity becomes highly uniform.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、主としてクリーンルームの天井に取付けられ
る空気吹出口に関するものであり、さらに詳しくは、擬
似的な押し出し流を発生させて換気を行う全方向均一型
空気吹出口に係るものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention mainly relates to an air outlet that is attached to the ceiling of a clean room, and more specifically relates to an air outlet that is installed on the ceiling of a clean room. This relates to a directionally uniform air outlet.

[従来の技術] 一般に、クリーンルームの換気は、天井に設置された空
気吹出口から清浄な空気を送り出すことによって行われ
ている。
[Prior Art] Generally, clean rooms are ventilated by blowing out clean air from air outlets installed in the ceiling.

例えば、清浄空気の気流によってクリーンルーム内に攪
拌効果をおこし、塵埃濃度のムラを防ぎつつ、濃度を稀
釈していく乱流式のクリーンルームが知られている。こ
のような乱流式のクリーンルームの空気吹出口としては
、初期的なタイプとして、第4図に示すように、空気清
浄フィルタが内蔵された吹出口1の本体の下端に、円錐
台形のチャンバ2が下方に突出して取付けられ、このチ
ャンバ2の下面に多数の吹出孔が設けられたパンチング
フェイス3が形成されている。しかし、このような吹出
口1は、吹出口直下は強い下降流、逆に吹出口間やクリ
ーンルームの壁際では上昇流が発生するのみで、単純な
対流しかおこらず、攪拌効果が低かった。そのため、塵
埃の濃度ムラが大きくコスト的に不利だった。なお、a
は清浄な空気の気流を示す。
For example, a turbulent flow clean room is known in which a flow of clean air creates an agitation effect in the clean room, thereby diluting the dust concentration while preventing uneven dust concentration. As shown in Fig. 4, an early type of air outlet for a turbulent clean room was a truncated conical chamber 2 at the lower end of the outlet 1 with a built-in air purifying filter. is attached so as to protrude downward, and a punching face 3 having a large number of blow-off holes is formed on the lower surface of the chamber 2 . However, in such a blower outlet 1, a strong downward flow was generated directly below the blower outlet, and conversely, only an upward flow was generated between the blower outlets or near the wall of the clean room, and only simple convection occurred, resulting in a low stirring effect. As a result, the dust concentration was uneven and was disadvantageous in terms of cost. In addition, a
indicates a flow of clean air.

そこで、第5図に示すような、垂直吹出と共に天井面に
水平吹出する吹出口4や第6図に示すような、アネモ吹
出口を用いて斜め方向に吹出す吹出口5が提案され、攪
拌効果の向上が図られていた。このような改良型の乱流
式クリーンルームの空気吹出口としては、実開昭62−
105449号に記載された考案がある。この空気吹出
口は、第7図に示すように吹出口本体の下端に、底面円
形状のパンチングフェイス30を備え、このパンチング
フェイス30内に吹出口本体と同心円を成す円錐状のバ
ッフルプレート6を取付けたことを特徴とし、パンチン
グフェイス30からの気流aの拡散性が極めて高い。従
って攪拌効果に優れ、塵埃!!度のムラは非常に少ない
Therefore, an air outlet 4 that blows out vertically and horizontally onto the ceiling surface as shown in Figure 5, and an air outlet 5 that blows out in an oblique direction using an anemo air outlet as shown in Figure 6 have been proposed. Efforts were made to improve effectiveness. As an air outlet for such an improved turbulent flow clean room, the U.S. Pat.
There is an idea described in No. 105449. As shown in FIG. 7, this air outlet includes a punching face 30 with a circular bottom surface at the lower end of the outlet body, and a conical baffle plate 6 concentric with the outlet body within the punching face 30. The airflow a from the punching face 30 has extremely high diffusivity. Therefore, it has excellent stirring effect and eliminates dust. ! There is very little unevenness in the degree.

[発明が解決しようとする課題] しかし、以上のような従来技術には次のような課題があ
った。
[Problems to be Solved by the Invention] However, the above conventional techniques have the following problems.

すなわち、上記のような乱流式をとる場合、攪拌効果が
高ければ、塵埃の高濃度な場所が生じにくい反面、気流
aによって渦流が発生し、塵埃がクリーンルーム内から
除去されなかった。例えば、前記実開昭62−1054
49号記載の実施例においても、気流aはバッフルプレ
ート6に沿って斜め方向に強く送り出され、パンチング
フェイス30の真下の気流aとの間で渦流が発生しやす
い。
That is, when using the turbulent flow method as described above, if the stirring effect is high, places with high dust concentration are less likely to occur, but on the other hand, the airflow a generates a vortex, and dust is not removed from the clean room. For example, the above-mentioned Utility Model Publication No. 62-1054
Also in the embodiment described in No. 49, the airflow a is strongly sent out in an oblique direction along the baffle plate 6, and a vortex is likely to occur between it and the airflow a directly below the punching face 30.

以上のように、従来技術においては、クリーンルーム内
に塵埃の濃度ムラは発生しないが、塵埃聞そのものが著
しく減少することはなく、かえって局所的な渦流発生の
場合では塵埃が除去さhI、。
As described above, in the conventional technology, no uneven dust concentration occurs in the clean room, but the dust volume itself is not significantly reduced, and on the contrary, when a local vortex is generated, the dust is removed.

くくなっていた。本発明は、このような課題を解゛決す
るために提案されたものであり、その目的は、クリーン
ルーム内の塵埃を押し出すように排出し、塵埃を一掃さ
せる、優れた全方向均一型空気吹出口を提供することで
ある。
It was getting harder. The present invention was proposed in order to solve these problems, and its purpose is to provide an excellent omnidirectional uniform air outlet that expels dust in a clean room in a manner that pushes it out and sweeps away the dust. The goal is to provide the following.

[課題を解決するための手段] 以上のような課題を解決するために、本発明の全方向均
一型空気吹出口は空気清浄用のフィルタが内蔵された吹
出口本体の下端に1、全面に多数の吹出孔が設置された
略半球状の吹出面を下方へ突出するように取付け、 この吹出面の内部に、吹出面全面に均一に空気を供給す
るよう吹出面から一定の距離を保って設置される均一拡
散部材を備えたことを特徴とする。
[Means for Solving the Problems] In order to solve the above-mentioned problems, the omnidirectional uniform air outlet of the present invention has a filter installed at the lower end of the outlet body that has a built-in filter for air purification, and a A roughly hemispherical blowout surface with a large number of blowholes is installed so as to protrude downward, and a certain distance from the blowout surface is maintained so that air is evenly supplied to the inside of the blowout surface over the entire surface of the blowout surface. It is characterized by having a uniform diffusion member installed therein.

[作 用] 以上のような構成を有する本発明の作用は、次のとおり
である。
[Function] The function of the present invention having the above configuration is as follows.

すなわち、空気清浄用のフィルタを通過した空気は、均
一拡散部材に当たり、均一に拡散される。
That is, the air that has passed through the air cleaning filter hits the uniform diffusion member and is uniformly diffused.

この拡散された空気は、均一に略半球状の吹出面に当た
り、全面に形成された吹出孔から全方向に吹出されてい
く。
This diffused air uniformly hits the substantially hemispherical blowing surface and is blown out in all directions from the blowing holes formed on the entire surface.

この空気は、吹出面から円周方向への特性差が出ない様
吹出し、クリーンルーム内に巨視的な渦を作らずに上か
ら下へ微風速で流れ、擬似−様流的な押し出し流となる
。この押し出し流に乗せて塵埃をできるだけ濃いまま排
出し、清浄度の回復を図る。
This air is blown out from the blowing surface so that there are no differences in characteristics in the circumferential direction, and flows from top to bottom at a slight wind speed without creating macroscopic vortices in the clean room, creating a pseudo-modal extrusion flow. . Dust is discharged along with this extrusion flow while remaining as concentrated as possible to restore cleanliness.

このような押し出し流は、コンベンション型クリーンル
ームでは、循環風量が少なく、その吹出口も点在である
ため、形成が困難でおると考えられていた。しかも、こ
の押し出し流は微風速で擬似的に形成されるため、作業
員の動き、照明の発熱、吹出温度差などのちょっとした
外乱によっても乱れる恐れがあり、実現が難しいと思わ
れていた。
It was thought that it would be difficult to create such an extrusion flow in a convention-type clean room because the amount of circulating air is small and the outlets are scattered. Moreover, since this extrusion flow is created in a simulated manner at low wind speeds, there is a risk that it will be disrupted by slight disturbances such as movement of workers, heat generated by lighting, or differences in outlet temperature, so it was thought to be difficult to realize.

しかしながら、本件出願人の実験により上記の構成を有
する本発明の清浄度回復特性は、作業員の歩行頻度が著
しく高くない限り、瞬時−様拡散の理論値を大きく超え
ており、平均的な清浄度も従来型と比べて良好であるこ
とが明らかになった。
However, according to experiments conducted by the present applicant, the cleanliness recovery characteristics of the present invention having the above-mentioned configuration greatly exceed the theoretical value of instantaneous-like diffusion, unless the frequency of walking of the worker is extremely high. It was also found that the temperature was better than that of the conventional type.

ところで、吹出表面が曲面状となる実開昭62−105
449号記載の考案は、形状的には本発明と似ているも
のの、その目的とする所は気流の拡散性を向上させ、塵
埃の攪拌効果を高めることをめざしたものであり、本発
明のように、擬似的な押し出し流を形成する程の全方向
性や均一性を目的とした形状を示すものではなかった。
By the way, Utility Model Application No. 62-105 in which the blowing surface is curved
Although the device described in No. 449 is similar in shape to the present invention, its purpose is to improve the diffusivity of airflow and enhance the dust agitation effect, and is different from the present invention. As such, the shape did not aim to be omnidirectional or uniform enough to form a pseudo extrusion flow.

以上のように、本発明は、擬似的な押し出し流を吹出す
ことにより、従来技術と比べて同−風量で高い清浄度を
得ることができ、且つ、従来技術と同一の平均清浄度を
得る際にも、より少ない風量で済むので省エネルギー化
が図ることができる。
As described above, by blowing out a pseudo extrusion flow, the present invention can obtain higher cleanliness with the same air volume than the conventional technology, and also obtain the same average cleanliness as the conventional technology. In other cases, it is possible to save energy because a smaller amount of air is required.

[実施例] 以上説明したような本発明の一実施例を図面に基づいて
具体的に説明する。
[Example] An example of the present invention as described above will be specifically described based on the drawings.

本実施例の構成* 第1図に示すように、空気清浄用のフィルタが内蔵され
た全方向均一型空気吹出口7は、吹出口本体の下端部に
、短い円柱部とこれに連なる円心円状の半真珠部からな
る吹出面8が下方に突出して設けられている。この吹出
面8は、全面に多数の吹出孔が設置された、目の細かい
、パンチングメタルや金網、又は、目の粗い金網に支え
ら°れた化繊やガラス繊維などの布から構成されており
、適度に大きな抵抗を均一に与えられている。
Configuration of this embodiment* As shown in Fig. 1, the omnidirectional uniform air outlet 7 with a built-in filter for air purification has a short cylindrical part and a circular center connected to the short cylindrical part at the lower end of the outlet body. A blowing surface 8 consisting of a circular half-pearl portion is provided to protrude downward. This blowing surface 8 is made of fine-mesh punched metal or wire mesh, or a cloth made of synthetic fiber or glass fiber supported by a coarse wire mesh, with many blow-off holes installed on the entire surface. , a moderately large resistance is uniformly applied.

また、この吹出面8の内部には、吹出面2と同心状の均
一拡散板9が設けられており、吹出面8と同様の部材で
構成されている。
Moreover, a uniform diffusion plate 9 concentric with the blowing surface 2 is provided inside the blowing surface 8, and is made of the same member as the blowing surface 8.

本実施例の作用* 以上のような構成を有する本実施例の作用は次のとおり
でおる。
Effects of this embodiment* The effects of this embodiment having the above-described configuration are as follows.

すなわち、空気清浄用のフィルタを通過した空気が、均
一拡散板9に当たり、均一の抵抗が与えられつつ、上流
からの動圧が弱められる。
That is, the air that has passed through the air cleaning filter hits the uniform diffusion plate 9, and while being given a uniform resistance, the dynamic pressure from upstream is weakened.

ざらに、この空気が吹出面8に均一に供給され、吹出孔
から擬似−様流的な押し出し流となって至内に長されて
いく。この時、吹出面8の円柱部は、周囲方向への風量
を増加させ、半真球部からは全方向に均一に吹出される
。また、吹出面8には均一に比較的大きな抵抗が与えら
れているため、吹田風速に高い均一性が得られる。
Roughly speaking, this air is uniformly supplied to the blow-off surface 8, and becomes a pseudo-like extrusion flow from the blow-off hole, and is elongated inwardly. At this time, the cylindrical portion of the blowing surface 8 increases the amount of air flowing in the circumferential direction, and the air is blown uniformly in all directions from the semispherical portion. Further, since a relatively large resistance is uniformly applied to the blowing surface 8, high uniformity in Suita wind speed can be obtained.

以上のような本実施例の洗浄度回復特性を従来技術と比
較すると第8図に示すように、換気回数を20回/hと
した時、本実施例は、20回/hの理論線を超える洗浄
度をもたらす。
Comparing the cleanliness recovery characteristics of this embodiment with those of the prior art, as shown in Fig. 8, when the ventilation frequency is 20 times/h, this embodiment achieves a theoretical line of 20 times/h. Delivering superior cleanliness.

さらに、本実施例は、微風速であるため、作業0の歩行
などにより、押し出し流が乱される心配があったが、第
9図に示すとおり、第6図の吹出口5の清浄度と比べて
も、人の歩行時以外の時の塵埃濃度は著しく低く、平均
しても、本実施例の清浄度の方が明らかに優れている。
Furthermore, in this example, since the wind speed was low, there was a concern that the extrusion flow would be disturbed by walking during work 0, but as shown in FIG. 9, the cleanliness of the outlet 5 in FIG. Even when compared, the dust concentration at times other than when a person is walking is significantly lower, and even on average, the cleanliness of this example is clearly superior.

*他の実施例* 本発明は上記の実施例に限定されるものではなく、均一
拡散部材は吹出面全面に均一に空気を供給できればよく
、例えば、同心円状のベーンなとでもよい。また、吹出
面の円柱部の長さを変えることにより、室端への風量配
分比を変えることができる。さらに、同様の主旨で正面
縦長楕円形状の吹出面80を備えた全方向均一型空気吹
出口70としてもよい。(第2図)この時、均一拡散部
材90は、同心状のものとする。
*Other Embodiments* The present invention is not limited to the above-mentioned embodiments, and the uniform diffusion member may be a concentric vane as long as it can uniformly supply air to the entire blowing surface. Furthermore, by changing the length of the cylindrical part of the blowout surface, the air volume distribution ratio to the ends of the chamber can be changed. Furthermore, the air outlet 70 may be of an omnidirectional uniform type having the outlet surface 80 having a vertically oblong elliptical shape from the front, based on the same idea. (FIG. 2) At this time, the uniform diffusion member 90 is made concentric.

また、天井から大きく突き出ることは、実用上支障とな
ることが多い。そこで、第3図に示すように、所定の高
さで半球を輪切りにし、二重(若しくは多重)に球冠の
吹出面11.12を重ねる型の全方向均一型空気吹出口
10でもよい。この場合も、吹出面11.12は、大き
さが異なる、同心円状に形成されており、両者は、やは
り同心円状の円錐台状のリング13で区画されており、
気流を防げるものではない。このような実施例において
は、外周部へ吹出される風量の配分比が大きくなるが、
敢えて全方向均一吹出が必要な場合には、外側の吹出面
11の構成部材の抵抗係数を内側の吹出面12のそれよ
り大きく設定する事により、均一吹出に近づけることが
可能である。なお、均一拡散板14.15は各々吹出面
11,12の方向に設置されている。
Moreover, a large protrusion from the ceiling often poses a practical problem. Therefore, as shown in FIG. 3, an omnidirectional uniform air outlet 10 may be used in which a hemisphere is sliced into rings at a predetermined height and the outlet surfaces 11 and 12 of the spherical crown are overlapped in a double (or multiple) manner. In this case as well, the blow-off surfaces 11 and 12 are formed in concentric circles with different sizes, and both are separated by a truncated conical ring 13 that is also concentric.
It does not prevent airflow. In such an embodiment, the distribution ratio of the amount of air blown to the outer circumference increases, but
If uniform blowing in all directions is desired, uniform blowing can be achieved by setting the resistance coefficient of the constituent members of the outer blowing surface 11 to be larger than that of the inner blowing surface 12. Note that the uniform diffusion plates 14 and 15 are installed in the direction of the blowing surfaces 11 and 12, respectively.

尚、上記の実施例においては、フランジの外形を円形と
してきたが、それは丸型のフィルタボックス用又はダク
ト接続用の形であり、角形フィルタボックス用には外形
を角形とするフランジを用いる。
In the above embodiments, the outer shape of the flange is circular, but this is for a round filter box or for connecting to a duct, and for a square filter box, a flange with a square outer shape is used.

[発明の効果] 以上述べたよつに、本発明の全方向均一型空気吹出口に
よれば、略半球状の吹出面と、その内部に、吹出面全面
に均一に空気を供給する均一拡散部材を備えるという簡
単な構成によって、擬似−様流的な押し出し流を作り出
し、瞬時−様拡散の理論地を上回る清浄度回復特性を示
す優れた清浄効果をもたらす全方向均一型空気吹出口を
提供することができる。
[Effects of the Invention] As described above, the omnidirectional uniform air outlet of the present invention has a substantially hemispherical air outlet and a uniform diffusion member inside the air outlet that uniformly supplies air over the entire area of the air outlet. To provide an omnidirectional uniform air outlet which produces a quasi-like extrusion flow with a simple configuration of having an air flow, and exhibits an excellent cleaning effect that exhibits cleanliness recovery characteristics superior to the theoretical ground of instantaneous-like diffusion. be able to.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本実施例の側面図、第2図は他の実施例の側
面図、第3図は他の実施例の側面断面図、第4図〜第6
図は従来例の側面図、第7図は従来例の側面断面図、第
8図は各種吹出口の洗浄度回復特性を比較するグラフ、
第9図は人の歩行前後にあける至内清浄度変化の本発明
と従来例とを比較するグラフである。 1・・・吹出口、2・・・チャンバ、3・・・パンチン
グフェイス、4,5・・・吹出口、6・・・バッフルプ
レート、7・・・全方向均一型空気吹出口、8・・・吹
出面、9・・・内部拡散材、10・・・全方向均一型空
気吹出口、11.12・・・吹出面、13・・・リング
、14.15・・・均一拡散板、a・・・気流。
Fig. 1 is a side view of this embodiment, Fig. 2 is a side view of another embodiment, Fig. 3 is a side sectional view of another embodiment, and Figs.
The figure is a side view of the conventional example, Figure 7 is a side cross-sectional view of the conventional example, and Figure 8 is a graph comparing the cleanliness recovery characteristics of various air outlets.
FIG. 9 is a graph comparing the change in internal cleanliness before and after a person walks between the present invention and a conventional example. DESCRIPTION OF SYMBOLS 1... Air outlet, 2... Chamber, 3... Punching face, 4, 5... Air outlet, 6... Baffle plate, 7... Omnidirectional uniform air outlet, 8... ... Blowout surface, 9... Internal diffusion material, 10... Omnidirectional uniform air blowout port, 11.12... Blowout surface, 13... Ring, 14.15... Uniform diffusion plate, a...Airflow.

Claims (1)

【特許請求の範囲】[Claims] 空気清浄用のフィルタが内蔵された吹出口本体の下端に
、全面に多数の吹出孔が設置された略半球状の吹出面を
下方へ突出するように取付け、この吹出面の内部に、吹
出面全面に均一に空気を供給するよう吹出面から一定の
距離を保って設置される均一拡散部材を備えたことを特
徴とする全方向均一型空気吹出口。
A roughly hemispherical blowout surface with a large number of blowholes installed on the entire surface is attached to the lower end of the blowout outlet body, which has a built-in filter for air purification, so as to protrude downward. An omnidirectional uniform air outlet characterized by being equipped with a uniform diffusion member installed at a certain distance from the outlet surface so as to supply air uniformly over the entire surface.
JP63094645A 1988-04-19 1988-04-19 Uniform air outlet in all directions Expired - Lifetime JPH0796952B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63094645A JPH0796952B2 (en) 1988-04-19 1988-04-19 Uniform air outlet in all directions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63094645A JPH0796952B2 (en) 1988-04-19 1988-04-19 Uniform air outlet in all directions

Publications (2)

Publication Number Publication Date
JPH01266462A true JPH01266462A (en) 1989-10-24
JPH0796952B2 JPH0796952B2 (en) 1995-10-18

Family

ID=14115995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63094645A Expired - Lifetime JPH0796952B2 (en) 1988-04-19 1988-04-19 Uniform air outlet in all directions

Country Status (1)

Country Link
JP (1) JPH0796952B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195636A (en) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd Cleaning work module and clean tunnel
JP2015078818A (en) * 2013-10-18 2015-04-23 大日本印刷株式会社 Air flow straightening member

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49110136A (en) * 1973-01-26 1974-10-19
JPS508468U (en) * 1973-05-22 1975-01-28
JPS60146247U (en) * 1984-03-08 1985-09-28 株式会社大氣社 ceiling blowing equipment
JPS62105449U (en) * 1985-12-23 1987-07-06

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49110136A (en) * 1973-01-26 1974-10-19
JPS508468U (en) * 1973-05-22 1975-01-28
JPS60146247U (en) * 1984-03-08 1985-09-28 株式会社大氣社 ceiling blowing equipment
JPS62105449U (en) * 1985-12-23 1987-07-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195636A (en) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd Cleaning work module and clean tunnel
JP2015078818A (en) * 2013-10-18 2015-04-23 大日本印刷株式会社 Air flow straightening member

Also Published As

Publication number Publication date
JPH0796952B2 (en) 1995-10-18

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