JPH01251766A - Power-supply switch circuit for laser - Google Patents

Abstract

PURPOSE:To prevent that a power supply is turned on again even when an emergency stop switch is reset by mistake after the emergency stop switch has been turned on by installing the following: a retention means to retain an ON state in accordance with an ON operation of a power-supply switch; a release means to execute a releasing operation by working in conjunction with an operation of the emergency stop switch. CONSTITUTION:A power-supply switching switch 10 is constituted of an automatic reset type rotary switch by a two-stage operation. A knob 13 is turned to a position D and a power supply is turned on; after that, the knob 13 is reset automatically to a position C; in this state, a contact 12 is in an OFF state; contacts 11 and 14a are in an ON state. When an emergency stop switch 2 is turned on in this state, the contact 14a of the power-supply switch 10 is set to the OFF state by working in conjunction with this. As a result, even when the emergency stop switch 2 is reset by mistake after that, the power supply is not supplied to a laser apparatus 4 because the contact 14a is set to the OFF state. Accordingly, the power supply is not turned on by an erroneous operation, the safety can be enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser power switch circuit suitable for use in a laser device such as an excimer laser.

(Prior art) Conventionally, in a power switch circuit used in a laser device,
As shown in Figure 4, an emergency stop switch 2 is connected in series with the power on/off switch 1, so if the emergency stop switch 2 is accidentally returned from on to off while the power on/off switch 1 is still on, , the power source 3 is supplied to the laser device 4, and as a result, the laser device 4 is restarted and there is a risk of being accidentally exposed to laser light.

That is, in the conventional device described above, when the emergency stop switch 2 is turned on to bring the laser device 4 to an emergency stop, the normal power on/off switch 1 remains on, and in this state, if the emergency stop switch 2 is accidentally turned on, When you turn it back off,
Input power supply 3 is turned on again, and if the cause of the emergency stop has not been removed at this erroneous restart,
Exposure to laser light can be extremely dangerous.

[Problem to be solved by the invention]

This invention was made in view of these circumstances,
An object of the present invention is to provide a safe laser power switch circuit in which the power will not be turned on again even if the emergency stop switch is erroneously reset after being turned on.

[Means and effects for solving the problem] In the present invention, the power switch includes a holding means that maintains the on state in response to the on operation of the power switch, and the holding means is held in the on state by operating the emergency stop switch. A release means for releasing in conjunction with the above is provided.

According to this configuration, when the emergency stop switch is turned on, the power switch is turned off in conjunction with this, so even if the emergency stop switch is turned on by mistake thereafter, the power will not be turned on.

Further, in the present invention, the power switch includes first and second contacts connected in series, a third contact connected in parallel to the second contact, and a first contact that turns on/off the first contact. an automatic OFF-return type second operation switch that turns on and off the second contact; contact opening/closing means for turning on and off the third contact;
The contact of the emergency stop switch is connected in series to the second contact.

According to this configuration, the contact opening/closing means turns on the third contact when the first and second operation switches are turned on and power supply to the laser device is started, and also turns on the third contact. Even if the second operation switch is automatically reset and the second contact is turned off, the third contact is maintained in the on state. The third contact is turned off by the contact switching means when the emergency stop switch is turned on or when the first and second operation switches are turned off. Therefore, in this circuit configuration, after turning on the first and second operation switches and turning on the power, the second operation switch is automatically reset.
As a result, power is supplied to the laser device through the contacts of the cylinder 1 and the third contacts. When the emergency stop switch is turned on in this state, not only the contacts of the emergency stop switch but also the third contact are turned off by the operation of the contact opening/closing means, and only the first contact remains on (of course ,
the second contact is also in the off state). Therefore, even if the emergency stop switch is erroneously reset in this state, the second contact remains off, so power will not be supplied to the laser device. The power can be turned on again only by turning on the emergency stop switch again and turning on the first and second operation switches again.

〔Example〕

Hereinafter, the present invention will be described in detail according to embodiments shown in the accompanying drawings.

FIG. 1 shows an embodiment of this light, in which 2 is an emergency stop switch, 3 is an input power source, and 4 is a laser device. Mechanically, the power on/off switch 10 is a two-stage rotary switch as shown in FIG. 2, and electrically has a circuit configuration as shown in FIG. That is, by rotating the knob 13 of the rotary switch 10 from the OFF position to the C position, the contact 11 is turned on, and by further rotating the knob 13 from the C position to the C position, the contact 12 is turned on (see FIG. 3).

However, in this rotary switch 10, the knob 13 is
When released after rotating to position C, it automatically returns to position C. Further, the circuit shown in FIG. 1 is provided with two relays 13 and 14, the relay 13 consisting of a coil 13b1 and a make contact 13a, and the relay 14 consisting of a coil 14b and a make contact 14a.

In this configuration, first, when the switch 10 is rotated from the OFF position to the C position, the contact 11 is turned on, but at this point, the power is not turned on to the laser device 4 because the contacts 12 and 14a are turned off. Furthermore, switch 10 is turned to C.
When rotated from the position to the C position, the contact 12 is turned on. At this time, the contact 11 remains on, so the power supplied from the input power source 3 passes through the contacts 11, 12 and the emergency stop switch 2, and is supplied to the laser device 4, which is the load, and then the coil 13b of the relay 13. This forms a circuit that returns to the input power source 3. At this time, since power is supplied to the coil 13b of the relay 13, the contact 13a of the relay 13 is turned on. Then, power is supplied to the coil 14b of the relay 14 through the contacts 11, 12 and the relay contact 13a, and the contact 14a is turned on.

Since the rotation operation of the switch 10 from the C position to the C position is a momentary operation, when the operation of the switch 10 is stopped, the switch 10 automatically returns to the C position and stops. At this time, the contact 12 is turned off, but since the contact 14a is turned on, power continues to be supplied to the laser device 4.

When performing a normal power OFF operation, turn off the contact 11 by returning the switch 10 to the OFF position.
The power supply to the laser device 4 is stopped.

At the time of an emergency stop, etc., by turning on the emergency stop switch 2, the contact of the emergency stop switch 2 is turned off, and the power supply to the laser device 4 is stopped. That is, when the emergency stop switch 2 is turned off, the coil 13 of the relay 13
Since power is not supplied to the terminal b, the contact 13a is turned off. As a result, no power is supplied to the coil 14b of the relay 14, and the contact 14a is also turned off.

Therefore, in this circuit, even if the emergency stop switch 2 is turned on after this while the switch 10 is in the C position, that is, the contact 11 is on, not only the contact 12 but also the contact 14a remains off, so the laser device 4 is not supplied with power.

That is, in order to turn on the power to the laser device 4 again, it is necessary to rotate the switch 10 from the C position to the C position again.

As described above, in this embodiment, the power on/off switch 10 is an automatic return type rotary switch with two-stage operation, so after turning the knob 13 to the C position to turn on the power, the knob 13 is turned on. It is automatically returned to the C position, and in this state, contact 12 is turned off, and contacts 11 and 14 are turned off.
a is on. In this state, emergency stop switch 2
When the power switch 1o is turned on, the contact 1 of the power switch 1o
4a is also turned off. Therefore, even if the emergency stop switch 2 is reset by mistake after this, power will not be supplied to the laser device 4 since the contact 14a is turned off. Therefore, if you turn on the emergency stop switch to shut off the power, such as when a device malfunctions, in order to turn the power back on, you must reset the emergency stop switch 2 and turn on the power switch 1 again.
Since the o knob 13 must be turned again to the C position, there is no possibility of turning on the power due to an erroneous operation, and safety can be improved.

In addition, in the above embodiment, two relays 13 and 14
However, the coil 14b and contact 13a
may be omitted, and the contact 14a may be turned on and off directly by the coil 13b.

In addition, in the above embodiment, one self-resetting momentary switch is used so that the first stage performs alternate operation and the second stage performs momentary operation, but two switches having the same function are used. You may also replace it with . In other words, one switch turns on contact 11.
By turning off the switch and making the other switch a self-returning type switch, the self-returning switch turns on and off the contacts 12 and 14a, thereby achieving the same function as the single momentary switch.

〔Effect of the invention〕

As explained above, according to the present invention, the power supply operation switch is a self-resetting switch with two-step operation, so when the emergency stop switch is turned on, the M! 1J, the power operation switch is also turned off, so that even if the emergency stop switch is erroneously reset, power will not be supplied to the laser device. Therefore, erroneous power-on due to erroneous operation of the emergency stop switch is reliably prevented, and accidents such as the operator being erroneously exposed to laser light can be prevented.

[Brief explanation of the drawing]

Fig. 1 is a circuit block diagram that does not show an embodiment of the present invention, Fig. 2 is a diagram for explaining the operating mode of the power on/off switch, and Fig. 3 is the relationship between the key position of the power on/off switch and the circuit state. FIG. 4 is a block diagram illustrating a conventional device. 1.10...Power on/off switch, 2...Emergency stop switch, 3...Input power supply, 4...Laser device, 11
゜12...Contact, 13.14...Relay, 13a. 14a... Relay make contact, 13b, 14b...
・Relay coil. Figure 1 Figure 2 Figure 3

Claims (3)

[Claims] (1) In a laser power switch circuit that connects an emergency stop switch in series with a power switch and supplies power to the laser device via these switches, the power switch is turned on in response to the on operation of the power switch. A laser power switch circuit comprising a holding means for holding the state, and a releasing means for releasing the ON state of the holding means in conjunction with the operation of the emergency stop switch. (2) In a laser power switch circuit in which an emergency stop switch is connected in series to a power switch, and power is supplied to the laser device via these switches, the power switch is connected to a first and a second switch connected in series. a contact, a third contact connected in parallel to the second contact, a first operation switch that turns on and off the first contact, and an automatic off return type that turns on and off the second contact. the second of
an operation switch that controls whether or not power is supplied to the laser device and the second
A power switch circuit for a laser, comprising: contact opening/closing means for turning on and off the third contact according to a self-returning mode of the switch; (3) The first and second operating switches are rotary switches that turn on and off the first and second contacts by rotating a knob, and when the knob is in the first position, the rotary switch The first contact is turned on, and when the knob is at a second position displaced by a predetermined angle from the first position, the second contact is turned on, and the knob is moved from the second position to the first position. 3. The laser power switch circuit according to claim 2, further comprising an automatic return means for automatically returning.