JPH01248101A - Manufacture of multicolor filter - Google Patents
Manufacture of multicolor filterInfo
- Publication number
- JPH01248101A JPH01248101A JP63077257A JP7725788A JPH01248101A JP H01248101 A JPH01248101 A JP H01248101A JP 63077257 A JP63077257 A JP 63077257A JP 7725788 A JP7725788 A JP 7725788A JP H01248101 A JPH01248101 A JP H01248101A
- Authority
- JP
- Japan
- Prior art keywords
- light
- dye
- exposed
- resin
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000011347 resin Substances 0.000 claims abstract description 13
- 229920005989 resin Polymers 0.000 claims abstract description 13
- 125000000524 functional group Chemical group 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 21
- 238000000206 photolithography Methods 0.000 claims description 5
- 239000000985 reactive dye Substances 0.000 claims description 2
- 238000007598 dipping method Methods 0.000 abstract description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- 239000000975 dye Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- 238000004043 dyeing Methods 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- 150000002576 ketones Chemical class 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 4
- 239000003086 colorant Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Optical Filters (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は多色カラーフィルタの製造方法に係わり、更に
詳しくはフォトリソグラフィー法による多色カラーフィ
ルタの製造方法において、反応性色素と光による官能基
発生(消滅)型樹脂を用いた多色カラーフィルタの製造
方法に関する。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a method for manufacturing a multicolor color filter, and more specifically, in a method for manufacturing a multicolor color filter using a photolithography method, the present invention relates to a method for manufacturing a multicolor color filter using a photolithography method. The present invention relates to a method for manufacturing a multicolor color filter using a group generation (disappearance) type resin.
従来のフォトリソグラフィー法による多色カラーフィル
タの製造方法は以下の工程による。A conventional method for manufacturing a multicolor color filter using photolithography involves the following steps.
(1)感光性樹脂をスピンコードする
(2)マスクを通して露光する
(3)現像により不要部分を除去する
(4)露光部を染色する
(5)防染処理を行なう
この工程を必要な染料の数だけくり返す方法が従来の多
色カラーフィルタの製造方法であった。(1) Spin-coding the photosensitive resin (2) Expose to light through a mask (3) Remove unnecessary areas by developing (4) Dye the exposed areas (5) Perform resist dyeing process The conventional method for manufacturing multicolor color filters was to repeat the process several times.
しかし、この方法によれば、次の工程を行なう前に色の
混合を防ぐため必ず防染処理工程が必要となる欠点があ
った。However, this method has the disadvantage that a resist dyeing process is always required to prevent color mixing before the next process.
そこで本発明は上記欠点に鑑みなされたものであり、そ
の目的とするところは工程の簡単な多色カラーフィルタ
の製造方法を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned drawbacks, and its object is to provide a method for manufacturing a multicolor color filter with simple steps.
本発明の多色カラーフィルタの製造方法は、フォトリソ
グラフィ法による多色カラーフィルタの製造方法におい
て、反応性色素と光による官能基発生(消滅)型樹脂を
用いることを特徴とする。The method for manufacturing a multicolor color filter of the present invention is characterized in that a reactive dye and a functional group generation (annihilation) type resin by light are used in the method for manufacturing a multicolor color filter by photolithography.
本発明で用いられる樹脂は光により官能基が発生(消滅
)する。そのため、マスクを通して露光した部分のみに
官能基が発生(消滅)する。露光した基板を反応性基を
存す染料を溶かした溶液中に浸漬すれば染料は露光した
部分(未露光部分)のみに反応付替する。浸漬を充分行
なうことにより官能基を消費でき、次工程の染料による
混色はさけられる。In the resin used in the present invention, functional groups are generated (disappeared) by light. Therefore, functional groups are generated (disappeared) only in the areas exposed through the mask. If the exposed substrate is immersed in a solution containing a dye containing a reactive group, the dye will react only in the exposed areas (unexposed areas). By sufficiently dipping, the functional groups can be consumed and color mixing by dyes in the next step can be avoided.
未露光部分(露光部分)は官能基を佇しないため付着し
た染料は簡単に洗い落とすことが可能である。Since no functional groups remain in the unexposed area (exposed area), the attached dye can be easily washed off.
この工程を必要な色の数だけくり返すことにより多色カ
ラーフィルターの製造が可能となる。By repeating this process as many times as necessary, it is possible to manufacture a multicolor filter.
〔実施例1〕
を溶解した、20%四塩化炭素溶液をスピンコード法に
より回転数200Orpmで塗布した。[Example 1] A 20% carbon tetrachloride solution in which the following was dissolved was applied by a spin cord method at a rotational speed of 200 rpm.
塗布後、乾燥し、マスクを通し紫外!1!露光した。そ
の結果露光部の水酸基はケトンに変わった。After application, dry and UV light passes through the mask! 1! exposed. As a result, the hydroxyl group in the exposed area was changed to a ketone.
のエタノール溶液に浸漬し、未露光部を染色した。染色
後、基板をエタノール水溶液に浸漬し、基板を洗浄する
と共に露光部のケトンを水酸基にもどした。The unexposed area was stained by immersing it in an ethanol solution. After dyeing, the substrate was immersed in an aqueous ethanol solution to wash the substrate and convert the ketones in the exposed areas back to hydroxyl groups.
再び基板を乾燥してから同様の工程をくり返し、染料 のエタノール溶液に浸漬し、未露光部を染色した。After drying the substrate again, repeat the same process and apply the dye. The unexposed area was stained by immersing it in an ethanol solution.
このようにして、青黄モザイク状の二色カラーフィルタ
ーを作製した。In this way, a blue-yellow mosaic two-color filter was produced.
〔実施例2〕
実施例1で述べた共重合体を溶かした四塩化炭素溶液を
スピンコード法により、実施例1と同様にして透明電極
付ガラス基板に塗布した。[Example 2] A carbon tetrachloride solution in which the copolymer described in Example 1 was dissolved was applied to a glass substrate with a transparent electrode using a spin code method in the same manner as in Example 1.
塗布後全面に紫外線を照射し、樹脂全体の水酸基をケト
ンに変換した。After coating, the entire surface was irradiated with ultraviolet rays to convert the hydroxyl groups in the entire resin to ketones.
続いて、マスクを透して一部の透明電極に合わせて紫外
線で露光し、露光部のケトンを水酸基にもどした。Next, a portion of the transparent electrode was exposed to ultraviolet light through a mask, and the ketones in the exposed areas were converted back to hydroxyl groups.
このようにして得た基板を染料 のエタノール溶液に浸漬し、露光部を染色した。The substrate obtained in this way is dyed. The exposed area was dyed by immersing it in an ethanol solution.
この基板をエタノールにより洗浄、乾燥後、再びにより
くり返し二色カラーフィルターを得た。This substrate was washed with ethanol, dried, and then repeated again to obtain a two-color filter.
この基板を用い液晶セルを組み立て表示したところ、鮮
やかな二色カラー液晶表示体を得た。When a liquid crystal cell was assembled and displayed using this substrate, a bright two-color liquid crystal display was obtained.
以上述べたように本発明に用いられる樹脂は光昭射前後
により官能基が発生(消滅)すれば良く、このような性
質ををする樹脂であるならば何でもよ(、実施例に限定
されるものではない。As mentioned above, the resin used in the present invention only needs to have functional groups generated (disappeared) before and after irradiation with light, and any resin that has such properties may be used (but is not limited to the examples). isn't it.
又、実施例においてはア/トラキノ7系統の染料をあげ
たが樹脂中の官能基と反応するような基を「する染料で
あるならばどのような染料でもよい。Further, in the examples, dyes of the a/traquino 7 series are used, but any dye may be used as long as it has a group that reacts with a functional group in the resin.
又、実施例においては二色の場合のみを述べたが同様な
工程を(り返すことにより三色、四色等・・・も可能と
なり、実施例に限定されるものではない。Further, in the examples, only the case of two colors is described, but by repeating the same process, it is possible to create three colors, four colors, etc., and is not limited to the examples.
染料の色、0度等も、染料の構造、樹脂膜厚等を変える
ことにより変更でき、目的に従い選択される。The color of the dye, 0 degree, etc. can also be changed by changing the structure of the dye, the thickness of the resin film, etc., and are selected according to the purpose.
以上述べたように本発明の製造方法は基本的には
(1)樹脂をスピンコードする
(2)マスクを通して露光する
(3)染色する
の三工程のくり返しよりなり、従来の五工程のくり返し
よりなる製造方法より非常に簡略化された方法である。As described above, the manufacturing method of the present invention basically consists of repeating the three steps of (1) spin-coding the resin, (2) exposing it to light through a mask, and (3) dyeing, which is better than the conventional repeating of five steps. This is a much simpler manufacturing method than the previous manufacturing method.
このため本発明の製造方法によれば安価に多色カラーフ
ィルタができるようになり、液晶表示体、液晶テレビ等
のコスト低下が可能となる。Therefore, according to the manufacturing method of the present invention, a multicolor color filter can be produced at low cost, and the cost of liquid crystal displays, liquid crystal televisions, etc. can be reduced.
よって本発明の多色カラーフィルタの製造方法は産業上
価値の高いものである。Therefore, the method for manufacturing a multicolor color filter of the present invention is of high industrial value.
以 上 出碩人 セイコーエプソン株式会社that's all Seiko Epson Corporation
Claims (1)
方法において、反応性色素と光による官能基発生(消滅
)型樹脂を用いることを特徴とする多色カラーフィルタ
の製造方法。A method for producing a multicolor color filter using a photolithography method, characterized in that a reactive dye and a resin that generates (disappears) functional groups by light are used.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63077257A JPH01248101A (en) | 1988-03-30 | 1988-03-30 | Manufacture of multicolor filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63077257A JPH01248101A (en) | 1988-03-30 | 1988-03-30 | Manufacture of multicolor filter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01248101A true JPH01248101A (en) | 1989-10-03 |
Family
ID=13628802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63077257A Pending JPH01248101A (en) | 1988-03-30 | 1988-03-30 | Manufacture of multicolor filter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01248101A (en) |
-
1988
- 1988-03-30 JP JP63077257A patent/JPH01248101A/en active Pending
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