JPH01246999A - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JPH01246999A JPH01246999A JP7547888A JP7547888A JPH01246999A JP H01246999 A JPH01246999 A JP H01246999A JP 7547888 A JP7547888 A JP 7547888A JP 7547888 A JP7547888 A JP 7547888A JP H01246999 A JPH01246999 A JP H01246999A
- Authority
- JP
- Japan
- Prior art keywords
- acoustic
- ultrasonic probe
- layer
- probe
- pieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 25
- 239000012814 acoustic material Substances 0.000 claims abstract description 12
- 229920005749 polyurethane resin Polymers 0.000 claims abstract description 6
- 229920001971 elastomer Polymers 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 7
- 238000009751 slip forming Methods 0.000 abstract description 3
- 238000003745 diagnosis Methods 0.000 abstract description 2
- 238000012856 packing Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000002604 ultrasonography Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は超音波探触子を利用分野とし、特に音響整合層
による指向特性への影響を防止した超音波探触子に関す
る。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention is applied to an ultrasonic probe, and particularly relates to an ultrasonic probe that prevents the directivity characteristics from being affected by an acoustic matching layer.
（発明の背漿）
超音波探触子は例えば医用、鉱工業用等の診断装置及び
探傷装置に超音波送受波源として有用される。近年では
、電子走査による例えばセクタ方式やリニア方式等の診
断装置が普及し、医用等で顕著な効果を示している。そ
１７て、このような診断装置には圧電片の複数個を並べ
た所謂配列型の超音波探触子が利用される。(Background of the Invention) Ultrasonic probes are useful as ultrasonic wave transmitting/receiving sources in, for example, medical, mining and industrial diagnostic equipment and flaw detection equipment. In recent years, diagnostic devices using electronic scanning, such as sector type or linear type, have become widespread and have shown remarkable effects in medical applications. 17. Such a diagnostic device utilizes a so-called array type ultrasonic probe in which a plurality of piezoelectric pieces are arranged side by side.
（従来技術） 第３図はこの種の超音波探触子を説明する図である。(Conventional technology) FIG. 3 is a diagram illustrating this type of ultrasonic probe.
複数個の圧電片１はそれぞれ例えばジルコン酸チタン酸
鉛（以下、Ｐ、Ｚ Ｔとする）からなり、両主面に厚み
振吻を励起する電極２を形成する。−方の主面側はバッ
キング材３上に固着されろ。他方の主面側は連続した音
ｖ３整合層４を取着して超音波送受波面とする。音響整
合層４は各圧電片１と図示１７ない被検出体との音響イ
ンピーダンスを整合させ、超音波エネルギーの伝搬損失
を最小にする。例えばＰ ７． Ｔの音響インピーダン
スは約３０ Ｘ １０ ’ｋｇ／ｍ ”ｓｅＣ，被検出
体を人体とするとその値はは約１ 、５ Ｘ １０ ＠
ｋｇ／ｍ ２−３ｅｅで、音響整合層は約４Ｘ１０’に
に７ｍ ”ｓｅｅに設定される。Each of the plurality of piezoelectric pieces 1 is made of, for example, lead zirconate titanate (hereinafter referred to as P, ZT), and has electrodes 2 on both principal surfaces for exciting thickness variation. - The main surface side is fixed onto the backing material 3. A continuous sound V3 matching layer 4 is attached to the other main surface to form an ultrasonic wave transmitting/receiving surface. The acoustic matching layer 4 matches the acoustic impedance between each piezoelectric piece 1 and a detected object (not shown), thereby minimizing the propagation loss of ultrasonic energy. For example, P7. The acoustic impedance of T is approximately 30 x 10'kg/m''seC, and if the detected object is a human body, the value is approximately 1,5 x 10 @
kg/m2-3ee, the acoustic matching layer is set to approximately 4X10' to 7m''see.
通常では、この値を満足するものとしてエポキシ樹脂が
選定される。そして、伝搬損失を更に少なくする場合に
は、音響整合ＩＰ！４を多層構造として送受波効率を高
める。例えば、第１と第２の音響整合層４ａ、４ｂを積
層して音参ｌＪインピーダンスを被検出体に向って徐々
に小さくする「第３図（ｈ）、＋。なお、各圧電片１間
には例えばシリコン′Ｖｊ４胞等の充填材を埋設して音
響的結合を防止して強度を高めろ。Usually, epoxy resin is selected as one that satisfies this value. And if you want to further reduce the propagation loss, use acoustic matching IP! 4 has a multilayer structure to improve wave transmission and reception efficiency. For example, the first and second acoustic matching layers 4a and 4b are laminated to gradually reduce the acoustic reference impedance toward the detected object. For example, bury a filler such as silicon 'Vj4 cell in the hole to prevent acoustic coupling and increase the strength.
そして、このようなものでは、例えば電極２に図示（７
ないリード線を接続して各圧電片１を遅延動作ｊ７、超
音波を扇状に送受波する所謂セクタ駆動して図示しない
診断装置本体により被検出体の疾患部の状況を映像化し
て診断する。In such a device, for example, the electrode 2 is shown (7
The piezoelectric pieces 1 are connected to lead wires, and each piezoelectric piece 1 is operated in a delay operation j7, and is driven in a so-called sector drive that transmits and receives ultrasonic waves in a fan shape, and the state of the diseased part of the detected object is visualized and diagnosed using the main body of the diagnostic apparatus (not shown).
（従来技術の問題点）
しかしながら、上記構成の超音波探触子では、音響整合
Ｒ４は各圧電片上に連続して形成されるため、音響整合
層４を媒介して各圧電片１間で音ｗ的な相互干渉を引き
起こす。そして、相互干渉は例えばセクタ駆動したとき
に指向特性を劣化させろ。(Problems with the prior art) However, in the ultrasonic probe with the above configuration, since the acoustic matching R4 is formed continuously on each piezoelectric piece, the sound is transmitted between each piezoelectric piece 1 via the acoustic matching layer 4. cause mutual interference. Mutual interference deteriorates the directivity characteristics when driving sectors, for example.
第４図はこのことを明確ｉこする本発明者等の実験によ
る指向特性図である。なお、この実験は音ＩＪＪ整合層
４を連続する二層構造とした場合［前第３図（ｈ） １
である。すなわち、送受波面に対して垂直方向（ｐ）の
放射レベルを０ｄＢとすると、例えば＋３０度領域では
一１５ｄＢとしてそれ以降にサイドロブを発生する「第
４図曲線（イ）」。FIG. 4 is a directivity characteristic diagram based on experiments conducted by the inventors that clearly demonstrates this. This experiment was conducted when the sound IJJ matching layer 4 had a continuous two-layer structure [see Figure 3 (h) 1
It is. That is, if the radiation level in the direction (p) perpendicular to the transmitting/receiving wave surface is 0 dB, then it is -15 dB in the +30 degree region, for example, and a side lobe is generated after that as shown in "Curve (A) in Figure 4."
従って、このような場合は、超音波の波面を不均一とし
て点音源からの送受波とならず、超音波の送受波領域を
狭めて広範囲の診断ができなくなる。Therefore, in such a case, the wavefront of the ultrasonic wave is non-uniform and the wave cannot be transmitted or received from a point source, and the ultrasonic wave transmission/reception area is narrowed, making it impossible to diagnose a wide range.
なお、エポキシ樹脂からなる音ＶＪ整合層４を独立分離
し、指向特性を維持するようにしたものがある「第３図
（Ｃ）」。この場合には、垂直方向（ｐ）に対して±３
０度の領域では一２ｄＢとしてサイドロブの発生を抑止
する「第４図曲ｍ（ロ）１゜すなわち、連続した音Ｗ整
合層の場合に比較してその指向特性を改善する。しかし
、このようなものでは、音Ｗ整灸層４が独立しているた
め、特に多層構造としたときは各圧電片１に対する付着
強度の低下や位置づれ等の製造上の問題があった。In addition, there is a device in which the sound VJ matching layer 4 made of epoxy resin is separated independently and the directional characteristics are maintained, as shown in FIG. 3 (C). In this case, ±3 with respect to the vertical direction (p)
In the 0 degree region, the side lobe is suppressed by -2 dB. In this case, since the sound W moxibustion layer 4 is independent, there are manufacturing problems such as a decrease in adhesion strength to each piezoelectric piece 1 and misalignment, especially when a multilayer structure is used.
（発明の目的）
本発明は、指向特性を良好として作業性の良好な配列型
の超音波探触子を捷供することを目的とする。(Objective of the Invention) An object of the present invention is to provide an array-type ultrasonic probe with good directivity and good workability.
（解決手段）
本発明；よ、複数個を配列した圧電片の一方の主面に連
続して形成する音響整合層を０．５〜２゜０ｄＲ／ｍｍ
−ＭＨｚの音響材から形成したことを解決手段とする。(Solution Means) The present invention: The acoustic matching layer is continuously formed on one main surface of a plurality of piezoelectric pieces arranged at a pitch of 0.5 to 2°0 dR/mm.
- MHz acoustic material is used as a solution.
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
（実施例）
第１図は本発明の一実施例を説明する超音波探触子の図
である。なお、前実施例図と同一部分には同番号を付与
して説明する。(Embodiment) FIG. 1 is a diagram of an ultrasonic probe illustrating an embodiment of the present invention. Note that the same parts as in the previous embodiment drawings are given the same numbers and explained.
超音波探触子は、前従来例同様にバッキング材３上にＴ
’ ７． Ｔからなる？Ｗ数個の圧電片１を配列してな
る。圧電片１の両主面には厚み振動を励起２する電極を
形成１７、送受波面側に多層構造とする第１と第２の音
響整合層６ａ、６ｂをを例えばコーティングにより取着
する。第１音ＩＪｊ整合［１６ａは各圧電片１上に独立
分離し、例えば音響インピーダンスを約７ Ｘ １０
’ｋｇ／ｍ”ｓｅｅとしたエポキシ樹ｎｎで、その厚み
を１７４波長とする。第２音響整自層６ｂ＋よ第１音響
整合層６ａ上に連続し、音響インピーダンスを約２Ｘ１
０’にに／諭”ｓｅｃと（〕たボリウレクン樹脂で、そ
の厚みを１７４波長とする。そして、このポリウレタン
樹脂は、横方向への音響エネルギーの漏れを防止する。The ultrasonic probe has T on the backing material 3 as in the previous conventional example.
'7. Consists of T? It is made by arranging several W piezoelectric pieces 1. Electrodes 17 for exciting thickness vibrations are formed on both main surfaces of the piezoelectric piece 1, and first and second acoustic matching layers 6a and 6b having a multilayer structure are attached to the wave transmitting/receiving surface side by, for example, coating. First sound IJj matching [16a is independently separated on each piezoelectric piece 1, for example, the acoustic impedance is about 7 x 10
The thickness of the epoxy tree is 174 wavelengths.
The polyurethane resin has a thickness of 174 wavelengths.This polyurethane resin prevents leakage of acoustic energy in the lateral direction.
すなわち、ポリウレタン樹脂は高減衰量の音響材として
作用し、各圧電片間の相互干渉を少なくする。なお、各
圧電片１間及び第１音響整合層６８間には前述１７た充
ｔａ材５を埋設する。That is, the polyurethane resin acts as a high-attenuation acoustic material and reduces mutual interference between the piezoelectric pieces. Note that the filler material 5 described above is buried between each piezoelectric piece 1 and between the first acoustic matching layers 68.
第２図はこの構成の超音波探触子をセクタ駆動した場合
の指向特性図である。この図から明らかなように、垂直
方向（ｐ）を０ｄＢとすると、±３０度領域では約３ｄ
Ｒの減衰に止める。すなわち、音！＃整合層をエポキシ
樹脂として連続した場合「第３図（ｂ）１と分離独立し
た場合「第３図（Ｃ）１どの中間値を得ろ。そして、＋
３０度以降でのサイドロブの発生を抑止する。FIG. 2 is a directional characteristic diagram when the ultrasonic probe with this configuration is driven in sectors. As is clear from this figure, if the vertical direction (p) is 0 dB, approximately 3 dB in the ±30 degree region
Stop at R damping. In other words, sound! #If the matching layer is made of epoxy resin and is continuous "Figure 3 (b) 1 and if it is separated and independent" Figure 3 (C) 1 Which intermediate value should you obtain?And +
Prevents side lobs from occurring at 30 degrees or higher.
従って、このようなものでは、超音波の波面を均一にし
て点音源からの送受波に近接し、超音波の送受波領域を
大きくして広範囲の診断を行え得る。また、第２音響整
合層６ｂは連続するため、第１音響整合育６ａに対する
付着強度を高めて位置づれ等も起こすことなく作業性を
良好とする。Therefore, in such a device, the wavefront of the ultrasound is made uniform so that it is close to the transmission and reception of waves from a point sound source, and the transmission and reception area of the ultrasound is enlarged, so that a wide range of diagnosis can be performed. In addition, since the second acoustic matching layer 6b is continuous, the adhesion strength to the first acoustic matching layer 6a is increased, and the workability is improved without causing misalignment.
（他の事項）
なお、上記実施例では音ＩＪｉ整合層を二層構造として
一層目を分離独立したが、−層目、二層目とも連続した
高減衰量の音響材としても、又高減衰量の音響材材によ
る連続した一層構造としてもよい。また、各圧電片１及
び第１音響整合暦６間には充填材５を埋設したが、単に
空隙としもよい。(Other matters) In the above example, the sound IJi matching layer has a two-layer structure, and the first layer is separated and independent. It may also be a continuous single-layer structure made of a large amount of acoustic material. Further, although the filler 5 is embedded between each piezoelectric piece 1 and the first acoustic matching calendar 6, it may be simply a gap.
また、高減衰量の音響材としてポリウレタン樹脂を示し
たが、減衰量を０．５〜２．０ｄＢ／ｍｍ ・Ｍ Ｈｖ
材料とした音響材であればばよいことは勿論である。ま
た、超音波探触子をセクタ駆動としたが、リニア駆動で
あっも、更には圧電片を曲面上に配列したものでも適用
される。In addition, polyurethane resin is shown as an acoustic material with high attenuation, but the attenuation is 0.5 to 2.0 dB/mm ・MHv
Of course, any acoustic material may be used as the material. Further, although the ultrasonic probe is sector-driven, linear drive or even one in which piezoelectric pieces are arranged on a curved surface can be applied.
（発明の効果）
本発明は、複数個を配列した圧電片の一方の主面に連続
して形成する音響整合層を０．５〜２．０ｄ Ｒ／ ｍ
ｍ−Ｍ Ｈｚの音響材から形成したので、指向特性を
良好として作業性の良好な配列型の超音波探触子を押供
できる。(Effects of the Invention) The present invention provides an acoustic matching layer formed continuously on one main surface of a plurality of piezoelectric pieces arranged at a pitch of 0.5 to 2.0 dR/m.
Since it is made of m-MHz acoustic material, it is possible to provide an array type ultrasonic probe with good directivity and good workability.
第１図は本発明の一実施例を説明する超音波探触子の断
面図、第２図は同実施例の効果を説明する指向特性図で
ある。
第３図（ａ）（ｂ）（ｅ）は従来例を説明する超音波探
触子の断面図、第４図は同従来例の指向特性図である。
１・・圧電片、２・・電極、３ ・バッキング材、４．
６ ・音響整合層、５・・充填材、。
第１図
第２ｒＭ
第４閃FIG. 1 is a sectional view of an ultrasonic probe illustrating an embodiment of the present invention, and FIG. 2 is a directional characteristic diagram illustrating the effects of the embodiment. 3(a), 3(b), and 3(e) are cross-sectional views of an ultrasonic probe illustrating a conventional example, and FIG. 4 is a directional characteristic diagram of the same conventional example. 1. Piezoelectric piece, 2. Electrode, 3. Backing material, 4.
6. Acoustic matching layer, 5. Filling material. Figure 1 2rM 4th Flash
Claims (4)
層を連続して取着した超音波探触子において、前記音響
整合層を減衰量０．５〜２．０ｄＢ／ｍｍ・ＭＨｚの音
響材から形成したことを特徴とする超音波探触子。(1) In an ultrasonic probe in which an acoustic matching layer is successively attached to one main surface of a plurality of piezoelectric pieces arranged, the acoustic matching layer has an attenuation of 0.5 to 2.0 dB/mm. An ultrasonic probe characterized in that it is formed from a MHz acoustic material.
した第１音響整合層と連続した第２音響整合層とを積層
した超音波探触子において、前記第２音響整合層を減衰
量０．５〜２．０ｄＢ／ｍｍ・ＭＨｚの音響材から形成
したことを特徴とする超音波探触子。(2) In an ultrasonic probe in which a divided and independent first acoustic matching layer and a continuous second acoustic matching layer are laminated on one main surface of a plurality of piezoelectric pieces arranged, the second acoustic matching layer is An ultrasonic probe characterized in that it is formed from an acoustic material with an attenuation of 0.5 to 2.0 dB/mm.MHz.
特許請求の範囲第１項記又は第２項記載の超音波探触子
。(3) The ultrasonic probe according to claim 1 or 2, wherein the high attenuation acoustic material is a polyurethane resin.
囲第１項又は第２項記載の超音波探触子。(4) The ultrasonic probe according to claim 1 or 2, wherein the high attenuation acoustic material is rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7547888A JPH0810960B2 (en) | 1988-03-29 | 1988-03-29 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7547888A JPH0810960B2 (en) | 1988-03-29 | 1988-03-29 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01246999A true JPH01246999A (en) | 1989-10-02 |
| JPH0810960B2 JPH0810960B2 (en) | 1996-01-31 |
Family
ID=13577445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7547888A Expired - Fee Related JPH0810960B2 (en) | 1988-03-29 | 1988-03-29 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810960B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03296658A (en) * | 1990-04-16 | 1991-12-27 | Tokimec Inc | Ultrasonic probe |
-
1988
- 1988-03-29 JP JP7547888A patent/JPH0810960B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03296658A (en) * | 1990-04-16 | 1991-12-27 | Tokimec Inc | Ultrasonic probe |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0810960B2 (en) | 1996-01-31 |
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