JPH01246078A - Abrasive stone and manufacturing method thereof - Google Patents

Abrasive stone and manufacturing method thereof

Info

Publication number
JPH01246078A
JPH01246078A JP7130188A JP7130188A JPH01246078A JP H01246078 A JPH01246078 A JP H01246078A JP 7130188 A JP7130188 A JP 7130188A JP 7130188 A JP7130188 A JP 7130188A JP H01246078 A JPH01246078 A JP H01246078A
Authority
JP
Japan
Prior art keywords
polishing
liquid
abrasive grains
water
stone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7130188A
Other languages
Japanese (ja)
Other versions
JPH0763936B2 (en
Inventor
Yasuhiro Tani
泰弘 谷
Sanso Sato
三倉 佐藤
Kenji Kawada
研治 河田
Yusuke Matsumura
松村 雄介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiho Kogyo Co Ltd
Original Assignee
Taiho Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiho Kogyo Co Ltd filed Critical Taiho Kogyo Co Ltd
Priority to JP63071301A priority Critical patent/JPH0763936B2/en
Publication of JPH01246078A publication Critical patent/JPH01246078A/en
Publication of JPH0763936B2 publication Critical patent/JPH0763936B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To prevent water from permeating into an abrasive stone deeply, to avoid the softening of the abrasive stone and to diminish the abrasion loss of the abrasive stone for prolong the life of the abrasive stone by making the abrasive stone contain water repellent agent at the rate of specified weight% to abrasive grains. CONSTITUTION:Mixture composed of abrasive grains and liquid binder(water for example) is compressed to for a compact. Water repellent agent(silicon oil or paraffin wax for example) is given to this compact to obtain a desired abrasive stone. In this case, the content of water repellent agent in the abrasive stone must be 0.05 through 5weight% or 1 through 3weight%, if possible, to the abrasive grains. As a result, even if polishing is done with the abrasive stone sprayed or poured water, the water will permeate to a fixed depth of the abrasive stone, but is prevented from permeating into the abrasive stone deeply by water repellent agent. For this reason the softening of the polishing stone is avoided, and the physical strength of the polishing stone is not deteriorated, and the abrasion loss of the polishing stone is diminished, which makes it possible to prolong the life of the polishing stone.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は硬脆材、金属材、合成樹脂等の被研磨材を精密
研磨仕上げするのに好適な研磨用砥石に関し、さらに詳
しく言うと、研磨表面に水を供給しながら研磨する場合
においても、その水によって軟化することのない、研磨
寿命の長い研磨用砥石に係るものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a grinding wheel suitable for precision polishing finishing materials to be polished such as hard brittle materials, metal materials, and synthetic resins. The present invention relates to a polishing whetstone that has a long polishing life and is not softened by the water even when polishing is performed while supplying water to the polishing surface.

[従来の技術] 液体ボンド砥石は砥粒に少量の液体を加えて均一に混合
し、型枠に入れて圧縮成形した砥石であり、この液体ボ
ンド砥石は硬脆材のセラミック類、金属材、ガラス、合
成樹脂等の精密研磨に広く使用されている。
[Prior Art] A liquid bond whetstone is a whetstone that is made by adding a small amount of liquid to abrasive grains, mixing them uniformly, putting them in a mold, and compression molding them. Widely used for precision polishing of glass, synthetic resin, etc.

この液体ボンド砥石については、たとえば「谷、河田「
液体ボンド砥石を用いた高精度研磨法の開発J E1本
機械学会論文集第50巻471号、昭和60−11J 
、  f谷、河田「液体ボンド砥石を用いた高能率研磨
法の開発」生産研究第37巻7号。
Regarding this liquid bond grindstone, for example, "Tani, Kawada"
Development of high precision polishing method using liquid bond grindstone J E1 Transactions of the Japan Society of Mechanical Engineers Vol. 50 No. 471, 1986-11J
, F. Tani, Kawata, “Development of high-efficiency polishing method using liquid bond grindstone,” Production Research Vol. 37, No. 7.

1985、7 J、「谷、河田「液体ボンド砥石の境面
断心への適用」昭和60年度精機学会秋季大会学術講演
会論文集」、r谷、河田「液体ボンド砥石によるシリコ
ンウェハの高能率研磨」昭和61年度精密工学会春季大
会学術講演会論文集J、r河田「液体ボンド砥石を用い
た高能率・高精度研磨法」日本機械学会誌、第90巻第
821号、昭和62年4月1等に記載されている。
1985, 7 J, "Tani, Kawada "Application of liquid bond grinding wheel to interface cutting" Proceedings of the 1985 Japan Society of Precision Machinery Autumn Conference Academic Lectures", R Tani, Kawada "High efficiency of silicon wafers using liquid bond grinding wheel""Polishing" 1985 Society for Precision Engineering Spring Conference Proceedings J, r Kawata "High efficiency and high precision polishing method using liquid bond grindstone" Journal of the Japan Society of Mechanical Engineers, Vol. 90, No. 821, 1986 4 It is listed in the 1st issue of the month.

これらの文献に記載の液体ボンド砥石は、砥粒と液体と
の混合比をペンデュラー域とファニキュラー域との間に
あるように設定し、混合、圧縮。
The liquid bonded grindstone described in these documents sets the mixing ratio of abrasive grains and liquid to be between the pendular region and the funicular region, and performs mixing and compression.

成形茅の操作により製造される砥石である。This is a whetstone manufactured by manipulating molded grass.

その場合、液体の混合比か小さいので混合物の流動性か
悪く、砥粒と液体との混合が不均一になる。そこで、そ
の不均一な混合状態のままで前記混合物を圧1il成形
すると、成形された液体ボンド砥石は密度や硬さにばら
つきが生じ、研磨の際に¥1分的に砥石か崩壊したり、
研磨の仕上りにむらが生しる。そのようなペンデュラー
域とファニキュラー域との間になるような砥粒と液体と
の混合比は砥粒や液体の種類、砥粒の粒径、形状等によ
り異なるのであるが、通常、砥粒のlO%〜20%程度
であると考えられていて、非常に小さいものである。
In this case, since the mixing ratio of the liquid is small, the fluidity of the mixture is poor, and the abrasive grains and the liquid are mixed non-uniformly. Therefore, if the mixture is pressure-molded in the non-uniform mixed state, the formed liquid bond grindstone will have variations in density and hardness, and the grindstone may collapse within 1 minute during polishing.
The polishing finish is uneven. The mixing ratio of abrasive grains and liquid that is between the pendular region and the funicular region varies depending on the type of abrasive grains and liquid, the particle size and shape of the abrasive grains, etc. It is thought that it is about 10% to 20% of the total, which is extremely small.

本出願人は、未だ公知ではないが、前記文献に記載の液
体ボンド砥石の欠点を解消する液体ボンド砥石として、
砥粒を結合する液体を、この液体より揮発し易い他の液
体て希釈し、過剰量のこの稀釈液と前記砥粒とを均一に
混合し、その後に過剰分の液体を除去することにより、
あるいは砥粒と液体との混合比を、混合、圧縮、成形の
操作に都合の良い条件になるように任意に設定し、砥粒
と液体とを混合し、圧縮成形し、その後に乾燥処理によ
り液体の含有量を減少させることにより、ペンデュラー
域に達した状態の液体ボンド砥石を提案し、かつ、ペン
デュラー域に達した状態の液体ボンド砥石を使用する研
磨方法として、研磨時に、前記液体ボンド砥石に水その
他の液体を添加することを提案している。かかる提案に
係る研磨方法では、研磨時の水の添加により、液体ボン
ド砥石における砥粒の充填形態かペンデュラー域からフ
ァニキュラー域に達するので、良好な精密研磨を実現す
ることかできる。
The present applicant has proposed a liquid bond grindstone that eliminates the drawbacks of the liquid bond grindstone described in the above-mentioned document, although it is not yet publicly known.
By diluting the liquid that binds the abrasive grains with another liquid that is more volatile than this liquid, uniformly mixing an excess amount of the diluted liquid with the abrasive grains, and then removing the excess liquid,
Alternatively, the mixing ratio of the abrasive grains and the liquid can be arbitrarily set so that the conditions are convenient for mixing, compression, and molding operations, and the abrasive grains and the liquid are mixed, compression molded, and then dried. We propose a liquid bond grindstone that reaches the pendular region by reducing the liquid content, and as a polishing method that uses the liquid bond grindstone that reaches the pendular region. It is suggested that water or other liquids be added to the In the polishing method according to this proposal, since the filling form of the abrasive grains in the liquid bond grindstone reaches from the pendular region to the funicular region by adding water during polishing, it is possible to realize good precision polishing.

[発明が解決しようとする課題] 砥粒を液体で結合してペンデュラー城とファニキュラー
域との間にあるような砥粒の充填状態となった従来公知
の液体ボンド砥石を使用して断心処理作業を行う場合、
研磨中に発生する摩擦熱による被研磨材の温度上昇を抑
制したり、液体ボンド砥石の表面に付着する切り子を除
去したりするために、液体ボンド砥石の表面に水もしく
は水性液体を流したり、あるいは噴霧したりすることが
行なわれる。
[Problems to be Solved by the Invention] Center cutting is performed using a conventionally known liquid bonded grindstone in which abrasive grains are bonded with a liquid so that the abrasive grains are filled between the pendulum castle and the funicular region. When carrying out processing operations,
In order to suppress the temperature rise of the polished material due to the frictional heat generated during polishing, or to remove chips that adhere to the surface of the liquid bond grindstone, water or an aqueous liquid is poured on the surface of the liquid bond grindstone. Alternatively, spraying is performed.

しかしながら、前述のように、研磨中に水もしくは水性
液体をかけたり噴霧したりすると、液体ボンド砥石の内
部に水が浸入し、その結果、ペンデュラー域とファニキ
ュラー域との間にある砥粒の充填状態が急速にキャピラ
リー状態あるいは極端な場合にはスラリー状態になって
しまい、液体ボンド砥石による研磨が不可部になってし
まう。
However, as mentioned above, when water or aqueous liquid is applied or sprayed during polishing, water infiltrates into the interior of the liquid bond grinding wheel, and as a result, the abrasive grains between the pendular region and the funicular region are The filling state rapidly becomes a capillary state or, in extreme cases, a slurry state, making polishing with a liquid bond grindstone impossible.

また、本出願人が提案している研磨方法においては、砥
粒の充填状態がペンデュラー域に達している液体ボンド
砥石を使用して研磨する際に前記と同様に液体ボンド砥
石の表面に水もしくは水性液体を流したり、あるいは噴
霧したりすることにより、ペンデュラー域からファニキ
ュラー域へと砥粒の充填状態を変化せしめて良好な研磨
状態を実現している。
In addition, in the polishing method proposed by the present applicant, when polishing using a liquid bond whetstone in which the abrasive grain filling state has reached the pendulum range, water or By flowing or spraying an aqueous liquid, the filling state of the abrasive grains is changed from the pendular region to the funicular region, thereby achieving a good polishing state.

しかしなから、本発明者らがさらに検討したところ、本
出願人か提案している研磨方法においては、研磨時に添
加する水等が液体ボンド砥石の研磨面かられずかに深い
所まてしか浸入しないのであれば良好な研磨が実現され
るのであるが、研磨時に液体ボンド砥石に添加する水の
添加量を管理しないでいると、添加する水等が徐々に液
体ボンド砥石の内部深くに浸入してボンド剤を軟化ある
いは液化させ、液体ボンド砥石全体が軟化することが判
明した。
However, upon further study by the present inventors, it was found that in the polishing method proposed by the present applicant, the water added during polishing only penetrates to a very deep place from the polishing surface of the liquid bond grindstone. If not, good polishing will be achieved, but if the amount of water added to the liquid bond whetstone is not controlled during polishing, the added water will gradually penetrate deep into the liquid bond whetstone. It was found that the bonding agent was softened or liquefied, and the entire liquid bond grinding wheel was softened.

研磨時に液体ボンド砥石に添加する水等の添加量を厳密
に管理するのは極めて煩雑である。
It is extremely complicated to strictly control the amount of water, etc. added to the liquid bond grindstone during polishing.

と言って、添加する水等の量を管理しないままに過剰量
の水を添加すると、前述のように、過剰の水か液体ボン
ド砥石の内部深くに浸透することにより、液体ボンド砥
石が軟化し、研磨時の押圧力により崩壊し、その砥粒か
削りとられる。
However, if you add an excessive amount of water without controlling the amount of water added, as mentioned above, the excess water will penetrate deep into the liquid bond grinding wheel, causing it to soften. , it collapses due to the pressing force during polishing, and the abrasive grains are scraped off.

そして、研磨中に液体ボンド砥石中に水か浸入すること
により、砥粒の減耗量か異常に大きくなって、砥石の寿
命か短くなり、ひいては加工コストの増大を招いてしま
う。
If water intrudes into the liquid bond grindstone during polishing, the amount of abrasive grains worn out becomes abnormally large, shortening the life of the grindstone and eventually increasing processing costs.

以上のように、従来の液体ボンド砥石においても、また
本出願人の提案に係る液体ボンド砥石においても、研磨
時に研磨面に供給する水やその他の冷却液体による砥石
の軟化を防止することが大きな課題となっている。
As described above, in both the conventional liquid bond grindstone and the liquid bond grindstone proposed by the applicant, it is important to prevent the grindstone from softening due to water and other cooling liquids supplied to the polishing surface during polishing. It has become a challenge.

本発明の目的は前記課題を解決し、研磨時に供給する水
もしくは水性液体による砥石の軟化を防止した研磨用砥
石、あるいは研磨時に添加する水等の添加量を厳格に管
理せずに水等を添加してもその水等によって容易に軟化
しない研磨用砥石を提供することであり、また本発明の
他の目的は前記研磨用砥石を製造する新規な方法を提供
することである。
The object of the present invention is to solve the above-mentioned problems, and to provide a grinding wheel that prevents softening of the grindstone due to water or aqueous liquid supplied during polishing, or a grindstone that can be used without strictly controlling the amount of water added during polishing. It is an object of the present invention to provide a polishing wheel that does not easily soften due to water or the like even when added to the polishing wheel.Another object of the present invention is to provide a novel method for manufacturing the polishing wheel.

[課題を解決するだめの手段および作用ゴ前記課題を解
決するための請求項1に記載の発明は、砥粒を液状結合
剤で結合し、圧縮成形してなる成形体が、砥粒に対l)
て01.05〜5重駿%の割合の撥水剤を含有すること
を特徴とする研磨用砥石である。
[Means and Functions for Solving the Problems] The invention as set forth in claim 1 for solving the above problems is such that a molded article formed by bonding abrasive grains with a liquid binder and compression molding is bonded to the abrasive grains. l)
This is a polishing whetstone characterized by containing a water repellent in a proportion of 01.05 to 5%.

前記:XR題を解決するための請求項2に記載の発明は
、砥粒と液状結合剤と撥水剤とを混合し、圧縮成形する
ことを特徴とする研磨用砥石の製造方性である。
The invention according to claim 2 for solving the above-mentioned XR problem is a manufacturing method of a polishing whetstone, characterized in that abrasive grains, a liquid binder, and a water repellent are mixed and compression molded. .

前記課題を解決するための請求項3に記載の発IJIは
、砥粒と液状結合剤との混合物を圧縮して成形体に成形
し、この成形体に撥水剤を+1与することを特徴とする
研磨用砥石の製造方法である。
The IJI according to claim 3 for solving the above problem is characterized in that a mixture of abrasive grains and a liquid binder is compressed to form a molded body, and a water repellent agent of +1 is added to this molded body. This is a method for manufacturing a grinding wheel.

本発明の研磨用砥石を構成する砥粒としては。The abrasive grains constituting the polishing whetstone of the present invention include:

研磨性を有する粒子ならば特に制限がなく1例えばダイ
ヤモンド、コランダム、エメリ、ザクロ石、珪石、トリ
ポリ、焼成ドロマイト、熔融アルミナ、人造エメリ、炭
化ケイ素、炭化ホウ素、酸化鉄、焼成アルミナ、酸化ク
ロム、酸化ヤリ・ブム、酸化ジルコニウム、酸化マグネ
シウム、’tRNカルシウム、シリカ、シラス等を挙げ
ることか”rきる。
There are no particular restrictions as long as the particles have abrasive properties; for example, diamond, corundum, emery, garnet, silica, tripoli, calcined dolomite, fused alumina, artificial emery, silicon carbide, boron carbide, iron oxide, calcined alumina, chromium oxide, I can't list any of the following, including oxide, zirconium oxide, magnesium oxide, 'tRN calcium, silica, whitebait, etc.

前記砥粒の粒径は、30pmの微粉か好ましい。なお、
砥粒粒度の選択は5基本的には要求される被研磨材の仕
上り面粗さによるものであるか、砥石の強度としては砥
粒が微細であればある程大きいから、砥粒径が大きいと
きには、微細な砥粒を混合して強度を増加させることも
できる。
The particle size of the abrasive grains is preferably fine powder of 30 pm. In addition,
The selection of abrasive grain size is basically based on the required finished surface roughness of the material to be polished, or the strength of the whetstone is determined by the finer the abrasive grains, the larger the abrasive grain size. Sometimes, fine abrasive grains can be mixed in to increase strength.

前記液状結合剤と1ノては砥粒を結合して成形体にする
ことかできるものならば特に制限か無く、たとえば、水
、アルカリ性溶液、酸性溶液、その他の塩類を含有する
水溶液、高分子溶液、油状液体、磁性流体などを挙げる
ことができる。また、観点を変えて言うならば、前記液
状結合剤は、添加剤として有機物質を含有する液状結合
剤、添加剤として無機物質(この場合、金属を含まない
The liquid binder is not particularly limited as long as it can bind abrasive grains and form a molded product, such as water, an alkaline solution, an acidic solution, an aqueous solution containing other salts, or a polymer. Examples include solutions, oily liquids, magnetic fluids, and the like. Also, from a different perspective, the liquid binder may be a liquid binder containing an organic substance as an additive, or an inorganic substance as an additive (in this case, it does not contain metal).

)を含有する液状結合剤のいずれでもよい。) may be used.

前記有機物質としては、たとえば、フェノール樹脂、キ
シレン樹脂、ポリビニルアルコール樹脂、アクリル系樹
脂、ウレタン樹脂、カルボキシメラルセルロース((:
M(:)、でんぷん、石油樹脂等などを挙げることかで
きる。
Examples of the organic substances include phenolic resin, xylene resin, polyvinyl alcohol resin, acrylic resin, urethane resin, carboxymeral cellulose ((:
Examples include M(:), starch, petroleum resin, etc.

前記無機物質としては、水ガラス、塩化マグネシウム等
を挙げることかできる。
Examples of the inorganic substance include water glass and magnesium chloride.

液状結合剤の液の状態としては、溶液、エマルジョン、
サスペンションのいずれの形であっても良い。
The liquid state of the liquid binder is solution, emulsion,
Any form of suspension may be used.

液状結合剤は、前述のように、砥粒を結合することがて
きれば、単なる水てあっても良いのであるが、通常の場
合、添加剤を含有する液状結合剤を使用するのか好まし
い。この添加剤は、砥粒同士をさらに強固に結合させて
、研磨用砥石の機械的強度を著しく大きくするとの作用
を有する。
As mentioned above, the liquid binder may be simply water as long as it can bind the abrasive grains, but it is usually preferable to use a liquid binder containing additives. This additive has the effect of further strongly bonding the abrasive grains to each other and significantly increasing the mechanical strength of the polishing wheel.

液状結合剤の研磨用砥石中の含有量は、砥粒かペンデュ
ラー域とファニキュラー域との中間の充填状態にあり、
好ましくはぺ、ンデュラー域の充填状態にあるような含
有量範囲内である。
The content of the liquid binder in the polishing wheel is in a filling state between the abrasive grains and the pendular region and the funicular region.
Preferably, the content is within a range that provides a filling state in the granular region.

液状結合剤のかかる含イj量は、砥粒の種類、砥粒のモ
均粒径、液状結合剤の種類、液状結合剤中に含まれる添
加剤の種類とその量によって変化するので−・概に規定
することができないが、通常。
The content of the liquid binder varies depending on the type of abrasive grains, the average particle diameter of the abrasive grains, the type of liquid binder, and the type and amount of additives contained in the liquid binder. It cannot be generally specified, but it is normal.

液状結合剤の含有量は、砥粒の10〜20重量%である
とペンデュラー域とファニキュラー域との中間の充填状
態にある砥粒の充填状態を実現することかでき、また、
砥粒をペンデュラー域の充填状態にするのであれば1通
常、液状結合剤の砥粒中の含有量は砥粒の1〜20重量
%、好ましくは5〜15重量%である。
When the content of the liquid binder is 10 to 20% by weight of the abrasive grains, it is possible to realize a filling state of the abrasive grains that is intermediate between the pendular region and the funicular region, and
If the abrasive grains are to be filled in the pendular region, the content of the liquid binder in the abrasive grains is usually 1 to 20% by weight, preferably 5 to 15% by weight of the abrasive grains.

液状結合剤に添加剤を含有せしめるのであれば、前記添
加剤の研磨用砥石中の含有量は、砥粒、液状結合剤を形
成する液体の種類等により相違して一概に規定すること
ができないが、一般的には砥粒に対して1重量%以下で
ある。
If an additive is to be included in the liquid binder, the content of the additive in the polishing whetstone cannot be unconditionally determined as it varies depending on the abrasive grains, the type of liquid forming the liquid binder, etc. However, it is generally 1% by weight or less based on the abrasive grains.

前記撥水剤としては、撥水性を付与し得る物質ならばい
ずれのものでも用いることができ、例えばシリコンオイ
ル、シリコンエマルジョン、水溶性シリコン、パラフィ
ンワックス、天然ワックス、ワウクスエマルジョン、フ
ッ素系撥水剤等を挙げることができる。
As the water repellent, any substance that can impart water repellency can be used, such as silicone oil, silicone emulsion, water-soluble silicone, paraffin wax, natural wax, wax emulsion, and fluorine-based water repellent. Agents, etc. can be mentioned.

前記撥水剤の研磨用砥石における含有量は、通常、砥粒
に対して0.05〜5重量%、好ましくは1〜3屯!、
;、%である。
The content of the water repellent in the polishing whetstone is usually 0.05 to 5% by weight, preferably 1 to 3 tons, based on the abrasive grains! ,
;, %.

+iij記撥水剤の含有1.)か0.051<j許%未
満であると、研磨用砥石に良好な撥水性か付与されず、
また、前記含有量が5重量%を超えると、撥水性か強く
なり過ぎて研磨用砥石の研磨表面に水等を添加した場合
に研磨用砥石の研磨面から所定の深さまでに水等が浸透
しなくなる。
+iii. Containing water repellent agent 1. ) is less than 0.051<j%, the polishing whetstone will not have good water repellency;
In addition, if the content exceeds 5% by weight, the water repellency becomes too strong, and when water, etc. is added to the polished surface of the polishing wheel, water penetrates from the polished surface of the polishing wheel to a predetermined depth. I won't.

この撥水剤の添加量は、重要な事柄である。と言うのは
、撥水剤を前記範囲の割合で含有することにより、研磨
用砥石で研磨する際に水等を添加すると、木等が研磨用
砥石の研磨時から所定の深さにまで浸透するがそれ以上
には特に浸透しないと言う微妙な作用が働くからである
。そして、このような微妙な作用か働くことによって、
断心用砥石の研磨時には、セルフドレッシングか阻害さ
れることなく達成されると共に、水等が研磨用砥石の内
部深くにまて浸透しないから研磨用砥石の軟化か防止さ
れる。
The amount of water repellent added is an important matter. This is because by containing a water repellent in the ratio in the above range, when water is added when polishing with a polishing whetstone, the wood etc. will penetrate to the specified depth from the time of polishing with the polishing whetstone. However, there is a subtle effect that prevents it from penetrating beyond that point. And, through such subtle effects,
During polishing of the cutting wheel, self-dressing is achieved without being inhibited, and water and the like do not penetrate deep into the polishing wheel, thereby preventing softening of the polishing wheel.

なお、この撥水剤は、また前記液状結合剤と同様に、研
磨用砥石中では、砥粒を結合する作用をも有していると
考えられる。
Note that this water repellent is also thought to have the function of binding abrasive grains in a polishing whetstone, similar to the liquid binder.

請求イ11に記載の研磨用砥石は、様々の方法により製
造することかてきるのであるか、特に請求項2および請
求項3に記載の方法により製造するのが好ましい。
The polishing whetstone according to claim 11 can be manufactured by various methods, but it is particularly preferable to manufacture it by the methods according to claims 2 and 3.

請求項2に記載の方法は、前記砥粒と前記液状結合剤と
前記撥水剤とを混合し、圧縮成形することを特徴とする
The method according to claim 2 is characterized in that the abrasive grains, the liquid binder, and the water repellent are mixed and compression molded.

混合に際する各成分の配合割合としては、各成分の種類
等により相違して一概に規定することができないけれど
、一般的には、前記砥粒が砥粒かペンデュラー域とファ
ニキュラー域との中間の充填状態にあり、好ましくはペ
ンデュラー域の充填状態にあるような含有量範囲内であ
る。
The mixing ratio of each component during mixing cannot be defined unconditionally as it varies depending on the type of each component, but generally speaking, it is determined whether the abrasive grains are abrasive grains or the ratio between the pendular region and the funicular region. It is within a content range such that it is in an intermediate filling state, preferably in a pendular region filling state.

混合に際しては、前記含有量の範囲内となるように設定
された割合の各成分を直ちに混合、混練しても良いが、
混合、圧縮、成形の操作に都合の良い条件になるように
各成分の配合割合を任意に設定し、しかる後各成分を混
合しても良い。
When mixing, each component may be immediately mixed and kneaded in a proportion set so that the content falls within the above content range, but
The proportions of each component may be arbitrarily set so as to provide conditions convenient for mixing, compression, and molding operations, and then the components may be mixed.

混合操作は通常の混合機、混合造粒機を使用することが
できる。
For the mixing operation, an ordinary mixer or mixing granulator can be used.

混合により得られた混合物は1次いで圧縮されて所定の
形状に成形される。
The mixture obtained by mixing is first compressed and molded into a predetermined shape.

圧縮成形は通常の圧縮成形機により行うことができる。Compression molding can be performed using a normal compression molding machine.

圧縮成形に要する圧力は100kg/cm2以上、望ま
しくは300kg/c禦2以上か好ましい。
The pressure required for compression molding is preferably 100 kg/cm2 or more, preferably 300 kg/cm2 or more.

請求項2に記載の発明においては、前記成形体中の砥粒
かペンデュラー域の充填状態にあるように、砥粒と液状
結合剤と撥水剤とを混合して得られる混合物を圧縮成形
して得られる成形体に、液体の含有量を減少させる液体
減量処理を行うのが好ましい。なお、場合によっては、
砥粒と液状結合剤と撥水剤とを混合して得られる混合物
について前記液体減量処理を行っても良いし、また、砥
粒と液状結合剤と撥水剤とを混合して得られる混合物を
圧縮成形するのと同時に前記液体減量処理を行っても良
い。
In the invention according to claim 2, a mixture obtained by mixing abrasive grains, a liquid binder, and a water repellent is compression molded so that the abrasive grains in the molded body are in a filled state in the pendular region. It is preferable to subject the molded article obtained by liquid reduction treatment to reduce the liquid content. In addition, in some cases,
The liquid reduction treatment may be performed on a mixture obtained by mixing abrasive grains, a liquid binder, and a water repellent, or a mixture obtained by mixing abrasive grains, a liquid binder, and a water repellent. The liquid reduction treatment may be performed at the same time as compression molding.

このような処理を経て得られる研磨用砥石にあっては、
含有される液体か砥粒の表面に吸着された状態になって
いて、前記液体が容易に砥粒から分離しない安定な状態
になる。したがって、砥粒がかかる充填状態にある研磨
用砥石は、長期間の保存によっても機械的強度に変化を
生じず、したがって、長期間の保存が可能になり、また
、機械的強度が低下しないので容易に開環したり破損し
たりしないから、運搬や装置への取り付けを容易なもの
とすることができる。
For polishing wheels obtained through such processing,
The liquid contained therein is adsorbed onto the surface of the abrasive grains, resulting in a stable state in which the liquid does not easily separate from the abrasive grains. Therefore, a polishing whetstone that is filled with abrasive grains does not change its mechanical strength even when stored for a long period of time. Since the ring does not open or break easily, it can be easily transported and attached to equipment.

前記液体減量処理としては、たとえば、乾燥機を使用す
る乾燥処理、吸液剤を接触させる吸液処理などを挙げる
ことかできる。
Examples of the liquid reduction treatment include a drying treatment using a dryer, a liquid absorption treatment in which a liquid absorbing agent is brought into contact with the liquid, and the like.

液体減量処理として乾燥処理を採用する場合、好ましく
は50〜70℃で10時間ないし数十時間、−段または
多段の乾燥を行ない、研磨用砥石中の液体含有量を約5
重量%以下にすることが好ましい。
When a drying process is employed as a liquid reduction process, drying is preferably performed at 50 to 70°C for 10 hours to several tens of hours, in stages or in multiple stages, to reduce the liquid content in the polishing wheel to about 5%.
It is preferable to make it less than % by weight.

また、液体減量処理として吸液処理を採用する場合にお
いても、研磨用砥石中の液体含有量が前記範囲内にある
ように吸液処理を行なうのが好ましい。
Furthermore, even when a liquid absorption process is adopted as the liquid reduction process, it is preferable to perform the liquid absorption process so that the liquid content in the polishing grindstone is within the above range.

請求項3に記載の方法は、砥粒と液状結合剤との混合物
を圧縮して成形体に成形し、この成形体に撥水剤を付与
することを特徴とする。
The method according to claim 3 is characterized in that a mixture of abrasive grains and a liquid binder is compressed to form a molded body, and a water repellent is applied to this molded body.

混合に際する砥粒と液状結合剤との配合割合は、各成分
の種類等により相違して一概に規定することかできない
けれど、一般的には、前記砥粒か砥粒かペンデュラー域
とファニキュラー域との中間の充填状態にあり、好まし
くはペンデュラー城の充填状態にあるような含有量範囲
内である。
The mixing ratio of abrasive grains and liquid binder during mixing differs depending on the type of each component and cannot be unconditionally defined, but generally speaking, it is determined that The content is in a filling state intermediate between that of the Pendular region, and preferably within the content range of the Pendular region.

混合に際しては、前記含有量の範囲内となるように設定
された割合の各成分を直ちに混合、混練しても良いが、
混合、圧縮、成形の操作に都合の良い条件になるように
各成分の配合割合を任意に設定し、しかる後各成分を混
合しても良い。
When mixing, each component may be immediately mixed and kneaded in a proportion set so that the content falls within the above content range, but
The proportions of each component may be arbitrarily set so as to provide conditions convenient for mixing, compression, and molding operations, and then the components may be mixed.

混合操作、混合後の圧縮成形操作については、前記請求
項2における場合と同様である。
The mixing operation and the compression molding operation after mixing are the same as in claim 2 above.

また、前記成形体中の砥粒がペンデュラー域の充填状態
にあるように、砥粒と液状結合剤とを混合して得られる
混合物を圧縮成形して得られる成形体に、液体の含有量
を減少させる液体減量処理を行うのが好ましい。なお、
場合によっては、砥粒と液状結合剤とを混合して得られ
る混合物について前記液体減量処理を行っても良いし、
また、砥粒と液状結合剤とを混合して得られる混合物を
圧縮成形するのと同時に前記液体減量処理を行っても良
い。
In addition, the liquid content is added to the molded product obtained by compression molding the mixture obtained by mixing the abrasive grains and the liquid binder so that the abrasive grains in the molded product are in a filled state in the pendular region. Preferably, a liquid reduction process is performed to reduce the amount of liquid. In addition,
In some cases, the liquid reduction treatment may be performed on a mixture obtained by mixing abrasive grains and a liquid binder,
Further, the liquid reduction treatment may be performed simultaneously with compression molding of the mixture obtained by mixing the abrasive grains and the liquid binder.

液体減量処理については、前記請求項2に置けるのと同
様である。
The liquid reduction process is the same as in claim 2 above.

かくして得られた成形体は、撥水剤を付与する撥水処理
に付される。
The molded article thus obtained is subjected to a water repellent treatment in which a water repellent is applied.

撥水処理は、撥水剤を含有する液あるいは撥水剤そのも
のに前記成形体を浸漬する浸漬操作、撥水剤を含有する
撥水剤含有液あるいは撥水剤を噴霧する噴霧操作等によ
り行なうことができる。
The water repellent treatment is carried out by a dipping operation in which the molded body is immersed in a liquid containing a water repellent or the water repellent itself, a spraying operation in which a water repellent-containing liquid containing a water repellent or a water repellent is sprayed, etc. be able to.

浸漬操作における撥水剤を含有する液の撥水剤の濃度は
適宜に決定することができ、また、その撥水剤の濃度に
応じて浸漬する時間および浸漬回数も決定することがで
きる。
The concentration of the water repellent in the liquid containing the water repellent in the dipping operation can be determined as appropriate, and the dipping time and the number of dipping times can also be determined depending on the concentration of the water repellent.

噴霧操作における撥水剤含有液における撥水剤の濃度お
よび噴霧時間およびuni回数も前記浸漬処理に準じて
適宜に決定することができる。
The concentration of the water repellent in the water repellent-containing liquid in the spraying operation, the spraying time, and the number of uni cycles can also be appropriately determined according to the above-mentioned dipping treatment.

なお、この撥水剤も砥粒を結合する作用を有しているの
で、撥水処理後、余分の撥水剤を除去することか望まし
い。
Since this water repellent also has the effect of binding abrasive grains, it is desirable to remove the excess water repellent after the water repellent treatment.

請求項2および請求項3に記載の方法により得られる請
求項1に記載の研磨用砥石は、撥水性を有するのである
が、この研磨用砥石に水等をかけた場合、研磨用砥石の
表面から一定の深さまでにしか木等が侵透しない特異な
性質を備えることになる。
The polishing whetstone according to claim 1 obtained by the method according to claims 2 and 3 has water repellency, but when water or the like is applied to this polishing whetstone, the surface of the polishing whetstone It has a unique property that trees etc. can only penetrate to a certain depth.

そこで、本発明の研磨用砥石を使用して被研磨材を研磨
する場合に、研磨用砥石に水を噴霧したり流しかけたり
しながら研磨すると、その際、研磨用砥石の表面p1ら
一定の深さまでは水が浸透し、内部深くにまで水が浸透
しないので、研磨用砥石の軟化が防止される。しかも、
研磨時に、研磨用砥石と被研磨材との摺動部において、
砥粒がファニキュラー状態に変換し、セルフドレッシン
グ機能か一段と促進されることになり、良好な研層状態
になる。
Therefore, when polishing a material to be polished using the polishing wheel of the present invention, if the polishing is performed while spraying or pouring water on the polishing wheel, at that time, a certain level from the surface p1 of the polishing wheel Water penetrates to the depth, but does not penetrate deep inside, which prevents the polishing whetstone from softening. Moreover,
During polishing, at the sliding part between the polishing wheel and the material to be polished,
The abrasive grains convert to a funicular state, and the self-dressing function is further promoted, resulting in a good abrasive layer state.

[実施例] 以下に本発明の詳細な説明する。[Example] The present invention will be explained in detail below.

(実施例1) アルミナW 雲1000砥粒(砥粒の平均直径154m
)500gに、溶剤型キシレン樹脂(固形分45!i!
量%)80gと砥石に対して1重量%のシリコンオイル
(メチルハイドロジエンポリシロキサン)とを添加し、
次いで、混合造粒機で混合。
(Example 1) Alumina W cloud 1000 abrasive grains (average diameter of abrasive grains 154 m)
) 500g, solvent-type xylene resin (solid content 45!i!
%) and 1% by weight of silicone oil (methylhydrodiene polysiloxane) to the grinding wheel.
Then mixed in a mixing granulator.

造粒し、型枠に入れて180 kg/cm”で圧縮して
圧縮成形し、その成形物を取り出して95℃で8時間乾
燥し、研磨用砥石を得た。このようにして得た研磨用砥
石は接触角110°の良好な撥水性を有するものであっ
た。また得られた砥石は被研磨材を研磨するのに充分な
硬度HR,50(J I 5Z2245に準拠)、曲げ
強度15にg/cm”、圧縮強度10 Kg/cm”を
有していた。
The granules were granulated, placed in a mold, compressed at 180 kg/cm'' and compression-molded, and the molded product was taken out and dried at 95°C for 8 hours to obtain a grindstone for polishing. The grindstone had good water repellency with a contact angle of 110°.The obtained grindstone also had a hardness HR of 50 (according to J I 5Z2245) and a bending strength of 15, which is sufficient for polishing the material to be polished. g/cm" and a compressive strength of 10 Kg/cm".

更に、この液体ボンド砥石を用いて硬脆材である窒化ケ
イ素を、研磨面に水を流しながら加工圧10 Kg/c
m2て相対回転速度30 m / win、て摺動。
Furthermore, using this liquid bond grindstone, silicon nitride, which is a hard and brittle material, was processed at a processing pressure of 10 kg/c while flowing water on the polishing surface.
m2 relative rotational speed 30 m/win, sliding.

研磨したところ、加工俺率は1.2gm/mi旧てあり
、研磨延時間1時間における加工用砥石の減耗量は2.
0mmであった。これは、セルフトレッシングか活発に
生し、砥石の目つまりな十分に抑え、しかも長時間にわ
たって高te率に研磨することかできたことを示すもの
である。
When polished, the grinding rate was 1.2 gm/mi, and the amount of wear of the grinding wheel in one hour of polishing time was 2.
It was 0 mm. This indicates that self-tressing was active, that clogging of the grindstone was sufficiently suppressed, and that it was possible to polish at a high Te ratio for a long period of time.

(実施例2) 炭化ケイ素(SiC)C雲3000砥粒1kgと結合剤
であるアクリルエマルジョン250gとに、砥粒に対し
て 1.5〜3.01i%のパラフィンワックス系エマ
ルションを滴下し、次いで、混合造粒機て混合、造粒し
、型枠に入れて400 kg/cm2て圧縮して成形し
、その成形物を取り出して60〜70℃て6時間乾燥し
、研磨用砥石を得た。このようにして得た研磨用砥石は
接触角100°の良好な撥水性を有するものであった。
(Example 2) A paraffin wax emulsion of 1.5 to 3.01i% based on the abrasive grains was dropped onto 1 kg of silicon carbide (SiC) C cloud 3000 abrasive grains and 250 g of acrylic emulsion as a binder, and then The mixture was mixed and granulated using a mixing granulator, put into a mold, compressed and molded at 400 kg/cm2, and the molded product was taken out and dried at 60 to 70°C for 6 hours to obtain a grindstone for polishing. . The polishing wheel thus obtained had good water repellency with a contact angle of 100°.

また得られた砥石は被研磨材を研磨するのに充分な硬度
HRR90、曲げ強度30にg/cm”、圧縮強度15
にg7cm”を有していた。
The obtained whetstone has a hardness of HRR90, which is sufficient for polishing the material to be polished, a bending strength of 30 g/cm", and a compressive strength of 15.
g7cm”.

更に、この液体ボンド砥石を用いて硬脆材である3イン
チφのシリコン単結晶を、研磨面に水を流しながら加工
荷重120Kgで相対回転速度30m/@in、で摺動
、研磨したところ、加工能率は10g、m/■in、で
あり、研磨延時間1時間における加工用砥石の減耗量は
0.4mmてあった。これは、セルフドレッシングが活
発に生じ、砥石の目つまりを十分に抑え、しかも長時間
にわたって高能率に研磨することができたことを示すも
のである。
Furthermore, using this liquid bond grindstone, a silicon single crystal with a diameter of 3 inches, which is a hard brittle material, was polished by sliding it at a processing load of 120 kg and a relative rotational speed of 30 m/@in while flowing water on the polishing surface. The processing efficiency was 10 g, m/inch, and the amount of wear of the processing grindstone during one hour of polishing time was 0.4 mm. This indicates that self-dressing occurred actively, clogging of the grindstone was sufficiently suppressed, and moreover, it was possible to polish with high efficiency over a long period of time.

(実施例3) 炭化ケイ素C11000砥粒1kgに、耐水性のない水
溶性バインダーであるCMC溶液(濃度3%)350g
とにシリコン(ジメチルポリシロキサン)系エマルジョ
ン20gを滴下しながら混合、造粒した。造粒物を型枠
に入れて300 kg/cm2で圧縮して成形し、その
成形物を取り出して50℃で8時間乾燥し、研磨用砥石
を得た。このようにして得た研磨用砥石は接触角100
°の良好な撥水性を有するものであった。また得られた
砥石は被研磨材を研磨するのに充分な硬度HR,30、
曲げ強度25 Kg/cm”、圧縮強度10 Kg/c
+s”を有していた。
(Example 3) 350 g of CMC solution (concentration 3%), which is a water-soluble binder without water resistance, is added to 1 kg of silicon carbide C11000 abrasive grains.
20 g of silicone (dimethylpolysiloxane) emulsion was added dropwise to the mixture and granulated. The granulated product was placed in a mold and compressed at 300 kg/cm 2 to form the product, and the molded product was taken out and dried at 50° C. for 8 hours to obtain a grindstone for polishing. The polishing wheel obtained in this way has a contact angle of 100
It had good water repellency of °. In addition, the obtained whetstone has a hardness of HR, 30, which is sufficient for polishing the material to be polished.
Bending strength: 25 Kg/cm", compressive strength: 10 Kg/c
+s”.

更に、この液体ボンド砥石を用いて硬脆材である金属材
のアルミニウムを、研磨面に水を流しなから加工圧20
0 g/am”で相対回転速度70m/■i口、で摺動
、研磨したところ、加丁俺率は160であり、研磨延時
間10分における加工用砥石の減耗量は50pLmてあ
った。これは、セルフドレッシングが活発に生し、砥石
の目つまりを十分に抑え、しかも長時間にわたって高能
率に研磨することかできたことを示すものである。
Furthermore, using this liquid bond grindstone, the metal material aluminum, which is a hard and brittle material, was processed at a processing pressure of 20% without running water on the polishing surface.
When sliding and polishing was carried out at a relative rotational speed of 70 m/cm and a relative rotational speed of 0 g/am'', the cutting loss rate was 160, and the amount of wear of the processing whetstone in 10 minutes of polishing time was 50 pLm. This indicates that self-dressing was active, clogging of the grindstone was sufficiently suppressed, and it was possible to polish with high efficiency over a long period of time.

[発明の効果] 請求項1に記載の発明によると、水を噴霧したり流しか
けたりしながら研磨しても、研磨用砥石の表面から一定
の深さまては水が浸透し、内部深くにまで水が浸透しな
いので、研磨用砥石の軟化か防IFされ、砥石の物理的
強度を低下させないのて、砥石の減耗量が少なく寿命を
長くすることができ、またドレッシング作用か活発に行
なわれ常に新しい切り刃が生成して超精密断心てきる。
[Effects of the Invention] According to the invention described in claim 1, even when polishing while spraying or pouring water, the water penetrates to a certain depth from the surface of the polishing whetstone, and the water penetrates deep inside. Since water does not penetrate up to the point, the polishing whetstone is prevented from softening or IF, and the physical strength of the whetstone is not reduced, so the amount of wear on the whetstone is reduced and its lifespan is extended, and the dressing action is actively performed. New cutting edges are constantly generated for ultra-precise centering.

従って本研磨用砥石はガラス、セラミックス、超硬合金
、金属シリコーン、各種金属、プラスチックス、その他
各材料の精密研磨に適用できるものである。
Therefore, this polishing whetstone can be applied to precision polishing of glass, ceramics, cemented carbide, metal silicone, various metals, plastics, and other materials.

また請求項2および3に記載の発明によると、請求項1
に記載の優れた性能を有する研磨用砥石を簡単な操作で
製造することかできる。
Furthermore, according to the invention described in claims 2 and 3, claim 1
The polishing wheel having the excellent performance described in can be manufactured by a simple operation.

特許出願人   タイホ一工業株式会社代理人    
 弁理士 福相 直樹 r、続補正1吋
Patent applicant Taiho Ichi Kogyo Co., Ltd. Agent
Patent attorney Naoki Fukuso r, continuation amendment 1-inch

Claims (3)

【特許請求の範囲】[Claims] (1)砥粒を液状結合剤で結合し、圧縮成形してなる成
形体が、砥粒に対して0.05〜5重量%の割合の撥水
剤を含有することを特徴とする研磨用砥石。
(1) For polishing, characterized in that the molded product formed by bonding abrasive grains with a liquid binder and compression molding contains a water repellent at a ratio of 0.05 to 5% by weight based on the abrasive grains. Whetstone.
(2)砥粒と液状結合剤と撥水剤とを混合し、圧縮成形
することを特徴とする研磨用砥石の製造方法。
(2) A method for manufacturing a polishing whetstone, which comprises mixing abrasive grains, a liquid binder, and a water repellent, and compression molding the mixture.
(3)砥粒と液状結合剤との混合物を圧縮して成形体に
成形し、この成形体に撥水剤を付与することを特徴とす
る研磨用砥石の製造方法。
(3) A method for manufacturing a polishing whetstone, which comprises compressing a mixture of abrasive grains and a liquid binder to form a molded body, and applying a water repellent to this molded body.
JP63071301A 1988-03-25 1988-03-25 Grinding stone and method for manufacturing the same Expired - Fee Related JPH0763936B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63071301A JPH0763936B2 (en) 1988-03-25 1988-03-25 Grinding stone and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63071301A JPH0763936B2 (en) 1988-03-25 1988-03-25 Grinding stone and method for manufacturing the same

Publications (2)

Publication Number Publication Date
JPH01246078A true JPH01246078A (en) 1989-10-02
JPH0763936B2 JPH0763936B2 (en) 1995-07-12

Family

ID=13456694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63071301A Expired - Fee Related JPH0763936B2 (en) 1988-03-25 1988-03-25 Grinding stone and method for manufacturing the same

Country Status (1)

Country Link
JP (1) JPH0763936B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9486896B2 (en) 2012-06-28 2016-11-08 Saint-Gobain Abrasives, Inc. Abrasive article and coating
US9844853B2 (en) 2014-12-30 2017-12-19 Saint-Gobain Abrasives, Inc./Saint-Gobain Abrasifs Abrasive tools and methods for forming same
US10189145B2 (en) 2015-12-30 2019-01-29 Saint-Gobain Abrasives, Inc. Abrasive tools and methods for forming same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521693A (en) * 1975-06-24 1977-01-07 Kyoei Kenmazai Kk Abrasives
JPS5218286A (en) * 1975-08-04 1977-02-10 Heiwa Kogyo Shoji Kk Grindstone for non ferric metal

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521693A (en) * 1975-06-24 1977-01-07 Kyoei Kenmazai Kk Abrasives
JPS5218286A (en) * 1975-08-04 1977-02-10 Heiwa Kogyo Shoji Kk Grindstone for non ferric metal

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9486896B2 (en) 2012-06-28 2016-11-08 Saint-Gobain Abrasives, Inc. Abrasive article and coating
US9844853B2 (en) 2014-12-30 2017-12-19 Saint-Gobain Abrasives, Inc./Saint-Gobain Abrasifs Abrasive tools and methods for forming same
US10189146B2 (en) 2014-12-30 2019-01-29 Saint-Gobain Abrasives, Inc. Abrasive tools and methods for forming same
US10189145B2 (en) 2015-12-30 2019-01-29 Saint-Gobain Abrasives, Inc. Abrasive tools and methods for forming same

Also Published As

Publication number Publication date
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