JPH01244511A - Fine adjustment mechanism - Google Patents
Fine adjustment mechanismInfo
- Publication number
- JPH01244511A JPH01244511A JP24324587A JP24324587A JPH01244511A JP H01244511 A JPH01244511 A JP H01244511A JP 24324587 A JP24324587 A JP 24324587A JP 24324587 A JP24324587 A JP 24324587A JP H01244511 A JPH01244511 A JP H01244511A
- Authority
- JP
- Japan
- Prior art keywords
- fine adjustment
- displacement
- piezoelectric element
- actuator
- fine movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 claims abstract description 30
- 230000003068 static effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野］
本発明は、微小変位工具台等の精密位置決め機構におい
て利用するのに適した微動機構に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine movement mechanism suitable for use in a precision positioning mechanism such as a small displacement tool stand.
最近の超精密切削技術の急速な進歩により、低コスト、
高精度などの特徴をもつ超精密金属鏡が脚光を浴びるよ
うになってきた。Due to recent rapid progress in ultra-precision cutting technology, low cost and
Ultra-precision metal mirrors, which have features such as high precision, are now in the spotlight.
かかる超精密切削を行うためには、工具位置の精密位置
決めが不可欠であり、それを実現するために、圧電素子
を用いた微動機構が開発されている。しかし、圧電素子
の〔ステリシス特性を排除し、精密な位置決めを行うた
めには、変位量を高精度で検出し、閉ループ制御を行う
必要があり、従来の微動機構はいずれも高価な変位検出
器を用い変位量の検出を打っている。In order to perform such ultra-precision cutting, precise positioning of the tool position is essential, and to achieve this, fine movement mechanisms using piezoelectric elements have been developed. However, in order to eliminate the steresis characteristic of piezoelectric elements and perform precise positioning, it is necessary to detect displacement with high precision and perform closed-loop control, and conventional fine movement mechanisms all require expensive displacement detectors. is used to detect displacement.
そこで、従来から一層簡単且つ安価で高精度な微小変位
工具台の開発が望まれている。また、このような要望は
、上述した超精密金属鏡の切削を行うだめの微小変位工
具台ばかりでなく、各種超精密製品の機械的加工や超精
密７１１１定等に利用する一般的な微動機構においても
同様である。Therefore, it has been desired to develop a micro-displacement tool stand that is simpler, cheaper, and more accurate. In addition, such requests are not limited to the micro-displacement tool stand for cutting the ultra-precision metal mirrors mentioned above, but also to general micro-movement mechanisms used for mechanical processing of various ultra-precision products and ultra-precision 7111 adjustment. The same applies to
し発明か解決しようとする問題点］
本発明の１的は、平何板へネ機構によって直線的に移動
可能に支持した微動台を圧電素子アクチュエータによっ
て変位させる微動機構において、圧電素子アクチュエー
タのヒステリシスの影響を排除して高精度な微動制御を
行うことができるようにした簡単で安価な機構を提供す
ることにある。[Problems to be Solved by the Invention] One object of the present invention is to solve the problem of hysteresis of the piezoelectric actuator in a fine movement mechanism in which a piezoelectric actuator displaces a fine movement table linearly movably supported by a flat plate bending mechanism. The object of the present invention is to provide a simple and inexpensive mechanism that can perform highly accurate fine movement control by eliminating the influence of .
［問題点を解決するための手段］
上記目的を達成するための本発明の微動機構は、平行板
ばね機構により支持された微動台を変位させる圧電素子
からなるアクチュエータを備え、上記平行板ばね機構に
おける板ばね上に抵抗線ひずみケージを貼着して、この
抵抗線ひすみケージを、その出力を変位信号として微動
台の変位の閉ループ制御を行う制御系に接続したことを
特徴とするものである。[Means for Solving the Problems] A fine movement mechanism of the present invention for achieving the above object includes an actuator made of a piezoelectric element that displaces a fine movement table supported by a parallel leaf spring mechanism, A resistance wire strain cage is attached onto the leaf spring of the device, and the resistance wire strain cage is connected to a control system that performs closed-loop control of the displacement of the fine movement table using its output as a displacement signal. be.
［作 用」
圧電素子からなるアクチュエータに電圧か那えられると
、電圧に応じた圧電素子の伸ひにより微動台か変位する
。この変位は、微動台を支持する板ばねに貼着した抵抗
線ひずみケージにより検出され、変位フィードバンクが
行われる。[Operation] When a voltage is applied to the actuator made of a piezoelectric element, the fine movement table is displaced by the expansion of the piezoelectric element according to the voltage. This displacement is detected by a resistance wire strain cage attached to a leaf spring supporting the fine movement table, and displacement feedbanking is performed.
上記抵抗線ひずみゲージは、平行板ハネ機構の線形性を
利用し、その出力を微動台の変位信号として、閉ループ
制御全行うことにより微動台の変位制御を行うものであ
り、その結果、特別の変位センサを用いるごとなく、圧
電素子におけるヒステリシスの影響を排除して、高精度
な微動制御を行うことかできる。The above resistance wire strain gauge utilizes the linearity of the parallel plate spring mechanism and uses its output as a displacement signal for the fine movement table to control the displacement of the fine movement table by performing closed loop control. Even without using a displacement sensor, it is possible to eliminate the effects of hysteresis in the piezoelectric element and perform fine movement control with high precision.
［実施例］
図面に示す実施例は、本発明の微動機構を板ハネ式微小
切込工具台に適用した場合をボすものである。この微小
切込工具台は、第１図及び第２図に示すように、基台１
上に一対の板ばね取・１句台２゜２を備え、これらの各
取伺台２，２間に配設した微動台３を平行板バネ機構に
より支持させている。[Embodiment] The embodiment shown in the drawings shows a case where the fine movement mechanism of the present invention is applied to a plate spring type fine cutting tool stand. As shown in Figs. 1 and 2, this micro-cutting tool stand has a base 1
A pair of leaf spring handles 2.degree. 2 is provided on the top, and a fine movement stage 3 disposed between each of the leaf spring handlers 2 is supported by a parallel leaf spring mechanism.
即ち、Ｅ記取付台２，２の両端にはりん青銅からな６＆
バネ４．４を互いに平行になるように取付け、取付台２
．２間に配置した微動台３を上記板ばね４゜４、・・に
より支持させている。また、手記基台１工には、アクチ
ュエーク取イ・１台５を設け、このアクチュエータ取付
台５と上記平行板／へ序機構によって支持された微動台
３との間に、その微動台３を板ばね４と直交する方向に
変位させるようにした積層圧電素子からなるアクチュエ
ータ６を介装している。上￥微動台３は、工具ホルタ−
として用いるもので、その上にタイヤモンド工具７等が
取付けられる。That is, there are 6&
Install the springs 4 and 4 parallel to each other, and
．． The fine movement table 3 disposed between the two is supported by the leaf springs 4, 4, . In addition, the notebook base 1 is provided with an actuator mount 5, and the fine movement table 3 is placed between the actuator mount 5 and the fine movement table 3 supported by the parallel plate/helix mechanism. An actuator 6 made of a laminated piezoelectric element is interposed so as to be displaced in a direction perpendicular to the leaf spring 4. The upper fine movement table 3 is a tool holder.
It is used as a tire molding tool 7 and the like is mounted on it.
従って、上記圧電素子からなるアクチュエータ６に電圧
が加えられると、電圧に応じた圧電素子の伸びにより、
微動台３とそれに取付けられたタイヤモント工具７が、
その工具のンＪり込み方向に変位する。 しかしながう
、上記アクチュエータ６として圧電素子を用いる場合に
は、その圧電素子のヒステリシスか問題となり、その影
響を排除するための配給゛か必要になる。Therefore, when a voltage is applied to the actuator 6 made of the piezoelectric element, the piezoelectric element expands in accordance with the voltage.
The fine movement table 3 and the tire mont tool 7 attached to it are
The tool is displaced in the direction of insertion. However, when a piezoelectric element is used as the actuator 6, the hysteresis of the piezoelectric element becomes a problem, and a distribution method is required to eliminate its influence.
そこで、上記板バネ４，４．・・には、変位検出センサ
として機能させる抵抗線ひすみケージ８，８．・・を貼
着している。二の抵抗線ひずみケージ８は、平行板／へ
序機構の線形性を利用し、その出力を微動台３の変位信
号として変位フィードバックし、閉ループ制御を行うこ
とにより微動台３の変位ル制御を行うためのもので、第
３図にその制御系の構成を示している。Therefore, the leaf springs 4, 4. . . . are resistance wire strain cages 8, 8, . . . which function as displacement detection sensors. ... is attached. The second resistance wire strain cage 8 utilizes the linearity of the parallel plate/helix mechanism, feeds back its output as a displacement signal for the fine movement table 3, and performs closed loop control to control the displacement of the fine movement table 3. Fig. 3 shows the configuration of the control system.
同図に示す制御系は、上記抵抗線ひすみゲージにより検
出した変位信号を増幅器で増幅した後、それを指令電圧
と比較し、それらの差に相当する信号を、ケイン調整′
、積分器による低周波部分のゲイン調整、ローパス・フ
ィルタ（ＬＰＦ）による板ばね４のばね剛さと微動台３
の質量とで決定される共振点近傍以−ヒの信号成分のカ
ットの後、高圧アンプを経て、微小切込工具台の圧電素
子に加えるようにしたものである。The control system shown in the figure amplifies the displacement signal detected by the resistance wire strain gauge using an amplifier, compares it with the command voltage, and uses the signal corresponding to the difference between the two to
, gain adjustment of the low frequency part using an integrator, and spring stiffness of the leaf spring 4 and fine movement table 3 using a low-pass filter (LPF).
After cutting the signal component near the resonance point determined by the mass of the cutting tool, the signal component is applied to the piezoelectric element of the micro-cutting tool stand via a high-voltage amplifier.
第４図は、上記微小切込工具台及び圧電素子単体の静特
性を示すものであり、印加電圧１５０ｖに対し約１０ｇ
ｍの変位を得た。これは圧電素子単体ｔ：ｌ５０Ｖで約
１７ｐｍ）の時に比べ、変位邦−が２７３程度に抑えら
れているものの、ヒステリシスループもその分減少して
いる。また、正弦波入力に対する応答に関しては、１０
０Ｈｚの入力正弦波に対し、最小的７ｎｍにおいても追
随することが確認できた。示ワイドノイズ入力による周
波数応答に関しては、９００ 、１８００）Ｉｚ付近に
大きなピークが見られるか、約３００Ｈｚまでは平坦な
特性を示した。Figure 4 shows the static characteristics of the above-mentioned micro-cutting tool stand and piezoelectric element alone, and shows the static characteristics of the above-mentioned micro-cutting tool stand and piezoelectric element alone.
A displacement of m was obtained. Although the displacement is suppressed to about 273 compared to when the piezoelectric element alone was used (t: about 17 pm at 150 V), the hysteresis loop was also reduced accordingly. Also, regarding the response to sine wave input, 10
It was confirmed that the input sine wave of 0 Hz could be followed even at a minimum wavelength of 7 nm. Regarding the frequency response due to wide noise input, large peaks were observed around 900 and 1800) Iz, or flat characteristics were observed up to about 300 Hz.
上述した構成を有する微小切込工具台は、アクチュエー
タ６として圧電素子を組込んでいるため、ヒステリシス
が間瑚となり、これを解決するために、平行板パ２機構
の線形性を利用して、抵抗線ひずみケージによる変位フ
ィードバックを行っている。圧電素子におけるヒステリ
シスの影響を排除するためには、変位を計測する必要か
あり、その計１ｎｔｌｌには通常変位センサが用いられ
ているが、上記微小切込工具台においては微動台３の支
持に板ばね４を用いているので、それに抵抗線ひずみケ
ージを貼着して変位信号を得るという簡単で安価な手段
な採用でき、これにより特別なセンサが不要になるばか
りでなく、抵抗線ひずみケージの貼着により、変位セン
サを設けるスペースをも必要とし尿い。Since the micro-cutting tool stand having the above-mentioned configuration incorporates a piezoelectric element as the actuator 6, hysteresis becomes a problem, and in order to solve this problem, the linearity of the parallel plate mechanism is utilized. Displacement feedback is provided using a resistance wire strain cage. In order to eliminate the influence of hysteresis in the piezoelectric element, it is necessary to measure displacement, and a displacement sensor is usually used for a total of 1 ntll. Since the leaf spring 4 is used, it is possible to obtain a displacement signal by attaching a resistance wire strain cage to it, which is a simple and inexpensive means.This not only eliminates the need for a special sensor, but also allows the resistance wire strain cage By pasting the sensor, it also requires space to install the displacement sensor.
第５図は、上記閉ループ制御を行う微小切込工具台にお
いて、三角波入力を行った場合の微動台の静特性を示す
ものであり、これにより、圧電素子のヒステリシスの影
響を排除して、比較的高精度な制御を行い得ることが確
かめられた。Figure 5 shows the static characteristics of the fine cutting tool table that performs the closed-loop control described above when a triangular wave input is applied. It was confirmed that highly accurate control could be performed.
「発明の効果」
以北に詳述した本発明によれば、平行板ばね機構によっ
て直線的に移動可能に支持した微動台を圧電素子アクチ
ュエータによって変位させる微動機構において、圧電素
子アクチュエータのヒステリシスの影響を排除して高精
度な微動制御を行う簡単で安価な機構を得ることができ
る。"Effects of the Invention" According to the present invention described in detail below, in a fine movement mechanism in which a piezoelectric actuator displaces a fine movement table supported linearly movably by a parallel plate spring mechanism, the effect of hysteresis of the piezoelectric actuator is reduced. It is possible to obtain a simple and inexpensive mechanism that performs high-precision fine movement control by eliminating this.
第１図は本発明に係る微動機構の側面図、第２図は同平
面図、第３図は同微動機構における制御系のブロック構
成図、第４図は微小切込工具台及び圧電素子単体の静特
性を示す線図、第５図は実験の結果を示す線区である。
３・・微動台、 ４噛・板ばね、
６ ・・アクチュエータ、
８・・抵抗線ひずみケージ。
指定代理人
第１図
第２図
第３図
第４図
第５図
出力
巨
ミ へ ′
恒
械Fig. 1 is a side view of the fine movement mechanism according to the present invention, Fig. 2 is a plan view thereof, Fig. 3 is a block configuration diagram of the control system in the fine movement mechanism, and Fig. 4 is a fine cutting tool stand and a single piezoelectric element. Figure 5 is a line diagram showing the static characteristics of , and a line section showing the results of the experiment. 3. Fine movement table, 4 Bit/plate spring, 6. Actuator, 8. Resistance wire strain cage. Designated agent Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5 Output large size to ' Hengmai
Claims (1)
る圧電素子からなるアクチュエータを備え、上記平行板
ばね機構における板ばね上に抵抗線ひすみゲージを貼着
して、この抵抗線ひずみゲージを、その出力を変位信号
として微動台の変位の閉ループ制御を行う制御系に接続
したことを特徴とする微動機構。1.Equipped with an actuator consisting of a piezoelectric element that displaces a fine movement table supported by a parallel plate spring mechanism, and a resistance wire strain gauge is pasted on the plate spring of the parallel plate spring mechanism, and the resistance wire strain gauge is A fine movement mechanism, characterized in that the output thereof is connected to a control system that performs closed loop control of the displacement of a fine movement table using the output as a displacement signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24324587A JPH01244511A (en) | 1987-09-28 | 1987-09-28 | Fine adjustment mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24324587A JPH01244511A (en) | 1987-09-28 | 1987-09-28 | Fine adjustment mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01244511A true JPH01244511A (en) | 1989-09-28 |
Family
ID=17100998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24324587A Pending JPH01244511A (en) | 1987-09-28 | 1987-09-28 | Fine adjustment mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01244511A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6320343B1 (en) * | 1999-02-19 | 2001-11-20 | Stmicroelectronics S.R.L. | Fine phase frequency multipiler for a brushless motor and corresponding control method |
| KR100953059B1 (en) * | 2003-09-09 | 2010-04-13 | 두산인프라코어 주식회사 | Minuteness high and low adjustable tool post |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178630A (en) * | 1984-02-27 | 1985-09-12 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for finely adjusting stage |
| JPS61243511A (en) * | 1985-04-20 | 1986-10-29 | Yotaro Hatamura | Fine positioning device |
| JPS6263317A (en) * | 1986-09-16 | 1987-03-20 | Hitachi Ltd | Minute displacement generator |
-
1987
- 1987-09-28 JP JP24324587A patent/JPH01244511A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178630A (en) * | 1984-02-27 | 1985-09-12 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for finely adjusting stage |
| JPS61243511A (en) * | 1985-04-20 | 1986-10-29 | Yotaro Hatamura | Fine positioning device |
| JPS6263317A (en) * | 1986-09-16 | 1987-03-20 | Hitachi Ltd | Minute displacement generator |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6320343B1 (en) * | 1999-02-19 | 2001-11-20 | Stmicroelectronics S.R.L. | Fine phase frequency multipiler for a brushless motor and corresponding control method |
| KR100953059B1 (en) * | 2003-09-09 | 2010-04-13 | 두산인프라코어 주식회사 | Minuteness high and low adjustable tool post |
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