JPH01236911A - Air cleaning apparatus - Google Patents

Abstract

PURPOSE:To enable obtaining a uniform wind velocity distribution at a filter face and a highly laminar flow property without increasing pressure drop and noise by arranging an inflection part for nearly inverting a wind direction at a draft induction member which is installed at a prescribed distance from an end of a draft shield member. CONSTITUTION:A blower 2, a filter 3 communicating with a diffuser 2a of the blower 2 and a pressure chamber 4 lying between the diffuser 2a and the filter 3 are arranged. A draft shield member 9 is arranged so as to change the direction of draft blown out of the blower 2 and a draft induction member 5 is installed at a prescribed distance from an end of the draft shield member 9. An inflection part 5b is arranged at the said draft induction member 5 so that part of the draft, which has its direction changed by the draft shield member 9, is induced and inverted its direction almost entirely. It is possible, as a result, to attain a uniformity of wind velocity out of the filter and to make the apparatus superior in laminar flow property of blowout draft without increasing pressure drop and noise.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an air purifying device, and in particular to a structure of an air flow guiding member suitable for making the air velocity distribution on the filter outlet surface more uniform and obtaining high laminar flow properties. Regarding.

[Conventional technology]

The conventional device has a structure in which a perforated plate is provided parallel to the filter surface and pressurized air from a blower is applied to the perforated plate almost perpendicularly, as described in Japanese Utility Model Application No. 61-76235. However, noise, pressure loss, and weight are large, and no consideration has been given to reducing these.

[Problem that the invention seeks to solve]

The above-mentioned conventional technology requires a perforated plate or a shielding plate with a wide area in order to make the air velocity distribution on the filter outlet surface sufficiently uniform, and the airflow is controlled from the perforated plate or shielding plate to the filter inlet surface. In order to achieve sufficient diffusion, the vertical dimensions of the casing must also be large, and it is difficult to make the wind speed distribution sufficiently uniform and high laminar flow is required.
It was necessary to further provide a perforated plate on the secondary side of the filter.

In addition, these structures had problems such as pressurized air from the blower directly hitting the perforated plate or shielding plate, generating vortices around and behind the plate, resulting in high pressure loss and increased noise.

SUMMARY OF THE INVENTION An object of the present invention is to provide an air cleaning device capable of achieving a uniform air velocity distribution on a filter surface and high laminar flow properties without increasing pressure loss or noise.

[Means for solving interlayer points]

The above object provides an air purifying device comprising an air blower, a filter provided in communication with an air outlet of the air blower, and a pressure chamber interposed between the air outlet and the filter.
An airflow shielding member provided to change the direction of the airflow blown out from the blower, and an airflow guiding member disposed at a predetermined distance from an end of the airflow shielding member, This is achieved by forming a bend in which a part of the airflow whose direction has been changed by the airflow shielding member is guided to substantially reverse the direction of the airflow.

[Effect]

The airflow shielding member changes the airflow blown out from the blower into an airflow having a direction substantially parallel to the upstream surface of the filter.

A bent portion and an airflow distribution portion are formed in the airflow guide member, which is disposed at a predetermined distance from the end of the airflow shielding member. The bent part guides a part of the airflow whose direction has been changed by the airflow shielding member, almost reversing the wind direction, and the airflow distribution part distributes a part of the guided airflow to the side of the airflow guiding member facing the filter. .

Thereby, the airflow blown out from the blower is distributed almost uniformly to the side of the filter facing the pressure chamber.

〔Example〕

Embodiments of the present invention will be described below with reference to FIGS. 1 to 11.

The first embodiment of the present invention is shown in Fig. 1, Fig. 5, and Fig. 8 (a).
).

The air purifying device of this embodiment includes a blower 2 housed in a housing 1, a silencing channel 6 communicating with an outlet 2a of the blower 2 and reaching a pressure chamber 4, and a filter 3 provided in the pressure chamber 4. ．． The direction of the airflow blown out from the air outlet 2a through the silencing channel 6 is changed to be almost parallel to the upstream surface of the filter. It comprises a flow path plate 9 as an air flow shielding member, and an air flow guide plate 5 as an air flow guide member disposed at a predetermined interval from the flow path plate 9. Note that reference numeral 10 and 11 are perforated plates provided along the flow path, which together with the reflecting plate 7 constitute a sound absorption box. Further, 12 is a sound absorbing material such as glass wool.

The air pressurized by the blower 2 passes through the noise-muffling channel 6,
The pressure chamber 4 is reached. An airflow guide plate 5 is provided at the entrance of the pressure chamber 4, and reverses the direction of a part of the airflow flowing leftward, almost parallel to the upstream side surface of the filter 3, to the right above the flow path plate 9. It is guided in a horizontal direction to a part of the lower atmospheric pressure below the channel plate 9.

Thereby, it is possible to increase the wind speed at the lower part of the channel plate 9 where the wind speed of the filter 3 is low.

Further, the airflow guide plate 5 is formed of a perforated plate, and a part of the airflow is distributed directly below the airflow guide plate 5 to prevent the filter blowing wind speed from decreasing in this area. The cross section of the airflow guide plate is set so that the upstream end is parallel to or at an acute angle with the airflow, and the rear end on the downstream side is parallel to or at an acute angle with the filter surface. In particular, the position of the airflow guide plate is determined according to the flow rate ratio that the upstream end of the cross section of the airflow guide plate separates from the airflow, taking into consideration the wind speed distribution. In this example, the position of the upstream end of the airflow guide plate is , is determined from the rate at which the flow rate of the airflow is divided at the inlet of the pressure chamber 4 in order to make the air velocity uniform through the filter.

In this embodiment, as shown in FIG. 4, the airflow guide plate 5 is slidably fixed to a long hole 1a drilled in the side surface of the housing 1 with screws 20, so that the position of the airflow guide plate 5 can be adjusted. There is.

In this embodiment, the airflow guide plate 5 has a bent portion 5b formed by bending a steel plate, as shown in FIG. 5, and a perforated plate-like airflow distribution portion 5c is formed by punching a large number of holes on the surface. be done.

As shown in FIG. 2, the airflow guiding plate 5 is installed at the optimal position to equalize the distribution of the blowing wind speed, and is attached to the bent portion 5b.
The airflow direction is changed by the passage plate 9, and a part of the airflow directed to the left in the figure is guided to reverse the airflow direction to the right. The airflow distribution section 5C allows a part of the airflow flowing along the airflow guide plate 5 to pass therethrough, and also supplies the airflow to the back side of the airflow guide plate 5.

In this embodiment, the airflow guide plate 5 is bent twice to evenly distribute the airflow to the primary side of the filter 3.
However, it may be bent once to have an L-shaped cross section.

The state of uniformity of the blowing wind speed by this airflow guide plate 5 is shown in the eighth figure.
This will be explained using figures. Figure 8 shows A-JJ in the width direction of the air outlet.
Set up 10 measurement positions, and set 10 measurement positions 1-10 in the depth direction for each measurement position A - J. 2 Measure the wind speed at a total of 100 grid points and plot the values. This is what I did. Scale in height direction 0.0
~1.0 represents the wind speed (m/s). Figure (a)
is the wind speed distribution when the airflow guide plate 5 is provided, FIG. Each shows the wind speed distribution. As is clear from a comparison of FIGS. 8(a) and 8(c), by providing the airflow guide plate 5, the blowing wind speed can be made significantly uniform.

The second embodiment of the present invention is shown in FIG. 6, FIG. 7, FIG. 8(b),
This will be explained with reference to FIG.

In this embodiment, a wide portion 5a is formed on the airflow guiding plate 5 to further equalize the wind speed distribution.

Note that the configuration of other parts is the same as that of the first embodiment.

In this embodiment, as shown in FIG. 6, the airflow guide plate 5 has a wide portion 5a formed so as to become wider around a position corresponding to the outlet 2a of the blower 2 in the depth direction of the device, and an airflow distribution portion 5c. It is provided at the rear of the device to further diffuse the airflow that could not be spread out in the depth direction of the device.

Figure 8 (b) shows the state of uniformity of the blowing wind speed in this example
).

As is clear from the figure, according to this embodiment, FIG.
) The uniformity of the wind speed distribution in this embodiment will be explained in detail with reference to FIG.

FIG. 9(a) shows the positional relationship between the positions of the filter 3 and the airflow guiding plate 5 and each measurement position A-J, and FIG. 9(b)
, CO) show the wind speed distribution at each measurement position A-J without and with the airflow guide plate 5, respectively.

Note that the wind speeds shown in FIGS. 9(b) and (0) indicate the average value of the wind speeds at measurement positions 1 to 10 in the depth direction at each measurement position (average wind speed in the depth direction).

The maximum and minimum values of the average wind speed in the depth direction at 100 measurement points are tzO, 406 m/s, and 0 when there is no airflow guide plate, respectively.
．． 310n/s, the wind speed distribution is plus 16χ to minus 11 against the average wind speed of 0.350m/s at these 100 points.
7, but by providing the airflow guide plate 5, the maximum value and minimum value are 0.390 m/s and 0.338 m/s, respectively.
s, and the average wind speed at 100 points is 0.362 m.
/s has been improved to +8X to -7*.

As a result, by providing the airflow guide plate 5, the pressure chamber 4
It can be seen that the high wind speed area near the air inlet and the low wind speed area below the channel plate 9 are equalized.

For reference, FIGS. 13(a) and 13(b) show the effect when the perforated plate 14 used in the prior art is simply applied to the air cleaning device having the configuration shown in FIG. 12.

This will be explained using (c).

FIG. 13(a) shows the positional relationship between the positions of the filter 3 and the perforated plate 14 and each measurement position 11A-J.
b) and (C) show the wind speed distribution at each measurement position AJJ with and without the perforated plate 14, respectively;
The wind speeds shown in FIGS. 13(b) and 13(c) are the same as in FIG.
The number of measurement points is 100 as in the case of FIGS. 9(b) and 9(c), and the maximum and minimum values of the average wind speed in the depth direction when the perforated plate 14 is provided are 0.376 m/s and 0.376 m/s, respectively. 305m
/s and the wind speed distribution is 100 points average wind speed 0.343m/s
It was plus 1.0% - J minus 11/. The maximum and minimum values of the average wind speed in the depth direction, the average wind speed at 100 points, and the wind speed distribution when there is no perforated plate 14 are shown in Figure 9 (b
).

As mentioned above, it is impossible to achieve the object of the present invention by simply applying the perforated plate used in the prior art to an air cleaning device.

According to this embodiment, the wind speed distribution can be kept within the range of plus 8 to minus 7% of the average wind speed, making the wind speed distribution more uniform compared to the conventional method, and improving the laminar flow of the blowing air flow. Can be done. As a result, it is possible to improve the uniformity of temperature distribution below the outlet and to improve cleanliness by preventing the generation of vortices at the airflow interface between different wind speeds.

In addition, in recent years, down-flow type super clean rooms, which are required in semiconductor manufacturing, etc., require high laminar flow properties, and in order to satisfy this requirement, the distribution of the blowing wind speed must be extremely uniform. It is said that

This is because if the wind speed distribution is not uniform, there is a risk of contamination due to entrainment from the side, and if stagnation occurs in areas with low wind speed and dust is quickly discharged outside the clean room, it may cause contamination to the product. This is because it may cause a decrease in cleanliness, such as the possibility of occurrence of. In addition, highly accurate temperature control is important in ultra-highly integrated semiconductor manufacturing processes that require even higher levels of clean room performance, and highly uniform wind speed distribution is necessary to maintain product uniformity. It is said that

As described above, the air cleaning device of this embodiment has excellent uniformity of the blowing wind speed, and therefore can be used as an air cleaning device for such a super clean room.

In addition, even when applied to general clean rooms, the distribution of the blowout air velocity is extremely uniform, making it possible to eliminate the need for the blowout outlet diffuser plate on the secondary side of the filter, which was conventionally used, and reducing equipment costs. At the same time, it is possible to prevent a decrease in cleanliness due to accumulation of dust on the outlet diffuser plate F.

A third embodiment of the present invention will be described with reference to FIG.

In this embodiment, the present invention is applied to an air purifier portion of a workbench equipped with an air purifier. In this embodiment, an air purifying device is provided above the workbench 30 and is configured so that clean air blown from the filter 3 is supplied onto the workbench 30.

In this embodiment, as shown in FIG. 10, a passage plate 37 serving as an airflow shielding member is provided in the pressure chamber 34 to prevent direct sound from the blower 2 from passing through the filter 3. In this embodiment, the airflow guide plate 35 has a substantially 1-shaped cross section, and includes a substantially semicircular bent portion 35 and an airflow distribution portion 35c formed in the shape of a perforated plate. A wide portion 35a is formed at the rear of the distribution portion.

A part of the airflow thus guided is also guided to the lower part of the flow path plate 37 by the bent portion 35b having a semicircular cross-sectional shape.

At this time, a part of the guided airflow passes through the airflow distribution section 35C to the filter 3 side, and the airflow is evenly distributed to the primary side of the filter 3. Therefore, in this embodiment, it is possible to obtain a workbench with an air cleaning device that is excellent in uniformity of the blowing wind speed and has a low noise value.

A fourth embodiment of the present invention will be described with reference to FIG.

In this embodiment, the present invention is applied to an air purifying device in which the blowing direction of the blower 2 is directed downward.

In this embodiment, a blower 2 is installed in the upper part of the inside of a housing 41 so that its outlet 2a faces downward, a pressure chamber 44 communicating with the outlet 2a is provided below the blower 2, and a pressure chamber 44 is provided in the lower part of the pressure chamber 44. The filter 3 is attached to the filter 3. Directly below the air outlet 2a in the pressure chamber 44, a flow path plate 47 is provided as an airflow shielding member to prevent the sound of the blower 2 from being directly transmitted to the filter 3, and a sound absorbing material 12 is attached to the surface of the flow path plate 47.

In this embodiment, the airflow guide plate 45 is provided at a position so as to sandwich the flow path plate 47 from at least two opposing directions, and guides the airflow below the flow path plate 47 and below the airflow guide plate 45.
Airflow is evenly supplied to the filter 3. Airflow guide plate 45
is formed to have a substantially J-shaped cross section, and includes a substantially semicircular bent portion 45b and an airflow distribution portion 45c. Although they are provided on the sides, they may be provided on all sides of the channel plate 47 to further improve the wind speed distribution.

According to the embodiments described above, noise and pressure loss can be reduced compared to methods such as applying pressurized air perpendicularly to a perforated plate and diffusing the air. Furthermore, the vertical dimensions of the device can be reduced, making it possible to downsize the device and thereby reduce its weight.

〔Effect of the invention〕

According to the present invention, it is possible to equalize the speed of the airflow blown out from the filter without increasing pressure loss and noise, and it is possible to obtain an air cleaning device with excellent laminar flow properties of the blown airflow. .

[Brief explanation of the drawing]

1 and 2 are a plan sectional view and a side sectional view, respectively, showing the configuration of an air cleaning device according to a first embodiment of the present invention, and FIGS. FIG. 5 is a perspective view showing the shape of the airflow guide member in this embodiment, and FIG. 6 is a perspective view showing the main part of this embodiment as viewed from the outside. A perspective view showing the shape of the airflow guide member in this example, FIG. 7 is a partially broken perspective view showing the main part of this example,
8(a), 8(b), and 8(c) are wind speed distribution diagrams showing the wind speed distribution in the first embodiment, the second embodiment of the present invention, and the air cleaning device without an airflow guide member, respectively, and FIG. a
), (b), and (c) are side sectional views of the main parts showing the wind speed measurement positions of the air purifier according to the second embodiment of the present invention, and a wind speed distribution diagram at each measurement position when there is no airflow guiding member, A wind speed distribution diagram at each measurement position when there is an air flow guide member, and FIG. 10 is a side sectional view showing the configuration of the main part of an air cleaning device in a third embodiment of the present invention. Fig. 11 is a side sectional view showing the configuration of an air purifier according to the fourth embodiment of the present invention, and Fig. 12 shows the wind speed measurement position when a perforated plate is attached to a conventional air purifier without an air flow guiding member. Side sectional views of the main parts shown in FIGS. 13(b) and 13(c)
) are wind speed distribution charts showing the wind speed distribution at each measurement position when the perforated plate is not attached to the air purifying device of FIG. 12 and when the perforated plate is attached, respectively. 2: Blower, 2a: Air outlet, 3: Filter. 4.34, 44: Pressure chamber, 5, 35, 45: Air flow guide member, 5b, 35b, 45b: Bent part, 5c, 35c, 4
5c: Airflow distribution part, 9.37° 47: Airflow shielding member. 3 full 4 full) sb A music section 4th figure, 5 (2) 5: Kashimaruboko 4P seal 5c suitable flow intervention section sb
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Claims (1)

[Claims] 1. An air purifying device comprising: a blower; a filter provided in communication with an outlet of the blower; and a pressure chamber interposed between the outlet and the filter; An airflow shielding member provided to change the direction of the airflow blown out from the blower, and an airflow guiding member disposed at a predetermined distance from an end of the airflow shielding member, the airflow guiding member changing the direction of the airflow. An air purifying device comprising a bending portion that guides a part of the airflow whose direction has been changed by a shielding member and almost reverses the direction of the airflow. 2. The air cleaning device according to claim 1, wherein the airflow guide member includes an airflow distribution section that transmits a part of the guided airflow and distributes it to the filter.