JPH01232691A - Power source for magnetron - Google Patents
Power source for magnetronInfo
- Publication number
- JPH01232691A JPH01232691A JP63056086A JP5608688A JPH01232691A JP H01232691 A JPH01232691 A JP H01232691A JP 63056086 A JP63056086 A JP 63056086A JP 5608688 A JP5608688 A JP 5608688A JP H01232691 A JPH01232691 A JP H01232691A
- Authority
- JP
- Japan
- Prior art keywords
- magnetron
- output
- power supply
- transformer
- intermittent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims description 7
- 238000010411 cooking Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004397 blinking Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009730 filament winding Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、マグネトロンの出力を、間歇的停止を含む広
範囲に変化させても、マグネトロンの陰極(フィラメン
ト)の寿命が短くならないようにしたマグネトロン用電
源装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a magnetron in which the life of the magnetron cathode (filament) is not shortened even if the output of the magnetron is changed over a wide range including intermittent stoppage. related to a power supply device.
[従来の技術]
商用周波数の変圧器を用いてマグネトロンの陽極高圧を
得る従来のマグネ1ヘロン用電源装置では。[Prior Art] A conventional power supply device for Magne 1 Heron uses a commercial frequency transformer to obtain high voltage at the anode of the magnetron.
出力の調整を、電源を間歇的に断続させて行っていたが
、マグネトロンの陰極フィラメントを間歇的に点滅させ
ると、特に間歇動作の周期を短くすると、フィラメント
寿命を著しく短くするので。The output was adjusted by intermittent power supply, but if the magnetron's cathode filament was blinked intermittently, especially if the period of intermittent operation was shortened, the life of the filament would be significantly shortened.
一般に、フィラメント用変圧器を別に備えて、ノイラメ
ントを常時点火するようにしていた。また。Generally, a separate filament transformer was provided to keep the Neurament ignited at all times. Also.
商用周波数の変圧器は大きく重いものになるので、近年
、例えば実開昭62−107396号公報に開示されて
いるように、商用電源を整流して得た直流をスイッチン
グ素子により開閉して、商用電源周波数より遥かに高い
周波数の交流に変換する一rンバータ回路を用いて変圧
器の小形軽量化を回リ、同時に、マグネトロンのマイク
ロ波出力の調整を前記スイッチング素子の開閉状態の時
間的比率を変化させて調整するようにした軽量なインバ
ータ方式マグネトロン用電源装置が開発されている。Commercial frequency transformers are large and heavy, so in recent years, as disclosed in Utility Model Application Publication No. 62-107396, a switching element is used to open and close the DC obtained by rectifying the commercial power supply, The transformer is made smaller and lighter by using a 1R inverter circuit that converts the alternating current at a frequency far higher than the power supply frequency. At the same time, the microwave output of the magnetron is adjusted by adjusting the time ratio of the open/closed state of the switching element. A lightweight inverter-type magnetron power supply device that can be adjusted by changing the power supply has been developed.
[発明が解決しようとする課題]
上記従来の技術は、マグネトロンを電子レンジなどで高
周波加熱に利用することを目的としており、被加熱物体
に与えられるマイクロ波出力は、商用周波数電源で士数
秒間隔の間歇動作により制御しても、又はインバータ方
式電源でスイッチング素子による開閉時間比率を変化さ
せて制御しても6両者とも目的を達成することができる
。[Problems to be Solved by the Invention] The purpose of the above conventional technology is to use a magnetron for high-frequency heating in a microwave oven, etc., and the microwave output given to the object to be heated is delivered at intervals of several seconds using a commercial frequency power supply. Even if the control is performed by intermittent operation or by changing the opening/closing time ratio of switching elements using an inverter type power source, the purpose can be achieved in both cases.
マグネトロンを用いたマイクロ波発生装置は、電子レン
ジのほかに、プラズマエツチング装置、ストロボ式高輝
度発光装置、半導体加工プロセスにおける微小スポット
加熱装置などの工業用装置もあり、これらの装置ではマ
イクロ波出力値の制御に加えて、高速な間歇的出力断続
動作を必要とするものがある。Microwave generators using magnetrons include not only microwave ovens but also industrial equipment such as plasma etching equipment, strobe-type high-intensity light emitting equipment, and minute spot heating equipment used in semiconductor processing processes. In addition to value control, some require fast intermittent output switching.
高速な間歇的出力断続動作を行うために、フィラメン1
へ用変圧器を別に設け、マグネトロンの陽極高圧のみ開
閉するようにした電源も実用化されているが、大形で高
価である。In order to perform high-speed intermittent output intermittent operation, filament 1
A power supply with a separate transformer installed to open and close only the high voltage anode of the magnetron has been put into practical use, but it is large and expensive.
本発明はマイクロ波出力の大小を制御できるだけでなく
、マイクロ波出力を高速で間歇的に断続できるようにし
たマグネトロン用電源装置を提供することを目的とする
。SUMMARY OF THE INVENTION An object of the present invention is to provide a power supply device for a magnetron that can not only control the magnitude of the microwave output but also can intermittent the microwave output at high speed.
[課題を解決するための手段]
上記課題を解決するために本発明においては、商用電源
を整流して得た直流を、スイッチング素子により開閉し
て商用電源周波数より遥かに高い周波数の交流に変換す
るインバータ回路と、この回路で発生させた高周波交流
を一次側入力とし、二次側に、マグネトロンの陽極用高
圧出力巻線および陰極用低圧出力巻線を有する変圧器と
、前記スイッチング素子の開閉状態の時間を制御する制
御回路とを備えたマグネトロン用電源装置において、マ
グネトロンのマイクロ波出力の、大小のみならず間歇的
停止を含む調整を、前記スイッチング素子の開閉状態の
時間的比率を変化させることだけで行い、マイクロ波出
力停止時にも前記変圧器一次側には、給電を継続するよ
うにした。即ち、上記インバータ回路のスイッチング素
子の開路期間を比較的長く、閉路期間を比較的短くして
行くと、マグネトロンの陽極に印加される高圧値が次第
に低下して、あΔ臨界値以下になると、陽極電流が流れ
なくなり、マイクロ波出力が停止する。[Means for Solving the Problems] In order to solve the above problems, the present invention converts the direct current obtained by rectifying the commercial power supply into alternating current with a frequency far higher than the commercial power supply frequency by switching on and off using a switching element. an inverter circuit that takes the high-frequency alternating current generated by this circuit as its primary input, and a transformer that has a high-voltage output winding for the anode of the magnetron and a low-voltage output winding for the cathode on the secondary side, and an inverter circuit that opens and closes the switching element. In a magnetron power supply device equipped with a control circuit that controls the state time, the microwave output of the magnetron is adjusted not only in magnitude but also intermittently stopping, and the time ratio of the open and closed states of the switching element is changed. Even when microwave output is stopped, power continues to be supplied to the primary side of the transformer. That is, when the open period of the switching element of the inverter circuit is made relatively long and the closed period is made relatively short, the high voltage value applied to the anode of the magnetron gradually decreases, and when it becomes below the Δ critical value, Anode current stops flowing and microwave output stops.
:のようにしてマイクロ波出力の高速な間歇的断続動作
を、インバータ回路のスイッチング素子の開閉状態の時
間的比率を変化させるだけで行わせることが出来る。In this way, high-speed intermittent operation of microwave output can be performed simply by changing the time ratio of the open/close states of the switching elements of the inverter circuit.
[作用コ
マグネト・ロンの陽極電流は、陽極印加電圧の比較的小
さな変動によって大きく変化し、陽極印加電圧値がある
臨界値以下になると流れなくなり、マイクロ波出力が得
られなくなる。此の臨界値はかなり高く、マイクロ波出
力が停止した時でも。[The anode current of the action comagnetron changes greatly with relatively small fluctuations in the voltage applied to the anode, and when the voltage applied to the anode falls below a certain critical value, it stops flowing and no microwave output can be obtained. This critical value is quite high, even when the microwave output is stopped.
陰極フィラメントには未だかなりな電圧が印加されてい
る。つまり、陰極加熱電力が余り小さくない状態で、マ
イクロ波出力停止状態となる。A considerable voltage is still applied to the cathode filament. In other words, the microwave output is stopped in a state where the cathode heating power is not very small.
従って、インバータ回路のスイッチング素子の開閉状態
の時間的比率を変化させるだけで、マイクロ波出力の高
速な間歇的断続動作を行わせることは可能で6その場合
、マグネトロンの陰極加熱状態の変化は余り大きくなく
、陰極加熱用に別に変圧器を設けなくても差支えない。Therefore, it is possible to perform high-speed intermittent operation of the microwave output simply by changing the time ratio of the open/close states of the switching elements of the inverter circuit. It is not large and does not require a separate transformer for cathode heating.
[実施例]
第1図は本発明の一実施例を示し、図中、1はマグネト
ロンの陽極用高圧巻線と陰極用低圧巻線を有する高周波
変圧器、2はスイッチング素子。[Embodiment] FIG. 1 shows an embodiment of the present invention, in which 1 is a high-frequency transformer having a high-voltage winding for the anode of a magnetron and a low-voltage winding for the cathode, and 2 is a switching element.
3は整流器、4はインバータ回路のスイッチング素子開
閉期間比率を変化させてマイクロ波出力停止状態から最
大出力状態まで調整できる出力調整回路、5は間歇動作
時のマイクロ波出力時間および停止時間を決める間歇動
作回路、6はマグネトロンである。3 is a rectifier, 4 is an output adjustment circuit that can adjust the microwave output from a stopped state to a maximum output state by changing the switching element open/close period ratio of the inverter circuit, and 5 is an intermittent that determines the microwave output time and stop time during intermittent operation. The operating circuit 6 is a magnetron.
第2図は従来の、一次側で給電を間歇的に断続させて7
マイクロ波出力調整を行う回路を示す。Figure 2 shows the conventional method where power supply is intermittently interrupted on the primary side.
A circuit for adjusting microwave output is shown.
この方式では、一次側が通電状態になるとマグネトロン
が動作してマイクロ波出力が生じ、遮断状態になると動
作しなくなる。この方式では、第3図に示すように、マ
グネトロンのフィラメントも通電、非通電状態になるた
め、フィラメント温度は非常に大きく変動する。このフ
ィラメント温度の変化を多数回繰り返すとフィラメント
寿命したがってマグネトロンの寿命が著しく短くなる。In this system, when the primary side becomes energized, the magnetron operates and generates microwave output, and when the primary side becomes energized, it stops operating. In this method, as shown in FIG. 3, the filament of the magnetron is also energized and de-energized, so the filament temperature fluctuates significantly. If this change in filament temperature is repeated many times, the life of the filament and therefore the life of the magnetron will be significantly shortened.
通常マグネトロンのフィラメン1〜の点滅可能回数はあ
る品質条件のもとに管理製造されており、間歇動作の回
数が多ければ、フィラメントの熱サイクルにより寿命が
短くなる。このような理由から、フィラメント巻線と高
圧巻線を同じ変圧器に設ける方式での間歇動作時間は短
くとも10秒程度となる。これより短い時間で間歇動作
を行うとサイクル数が多くなり寿命が短くなってしまう
。従って、フィラメント専用に別の変圧器を設け、マイ
クロ波出力を間歇的に断続させている時でもフィラメン
トを常時点火しておかなければならない。Normally, the number of blinking times of the filament 1 of a magnetron is controlled and manufactured under certain quality conditions, and if the number of intermittent operations is large, the life of the filament will be shortened due to the thermal cycle of the filament. For these reasons, the intermittent operation time in a system in which the filament winding and the high voltage winding are provided in the same transformer is about 10 seconds at the shortest. If intermittent operation is performed for a shorter time than this, the number of cycles will increase and the life will be shortened. Therefore, it is necessary to provide a separate transformer exclusively for the filament to keep the filament ignited at all times even when the microwave output is intermittent.
第1図に示した実施例では、インバータ回路のスイッチ
ング素子の導通時間を増減することにより、第4図(こ
の図の目盛数値は例として記入したもので、これにこだ
わらない)に示すような特性が得られる。スイッチング
素子の導通時間が25μsの時に500W出力を得てお
り、導通時間を短くするにつれて、出力は減少する。導
通時間が10μSになると出力はOになる。この時の変
圧器出力電圧はマグネトロンの動作開始電圧(この例の
場合は約3.8kV)を下回っただけで、そんなに低く
はなっていない。一方、マグネトロンのフィラメント電
流はフィラメント電圧にほぼ比例しているため、マグネ
トロンの陽極電圧が動作開始電圧以下になっても、かな
りな大きさのフィラメント電流が流れる。In the embodiment shown in FIG. 1, by increasing or decreasing the conduction time of the switching elements of the inverter circuit, the scale values shown in FIG. characteristics are obtained. When the conduction time of the switching element is 25 μs, an output of 500 W is obtained, and as the conduction time is shortened, the output decreases. When the conduction time reaches 10 μS, the output becomes O. At this time, the transformer output voltage was only lower than the magnetron's starting voltage (approximately 3.8 kV in this example), and was not that low. On the other hand, since the filament current of a magnetron is approximately proportional to the filament voltage, a considerable amount of filament current flows even if the anode voltage of the magnetron falls below the operation start voltage.
従って、上記のようなことから、スイッチング素子の導
通時間を、所望のマイクロ波出力が得られる長さにした
り、変圧器高圧出力がマグネトロンの動作開始電圧以下
となりマイクロ波出力が停止するまで短くしたり、とい
うような動作条件を繰り返すことによって、第5図に示
すような、フィラメント温度の変化を少なくした間歇動
作が可能となり、マグネトロンの寿命を短くすることが
ない。従って従来の、商用周波数交流をそのまま変圧器
に流し、一次側入力を断続させてマイクロ波出力を調整
する方式では、10秒以内の間歇動作は実用化できなか
ったが、本発明によれば1秒以内の間歇動作も十分可能
になった。Therefore, based on the above, the conduction time of the switching element should be set to a length that allows the desired microwave output to be obtained, or it should be shortened until the high voltage output of the transformer falls below the magnetron's operation start voltage and the microwave output stops. By repeating such operating conditions, intermittent operation with less change in filament temperature as shown in FIG. 5 becomes possible, and the life of the magnetron is not shortened. Therefore, with the conventional method of flowing commercial frequency AC directly to the transformer and adjusting the microwave output by intermittent input on the primary side, intermittent operation within 10 seconds could not be put to practical use, but according to the present invention, Intermittent operation within seconds is now possible.
[発明の効果コ
以上説明したように本発明によれば、インバータ回路を
用いたマグネトロン用電源装置で、1秒以内の間歇動作
が可能となり、マイクロ波出力の連続可変、任意のマイ
クロ波出力における任意の間歇動作が可能になった。こ
れにより、電子レンジに要求される如何なる調理条件に
も、また、工業用の如何なる使用条件にも、対応可能な
小型、軽量、高性能なマグネトロン用電源が得られる。[Effects of the Invention] As explained above, according to the present invention, a power supply device for a magnetron using an inverter circuit can perform intermittent operation within 1 second, continuously variable microwave output, and can operate at any microwave output. Arbitrary intermittent operation is now possible. As a result, a compact, lightweight, and high-performance power source for a magnetron can be obtained that is compatible with any cooking conditions required of a microwave oven and any industrial usage conditions.
第1図は本発明の一実施例図、第2図は従来の技術を説
明する図、第3図は従来例の動作説明図、第4図は本発
明実施例の特性図、第5図は実施例の動作説明図である
。
1・・・高周波変圧器、 2・・・スイッチング素子
。
3・・・′!1流器、 4・・・出力調整回路、 5・
・・間歇動第 2 因
1−高(5)5痘9悉各
2−スイRじテ斉子
3−¥=?−6
ローマク゛序)℃ン
第 3 図
第4図
第 5 図
LrFJI −Fig. 1 is a diagram of an embodiment of the present invention, Fig. 2 is a diagram explaining the conventional technique, Fig. 3 is a diagram explaining the operation of the conventional example, Fig. 4 is a characteristic diagram of the embodiment of the present invention, Fig. 5 is an explanatory diagram of the operation of the embodiment. 1...High frequency transformer, 2...Switching element. 3...'! 1 current device, 4...output adjustment circuit, 5.
... Intermittent motion 2nd factor 1-high (5) 5 pox 9 each 2-sui Rjite Saiko 3-¥=? -6 Roman sequence) ℃ Fig. 3 Fig. 4 Fig. 5 LrFJI -
Claims (1)
により開閉して商用電源周波数より遥かに高い周波数の
交流に変換するインバータ回路と、この回路で発生させ
た高周波交流を一次側入力とし、二次側に、マグネトロ
ンの陽極用高圧出力巻線および陰極用低圧出力巻線を有
する変圧器と、前記スイッチング素子の開閉状態の時間
を制御する制御回路とを備えたマグネトロン用電源装置
において、マグネトロンのマイクロ波出力の、大小のみ
ならず間歇的停止を含む調整を、前記スイッチング素子
の開閉状態の時間的比率を変化させることだけで行い、
マイクロ波出力停止時にも前記変圧器一次側には、給電
を継続するようにしたことを特徴とするマグネトロン用
電源装置。1. An inverter circuit that converts the direct current obtained by rectifying the commercial power supply into alternating current with a frequency far higher than the commercial power supply frequency by switching on and off using a switching element, and the high-frequency alternating current generated by this circuit as the primary input. A magnetron power supply device comprising, on a secondary side, a transformer having a high-voltage output winding for the anode of the magnetron and a low-voltage output winding for the cathode, and a control circuit that controls the open/close state time of the switching element. Adjustment of the microwave output, including not only the magnitude but also intermittent stopping, is carried out by simply changing the time ratio of the open and closed states of the switching element,
A power supply device for a magnetron, characterized in that power continues to be supplied to the primary side of the transformer even when microwave output is stopped.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63056086A JPH01232691A (en) | 1988-03-11 | 1988-03-11 | Power source for magnetron |
US07/258,478 US4903183A (en) | 1987-10-21 | 1988-10-17 | Power supply for a magnetron |
KR1019880013566A KR910006171B1 (en) | 1987-10-21 | 1988-10-18 | Power source for magnetron |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63056086A JPH01232691A (en) | 1988-03-11 | 1988-03-11 | Power source for magnetron |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01232691A true JPH01232691A (en) | 1989-09-18 |
Family
ID=13017281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63056086A Pending JPH01232691A (en) | 1987-10-21 | 1988-03-11 | Power source for magnetron |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01232691A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02170391A (en) * | 1988-10-14 | 1990-07-02 | Philips Gloeilampenfab:Nv | Power feeder for electronic oven |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59194384A (en) * | 1983-04-19 | 1984-11-05 | 三洋電機株式会社 | Drive circuit of magnetron |
-
1988
- 1988-03-11 JP JP63056086A patent/JPH01232691A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59194384A (en) * | 1983-04-19 | 1984-11-05 | 三洋電機株式会社 | Drive circuit of magnetron |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02170391A (en) * | 1988-10-14 | 1990-07-02 | Philips Gloeilampenfab:Nv | Power feeder for electronic oven |
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