JPH01217739A - Stamper for optical disk - Google Patents
Stamper for optical diskInfo
- Publication number
- JPH01217739A JPH01217739A JP4276088A JP4276088A JPH01217739A JP H01217739 A JPH01217739 A JP H01217739A JP 4276088 A JP4276088 A JP 4276088A JP 4276088 A JP4276088 A JP 4276088A JP H01217739 A JPH01217739 A JP H01217739A
- Authority
- JP
- Japan
- Prior art keywords
- stamper
- rear face
- hardness thin
- thin film
- nickel plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 abstract description 14
- 238000000465 moulding Methods 0.000 abstract description 7
- 238000005498 polishing Methods 0.000 abstract description 7
- 239000010408 film Substances 0.000 abstract description 6
- 230000008602 contraction Effects 0.000 abstract description 5
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/263—Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
- B29C45/2632—Stampers; Mountings thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/263—Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
- B29C45/2632—Stampers; Mountings thereof
- B29C2045/2634—Stampers; Mountings thereof mounting layers between stamper and mould or on the rear surface of the stamper
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光ディスク用スタンパ、特に、ディジタルオ
ーディオディスク（ＤＡＤ）、ビデオディスク（ＶＤ）
等の光ディスクのレプリカを大量に複製するための光デ
ィスク用スタンパに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention is directed to a stamper for optical discs, particularly for digital audio discs (DAD) and video discs (VD).
The present invention relates to an optical disc stamper for mass-producing replicas of optical discs such as the like.
従来の光ディスク用スタンパは、ニッケル板で構成され
た表面は情報記録面となっており、この情報記録面の裏
面が「完全なる鏡面のもの」と「細かな研摩跡の残った
面のもの」の２種類があった。Conventional stampers for optical discs have a front surface made of a nickel plate that serves as an information recording surface, and the back side of this information recording surface can be either completely mirror-finished or with fine polishing marks left. There were two types.
これらは裏面の研摩方法の差異によって生じたもので「
完全なる鏡面のもの」は遊離砥粒な使った研摩で得らｈ
その面精度は平均粗さ（Ｒａ）で０．０１μｍ以下で仕
上っていた。また「細かな研摩跡の残った面のもの」は
固定砥粒を使った研摩で得らｈ、その面精度は平均粗さ
（Ｒａ）で０．１μｍ以下で仕上っていた。These were caused by differences in the polishing method of the back side.
A perfect mirror surface can be obtained by polishing using free abrasive grains.
The surface accuracy was finished with an average roughness (Ra) of 0.01 μm or less. In addition, the "surface with fine polishing marks" was obtained by polishing with fixed abrasive grains, and the surface accuracy was finished with an average roughness (Ra) of 0.1 μm or less.
しかしながら、このような上述した光ディスク用スタン
パは、裏面が「完全なる鏡面のもの」では成形金型の鏡
面との密着性が高いために摩擦力がたかく、成形時の熱
サイクルによる膨張、収縮に対し、伸び縮みを限定し、
裏面が局部的に摩耗し寿命を短命化するという欠点があ
った。However, when the above-mentioned optical disc stamper has a completely mirrored back surface, it has high frictional force due to high adhesion to the mirror surface of the molding die, and is susceptible to expansion and contraction due to thermal cycles during molding. On the other hand, by limiting expansion and contraction,
The drawback was that the back surface was locally worn, shortening its lifespan.
また、光ディスク用スタンパの裏面が「細かな研摩跡の
残ったもの」は、前述のスタンパとは異なり、スタンパ
の膨張、収縮時に成形金型とは点接触となるため、伸び
縮みが容易となりその寿命は良好であるがスタンパ裏面
の粗さが成型板に転写され、成形板の情報記録面に微少
な凹凸を生じ、雑音源となりやすいため、追記型、書替
可能な光ディスク等の高密度情報記録媒体の基板として
は適さないといった欠点があった。Also, unlike the stamper mentioned above, if the back side of an optical disc stamper has "fine polishing marks left", it will easily expand and contract, as it will come into point contact with the mold when the stamper expands and contracts. Although the lifespan is good, the roughness on the back side of the stamper is transferred to the molding plate, causing minute irregularities on the information recording surface of the molding plate, which can easily become a source of noise. The drawback was that it was not suitable as a substrate for recording media.
本発明の光ディスク用スタンパは、情報記録面の裏面が
鏡面研摩加工され、かつ、該裏面に５００人ないし５０
００人の膜厚を有する高硬度薄膜が幾何学的パターンに
形成されて構成される。In the optical disc stamper of the present invention, the back surface of the information recording surface is mirror-polished, and 500 to 50
A highly hard thin film having a film thickness of 0.00 mm is formed into a geometric pattern.
次に、本発明の実施例について、図面を参照して説明す
る。Next, embodiments of the present invention will be described with reference to the drawings.
第１図（ａ）、 （ｂ）は本発明の第１の実施例を示す
平面図およびＡ−Ａ’断面拡大図である。FIGS. 1(a) and 1(b) are a plan view and an enlarged cross-sectional view taken along line AA', showing a first embodiment of the present invention.
第１図（ａ）、 （ｂ）に示す光ディスク用スタンパは
、ニッケル板１と、高硬度薄膜２とで構成されている。The optical disc stamper shown in FIGS. 1(a) and 1(b) is composed of a nickel plate 1 and a highly hard thin film 2. The stamper shown in FIGS.
ニッケル板１の裏面１１は「完全なる鏡面」となってお
り、この裏面１１には放射状のパターンをなす高硬度薄
膜２が窒化硅素５ｉｓＮｓを使用し、膜厚１０００±１
００人２幅２薗でスパッタおよびリフトオフにより形成
される。The back surface 11 of the nickel plate 1 is a "perfect mirror surface", and the high hardness thin film 2 forming a radial pattern on this back surface 11 is made of silicon nitride 5isNs and has a film thickness of 1000±1.
Formed by sputtering and lift-off with a width of 0.00 people and 2 widths.
この光ディスク用スタンバを使用して光ディスクを成形
したところ、裏面１１の摩耗が少なくなり、長寿命化が
はかれた。When an optical disc was molded using this optical disc standber, wear on the back surface 11 was reduced and the life of the disc was extended.
また、高硬度薄膜２による局部的凸部は成形板に対して
悪影響を及ぼすことはなかった。Further, the localized convex portions caused by the highly hard thin film 2 did not have any adverse effect on the molded plate.
第２図は本発明の２の実施例を示す平面図であり同心円
状のパターンをなす高硬度薄膜２′がニッケル板１の裏
面に形成されたものである。FIG. 2 is a plan view showing a second embodiment of the present invention, in which a highly hard thin film 2' forming a concentric pattern is formed on the back surface of a nickel plate 1.
また、第３図は本発明の第３の実施例を示す平面図であ
り、同心円と放射状との２つのパターンをなす高硬度薄
膜２＃がニッケル板１の裏面に形成されたものである。FIG. 3 is a plan view showing a third embodiment of the present invention, in which a highly hard thin film 2# having two patterns, concentric and radial, is formed on the back surface of the nickel plate 1.
上述の実施例では高硬度薄膜として窒化硅素Ｓｉ＞Ｎ４
を用いた例を示したがＴｉＣ，ＳｉＣ。In the above embodiment, silicon nitride Si>N4 is used as the high hardness thin film.
An example using TiC and SiC was shown.
ＢＮ、 Ａｎ２０３等の材質についても適用可能である
。It is also applicable to materials such as BN and An203.
また、上述の実施例では、膜厚１０００±１００人の例
について説明したが、膜厚は５００ないし５０００人の
範囲で適用可能である。Further, in the above-described embodiment, an example was explained in which the film thickness was 1000±100 people, but the film thickness is applicable to a range of 500 to 5000 people.
さらに、また、上述の実施例では高硬度薄膜の幾何学的
パターンとして同心円、放射状のパターンを用いた例を
示したが、らせん状のパターンであってもよい。Furthermore, in the above-described embodiments, concentric circles and radial patterns were used as the geometric patterns of the high-hardness thin film, but spiral patterns may also be used.
本発明の光ディスク用スタンパは、裏面に幾何学的パタ
ーンとして形成された高硬度薄膜を追加することにより
、成形時の温度変動にもとづく伸縮時のキズの発生を低
減できるため、スタンパの長寿命化を達成できるという
効果がある。By adding a high-hardness thin film formed in a geometric pattern to the back surface of the optical disk stamper of the present invention, it is possible to reduce the occurrence of scratches during expansion and contraction due to temperature fluctuations during molding, thereby extending the life of the stamper. This has the effect of achieving the following.
第１図（ａ）、 （ｂ）は本発明の第１の実施例を示す
平面図およびＡ−Ａ’断面拡大図、第２図は本発明の第
２の実施例を示す平面図、第３図は本発明の第３の実施
例を示す平面図である。
１・・・・・・ニッケル板、２．２’、２″・・・・・
・高硬度薄膜、１１・・・・・・裏面、１２・・・・・
・情報記録面。
代理人 弁理士 内 原 音
（αン
第１ 図
石２回
第 ３旧FIGS. 1(a) and 1(b) are a plan view and an enlarged sectional view taken along line A-A' of the first embodiment of the present invention, and FIG. FIG. 3 is a plan view showing a third embodiment of the present invention. 1...Nickel plate, 2.2', 2''...
・High hardness thin film, 11... Back side, 12...
・Information recording surface. Agent Patent Attorney Oto Uchihara (αn 1st Zuishi 2nd 3rd Old)
Claims (1)
前記ニッケル板の裏面に５００Åないし５０００Åの膜
厚を有し幾何学的パターンとして形成された高濃度膜厚
とを含むことを特徴とする光ディスク用スタンパ。The back side of the information recording surface is a mirror-polished nickel plate,
A stamper for an optical disk, comprising a high concentration film having a thickness of 500 Å to 5000 Å and formed as a geometric pattern on the back surface of the nickel plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4276088A JPH01217739A (en) | 1988-02-24 | 1988-02-24 | Stamper for optical disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4276088A JPH01217739A (en) | 1988-02-24 | 1988-02-24 | Stamper for optical disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01217739A true JPH01217739A (en) | 1989-08-31 |
Family
ID=12644938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4276088A Pending JPH01217739A (en) | 1988-02-24 | 1988-02-24 | Stamper for optical disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01217739A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008524854A (en) * | 2004-12-16 | 2008-07-10 | エーエスエムエル ホールディング エヌ．ブイ． | System and method for forming nanodisks used in imprint lithography and nanodisks and memory disks formed thereby |
-
1988
- 1988-02-24 JP JP4276088A patent/JPH01217739A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008524854A (en) * | 2004-12-16 | 2008-07-10 | エーエスエムエル ホールディング エヌ．ブイ． | System and method for forming nanodisks used in imprint lithography and nanodisks and memory disks formed thereby |
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