JPH01208115A - Large-sized vessel for high-purity chemical - Google Patents
Large-sized vessel for high-purity chemicalInfo
- Publication number
- JPH01208115A JPH01208115A JP63033384A JP3338488A JPH01208115A JP H01208115 A JPH01208115 A JP H01208115A JP 63033384 A JP63033384 A JP 63033384A JP 3338488 A JP3338488 A JP 3338488A JP H01208115 A JPH01208115 A JP H01208115A
- Authority
- JP
- Japan
- Prior art keywords
- inner cylinder
- outer cylinder
- vessel
- polyethylene
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 title claims abstract description 23
- -1 polyethylene Polymers 0.000 claims abstract description 21
- 239000004698 Polyethylene Substances 0.000 claims abstract description 19
- 229920000573 polyethylene Polymers 0.000 claims abstract description 19
- 238000000071 blow moulding Methods 0.000 claims abstract description 9
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 7
- 239000000654 additive Substances 0.000 claims description 9
- 239000000155 melt Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000003963 antioxidant agent Substances 0.000 claims description 3
- 230000000996 additive effect Effects 0.000 claims description 2
- 230000003078 antioxidant effect Effects 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 9
- 239000012535 impurity Substances 0.000 abstract description 5
- 239000002530 phenolic antioxidant Substances 0.000 abstract description 2
- 239000004615 ingredient Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 5
- 239000011151 fibre-reinforced plastic Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Natural products CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- CJZGTCYPCWQAJB-UHFFFAOYSA-L calcium stearate Chemical compound [Ca+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O CJZGTCYPCWQAJB-UHFFFAOYSA-L 0.000 description 1
- 235000013539 calcium stearate Nutrition 0.000 description 1
- 239000008116 calcium stearate Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- ZPUCINDJVBIVPJ-LJISPDSOSA-N cocaine Chemical compound O([C@H]1C[C@@H]2CC[C@@H](N2C)[C@H]1C(=O)OC)C(=O)C1=CC=CC=C1 ZPUCINDJVBIVPJ-LJISPDSOSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 210000003296 saliva Anatomy 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Containers Having Bodies Formed In One Piece (AREA)
- Rigid Containers With Two Or More Constituent Elements (AREA)
- Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】 〈産業上の利用分野〉 本発明は高純度薬品用の大型容器に関するものである。[Detailed description of the invention] <Industrial application field> The present invention relates to large containers for high purity chemicals.
詳しくは半導体等の電子部品の加工に用いる塩酸、硫酸
や硝酸等のような高純度の薬品を収容して運搬するため
に用いる大型容器に関するものである。Specifically, it relates to a large container used to store and transport high-purity chemicals such as hydrochloric acid, sulfuric acid, and nitric acid used in processing electronic components such as semiconductors.
〈従来の技術〉
半導体の電子部品の加工には、極めて高純度の薬品が要
求されており、その製造は厳重な品質管理の下になされ
ている。従って製造過程での不純物やダストの混入は殆
んど完全に防止されるようになったが、これに伴い出荷
の際に用いる容器からの不純物やダストの混入を防止す
ることが益々重要視されるようになってきている０
特開昭６２−３７弘弘弘号には、ポリエチレンの吹込成
形により形成した多層構造のボトルであって、最内層以
外の層に遮光剤を含有させたものが高純度薬品用の容器
として提案されている。<Prior Art> Processing of semiconductor electronic components requires chemicals of extremely high purity, and their manufacture is carried out under strict quality control. Therefore, the contamination of impurities and dust during the manufacturing process has become almost completely prevented, but as a result, it has become increasingly important to prevent contamination of impurities and dust from containers used during shipping. 0 JP-A-62-37 Hirohiro describes a bottle with a multilayer structure formed by blow molding polyethylene, in which layers other than the innermost layer contain a light-shielding agent. Proposed as a container for high-purity chemicals.
〈発明が解決しようとする課題〉
高純度薬品の価格に占める出荷費用（容器代、運搬費、
容器充填費等）を考慮すると、大型で且つ反復使用の可
能な通い容器を用いることが望ましい。しかしながら上
述の特開昭４２−３り弘≠≠号に記載のボトルは、小型
容器としては極めてすぐれたものであるが、大型容器に
は適していない。何故ならば反復使用に耐えるだけの強
度を有する多層構造の大型容器を吹込成形で成形するこ
とは困難であるし、かつ一般に大型容器の吹込成形に用
いるポリエチレンは、高純度薬品中のダストや不純物を
増加させる傾向があるからである。<Problems to be solved by the invention> Shipping costs (container costs, transportation costs,
Considering container filling costs, etc., it is desirable to use reusable containers that are large and can be used repeatedly. However, although the bottle described in the above-mentioned Japanese Patent Application Laid-open No. 42-3 Rihiro≠≠ is extremely excellent as a small container, it is not suitable for a large container. This is because it is difficult to blow mold large containers with a multilayer structure that is strong enough to withstand repeated use, and the polyethylene typically used for blow molding large containers is free from dust and impurities in high-purity chemicals. This is because there is a tendency to increase
従って本発明は、高純度薬品中にダストや不純物が混入
することが少なく、かつ通い容器として反復使用に耐え
る大型容器を提供することを目的とするものである。Therefore, an object of the present invention is to provide a large-sized container that is less likely to contain dust or impurities in high-purity chemicals and can withstand repeated use as a returnable container.
く課題を解決するための手段〉
本発明に係る高純度薬品用の大型容器は、補強用の外筒
とこれに内挿されているポリエチレン製の内筒とから成
り、該内筒は弘ｏｏｒｔｒｙｒ以上の直径及び深さの筒
状部を有しており、且つメルトインデックス０．０ ／
〜０．０弘ｔ／１０分、密度Ｏ０りに ３〜０．’？
ｔ ７ ？／ｃｎｌのポリエチレンであって金属成分
を含有する添加剤を実質的に含まないものの吹込成形に
より成形されたものであることを特徴とするものである
。Means for Solving the Problems> The large container for high-purity chemicals according to the present invention consists of a reinforcing outer cylinder and an inner cylinder made of polyethylene inserted into the reinforcing outer cylinder. It has a cylindrical part with a diameter and depth of 0.0 or more, and has a melt index of 0.0/
~0.0 ton/10 minutes, density O0 3~0. '?
t7? /cnl polyethylene substantially free of additives containing metal components, and is molded by blow molding.
本発明について更に詳細に説明すれば、本発明は容器と
しての機械的強度を確保し、かつ外部からの衝撃を緩和
する補強用の外筒と、高純度薬品を汚染せずに収容する
役割を果すポリエチレン製の内筒とから成っている。内
筒は外筒にゆるい嵌合状態で内挿されており、外筒を傷
めずに内筒の交換も行なうことができる。内筒は内部に
収容する薬品の荷重、及び薬物の抜出しを内筒への圧力
気体の導入にょシ行なう場合には該気体の圧力に耐える
強度を有すればよく、通常５〜６間の壁厚を有している
。内筒と外筒との間隙は空容器の状態で通常／ ””
２ ｆｆ１ｌｌ！であればよい。To explain the present invention in more detail, the present invention includes a reinforcing outer cylinder that ensures mechanical strength as a container and cushions external impact, and a reinforcing outer cylinder that serves to accommodate high-purity chemicals without contaminating them. It consists of an inner cylinder made of polyethylene. The inner cylinder is inserted into the outer cylinder in a loosely fitted state, and the inner cylinder can be replaced without damaging the outer cylinder. The inner cylinder only needs to have the strength to withstand the load of the medicine contained therein and the pressure of the gas when the medicine is extracted by introducing pressure gas into the inner cylinder, and usually has a wall between 5 and 6. It has a thickness. The gap between the inner cylinder and the outer cylinder is normal when the container is empty.
2 ff1ll! That's fine.
内筒はポリエチレンの吹込成形により成形する。内筒は
４ｔｏｏｒｒｍ以上の直径（内筒の主体部は通常は円筒
であるが、円筒でない場合は同一横断面積の円筒として
算出する）及び深さの筒状部を有する大型成形品である
が、はだ荒れを起さないように成形することが重要であ
る。吹込成形に際しての成形性、並びに使用に際しての
耐久性及び非汚染性等の諸条件を同時に満足するには、
使用するポリエチレンの選択が重要である。The inner cylinder is formed by blow molding polyethylene. The inner cylinder is a large molded product having a cylindrical part with a diameter of 4 toorrm or more (the main body of the inner cylinder is usually a cylinder, but if it is not a cylinder, it is calculated as a cylinder with the same cross-sectional area) and a depth, It is important to mold the material so that it does not cause roughness. In order to simultaneously satisfy conditions such as moldability during blow molding, durability and non-contamination during use,
The choice of polyethylene used is important.
本発明では、メルトインデックス０．０ ／〜ｏ、ｏ弘
９１ｔｏ分、密度０．９６３〜０．９ ｊ ７ ｒ／ｃ
ｒ／ｌのポリエチレンであって金属成分を含有する添加
物を実質的に含まないものを使用する。In the present invention, the melt index is 0.0/~o, the density is 0.963~0.9, and the density is 0.963~0.9.
r/l polyethylene substantially free of additives containing metal components.
ポリエチレンは通常、種々の添加剤を含む組成物として
成形に供されるが、添加剤は一般に容器に収容する高純
度薬品を汚染する危険があるので、汚染防止の点からは
添加剤を全く含まないポリエチレンを用いるのが好まし
い。特に、通常用いられているステアリン酸カルシウム
をはじめ金属成分を含有する添加剤は、硝酸等の高純度
薬品を汚染しやすいので用いてばならない。しかしヒン
ダードフェノール系の酸化防止剤は高純度薬品を汚染す
ることが少なく、かつピンチオフ部の強度を確保するの
に有効なので用いるのが好ましい。Polyethylene is usually molded as a composition containing various additives, but additives generally risk contaminating the high-purity chemicals contained in the container, so from the standpoint of preventing contamination, no additives are included at all. Preferably, polyethylene is used. In particular, commonly used additives containing metal components such as calcium stearate must be used because they tend to contaminate high purity chemicals such as nitric acid. However, it is preferable to use hindered phenol-based antioxidants because they are less likely to contaminate high-purity chemicals and are effective in ensuring the strength of the pinch-off portion.
ヒンダードフェノール系の酸化防止剤とは、弘−ヒドロ
キシ−３，！−ジ第三ブチルフェニルで表わされる化合
物があげられる。具体的には、メチル−β−（弘−ヒド
ロキシ−３，Ｊ−−ジ第三ブチルフェニル）プロピオネ
ート、エチル−β−（弘−ヒドロキシ−３，！−ジ第三
ブチルフェニル）プロピオネート、オクチル−β−（弘
−ヒドロキシ−３，５−ジ第三ブチルフェニル）フロヒ
オネート、ラウリル−β−（弘−ヒドロキシ−３，ｊ−
ジ第三ブチルフェニル）プロピオネート、オクタデシル
−β−（弘−ヒドロキシ−３、ｊ−ジ第三ブチルフェニ
ル）プロピオネート、プロピル−ｉ、ｉ、ｔ −トリス
−〔メチレン−３′−（ψ″−ヒドロキシーＪ 、ｊ”
−ジ第三ブチルフェニル）プロピオネート〕、エチル−
／、／、／ −トリス−〔メチレン−３’−（μ″−ヒ
ドロキシー３１１、 ＰＩ−ジｇ三ブチルフェニル）プ
ロピオネート〕、ペンタエリスリチルテトラキス〔３−
（≠′−ヒドロキシー３’、Ｊ’−ジ第三ブチルフェニ
ル）プロピオネート〕、トリス（（４’−ヒドロキシ−
３，タージ第三ブチルフェニル）プロピオニルオキシエ
チルコインシアヌレート、オクタデシル−α−（ｌＩＬ
−ヒドロキシ−３，ｊ−ジ第三ブチルフェニル）アセテ
ート、オクタデシル−γ−（ｌＡ−ヒドロキシ−３，ｊ
−ジ第三ブチルフェニル）ブチレートなどがあげられる
。Hindered phenol antioxidants are Hiro-Hydroxy-3,! Examples include compounds represented by -di-tert-butylphenyl. Specifically, methyl-β-(Hiro-hydroxy-3,J-di-tert-butylphenyl) propionate, ethyl-β-(Hiro-hydroxy-3,!-di-tert-butylphenyl) propionate, octyl- β-(Hiro-hydroxy-3,5-di-tert-butylphenyl) fluorionate, lauryl-β-(Hiro-hydroxy-3,j-
di-tert-butylphenyl) propionate, octadecyl-β-(Hiro-hydroxy-3,j-di-tert-butylphenyl) propionate, propyl-i,i,t-tris-[methylene-3'-(ψ''-hydroxy- J,j”
-di-tert-butylphenyl)propionate], ethyl-
/, /, / -Tris-[methylene-3'-(μ''-hydroxy-311, PI-di-g-tributylphenyl)propionate], pentaerythrityltetrakis [3-
(≠′-hydroxy-3′,J′-di-tert-butylphenyl)propionate], Tris((4′-hydroxy-
3, tert-tert-butylphenyl) propionyloxyethyl coin cyanurate, octadecyl-α-(lIL
-hydroxy-3,j-di-tert-butylphenyl) acetate, octadecyl-γ-(lA-hydroxy-3,j
-di-tert-butylphenyl)butyrate and the like.
ポリエチレンのメルトインデックス及び密度は、上記の
範囲から選択する必要がある。密度が上記の範囲よりも
小さくなると高純度薬品中のダストが増加する。また密
度が上記の範囲よシも大きくなると長期間の使用にあた
り破損しやすくなる。またメルトインデックスは成形性
を確保するために上記の範囲にあることが必要である。The melt index and density of the polyethylene must be selected from the above ranges. When the density is lower than the above range, dust in the high purity chemical increases. Furthermore, if the density is greater than the above range, it will be more likely to be damaged during long-term use. Further, the melt index needs to be within the above range in order to ensure moldability.
外筒は繊維強化プラスチック（ＦＲＰ）等で製作するの
が有利である。外筒は容器の機械的強度を確保し、外部
からの衝撃に対して内筒を保護するだめのものであり、
ＦＲＰの厚さは乙部程度で十分である。Advantageously, the outer cylinder is made of fiber reinforced plastic (FRP) or the like. The outer cylinder ensures the mechanical strength of the container and protects the inner cylinder from external shocks.
It is sufficient for the thickness of the FRP to be about the size of the second part.
本発明を図面に基づいて更に具体的に説明すると、第１
図は本発明に係る容器の１例の一部縦断面図である。図
中（１）はＦＲＰ製の外筒であり、上面と側面が一体に
形成されている。底板（２）は取外し可能となっておシ
、ボルトで外筒の本体に固定するようになっている。底
面の中央部（最低部）には通気及び上面の開口部から侵
入するかもしれない水を排出するだめの小孔（９）が設
けられている。上面（３）には、内筒（４）の上部に突
起状に設けだ液出入口（５）、ガス入口（６）、および
洗浄口開口部が設けられている。To explain the present invention more specifically based on the drawings, the first
The figure is a partial vertical sectional view of an example of a container according to the present invention. In the figure, (1) is an outer cylinder made of FRP, and the upper surface and side surfaces are integrally formed. The bottom plate (2) is removable and is fixed to the main body of the outer cylinder with bolts. The center (lowest part) of the bottom is provided with a small hole (9) for ventilation and drainage of water that may enter through the opening in the top. The upper surface (3) is provided with a saliva inlet/outlet (5), a gas inlet (6), and a cleaning port opening which are protruded from the upper part of the inner cylinder (4).
液出入口（５）、ガス入口（６）には高純度薬品の充填
、抜出しのだめのフンタッチカプラー（８）カ取付けら
れている。洗浄口（７）は容器内部を洗浄するときの洗
浄液の出入のためのものであシ、高純度薬品用容器とし
て用いる際は蓋で閉鎖されている。００）は液出入口（
５）、ガス入口（６）を保護するためのカバーである。A touch coupler (8) for filling and extracting high-purity chemicals is attached to the liquid inlet/outlet (5) and gas inlet (6). The cleaning port (7) is for the entry and exit of cleaning liquid when cleaning the inside of the container, and is closed with a lid when used as a container for high-purity chemicals. 00) is the liquid inlet/outlet (
5), a cover to protect the gas inlet (6).
０υは高純度薬品の抜出導管である。0υ is a high purity chemical extraction conduit.
〈実施例〉
密度Ｏ６り、５− ｚ ｙ ／ｃｔｌ、メルトインデッ
クス０．０３ｆ／１０分で、添加剤としてヒンダードフ
ェノール系酸化防止剤を０．１％含有するポリエチレン
を用いて、吹込成形により、第１図に示す如き形状で直
径約！００ｔｒｒｍ、深さ約１．２０闇、壁の厚さ約５
間で内容積的ｔｏｏｔの内筒を製作した。これを第１図
の如き形状の厚さ６閣のＦＲＰ製の外筒に下から挿入し
、底板を取付て内筒を底板上に支持した。内筒と外筒と
の間隙は約１ｒｒｒ！ｎである。容器を十分に洗浄し、
かつ高純度塩酸を入れて放置して容器から生ずる汚染物
を予じめ除去したのち、これに高純度塩酸を充填して約
Ａ２０Ｋｍ トラック輸送した。<Example> Polyethylene containing 0.1% of hindered phenolic antioxidant as an additive with a density of O6, 5-z y /ctl, and a melt index of 0.03 f/10 min was used by blow molding. , with a shape as shown in Figure 1 and a diameter of approximately! 00trrm, depth approximately 1.20 darkness, wall thickness approximately 5
An inner cylinder with an internal volume of toot was manufactured between the two. This was inserted from below into an FRP outer cylinder having a shape as shown in Fig. 1 and having a thickness of 6 mm, a bottom plate was attached, and the inner cylinder was supported on the bottom plate. The gap between the inner cylinder and the outer cylinder is approximately 1rrr! It is n. Wash the container thoroughly and
After adding high-purity hydrochloric acid and leaving the container to remove contaminants generated from the container, the container was filled with high-purity hydrochloric acid and transported approximately 20 km by truck.
高純度薬品中のＱ、５８以上のダスト数（個／１ｇ）は
充填時７３個／ ｍｌ ｓ輸送後／＆個／ ｍｌで殆ん
ど変化しなかった。The number of Q, 58 or higher dust particles (pieces/1g) in high purity chemicals was 73 pieces/ml at the time of filling, and was almost unchanged at /& pieces/ml after transportation.
これに対し密度θ、りｓｉｔ／ｃｄｓ メルトインデッ
クス０．０３９／１０分のポリエチレンを用いて製作し
た内筒を用いるとり！Ｏ個／ ｍｅとダストが５０倍以
上にも増加する。On the other hand, an inner cylinder made of polyethylene with a density θ, a sat/cds melt index of 0.039/10 is used! O pieces/me and dust increase by more than 50 times.
第１図は本発明に係る高純度薬品用の大型容器の１例で
ある。FIG. 1 is an example of a large container for high-purity chemicals according to the present invention.
Claims (2)
レン製の内筒とから成り、該内筒は ４００ｍｍ以上の直径及び深さの筒状部を有しており、
且つメルトインデックス０．０１〜０．０４ｇ／１０分
、密度０．９５３〜０．９５７ｇ／ｃｍ＾３のポリエチ
レンであって金属成分を含有する添加剤を実質的に含ま
ないものの吹込成形により成形されたものであることを
特徴とする高純度薬品用の大型容器。(1) Consisting of a reinforcing outer cylinder and an inner cylinder made of polyethylene inserted into the outer cylinder, the inner cylinder has a cylindrical part with a diameter and depth of 400 mm or more,
In addition, it is formed by blow molding of polyethylene having a melt index of 0.01 to 0.04 g/10 min and a density of 0.953 to 0.957 g/cm^3 and substantially free of additives containing metal components. A large container for high purity chemicals.
剤のみを含んでいるポリエチレンで内筒が形成されてい
ることを特徴とする請求項（１）記載の高純度薬品用の
大型容器。(2) The large container for high-purity chemicals according to claim (1), wherein the inner cylinder is formed of polyethylene containing only a hindered phenol antioxidant as an additive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63033384A JPH01208115A (en) | 1988-02-16 | 1988-02-16 | Large-sized vessel for high-purity chemical |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63033384A JPH01208115A (en) | 1988-02-16 | 1988-02-16 | Large-sized vessel for high-purity chemical |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01208115A true JPH01208115A (en) | 1989-08-22 |
| JPH0420773B2 JPH0420773B2 (en) | 1992-04-06 |
Family
ID=12385100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63033384A Granted JPH01208115A (en) | 1988-02-16 | 1988-02-16 | Large-sized vessel for high-purity chemical |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01208115A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995027754A1 (en) * | 1994-04-08 | 1995-10-19 | Wiva Verpakkingen B.V. | Vessel for high purity chemicals of carbon filled high density polyethylene |
| WO1998002368A1 (en) * | 1996-07-16 | 1998-01-22 | Merck Patent Gmbh | Materials for production of containers |
| WO2000047412A1 (en) * | 1999-02-11 | 2000-08-17 | Riedel-De Haen Gmbh | Multilayer device for storing and transporting chemicals |
-
1988
- 1988-02-16 JP JP63033384A patent/JPH01208115A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995027754A1 (en) * | 1994-04-08 | 1995-10-19 | Wiva Verpakkingen B.V. | Vessel for high purity chemicals of carbon filled high density polyethylene |
| WO1998002368A1 (en) * | 1996-07-16 | 1998-01-22 | Merck Patent Gmbh | Materials for production of containers |
| WO2000047412A1 (en) * | 1999-02-11 | 2000-08-17 | Riedel-De Haen Gmbh | Multilayer device for storing and transporting chemicals |
| US7378138B1 (en) | 1999-02-11 | 2008-05-27 | Honeywell International Inc. | Multilayer device for storing and transporting chemicals |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0420773B2 (en) | 1992-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |