JPH01205939A - Manufacture of needle - Google Patents

Manufacture of needle

Info

Publication number
JPH01205939A
JPH01205939A JP2572888A JP2572888A JPH01205939A JP H01205939 A JPH01205939 A JP H01205939A JP 2572888 A JP2572888 A JP 2572888A JP 2572888 A JP2572888 A JP 2572888A JP H01205939 A JPH01205939 A JP H01205939A
Authority
JP
Japan
Prior art keywords
needle
deformed
etching
metal wire
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2572888A
Other languages
Japanese (ja)
Inventor
Tetsuo Iijima
飯島 哲生
Kyosuke Yasuda
安田 享祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2572888A priority Critical patent/JPH01205939A/en
Publication of JPH01205939A publication Critical patent/JPH01205939A/en
Pending legal-status Critical Current

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)

Abstract

PURPOSE:To obtain the simple method for manufacturing needles in a wide application range by etching-treating a metal wire on which a deformed or broken part is formed, on the surface of an electrolytic liquid or in the electrolytic liquid. CONSTITUTION:After a metal wire 1 is inserted into a tube 3, a deformed or broken part 2 is formed on the metal wire 1, and then said wire 1 is etching- treated in an electrolytic liquid. Then, the wire is surely cut at the deformed or broken part 2. Since a formed needle projects by several mm from the top edge of an insulating tube 3' in the lower part, said needle can be easily taken out. The reason of the formation of the needle at the deformed or broken part 2 comes from the fact that this part is made thinner in comparison with the diameter of the original wire, and etching is completed faster, or the surface area of the etching-treated part is increased, and the etching rate is increased.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は走査型トンネル顕微鋺(ScanningTu
nneling Mieroseopy)の原理を応用
して物体の表面の凹凸、原子吸引力、磁気吸引力等の解
析、評価を行う際にセンサとなる金属針の作製法に関す
る。
[Detailed Description of the Invention] <Industrial Application Field> The present invention is directed to a scanning tunneling microscope (Scanning Tube).
This invention relates to a method for manufacturing a metal needle that serves as a sensor when analyzing and evaluating surface irregularities of objects, atomic attraction force, magnetic attraction force, etc. by applying the principle of ``Nneling Mieroseopy''.

〈従来の技術〉 トンネル電流、原子吸引力、磁気吸引力等をセンスする
ための針の作製方法には各覆ある。なかでも比較的簡単
で、1μm程度の針先を得る方法として電解液表面また
は電解液中でエツチングする方法がある。この方法の特
徴は、 (1)  エツチングの結果電解液中に落下した方の先
が鋭く、従ってこれを針とする。
<Prior Art> There are various methods for producing needles for sensing tunneling current, atomic attraction, magnetic attraction, and the like. Among these, a relatively simple method of obtaining a needle tip of about 1 μm is a method of etching on the surface of or in an electrolytic solution. The features of this method are as follows: (1) The tip that falls into the electrolyte as a result of etching is sharp, and is therefore used as a needle.

(2)  チューブ等でエツチングをしない部分を絶縁
し、エツチング部分を限定する。
(2) Insulate the parts that will not be etched with tubes, etc., and limit the etched parts.

これらは、P、J、Bryant、 et al=Re
v、sci、 In5tru、。
These are P, J. Bryant, et al=Re
v,sci,In5tru,.

vol、 58. 、 p、 1115.1987.及
び支出、金子;第48回応用物理学会学術講演会講演予
稿集、No、 20P−B−9,P、 396.198
7゜の文献に記述されている。
vol, 58. , p. 1115.1987. and Expenses, Kaneko; Proceedings of the 48th Academic Conference of the Japan Society of Applied Physics, No. 20P-B-9, P, 396.198
7° is described in the literature.

〈発明が解決しようとする課題〉 しかし、とくに原子吸引力、磁気吸引力をセンスする場
合には、原子吸引力、磁気吸引力の微弱な力を針のたわ
み等の変形iとして検出するため、針自体の径が細いこ
と、例えば0.1mm以下が要求される。この場合上記
方法では、■ワイヤ径が細いためこれを絶縁し針形成後
に簡単に回収する良い方法がない、■高い電流密度でエ
ツチングした場合チューブ間隔を小さくしようとすると
気泡が発生すると共にエツチングが不均一になり、また
チューブ間隔を広げると再現性がなくなる、■ワイヤ径
が小さいため回収等ハンドリングが難しい、という問題
点があった。
<Problem to be solved by the invention> However, especially when sensing atomic attraction force or magnetic attraction force, since the weak force of atomic attraction force or magnetic attraction force is detected as deformation i such as deflection of the needle, The diameter of the needle itself is required to be small, for example 0.1 mm or less. In this case, with the above method, there is no good way to insulate the wire and recover it easily after needle formation because the diameter of the wire is small.■ If etching is performed at a high current density, air bubbles will be generated and etching will be interrupted if the tube spacing is reduced. There were problems such as non-uniformity, loss of reproducibility when the tube spacing was widened, and difficulty in handling such as collection due to the small wire diameter.

本発明は上記状況に鑑みてなされたもので、簡単で適用
範囲の広い針作製法を提供することを目的とする。
The present invention was made in view of the above situation, and an object of the present invention is to provide a needle manufacturing method that is simple and has a wide range of applications.

く課題を解決するための手段〉 上記目的を達成するための本発明の針の作製法は、金属
ワイヤーの一部に変形または傷を生じさせ、変形または
傷が生じた金属ワイヤーを電解液表面または電解液中で
エツチングして針を作製することを特徴とする。また、
変形または傷の部位を除き金属ワイヤーを絶縁体で被覆
し、金属ワイヤーを電解液表面または電解液中でエツチ
ングして針を作製することを特徴とする。
Means for Solving the Problems> In order to achieve the above object, the method for manufacturing a needle of the present invention involves deforming or scratching a part of a metal wire, and placing the deformed or scratched metal wire on the surface of an electrolyte. Alternatively, the needle is produced by etching in an electrolytic solution. Also,
The method is characterized in that the metal wire is covered with an insulator except for deformed or damaged areas, and the metal wire is etched on the surface of or in the electrolytic solution to produce the needle.

く作   用〉 金属ワイヤーをエツチングすると、変形または傷の部分
から細線化され、金属ワイヤーは溶断されて針先端が作
製される。
Function: When a metal wire is etched, it becomes thinner from the deformed or scratched area, and the metal wire is fused to create a needle tip.

く実 施 例〉 第1図には金属ワイヤーの外観、第2図にはエツチング
を行なっている状態説明、第3図にはFeとNiワイヤ
ーの電流電圧特性、第4図には定電流駆動時の溶断時間
の変化を示しである。
Examples: Figure 1 shows the appearance of the metal wire, Figure 2 explains the state of etching, Figure 3 shows the current-voltage characteristics of Fe and Ni wires, and Figure 4 shows the constant current drive. This figure shows the change in melting time over time.

第1図において、1は金属ワイヤー、2は金属ワイヤー
1に設けた変形または偏部、3は絶縁体としてのチュー
ブ、4は浮力発生手段、5はチューブ間隔(非絶縁部)
で、チューブ間隔5は11〜数間の範囲に設定されてい
る。チューブ3は内径0.5m+aの熱収縮チューブ(
シュンフロン線)を熱で伸ばし内径が0.2〜0.3m
m程度に小さくなたものを絶縁体として使用し、金属ワ
イヤー1にチューブ3を通す。チューブ3を通した後金
属ワイヤー1に変形または偏部2を設ける。変形または
偏部2を形成する場合、通常の切削手段、例えばニッパ
、はさみ、カッターナイフ、かみそり刃等を使用する。
In Figure 1, 1 is a metal wire, 2 is a deformed or uneven part provided on the metal wire 1, 3 is a tube as an insulator, 4 is a buoyancy generating means, and 5 is a tube interval (non-insulated part)
The tube spacing 5 is set in a range of 11 to several. Tube 3 is a heat shrink tube with an inner diameter of 0.5m+a (
Stretch the Shunflon wire with heat to an inner diameter of 0.2 to 0.3 m.
The tube 3 is passed through the metal wire 1 using a piece of metal wire 1 as an insulator, which has a size of about 100 mm. After passing through the tube 3, the metal wire 1 is provided with a deformed or biased portion 2. When forming the deformed or eccentric portion 2, conventional cutting means are used, such as nippers, scissors, a utility knife, a razor blade, etc.

変形または偏部2の度合は、ニッパ等の刃に微小な切欠
を設ける、予め厚さのわかったスペーサをはき八で刃を
当てる、切削に加える力をコントロールする等の方法で
行なう。
The degree of deformation or uneven portion 2 can be determined by making a small notch in the blade of a nipper or the like, by applying the blade to a spacer whose thickness is known in advance, or by controlling the force applied to the cutting.

この金属ワイヤー1を第2図に示したように電解液中で
エツチングする。第2図中・A部は変形または傷を設け
たワイヤ部、6は白金電極、7は定電流または定電圧電
源、8は電解液でここでは濃度10%の塩酸(HCI)
、9はビー力である。エツチングにより落下した方が針
先端が鋭いのでこれを採用する。第3図にFeとNiワ
イヤでの電圧−電流特性を示す。第4図には定電流駆動
したときのエツチング完了までの時間を示す。この条件
の範囲では20〜50mAの電流範囲で先端径1μm程
度の鋭い針が得られた。
This metal wire 1 is etched in an electrolytic solution as shown in FIG. In Figure 2, part A is a deformed or scratched wire part, 6 is a platinum electrode, 7 is a constant current or constant voltage power source, and 8 is an electrolyte, in this case hydrochloric acid (HCI) with a concentration of 10%.
, 9 is the bee force. This method is used because the tip of the needle will be sharper if it falls due to etching. FIG. 3 shows the voltage-current characteristics of Fe and Ni wires. FIG. 4 shows the time taken to complete etching when driven at constant current. Under these conditions, a sharp needle with a tip diameter of about 1 μm was obtained in the current range of 20 to 50 mA.

金属ワイヤ1につけた変形または偏部2がない場合には
チューブ3で覆わない部分が急速にエツチングされ、針
の部分が下方のチューブ3′のなかに入ってしまい取り
出すのが難しい。これに対して変形または偏部2をつけ
た場合には確実に変形または偏部2から切断された。こ
の変形まt−t1四部2に形成された針は下部の絶縁チ
ューブ3′の上端より数mm程度出ているので、取り出
すのに容易である。
If the metal wire 1 does not have the deformed or eccentric part 2, the part not covered by the tube 3 will be rapidly etched, and the needle part will enter the lower tube 3' and be difficult to remove. On the other hand, when the deformed or biased portion 2 was attached, the deformation or biased portion 2 was surely cut. The needle formed in the four parts 2 of this modified t-t1 protrudes from the upper end of the lower insulating tube 3' by several millimeters, so it is easy to take out.

変形または偏部2に針が形成されるのは、この部分がも
とのワイヤ径に比べて薄くなるためエツチングが早く完
了する、あるいは被エツチング部分の表面積が増すため
エツチングレイトが高いためと考えられろ。尚、絶縁チ
ューブを設けない場合には、変形または偏部2以外から
も溶断されることもある。絶縁チューブ3で絶縁するこ
とにより、金属ワイヤ1は変形または偏部2で確実に溶
断されることがHEEできた。これはエツチングが被エ
ツチング部分の表面猜に依存するためと考えられろ。
The reason why needles are formed in the deformed or uneven part 2 is thought to be that this part becomes thinner than the original wire diameter, so etching completes quickly, or that the etching rate is high because the surface area of the part to be etched increases. Let it go. Note that if the insulating tube is not provided, deformation or melting may occur from areas other than the uneven portion 2. By insulating with the insulating tube 3, it was possible to ensure that the metal wire 1 was deformed or fused at the uneven portion 2. This is thought to be because etching depends on the surface thickness of the part to be etched.

浮力印加手段4は発泡スチロールで構成し、被切断部分
の重力が浮力より僅カ\に大きいように設定する。これ
は、エツチング完了時(溶断時)に針形酸部分の引張力
を弱めることにより先端まで十分にエツチングをさせろ
効果と、同時に落下後針の先端が電解液中に立つように
なるので、針形成後の変形、曲がり等の外乱を受けず回
収等のハンドリングも容易にするのに役立つ。但し浮力
印加手段4がない場合でも電解液中でほぼ自由落下する
ので、針の鋭さは浮力印加手段が無い場合と同様である
The buoyant force applying means 4 is made of polystyrene foam, and is set so that the gravity of the part to be cut is slightly larger than the buoyant force. This is because the tensile force on the needle-shaped acid part is weakened when etching is completed (during fusing), allowing sufficient etching to reach the tip, and at the same time, the tip of the needle stands in the electrolyte after falling, so the needle It is useful for facilitating handling such as collection without being subjected to disturbances such as deformation and bending after formation. However, even in the absence of the buoyancy applying means 4, the needle falls almost freely in the electrolyte, so the sharpness of the needle is the same as in the case without the buoyancy applying means.

第5図には溶断された金属ワイヤー1の先端部(針部)
の形状を示し、第5図+81にはFeの場合、第5図(
blにばNiの場合を示しである。第5図(rL)に示
すようにFeの場合、先端は変形を反映してペンの先端
状になるものもあろが、第5図(b)に示すようにNi
の場合、先端の針先端は少なくとも1μm以下と鋭い。
Figure 5 shows the tip (needle) of the metal wire 1 that has been fused.
In the case of Fe, Fig. 5+81 shows the shape of Fig. 5 (
bl shows the case of Ni. As shown in Figure 5 (rL), in the case of Fe, the tip may become like the tip of a pen reflecting the deformation, but as shown in Figure 5 (b), in the case of Fe,
In this case, the tip of the needle is as sharp as at least 1 μm or less.

また、絶縁していない部分もエツチングされるため、第
5図(fl)に符号20で示したように略−様に細くな
っている。第5図は光学@微鏡観察の結果を図に表わし
たものであるが、この例で9は太さが約1/3と細くな
っている。
Furthermore, since the non-insulated portions are also etched, they become thinner in a substantially --shape as shown by the reference numeral 20 in FIG. 5(fl). FIG. 5 is a graphical representation of the results of optical @ microscopic observation, and in this example, the thickness of 9 is as thin as about 1/3.

上述した針の作成法は、金属ワイヤー1に変形または渦
部2をつけろことによりその部分が選択的にエツチング
を受けて針先端となる。また、チニーブ3で変形または
偏部2以外を覆ったので、非絶縁部(変形または偏部2
)がエツチングを受は細線化されろ。また、溶断部に浮
力発生手段4を設けたので、溶断がゆっくりと完了する
と共に針の回収作業が楽に行なえる。
In the above-described needle manufacturing method, the metal wire 1 is deformed or a vortex portion 2 is added, and that portion is selectively etched to become the needle tip. In addition, since the part other than the deformed or uneven part 2 was covered with the chinibu 3, the non-insulated part (the deformed or uneven part 2
) will be etched to make the wire thinner. Furthermore, since the buoyancy generating means 4 is provided at the fusing part, the fusing is completed slowly and the needle can be recovered easily.

尚、本発明法は通常のトンネル電流の検出用、原子吸引
力測定用、また電解放射型顕微鏡の針の作製にも適用で
きることは自明である。
It is obvious that the method of the present invention can be applied to ordinary tunnel current detection, atomic attraction force measurement, and to the production of needles for field emission microscopes.

〈発明の効果〉 本発明の針の作製法は、金属ワイヤーに変形または傷を
生じさせたので、その部分が選択的にエツチングを受け
て針先端となる。また絶縁体で必要な部分を覆うように
したので、非絶iij部がエツチングを受けて細線化さ
れろ。
<Effects of the Invention> In the needle manufacturing method of the present invention, the metal wire is deformed or damaged, and the deformed portion is selectively etched to become the needle tip. Also, since the necessary portions are covered with an insulator, the non-interrupted portions will be etched to become thinner lines.

この結果、簡単で適用範囲の広い新作製法が達成される
This results in a new manufacturing method that is simple and has a wide range of applications.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a) (b)は本発明を実施する金属ワイヤー
の側面図、正面図、第2図はエツチングを行なっている
状態の説明図、第3図はFeワイヤーとNiワイヤーの
電流電圧特性を表わすグラフ、第4図は定電流駆動時の
溶断時間の変化を表わすグラフ、第5図(a)は溶断さ
れたFeワイヤーの先端部(針部)を表わした平面図、
第5図1b)は溶断されたNiワイヤーの先端部(針部
)を表わした平面図である。 図 面 中、 1は金属ワイヤー、 2は変形または偏部、 3.3′はチューブ、 4は浮力発生手段、 5はチューブ間隔、 6は白金Ti極、 7は定電流または定電圧電源、 8は電解液、 9はピー力である。
Figures 1 (a) and (b) are side and front views of the metal wire according to the present invention, Figure 2 is an explanatory diagram of the state in which etching is being performed, and Figure 3 is the current and voltage of the Fe wire and Ni wire. A graph showing the characteristics, Fig. 4 is a graph showing the change in fusing time during constant current driving, Fig. 5 (a) is a plan view showing the tip (needle part) of the fusing Fe wire,
FIG. 5 1b) is a plan view showing the tip portion (needle portion) of the fused Ni wire. In the drawing, 1 is a metal wire, 2 is a deformed or uneven part, 3.3' is a tube, 4 is a buoyancy generating means, 5 is a tube spacing, 6 is a platinum Ti electrode, 7 is a constant current or constant voltage power source, 8 is the electrolyte, and 9 is the pea force.

Claims (1)

【特許請求の範囲】 1、金属ワイヤーの一部に変形または傷を生じさせ、変
形または傷が生じた金属ワイヤーを電解液表面または電
解液中でエッチングして針を作製することを特徴とする
針の作製法。 2、変形または傷の部位を除き前記金属ワイヤーを絶縁
体で被覆したことを特徴とする特許請求の範囲第1項記
載の針の作製法。
[Claims] 1. A needle is produced by deforming or scratching a part of a metal wire and etching the deformed or scratched metal wire on or in the electrolyte. How to make needles. 2. The method for manufacturing a needle according to claim 1, wherein the metal wire is covered with an insulator except for deformed or damaged areas.
JP2572888A 1988-02-08 1988-02-08 Manufacture of needle Pending JPH01205939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2572888A JPH01205939A (en) 1988-02-08 1988-02-08 Manufacture of needle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2572888A JPH01205939A (en) 1988-02-08 1988-02-08 Manufacture of needle

Publications (1)

Publication Number Publication Date
JPH01205939A true JPH01205939A (en) 1989-08-18

Family

ID=12173864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2572888A Pending JPH01205939A (en) 1988-02-08 1988-02-08 Manufacture of needle

Country Status (1)

Country Link
JP (1) JPH01205939A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5477604A (en) * 1993-11-01 1995-12-26 Smith; Daniel Process for manufacturing taper point surgical needles
CN110777424A (en) * 2019-11-14 2020-02-11 南京工业职业技术学院 Nano needle tip batch production device and preparation method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5477604A (en) * 1993-11-01 1995-12-26 Smith; Daniel Process for manufacturing taper point surgical needles
CN110777424A (en) * 2019-11-14 2020-02-11 南京工业职业技术学院 Nano needle tip batch production device and preparation method
CN110777424B (en) * 2019-11-14 2023-07-18 南京工业职业技术学院 Nanometer needle tip batch production device and preparation method

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