JPH01197644A - インピーダンス検出装置 - Google Patents

インピーダンス検出装置

Info

Publication number
JPH01197644A
JPH01197644A JP2207888A JP2207888A JPH01197644A JP H01197644 A JPH01197644 A JP H01197644A JP 2207888 A JP2207888 A JP 2207888A JP 2207888 A JP2207888 A JP 2207888A JP H01197644 A JPH01197644 A JP H01197644A
Authority
JP
Japan
Prior art keywords
electrode
impedance
filter element
filter
foreign matter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2207888A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583148B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masaji Tatezawa
館澤 正司
Yukio Nagasawa
長沢 幸雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2207888A priority Critical patent/JPH01197644A/ja
Publication of JPH01197644A publication Critical patent/JPH01197644A/ja
Publication of JPH0583148B2 publication Critical patent/JPH0583148B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2207888A 1988-02-03 1988-02-03 インピーダンス検出装置 Granted JPH01197644A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2207888A JPH01197644A (ja) 1988-02-03 1988-02-03 インピーダンス検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2207888A JPH01197644A (ja) 1988-02-03 1988-02-03 インピーダンス検出装置

Publications (2)

Publication Number Publication Date
JPH01197644A true JPH01197644A (ja) 1989-08-09
JPH0583148B2 JPH0583148B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-11-24

Family

ID=12072850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2207888A Granted JPH01197644A (ja) 1988-02-03 1988-02-03 インピーダンス検出装置

Country Status (1)

Country Link
JP (1) JPH01197644A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6009739A (en) * 1996-12-18 2000-01-04 Ebara Corporation Method for evaluating performance of chemical filter for cleaning gas
JP2021016811A (ja) * 2019-07-18 2021-02-15 国立大学法人信州大学 フィルタ膜の透水性評価方法および装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6338612U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-08-28 1988-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6338612U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-08-28 1988-03-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6009739A (en) * 1996-12-18 2000-01-04 Ebara Corporation Method for evaluating performance of chemical filter for cleaning gas
JP2021016811A (ja) * 2019-07-18 2021-02-15 国立大学法人信州大学 フィルタ膜の透水性評価方法および装置

Also Published As

Publication number Publication date
JPH0583148B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-11-24

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