JPH01183457A - Ceramic composition - Google Patents
Ceramic compositionInfo
- Publication number
- JPH01183457A JPH01183457A JP63005375A JP537588A JPH01183457A JP H01183457 A JPH01183457 A JP H01183457A JP 63005375 A JP63005375 A JP 63005375A JP 537588 A JP537588 A JP 537588A JP H01183457 A JPH01183457 A JP H01183457A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- alumina
- parts
- raw material
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 41
- 239000000919 ceramic Substances 0.000 title claims abstract description 20
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 51
- 239000000843 powder Substances 0.000 claims abstract description 38
- 239000002994 raw material Substances 0.000 claims abstract description 22
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052863 mullite Inorganic materials 0.000 claims abstract description 17
- 150000001875 compounds Chemical class 0.000 claims abstract description 15
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 7
- 238000010304 firing Methods 0.000 claims description 15
- 229910000484 niobium oxide Inorganic materials 0.000 claims description 6
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 6
- 239000000654 additive Substances 0.000 abstract description 8
- 230000000996 additive effect Effects 0.000 abstract description 4
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 229910019714 Nb2O3 Inorganic materials 0.000 abstract 1
- -1 Y2O3) and Chemical class 0.000 abstract 1
- 239000011104 metalized film Substances 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 11
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 10
- 238000000280 densification Methods 0.000 description 10
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 10
- 239000002245 particle Substances 0.000 description 9
- 239000007791 liquid phase Substances 0.000 description 8
- 239000000395 magnesium oxide Substances 0.000 description 8
- 235000012245 magnesium oxide Nutrition 0.000 description 8
- 238000001465 metallisation Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910000019 calcium carbonate Inorganic materials 0.000 description 5
- 235000010216 calcium carbonate Nutrition 0.000 description 5
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 4
- 229910000423 chromium oxide Inorganic materials 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 238000010344 co-firing Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000005078 molybdenum compound Substances 0.000 description 2
- 150000002752 molybdenum compounds Chemical class 0.000 description 2
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 2
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000010062 adhesion mechanism Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 150000002681 magnesium compounds Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はセラミック組成物に関し、特に電子部品材料と
して好適に用いることのできるセラミック組成物に関す
る。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a ceramic composition, and particularly to a ceramic composition that can be suitably used as an electronic component material.
（従来の技術）
近年、電子部品の高密度実装化、低コスト化に伴い、パ
ッケージおよび基板材料には様々な特性が要求されるよ
うになり、これらの要求に対応して窒化アルミニウム、
炭化ケイ素等の新しいセラミックが開発されている。し
かしながら、従来のアルミナセラミックは、物理的、化
学的な譜性質のバランスの良さ、および低コスト、作業
性の良さ等の点から、特にパッケージ材料としてはいま
だに主流を占めており、近年新たに開発されている窒化
アルミニウム等は用途に応じて部分的に用いられている
に過ぎない。(Prior art) In recent years, with the increasing density and cost reduction of electronic components, packages and substrate materials are required to have various properties.In response to these demands, aluminum nitride,
New ceramics such as silicon carbide are being developed. However, conventional alumina ceramics are still the mainstream, especially as packaging materials, due to their well-balanced physical and chemical properties, low cost, and good workability. Aluminum nitride and the like are only partially used depending on the application.
上述したアルミナセラミックは比較的長い期間を費やし
て技術蓄積がなされ、品質改善がなされてきているが、
近年は従来品よりもさらに高強度、高表面平滑性を有す
るとともに、高いメタライズ強度を保証できるものが望
まれている。また、用途によってはさらに遮光性が要求
されている。The alumina ceramics mentioned above have undergone a relatively long period of technological accumulation and quality improvements.
In recent years, there has been a demand for products that have even higher strength and surface smoothness than conventional products, and can guarantee high metallization strength. Further, depending on the application, light-shielding properties are required.
（発明が解決しようとする問題点）
アルミナセラミックの機械的強度は、従来技術からもわ
かる通り、アルミナの純度がより高いはど、また、焼成
体の組織がより均一かつより緻密であるほど、そして焼
結粒がより微細であるほど高い値となる。また１表面平
滑性も機械的強度とほぼ同様の傾向で向上する。(Problems to be Solved by the Invention) As can be seen from the prior art, the mechanical strength of alumina ceramics increases as the purity of alumina increases and as the structure of the fired body becomes more uniform and denser. The finer the sintered grains, the higher the value. Furthermore, the surface smoothness also improves in almost the same manner as the mechanical strength.
しかしながら、相対的に高アルミナ純度のセラミックは
高い抗折強度を有する反面、良好なメタライズ性を保証
できず、実際、従来技術によってつくられている９５重
量パーセント以上のアルミナを含有するセラミックは、
同時焼成によるメタライズ層の形成が雅しく、もっばら
後焼成または蒸着法等によってメタライズ層を形成する
セラミック基板として用いられていた。However, although ceramics with relatively high alumina purity have high bending strength, they cannot guarantee good metallization properties, and in fact, ceramics containing more than 95% by weight of alumina made by conventional techniques
The metallized layer can be formed elegantly by co-firing, and it has been used as a ceramic substrate on which the metallized layer is formed by post-firing or vapor deposition.
一方、これに対し９０〜９２重量パーセントのアルミナ
を含有するセラミックでは同時焼成によって良好なメタ
ライズ強度は得られるものの満足できる抗折強度が得ら
れない。On the other hand, with ceramics containing 90 to 92 weight percent alumina, good metallization strength can be obtained by co-firing, but satisfactory flexural strength cannot be obtained.
ここで、メタライズの接着機構としては、焼成時にセラ
ミック中に生成する液相がメタライズ層に浸透しアンカ
ーを形成することが主と考えられるため、焼成中にある
程度の量の液相が生成しないとアンカーの形成が不十分
となりメタライズ強度の低下につながる。そこで、十分
なメタライズ強度を保証するためにアルミナ純度を９２
重量％程度以下とし、さらに十分な機械的強度を保証す
る目的で焼結粒のサイズを小さくするために原料中のア
ルミナ粉末として粒径の微細なものを用いることが考え
られるが、粒径の微細なものを用いる場合は一般に緻密
化が阻害される。Here, the main adhesion mechanism of metallization is thought to be that the liquid phase generated in the ceramic during firing penetrates into the metallized layer and forms an anchor, so a certain amount of liquid phase must be generated during firing. This results in insufficient anchor formation, leading to a decrease in metallization strength. Therefore, in order to guarantee sufficient metallization strength, the alumina purity was increased to 92%.
It is conceivable to use alumina powder with a fine particle size in the raw material in order to reduce the size of the sintered grains to ensure sufficient mechanical strength. When fine particles are used, densification is generally inhibited.
また、従来から焼成時に液相を生成させるために添加さ
れている無機成分添加物（焼結助剤）は、炭酸カルシウ
ム、酸化マグネシウム、酸化ケイ素等が主であり、これ
らを試薬としてそのまま添加するか、または白石灰、タ
ルク、純硅石等の天然鉱物として添加していたが、これ
ら焼結助剤を粒径約２μｍ以下のアルミナ粉末に適用す
ると、アルミナ純度が９２重量％以下の組成物の場合は
緻密化が阻害され、液相の組成および粘度、焼成温度に
もよるが焼成体にふくれが生じてしまう、また、アルミ
ナ純度が９６重量％以上の組成物に適用すると緻密で高
強度を有する焼成体は得られるものの、そのメタライズ
性は著しく低く、使用に耐えるものが得られない。In addition, the inorganic additives (sintering aids) traditionally added to generate a liquid phase during firing are mainly calcium carbonate, magnesium oxide, silicon oxide, etc., and these are added as reagents as they are. However, when these sintering aids are applied to alumina powder with a particle size of approximately 2 μm or less, the alumina purity of the composition is 92% by weight or less. If it is applied to a composition with an alumina purity of 96% by weight or more, densification is inhibited and blistering occurs in the fired product, depending on the composition and viscosity of the liquid phase and the firing temperature. Although it is possible to obtain a fired product having the following properties, the metallizability thereof is extremely low, and a product that can withstand use cannot be obtained.
そこで、本発明は上記問題点に鑑みて成されたものであ
り、その目的とするところは、アルミナセラミックであ
って高強度、高表面平滑性を有するとともに、優れたメ
タライズ性を有するセラミック組成物を提供するにある
。Therefore, the present invention has been made in view of the above problems, and its object is to provide an alumina ceramic composition having high strength, high surface smoothness, and excellent metallization properties. is to provide.
（問題点を解決するための手段） 本発明は上記目的を達成するため次の構成をそなえる。(Means for solving problems) The present invention has the following configuration to achieve the above object.
すなわち、アルミナ粉末とムライト粉末との原料混合物
にたいして、アルカリ土類元素化合物または希土類元素
化合物のうちの少なくとも１種を０．１−１０．０重量
％添加されて成る原料混合物であって、該原料混合物中
の前記ムライト粉末中のアルミナ成分を含む全アルミナ
成分が８８．０〜９９．０重量％である原料混合物を焼
成して成ることを特徴とする。That is, it is a raw material mixture in which 0.1-10.0% by weight of at least one of an alkaline earth element compound or a rare earth element compound is added to a raw material mixture of alumina powder and mullite powder, It is characterized in that it is made by firing a raw material mixture in which the total alumina component including the alumina component in the mullite powder in the mixture is 88.0 to 99.0% by weight.
また、さらに前記原料混合物に酸化ニオブを０．１〜３
．０重量％添加して焼成して成ることを特徴とする。Furthermore, 0.1 to 3 niobium oxide is added to the raw material mixture.
．． It is characterized by being made by adding 0% by weight and firing.
（発明の概要）
前述したように、従来より焼成中の液相生成のために用
いられている無機成分として主流をなしているのはＣａ
Ｏ−ＭｇＯ−３ｉＯｚの三成分系であり、本発明者らは
粒径２μｍ以下、アルミナ純度９４重量パーセント以下
の組成物中での液相の粘度および生成時期（温度）を制
御すべく、三成分系相図をもとに実験を行ったが、原料
の粉砕混合処理条件を変えることによりやや緻密な焼成
体が得られたものの製造工程上安定に製造することが困
難であり、相対密度も９４％以下と低いものであった。(Summary of the invention) As mentioned above, Ca has been the main inorganic component conventionally used to generate a liquid phase during firing.
It is a three-component system of O-MgO-3iOz, and the present inventors aimed to control the viscosity and generation timing (temperature) of the liquid phase in a composition with a particle size of 2 μm or less and an alumina purity of 94 weight percent or less. We conducted experiments based on the component system phase diagram, but although we were able to obtain a somewhat dense fired product by changing the pulverization and mixing treatment conditions of the raw materials, it was difficult to produce stably due to the manufacturing process, and the relative density was also low. It was low at 94% or less.
一方、これまでに知られているムライトセラミックは原
料組成中に３重量パーセント以下の焼結助剤を加えるだ
けで十分に緻密化し、かつ良好なメタライズ性が得られ
ている０本発明者らは、これに着目し、これらの系で生
成する液相をアルミナ純度９４重量％以下のアルミナセ
ラミックに応用したところ、微細なアルミナ粉末を用い
た場合でも十分な緻密化（相対密度約９８％）が得られ
、さらに、アルミナ純度が９６重量％を越えるアルミナ
セラミックにおいても十分な緻密化とともに良好なメタ
ライズ性が得られることを見出した。On the other hand, the mullite ceramics known so far can be sufficiently densified by adding 3% by weight or less of a sintering aid to the raw material composition, and have good metallizability. When we focused on this and applied the liquid phase generated in these systems to alumina ceramics with alumina purity of 94% by weight or less, we found that sufficient densification (relative density of approximately 98%) was achieved even when using fine alumina powder. Furthermore, it has been found that sufficient densification and good metallizability can be obtained even in an alumina ceramic having an alumina purity of more than 96% by weight.
本発明のセラミック組成物は、アルミナ粉末とムライト
粉末とに０．１〜ｉｏ、 ｏ重量％の無機成分添加物を
添加した原料混合物を焼成して得られるものである。The ceramic composition of the present invention is obtained by firing a raw material mixture of alumina powder and mullite powder to which 0.1 to io,0% by weight of an inorganic additive is added.
無機成分添加物としては、アルカリ土類元素化合物また
は希土類元素化合物が用いられ、これらは焼成中の液相
の生成に関与し、それぞれ単独で添加しても十分な緻密
体が得られる。アルカリ土類元素化合物の中ではＭｇＯ
やＭｇＦａ等のマグネシウム化合物が最もその効果が大
きく、ＣａＯ１ＣａＣＯｚ 、ＢａＣ０ｚ等では同じ効
果を得るのに添加量をやや多くする必要がある。希土類
元素化合物の中ではＹ２０３ 、ＹＦ３ 、 Ｃｅｎｔ
等でほぼＭｇＯと同じ程度の緻密化が得られ、Ｌａｗ
Ｏ−ではＣａＣＯ３と同じ程度の緻密化が得られるが、
Ｃｅ以上の質量数の元素化合物では電子材料で問題と
なるアルファ線発生量が高まるので好ましくない。As the inorganic component additive, an alkaline earth element compound or a rare earth element compound is used, and these are involved in the generation of a liquid phase during firing, and a sufficiently dense body can be obtained even if each is added alone. Among alkaline earth element compounds, MgO
Magnesium compounds such as and MgFa have the greatest effect, and with CaO1CaCOz, BaC0z, etc., it is necessary to add a slightly larger amount to obtain the same effect. Among rare earth element compounds, Y203, YF3, Cent
etc., the densification is almost the same as that of MgO, and Law
With O-, the same degree of densification as with CaCO3 can be obtained, but
Elemental compounds having a mass number greater than or equal to Ce are not preferred because they increase the amount of alpha rays generated, which is a problem in electronic materials.
゛また、酸化ニオブは焼成体組織の均一性を制御するの
に効果を発揮する。すなわち、焼成体はアルミナ含有量
が９０重量％以下の場合や、アルミナ粉末とムライト粉
末の各粒径に大きな差がある場合または焼成条件により
しばしば不均一な組織を示し、染みや斑点状の変色部を
呈するが、酸化ニオブの添加により組織を均一に保つこ
とができる。``Also, niobium oxide is effective in controlling the uniformity of the structure of the fired body. In other words, the fired product often exhibits a non-uniform structure when the alumina content is less than 90% by weight, when there is a large difference in particle size between the alumina powder and the mullite powder, or depending on the firing conditions, resulting in stains and spot-like discoloration. However, by adding niobium oxide, the structure can be kept uniform.
このときの添加量はアルミナ純度や焼成条件にもよるが
０．１〜３．０重量％程度で十分な効果が得られる。The amount added at this time depends on the alumina purity and firing conditions, but a sufficient effect can be obtained with about 0.1 to 3.0% by weight.
なお、とくに焼成体を着色し遮光性をもたせたい場合に
は酸化クロムやモリブデン化合物を添加するが、これら
の添加による電気特性への影響を考慮すると、酸化クロ
ム、モリブデン化合物を合わせても１重量％以内に抑え
ることが望ましく、一般にはアルカリ土類元素化合物や
希土類元素化合物と同時に添加して効果が認められる。Note that chromium oxide and molybdenum compounds are added especially when the fired product is desired to be colored and have light-shielding properties, but considering the effect of these additions on electrical properties, the total weight of chromium oxide and molybdenum compounds is 1. It is desirable to suppress the amount within %, and the effect is generally recognized when added at the same time as alkaline earth element compounds and rare earth element compounds.
（実施例） 以下本発明の実施例について詳細に説明する。(Example) Examples of the present invention will be described in detail below.
〔実施例１〕 平均粒径的２μｍのアルミナ粉末７７．３重量部。[Example 1] 77.3 parts by weight of alumina powder with an average particle size of 2 μm.
平均粒径的２μｍのムライト粉末（アルミナ含有量約７
２重量％）１７．７重量部、無機成分添加物として酸化
イツトリウム粉末５重量部からなる原料粉末をｎ−ブタ
ノール−トルエン混合溶液を分散媒体として２４時間ボ
ールミル混合した後、これにフタル酸−ジーｎ−ブチル
３重景部とポリビニルブチラール８重量部を加え、さら
に２４時間のボールミル混合を行った。得られた混合物
を真空脱泡した後、ドクターブレード法によってシート
に成形した。焼成は１５７０℃、大気圧、弱還元性雰囲
気中にて４時間行った。Mullite powder with an average particle size of 2 μm (alumina content approximately 7
A raw material powder consisting of 17.7 parts by weight (2% by weight) and 5 parts by weight of yttrium oxide powder as an inorganic additive was mixed in a ball mill for 24 hours using a mixed solution of n-butanol and toluene as a dispersion medium. Three parts of n-butyl and 8 parts by weight of polyvinyl butyral were added, and the mixture was further mixed in a ball mill for 24 hours. The resulting mixture was defoamed under vacuum and then formed into a sheet by a doctor blade method. Firing was performed at 1570° C., atmospheric pressure, and a weakly reducing atmosphere for 4 hours.
〔実施例２〕
実施例１の原料組成中の無機成分添加物を酸化イツトリ
ウム４．５重量部、酸化ニオブ０．５重量部とし、これ
を実施例１と同様な手順によりシート成形し焼成体を得
た。[Example 2] The inorganic component additives in the raw material composition of Example 1 were 4.5 parts by weight of yttrium oxide and 0.5 parts by weight of niobium oxide, and this was formed into a sheet by the same procedure as in Example 1 to obtain a fired product. I got it.
〔実施例３〜６．８〕
実施例１で用いたと同じアルミナ粉末およびムライト粉
末を用い、原料組成としてアルミナ粉末８４．４重量部
、ムライト粉末１Ｏ１６重量部、酸化イツトリウム５重
量部としたもの（実施例３）、アルミナ粉末９１．５重
量部、ムライト粉末３．５重量部、酸化イツトリウム５
重量部としたもの（実施例４）、アルミナ粉末８６．４
重量部、ムライト粉末１０．６重量部、酸化イツトリウ
ム３重量部としたもの（実施例５）、アルミナ粉末８６
．４重量部、ムライト粉末１０．６重量部、酸化マグネ
シウム３重量部としたもの（実施例６）、アルミナ粉末
９０．９重量部、ムライト粉末７．１重量部、酸化イツ
トリウム２重量部としたもの（実施例８）を、それぞれ
実施例１と同じ手順によりシート成形し、焼成体を得た
。[Examples 3 to 6.8] Using the same alumina powder and mullite powder as used in Example 1, the raw material composition was 84.4 parts by weight of alumina powder, 16 parts by weight of mullite powder, and 5 parts by weight of yttrium oxide ( Example 3), 91.5 parts by weight of alumina powder, 3.5 parts by weight of mullite powder, 5 parts by weight of yttrium oxide
Parts by weight (Example 4), alumina powder 86.4
Parts by weight, 10.6 parts by weight of mullite powder, 3 parts by weight of yttrium oxide (Example 5), 86 parts by weight of alumina powder
．． 4 parts by weight, 10.6 parts by weight of mullite powder, 3 parts by weight of magnesium oxide (Example 6), 90.9 parts by weight of alumina powder, 7.1 parts by weight of mullite powder, 2 parts by weight of yttrium oxide. (Example 8) was formed into a sheet according to the same procedure as in Example 1 to obtain a fired body.
〔実施例７，９〕
実施例８の組成において、酸化イツトリウムを同一重量
部の酸化マグネシウムまたは酸化ランタンと置き換えた
ものをそれぞれ実施例１と同様な手順によりシート成形
し、焼成体を得た。[Examples 7 and 9] The composition of Example 8 except that yttrium oxide was replaced with the same weight part of magnesium oxide or lanthanum oxide was formed into a sheet in the same manner as in Example 1 to obtain a fired body.
【比較例１〕
平均粒径的４μｍのアルミナ粉末９２．０重量部、二酸
化ケイ素粉末５．４重量部、酸化マグネシウム２．１重
量部、炭酸カルシウム０４９重量部を原料組成として実
施例１と同様な手順によりシートを成形し焼成体を得た
。[Comparative Example 1] Same as Example 1 using raw material composition of 92.0 parts by weight of alumina powder with an average particle size of 4 μm, 5.4 parts by weight of silicon dioxide powder, 2.1 parts by weight of magnesium oxide, and 049 parts by weight of calcium carbonate. A sheet was molded using the same procedure to obtain a fired body.
〔比較例２〕
平均粒径２μｍのアルミナ粉末を用い、比較例１と同じ
組成および手順によって焼成体を得た。[Comparative Example 2] A fired body was obtained using the same composition and procedure as Comparative Example 1 using alumina powder with an average particle size of 2 μm.
〔比較例３．４〕
比較例２と同一のアルミナ粉末を用い、二酸化ケイ素、
酸化マグネシウム、炭酸カルシウム（ＣａＯ換算）をそ
れぞれ３．７．１．９．２．４重量部または３．９．３
．７ 、０．５重量部加えた組成物を用いて、実施例１
と同様な手順によって焼成体を得た。[Comparative Example 3.4] Using the same alumina powder as Comparative Example 2, silicon dioxide,
Magnesium oxide, calcium carbonate (CaO equivalent) 3.7.1.9.2.4 parts by weight or 3.9.3 parts by weight, respectively
．． Example 1 using a composition containing 0.5 parts by weight of
A fired body was obtained by the same procedure as above.
〔比較例５〕
比較例２と同一のアルミナ粉末９４重量部に、二酸化ケ
イ素２．４重量部、酸化マグネシウム１．２重量部、炭
酸カルシウム０．６重量部、酸化クロム１．０重量部、
酸化モリブデン１．０重量部を加え。[Comparative Example 5] 94 parts by weight of the same alumina powder as in Comparative Example 2, 2.4 parts by weight of silicon dioxide, 1.2 parts by weight of magnesium oxide, 0.6 parts by weight of calcium carbonate, 1.0 parts by weight of chromium oxide,
Add 1.0 parts by weight of molybdenum oxide.
実施例１と同様な手順によって焼成体を得た。A fired body was obtained by the same procedure as in Example 1.
〔比較例６〕
比較例５の原料組成中、酸化クロム、酸化モリブデンを
除いたものを用い、他はまったく同一として焼成体を得
た。[Comparative Example 6] A fired body was obtained using the same raw material composition as in Comparative Example 5 except that chromium oxide and molybdenum oxide were excluded.
上記各実施例および比較例の焼成体の密度、抗折強度、
リードろう付は強度の測定結果を第１表に示す。The density and bending strength of the fired bodies of each of the above examples and comparative examples,
The strength measurement results for lead brazing are shown in Table 1.
第１表
なお、第１表に示す各実施例および比較例で使用した原
料アルミナの粒径と使用された添加物を第２表に示す。Table 1 Table 2 shows the particle size of the raw material alumina used in each of the Examples and Comparative Examples shown in Table 1 and the additives used.
第２表
第１表、第２表かられかるように、従来法では、９２重
量％の同一組成のアルミナセラミック焼成体でもアルミ
ナ原料粉末の粒径が４μｍから２μｍになることにより
緻密化が困難になりＣａＯ−ＭｇＯ３ｉｎｓ系の組成を
変えてもあまり緻密性は向上しない、一方、アルミナ純
度を９４〜９６重量％に上げると、緻密化は容易になり
、抗折強度の向上は認められるものの、リードろう付は
強度は著しく低く、この場合、剥離はすべてセラミック
ーメタライズ界面で起こっていた。Table 2 As can be seen from Tables 1 and 2, in the conventional method, it is difficult to densify even an alumina ceramic fired body with the same composition of 92% by weight because the particle size of the alumina raw powder changes from 4 μm to 2 μm. Even if the composition of the CaO-MgO3ins system is changed, the densification does not improve much. On the other hand, when the alumina purity is increased to 94 to 96% by weight, the densification becomes easier and the bending strength is improved, but The strength of lead brazing is extremely low, and in this case, all the peeling occurred at the ceramic-metallic interface.
これに対し、本発明による焼成体では、アルミナ純度が
９２重量％以下でも十分な緻密化が得られるばかりでな
く、アルミナ純度が９４重量％以上の焼成体においても
十分なり−ドろう付は強度が得られた。On the other hand, in the fired body of the present invention, sufficient densification is not only obtained even when the alumina purity is 92% by weight or less, but also sufficient densification is obtained even when the alumina purity is 94% by weight or more. was gotten.
（発明の効果）
本発明によるセラミック組成物によれば、上述したよう
に、アルミナにムライトと無機成分添加物を所定量含有
させることにより、十分に大きな抗折強度と、高表面平
滑性と、高メタライズ接着強度とを合わせもっという条
件をすべて満たすことのできるアルミナセラミックを提
供することができ、電子部品用セラミックとして好適に
使用することができる。また、酸化ニオブを原料混合物
に添加することにより、焼成体組織の均一性を向上させ
ることができる等の著効を奏する。(Effects of the Invention) According to the ceramic composition of the present invention, as described above, by containing a predetermined amount of mullite and inorganic component additives in alumina, a sufficiently large flexural strength, high surface smoothness, and It is possible to provide an alumina ceramic that satisfies all of the above conditions in addition to high metallization adhesive strength, and can be suitably used as a ceramic for electronic components. Further, by adding niobium oxide to the raw material mixture, significant effects such as improving the uniformity of the structure of the fired body can be achieved.
以上、本発明について好適な実施例を挙げて種々説明し
たが、本発明はこの実施例に限定されるものではなく１
発明の精神を逸脱しない範囲内で多くの改変を施し得る
のはもちろんのことである。The present invention has been variously explained above using preferred embodiments, but the present invention is not limited to these embodiments.
Of course, many modifications can be made without departing from the spirit of the invention.
Claims (2)
して、アルカリ土類元素化合物または希土類元素化合物
のうちの少なくとも１種を０．１〜１０．０重量％添加
されて成る原料混合物であって、該原料混合物中の前記
ムライト粉末中のアルミナ成分を含む全アルミナ成分が
８８．０〜９９．０重量％である原料混合物を焼成して
成るセラミック組成物。1. A raw material mixture comprising 0.1 to 10.0% by weight of at least one of an alkaline earth element compound and a rare earth element compound added to a raw material mixture of alumina powder and mullite powder, the raw material mixture comprising: A ceramic composition obtained by firing a raw material mixture in which the total alumina component including the alumina component in the mullite powder is 88.0 to 99.0% by weight.
％添加して焼成して成る請求項１記載のセラミック組成
物。2. 2. The ceramic composition according to claim 1, which is obtained by adding 0.1 to 3.0% by weight of niobium oxide to the raw material mixture and firing the mixture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63005375A JP2579333B2 (en) | 1988-01-13 | 1988-01-13 | Ceramic composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63005375A JP2579333B2 (en) | 1988-01-13 | 1988-01-13 | Ceramic composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01183457A true JPH01183457A (en) | 1989-07-21 |
| JP2579333B2 JP2579333B2 (en) | 1997-02-05 |
Family
ID=11609424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63005375A Expired - Lifetime JP2579333B2 (en) | 1988-01-13 | 1988-01-13 | Ceramic composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2579333B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111777409A (en) * | 2020-07-10 | 2020-10-16 | 首钢集团有限公司 | Brick for molten iron ladle with high slag corrosion resistance and preparation method thereof |
-
1988
- 1988-01-13 JP JP63005375A patent/JP2579333B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111777409A (en) * | 2020-07-10 | 2020-10-16 | 首钢集团有限公司 | Brick for molten iron ladle with high slag corrosion resistance and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2579333B2 (en) | 1997-02-05 |
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