JPH01182654A - Rotation transmission device - Google Patents
Rotation transmission deviceInfo
- Publication number
- JPH01182654A JPH01182654A JP63003228A JP322888A JPH01182654A JP H01182654 A JPH01182654 A JP H01182654A JP 63003228 A JP63003228 A JP 63003228A JP 322888 A JP322888 A JP 322888A JP H01182654 A JPH01182654 A JP H01182654A
- Authority
- JP
- Japan
- Prior art keywords
- gear
- gears
- dust
- transmission device
- tooth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 26
- 239000000696 magnetic material Substances 0.000 claims description 4
- 239000000428 dust Substances 0.000 abstract description 10
- 239000000314 lubricant Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 240000005523 Peganum harmala Species 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Gears, Cams (AREA)
- Structure Of Transmissions (AREA)
- Gear Transmission (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は、互に係合する2つの歯車を備えた回転伝達
装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a rotation transmission device including two gears that engage with each other.
(従来の技術)
かかる回転伝達装置は、例えは、第S図に略示されるよ
りに構成され、互に係合する2つの歯車30および31
のうちで、一方の歯車3oは、モータ(図示なし)Kよ
って回転駆動される駆動軸J−に固定取付けされ、他方
の歯車31は、被回転体33を回転させるための従動軸
34AI/c固定取付される。モータによって駆動軸3
2を介して歯車30を回転させると、歯車30の歯部分
と歯車31の歯部分との係合によって、歯車3ノも回転
し、従って、従動軸34Iを介して被回転体33も回転
し、かぐして回転の伝達が達成される。(Prior Art) Such a rotation transmission device is constructed, for example, as schematically shown in FIG.
Among them, one gear 3o is fixedly attached to a drive shaft J- rotated by a motor (not shown) K, and the other gear 31 is a driven shaft 34AI/c for rotating a rotated body 33. Fixedly mounted. Drive shaft 3 by motor
When the gear 30 is rotated via the driven shaft 34I, the gear 3 also rotates due to the engagement between the teeth of the gear 30 and the gear 31, and therefore the rotated body 33 also rotates via the driven shaft 34I. , transmission of rotation is achieved by sniffing.
このような回転伝達装置において、従来は、各歯車3o
、、tiは、その基部と歯部分とを一体に形成したもの
からなシ、回転伝達の際に、歯車30の歯部分が、歯車
3ノの歯部分に直接接触して、この直接接触によって、
歯車30から歯車31への回転の伝達が達成される。In such a rotation transmission device, conventionally, each gear 3o
. ,
Transmission of rotation from gear 30 to gear 31 is achieved.
(発明が解決しようとするlit!@)上述したような
従来の回転伝達装置には、歯部分の直接接触によって歯
部分が摩耗し、との摩耗によって粉塵が発生すると言う
欠点が伴なう。(Lit to be solved by the invention!@) The conventional rotation transmission device as described above has the disadvantage that the tooth portions are worn due to direct contact with the tooth portions, and dust is generated due to the wear with the tooth portions.
従って、例えば真空成膜装置に従来の回転伝達装置を採
用したとすると、とれから発生する粉塵によって、真空
成膜装置で製作される膜に微細なピンホールが生じ、こ
のピンホールによっテ、膜が不良品忙なってしまうとい
うおそれが存する。Therefore, for example, if a conventional rotation transmission device is used in a vacuum film deposition system, fine pinholes will be created in the film produced by the vacuum film deposition system due to the dust generated from the flakes. There is a risk that the membrane will become defective.
歯部分の摩耗を低減もしくは解消するために、油などの
潤滑剤を歯車に塗布するととも考えられるが、真空成膜
装置などでは、この潤滑剤が臭突雰囲気を劣化させて、
粉塵発生の場合と同様に、膜を不良品にする原因となる
。It is thought that a lubricant such as oil may be applied to the gears in order to reduce or eliminate wear on the teeth, but in vacuum film forming equipment, etc., this lubricant deteriorates the odor atmosphere and
As in the case of dust generation, this causes the membrane to be rejected.
この発明は、上述したよ、うな従来の回転伝達装置の欠
点を除去することを、主な目的とする。The main object of the present invention is to eliminate the drawbacks of conventional rotational transmission devices as described above.
(課題を解決するための手段)
この目的の達成のため、この発明に従って構成された、
互に係合する一つの歯車を備える回転伝達装置では、コ
つの歯車のいずれも、非磁性体で形成された基部と、こ
れに取付けられた歯部分とからなシ、両歯車の歯部分の
すべてが、そのすべてについて歯先を同種の磁極とする
永久礎石によって構成される。(Means for Solving the Problem) In order to achieve this purpose, a system configured according to the present invention,
In a rotation transmission device having one gear that engages with each other, each of the two gears has a base made of a non-magnetic material and a tooth portion attached to the base, and the tooth portions of both gears have a base made of a non-magnetic material and a tooth portion attached to the base portion. All are constructed of permanent foundation stones with homogeneous magnetic poles at the tips of all of them.
(作用)
このような構成の回転伝達装置によれば、一方の歯車の
歯部分の歯先ととれに係合する他方の歯車の歯部分の歯
先とが、同種の磁極であって、それらの閾に反発力が生
じるようになっているので、歯部分同志の直接接触なし
に、回転の伝達が達成される。(Function) According to the rotation transmission device having such a configuration, the tooth tip of the tooth portion of one gear and the tooth tip of the tooth portion of the other gear that engages with the rib are of the same type of magnetic pole, and A repulsive force is generated at the threshold of , so that transmission of rotation is achieved without direct contact of the toothed parts.
(実施例)
以下、図面の第1図から第4図を参照しながら、この発
明による回転伝達装置の実施例について説明する。(Embodiments) Hereinafter, embodiments of the rotation transmission device according to the present invention will be described with reference to FIGS. 1 to 4 of the drawings.
第1図および第2図に図示されるとの発明による回転伝
達装置は、互に係合するコつの歯車i。The rotational transmission device according to the invention as illustrated in FIGS. 1 and 2 comprises two mutually engaging gears i.
aおよびlObを備える。各歯車lOa、lObは、非
磁性体で形成された円盤状の基部//aおよび//1)
をそnぞれ有し、各基部//a、//bには、これから
半径方向外向きに突出するように基部の周に沿って等間
隔で配置された多くの棒状の永久磁石、/ j a 、
/ 2 bが、歯部分として取付けられる。いずれの
歯車10a、10bにおいても、そのすべての永久磁石
lコa、10bが、半径方向外方の歯先において正極N
となシ、半径方向内方の、基部//a、10bに連結さ
れる個所で負極Sとなるよりに指向される。両歯車10
aとiobは、それらの周が最接近する区域において一
方の筒車ノOaまたは10bの歯先Nが他方あ歯車10
bまたは10hのコつの歯先Nの間にはさ1f′L、る
ように配置される。a and lOb. Each gear lOa, lOb has a disc-shaped base made of non-magnetic material //a and //1)
Each base //a, //b has a number of rod-shaped permanent magnets arranged at equal intervals along the circumference of the base so as to protrude radially outward from the base //a, //b. ja,
/ 2 b is attached as a tooth part. In both gears 10a and 10b, all of the permanent magnet l cores a and 10b have a positive pole N at the radially outer tooth tip.
On the other hand, the negative electrode S is oriented radially inward at a point connected to the base portions //a and 10b. both gears 10
a and iob, in the area where their circumferences are closest, the tooth tip N of one hour wheel Oa or 10b is the same as the other hour gear 10.
It is arranged so that there is a distance 1f'L between the tooth tips N of the teeth b or 10h.
各基部//a、//bへの歯部分すなわち永久磁石lコ
a、/コbの取付けについて例示すると、そのために各
基部//a、・//bには、浅いくほみ13a、/3b
と、これからさらに凹下した多くの深いくぼみ/4Ca
、/IIbが形成される。浅いくほみ/3&、/3bは
、基部//a、//bと等しい外径を有する円環状の固
定板/Ja。To exemplify the attachment of the tooth portions, that is, the permanent magnets l cores a and /b to each base //a, //b, for this purpose, each base //a,...//b has shallow indentations 13a, /3b
And many deep depressions that will continue to sink/4Ca
, /IIb are formed. Shallow corners /3&, /3b are annular fixed plates /Ja having the same outer diameter as the bases //a, //b.
/jt)?収容できる形状寸法を有し、基部の全外周に
沿って延長する。深いくほみlダa、/lbは、各永久
磁石/Ja、/J’bの半径方向内方部分を、基部の幅
方向で浅いくほみ/Jh、/3bの中に僅かに張出すよ
うに収容できるように形成され、寸法法めされ、かつ配
置され、溝形で基部/ / a m / / 1)の外
周まで達する。深いくぼみ。/jt)? It has a accommodating geometry and extends along the entire circumference of the base. The deep holes a, /lb slightly stretch the radially inner portions of each permanent magnet /Ja, /J'b into the shallow holes /Jh, /3b in the width direction of the base. It is shaped, dimensioned and arranged to be removable and extends in the form of a groove to the outer periphery of the base. deep depression.
/la、/lbのおのおのの中に、永久磁石lコa、/
2bを収容し、こ九の半径方向内方部分にかぶさ・るよ
うに、浅いくぼみ/3e、、l、lbの中に固定板/j
a、/jbli配置し、固定板lsa * / j b
に沿う(永久磁石/、l*、1213Vc接触しない)
多くの場所で、締付ねじ/6a、/Abによって固定板
/ja、/jbを基部//a。In each of /la, /lb, there are permanent magnets a, /lb.
A fixing plate /j is placed in a shallow recess /3e, , l, lb to accommodate the 2b and cover the radially inner part of the
Place a, /jbli, fixing plate lsa * / j b
Along (permanent magnet/, l*, 1213Vc not in contact)
In many places, fixing plates /ja, /jb are attached to the base //a by means of tightening screws /6a, /Ab.
//bに固定締付けすると、永久磁石ノコa。// When fixed and tightened to b, permanent magnet saw a.
lコbが、固定板/ja、/jbを収容した浅い〈tホ
み/ J a e / J bの中に僅かに張出してい
るので、永久磁石ノコa * /2bは、固定板/ j
a #isbと基部//a、//’bの間で強く挾持
されて、基部//a、//bに、これに対して不動にし
つかシと取付けらする。The permanent magnet saw a*/2b is attached to the fixed plate /j because the l piece b slightly protrudes into the shallow hole/jae/Jb that accommodates the fixed plates /ja and /jb.
It is firmly clamped between a #isb and the base //a, //'b and is fixedly and firmly attached to the base //a, //b.
このように構成された回転伝動装置において、一方の歯
車lOaは例えは駆動軸/7aに固定取付けされ、他方
の歯車101)は例えば従動軸lりbに固定取付けされ
る。例えばモータ(図示なし)によって駆動軸/’7a
を回転させると、これと共に歯車10hも回転する。そ
の際に、歯車10aの1つの歯先すなわち永久磁石lコ
a−の正極Nが、他の歯車10b(01つの歯先すなわ
ち永久磁石ノコbの正極NK接近すると、正極Nと正極
Nの間の反発力によって、歯車lObの永久磁石/Jb
の正極Nが、歯車lOaの永久磁石lコaの正極Nと同
じ方向に移動する。かくして、歯車lOaと歯車lOb
が接触することなしに、歯車同志が互に直接接触する従
来の回転伝達装置の場合と同様に、歯車10aの例えば
第1−図で反時計回ルの回転(矢印igth)によって
、歯車10bの例えは第1図で時計回シの回転(矢印1
gb)が生じる。歯車lObの回転に伴なって、これが
固定取付けされている従動軸1’lbも回転し、この従
動軸17bの回転によって、被回転体(図示なし)も回
転する。In the rotary transmission device configured in this way, one gear lOa is fixedly attached to, for example, the drive shaft /7a, and the other gear 101) is fixedly attached to, for example, the driven shaft lb. For example, a motor (not shown) drives the shaft/'7a.
When the gear 10h is rotated, the gear 10h also rotates. At that time, when one tooth tip of the gear 10a, that is, the positive pole N of the permanent magnet l core a- approaches the other gear 10b (one tooth tip, that is, the positive pole NK of the permanent magnet saw b), the gap between the positive pole N and the positive pole N Due to the repulsive force of gear lOb, the permanent magnet /Jb
The positive pole N of the gear lOa moves in the same direction as the positive pole N of the permanent magnet l core a of the gear lOa. Thus, gear lOa and gear lOb
As in the conventional rotation transmission device in which the gears are in direct contact with each other without contacting each other, the rotation of the gear 10a, for example counterclockwise (arrow igth) in FIG. For example, in Figure 1, clockwise rotation (arrow 1)
gb) occurs. As the gear lOb rotates, the driven shaft 1'lb to which it is fixedly attached also rotates, and the rotation of the driven shaft 17b also rotates a rotated body (not shown).
かかる回転伝達装置において、幅W−ダ1oI(第1図
)、厚さt−μm1謔(第二図)、長きt−,20簡(
第1図)のサマリウムコバルト磁石およびフェライト磁
石を、永久磁石lコaおよび/2bとして使用した実験
結果を、第3図のグラフに示す。このグラフは、歯車/
(7aとiobのかみ合い深き(1なり合い1)b(第
7図)を横軸とし、伝達可能トルクQを縦軸として、L
を変化させたときのQの変化を表わす。この実験結果に
よレバ、サマリウムコバルト磁石およびフェライト磁石
のいずれを採用した場合にも、かみ合い深きLが約−鰭
のときに、最大の回転伝達力が得られる。In such a rotation transmission device, the width W-da 1oI (Fig. 1), the thickness t-μm 1oI (Fig. 2), the length t-, 20-μm (
The graph of FIG. 3 shows the experimental results using the samarium cobalt magnet and ferrite magnet of FIG. 1 as permanent magnets l-core a and /2b. This graph shows the gear/
(The horizontal axis is the meshing depth (1 order 1) b (Fig. 7) between 7a and iob, and the vertical axis is the transmissible torque Q.
It represents the change in Q when changing . According to the experimental results, when a lever, a samarium cobalt magnet, or a ferrite magnet is used, the maximum rotational transmission force is obtained when the engagement depth L is approximately -fin.
第4図は、この発明による回転伝達装置の別の実施例を
示す。この実施例においては、大寸の太陽@車lデが固
定配置され、太陽歯車lりと同軸線の回転軸20に固定
されかつこれから放射方向に延長する6本の腕21の先
端部に、これに対して回転可能に小寸の遊星歯車ココが
取付けられる。FIG. 4 shows another embodiment of the rotation transmission device according to the invention. In this embodiment, a large sun wheel is fixedly arranged, and at the tips of six arms 21 that are fixed to a rotating shaft 20 coaxial with the sun gear and extend radially from the rotating shaft 20, A small planetary gear is rotatably attached to this.
各遊星歯車ココおよび太陽歯車19は、第7図および第
2図に示された実施例における歯車lOa、lObと同
様に構成され、各遊星歯車はいずれも、太陽歯車lりに
係合する。Each of the planet gears Coco and the sun gear 19 is constructed similarly to the gears lOa and lOb in the embodiment shown in FIGS. 7 and 2, and each planet gear is engaged with the sun gear l.
この第4図の実施例において、回転軸コOを回転させる
と、6個の遊星歯車2コはいずれも、回転@−0の軸線
す力わち太陽歯車19の中心軸線を中心として、矢印コ
3で示すように、太陽歯車lりのまわルを公転すると同
時に、固定の太陽歯車lデに係合しているので、矢印−
ダで示すよりに自転する。In the embodiment shown in FIG. 4, when the rotating shaft O is rotated, all of the six planetary gears 2 will move around the axis of rotation @-0, that is, the center axis of the sun gear 19, as shown by the arrows. As shown by 3, the sun gear revolves around the same time as the sun gear 1, and at the same time it engages with the fixed sun gear 1, so the arrow -
It rotates more than shown by da.
このような構成によれば、歯車と歯車を直接接触させる
ことのない、真空蓋着装fILまたはスパッタリング装
置のプラネタリ−治具として使用できるような、自公転
手段が提供できる。According to such a configuration, it is possible to provide a rotation-revolution means that does not bring gears into direct contact and can be used as a planetary jig for a vacuum lid attachment fIL or a sputtering device.
(発明の効果)
この発明によれば、互に係合するλつの歯車のすべての
歯部分が、そのすべてについて歯先上同種のVb&とす
る永久磁石によって構成されているので、同種の磁極か
らなる一方の出車の歯先と他方の歯車の歯先との間に生
じる反発力によって、互に係合する歯車のうちの一方の
歯車の回転が、他方の歯車に伝達される。或いは、第4
図の実施例で示されるように、固定された一方の歯車の
まわシの他方の歯車の公転によって、後者の歯車の自転
も達成される。(Effects of the Invention) According to the present invention, all the tooth portions of the mutually engaging λ gears are constituted by permanent magnets with the same type of Vb & on the tooth tips, so that the same type of magnetic poles The rotation of one of the mutually engaged gears is transmitted to the other gear by the repulsive force generated between the tooth tip of one output gear and the tooth tip of the other gear. Or the fourth
As shown in the illustrated embodiment, the revolution of the fixed gear wheel of the other also results in the rotation of the latter gear.
これらの作動は、歯車と歯車を直接接触させることなし
に達成され、従って、この発明による回転伝達装置によ
れば、歯車と歯車の直接接触による粉塵が発生するおそ
れはなく、ま次かかる粉塵の発生を阻止するために潤滑
剤を使用する必要もない。These operations are achieved without direct contact between the gears, and therefore, according to the rotation transmission device of the present invention, there is no risk of dust being generated due to direct contact between the gears, and there is no possibility that such dust will be generated. There is no need to use lubricants to prevent this from occurring.
故に、この発明による回転伝達装置は、粉塵または潤滑
剤によって製品の不良化が生じるおそれのおる真空成膜
装置などで、特に有効に採用できる。Therefore, the rotation transmission device according to the present invention can be particularly effectively employed in vacuum film forming apparatuses and the like where there is a risk of product defects due to dust or lubricant.
第7図は、この発明による回転伝達装置の第7実施例を
示す正面図゛である。第一図は、第1図に験結果を表わ
すグラフである。第4図は、この発明による回転伝達装
置の第一実施例′lt表わす。第S図は、従来から知ら
れている回転伝達装置It′ft斜視図で表わす。
図面において、lOaとiobは互に係合する一つの歯
車、//aと//1)は歯車の基部、l二aとlコbは
歯車の歯部分を構成する永久磁石、NおよびSは永久磁
石、/ 2 a * / −2bの正極および負極を示
す。
第2図
: ニ
ー−a417−t。
第3図
力)み合い5朶さL (m曜)
第4図FIG. 7 is a front view showing a seventh embodiment of the rotation transmission device according to the present invention. Figure 1 is a graph showing the results of the experiment in Figure 1. FIG. 4 shows a first embodiment of the rotation transmission device according to the invention. FIG. S is a perspective view of a conventionally known rotation transmission device It'ft. In the drawing, lOa and iob are gears that engage with each other, //a and //1) are the bases of the gears, l2a and lcob are permanent magnets forming the teeth of the gears, N and S indicate the positive and negative poles of the permanent magnet, /2a*/-2b. Figure 2: Knee-a417-t. 3rd figure power) Miai 5 hare L (myo) Figure 4
Claims (1)
れた基部に歯部分を取付けたものからなり、両歯車のす
べての歯部分が、そのすべてについて歯先を同種の磁極
とする永久磁石によつて構成された回転伝達装置。Both of the two gears that engage with each other consist of teeth attached to a base made of non-magnetic material, and all the teeth of both gears have the same type of magnetic pole on their tips. A rotation transmission device composed of permanent magnets.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63003228A JPH01182654A (en) | 1988-01-12 | 1988-01-12 | Rotation transmission device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63003228A JPH01182654A (en) | 1988-01-12 | 1988-01-12 | Rotation transmission device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01182654A true JPH01182654A (en) | 1989-07-20 |
Family
ID=11551592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63003228A Pending JPH01182654A (en) | 1988-01-12 | 1988-01-12 | Rotation transmission device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01182654A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103161912A (en) * | 2013-04-03 | 2013-06-19 | 山东邦德橡塑科技有限公司 | Magnetic induction gear ring and manufacturing process thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6132853B2 (en) * | 1980-10-04 | 1986-07-30 | Nippon Electric Co | |
JPS628458B2 (en) * | 1982-11-19 | 1987-02-23 | Ciba Geigy |
-
1988
- 1988-01-12 JP JP63003228A patent/JPH01182654A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6132853B2 (en) * | 1980-10-04 | 1986-07-30 | Nippon Electric Co | |
JPS628458B2 (en) * | 1982-11-19 | 1987-02-23 | Ciba Geigy |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103161912A (en) * | 2013-04-03 | 2013-06-19 | 山东邦德橡塑科技有限公司 | Magnetic induction gear ring and manufacturing process thereof |
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