JPH01181036U - - Google Patents

Info

Publication number
JPH01181036U
JPH01181036U JP7691388U JP7691388U JPH01181036U JP H01181036 U JPH01181036 U JP H01181036U JP 7691388 U JP7691388 U JP 7691388U JP 7691388 U JP7691388 U JP 7691388U JP H01181036 U JPH01181036 U JP H01181036U
Authority
JP
Japan
Prior art keywords
pellicle frame
periphery
attached
female screw
predetermined thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7691388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7691388U priority Critical patent/JPH01181036U/ja
Publication of JPH01181036U publication Critical patent/JPH01181036U/ja
Pending legal-status Critical Current

Links

JP7691388U 1988-06-09 1988-06-09 Pending JPH01181036U (US07579456-20090825-P00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7691388U JPH01181036U (US07579456-20090825-P00002.png) 1988-06-09 1988-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7691388U JPH01181036U (US07579456-20090825-P00002.png) 1988-06-09 1988-06-09

Publications (1)

Publication Number Publication Date
JPH01181036U true JPH01181036U (US07579456-20090825-P00002.png) 1989-12-27

Family

ID=31301918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7691388U Pending JPH01181036U (US07579456-20090825-P00002.png) 1988-06-09 1988-06-09

Country Status (1)

Country Link
JP (1) JPH01181036U (US07579456-20090825-P00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002131892A (ja) * 2000-10-27 2002-05-09 Asahi Kasei Electronics Co Ltd ペリクルの剥離方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002131892A (ja) * 2000-10-27 2002-05-09 Asahi Kasei Electronics Co Ltd ペリクルの剥離方法及びその装置

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