JPH01180653U - - Google Patents

Info

Publication number
JPH01180653U
JPH01180653U JP7111588U JP7111588U JPH01180653U JP H01180653 U JPH01180653 U JP H01180653U JP 7111588 U JP7111588 U JP 7111588U JP 7111588 U JP7111588 U JP 7111588U JP H01180653 U JPH01180653 U JP H01180653U
Authority
JP
Japan
Prior art keywords
waveguide rod
acoustic emission
test object
sensor
fins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7111588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7111588U priority Critical patent/JPH01180653U/ja
Publication of JPH01180653U publication Critical patent/JPH01180653U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP7111588U 1988-05-31 1988-05-31 Pending JPH01180653U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7111588U JPH01180653U (US06623731-20030923-C00012.png) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7111588U JPH01180653U (US06623731-20030923-C00012.png) 1988-05-31 1988-05-31

Publications (1)

Publication Number Publication Date
JPH01180653U true JPH01180653U (US06623731-20030923-C00012.png) 1989-12-26

Family

ID=31296326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7111588U Pending JPH01180653U (US06623731-20030923-C00012.png) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH01180653U (US06623731-20030923-C00012.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014022594A (ja) * 2012-07-19 2014-02-03 Tokyo Electron Ltd 膜割れ検出装置及び成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014022594A (ja) * 2012-07-19 2014-02-03 Tokyo Electron Ltd 膜割れ検出装置及び成膜装置

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