JPH01179701U - - Google Patents

Info

Publication number
JPH01179701U
JPH01179701U JP7426888U JP7426888U JPH01179701U JP H01179701 U JPH01179701 U JP H01179701U JP 7426888 U JP7426888 U JP 7426888U JP 7426888 U JP7426888 U JP 7426888U JP H01179701 U JPH01179701 U JP H01179701U
Authority
JP
Japan
Prior art keywords
thin film
film evaporation
reaction device
evaporation type
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7426888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522242Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7426888U priority Critical patent/JPH0522242Y2/ja
Publication of JPH01179701U publication Critical patent/JPH01179701U/ja
Application granted granted Critical
Publication of JPH0522242Y2 publication Critical patent/JPH0522242Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP7426888U 1988-06-06 1988-06-06 Expired - Lifetime JPH0522242Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7426888U JPH0522242Y2 (enExample) 1988-06-06 1988-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7426888U JPH0522242Y2 (enExample) 1988-06-06 1988-06-06

Publications (2)

Publication Number Publication Date
JPH01179701U true JPH01179701U (enExample) 1989-12-25
JPH0522242Y2 JPH0522242Y2 (enExample) 1993-06-08

Family

ID=31299384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7426888U Expired - Lifetime JPH0522242Y2 (enExample) 1988-06-06 1988-06-06

Country Status (1)

Country Link
JP (1) JPH0522242Y2 (enExample)

Also Published As

Publication number Publication date
JPH0522242Y2 (enExample) 1993-06-08

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