JPH01179701U - - Google Patents
Info
- Publication number
- JPH01179701U JPH01179701U JP7426888U JP7426888U JPH01179701U JP H01179701 U JPH01179701 U JP H01179701U JP 7426888 U JP7426888 U JP 7426888U JP 7426888 U JP7426888 U JP 7426888U JP H01179701 U JPH01179701 U JP H01179701U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film evaporation
- reaction device
- evaporation type
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7426888U JPH0522242Y2 (enExample) | 1988-06-06 | 1988-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7426888U JPH0522242Y2 (enExample) | 1988-06-06 | 1988-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01179701U true JPH01179701U (enExample) | 1989-12-25 |
| JPH0522242Y2 JPH0522242Y2 (enExample) | 1993-06-08 |
Family
ID=31299384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7426888U Expired - Lifetime JPH0522242Y2 (enExample) | 1988-06-06 | 1988-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522242Y2 (enExample) |
-
1988
- 1988-06-06 JP JP7426888U patent/JPH0522242Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522242Y2 (enExample) | 1993-06-08 |