JPH01179701U - - Google Patents

Info

Publication number
JPH01179701U
JPH01179701U JP7426888U JP7426888U JPH01179701U JP H01179701 U JPH01179701 U JP H01179701U JP 7426888 U JP7426888 U JP 7426888U JP 7426888 U JP7426888 U JP 7426888U JP H01179701 U JPH01179701 U JP H01179701U
Authority
JP
Japan
Prior art keywords
thin film
film evaporation
reaction device
evaporation type
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7426888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522242Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7426888U priority Critical patent/JPH0522242Y2/ja
Publication of JPH01179701U publication Critical patent/JPH01179701U/ja
Application granted granted Critical
Publication of JPH0522242Y2 publication Critical patent/JPH0522242Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP7426888U 1988-06-06 1988-06-06 Expired - Lifetime JPH0522242Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7426888U JPH0522242Y2 (enrdf_load_stackoverflow) 1988-06-06 1988-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7426888U JPH0522242Y2 (enrdf_load_stackoverflow) 1988-06-06 1988-06-06

Publications (2)

Publication Number Publication Date
JPH01179701U true JPH01179701U (enrdf_load_stackoverflow) 1989-12-25
JPH0522242Y2 JPH0522242Y2 (enrdf_load_stackoverflow) 1993-06-08

Family

ID=31299384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7426888U Expired - Lifetime JPH0522242Y2 (enrdf_load_stackoverflow) 1988-06-06 1988-06-06

Country Status (1)

Country Link
JP (1) JPH0522242Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0522242Y2 (enrdf_load_stackoverflow) 1993-06-08

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