JPH01179443U - - Google Patents

Info

Publication number
JPH01179443U
JPH01179443U JP7652688U JP7652688U JPH01179443U JP H01179443 U JPH01179443 U JP H01179443U JP 7652688 U JP7652688 U JP 7652688U JP 7652688 U JP7652688 U JP 7652688U JP H01179443 U JPH01179443 U JP H01179443U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
wafer support
boat
support boat
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7652688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7652688U priority Critical patent/JPH01179443U/ja
Publication of JPH01179443U publication Critical patent/JPH01179443U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP7652688U 1988-06-09 1988-06-09 Pending JPH01179443U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7652688U JPH01179443U (US07534539-20090519-C00280.png) 1988-06-09 1988-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7652688U JPH01179443U (US07534539-20090519-C00280.png) 1988-06-09 1988-06-09

Publications (1)

Publication Number Publication Date
JPH01179443U true JPH01179443U (US07534539-20090519-C00280.png) 1989-12-22

Family

ID=31301547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7652688U Pending JPH01179443U (US07534539-20090519-C00280.png) 1988-06-09 1988-06-09

Country Status (1)

Country Link
JP (1) JPH01179443U (US07534539-20090519-C00280.png)

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