JPH01179441U - - Google Patents

Info

Publication number
JPH01179441U
JPH01179441U JP7592588U JP7592588U JPH01179441U JP H01179441 U JPH01179441 U JP H01179441U JP 7592588 U JP7592588 U JP 7592588U JP 7592588 U JP7592588 U JP 7592588U JP H01179441 U JPH01179441 U JP H01179441U
Authority
JP
Japan
Prior art keywords
case
wafer storage
storage case
wafer
joining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7592588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7592588U priority Critical patent/JPH01179441U/ja
Publication of JPH01179441U publication Critical patent/JPH01179441U/ja
Pending legal-status Critical Current

Links

JP7592588U 1988-06-08 1988-06-08 Pending JPH01179441U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7592588U JPH01179441U (enrdf_load_stackoverflow) 1988-06-08 1988-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7592588U JPH01179441U (enrdf_load_stackoverflow) 1988-06-08 1988-06-08

Publications (1)

Publication Number Publication Date
JPH01179441U true JPH01179441U (enrdf_load_stackoverflow) 1989-12-22

Family

ID=31300974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7592588U Pending JPH01179441U (enrdf_load_stackoverflow) 1988-06-08 1988-06-08

Country Status (1)

Country Link
JP (1) JPH01179441U (enrdf_load_stackoverflow)

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