JPH01176926U - - Google Patents

Info

Publication number

JPH01176926U

JPH01176926U JP7401388U JP7401388U JPH01176926U JP H01176926 U JPH01176926 U JP H01176926U JP 7401388 U JP7401388 U JP 7401388U JP 7401388 U JP7401388 U JP 7401388U JP H01176926 U JPH01176926 U JP H01176926U

Authority

JP

Japan

Prior art keywords

tank

inlet

outlet

liquid

curved

Prior art date

1988-06-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 6
• 238000001914 filtration Methods 0.000 claims description 3
• 238000005530 etching Methods 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000004140 cleaning Methods 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1