JPH01176923U - - Google Patents
Info
- Publication number
- JPH01176923U JPH01176923U JP7360688U JP7360688U JPH01176923U JP H01176923 U JPH01176923 U JP H01176923U JP 7360688 U JP7360688 U JP 7360688U JP 7360688 U JP7360688 U JP 7360688U JP H01176923 U JPH01176923 U JP H01176923U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- opening
- operating
- operating device
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7360688U JPH01176923U (fi) | 1988-06-02 | 1988-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7360688U JPH01176923U (fi) | 1988-06-02 | 1988-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01176923U true JPH01176923U (fi) | 1989-12-18 |
Family
ID=31298743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7360688U Pending JPH01176923U (fi) | 1988-06-02 | 1988-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01176923U (fi) |
-
1988
- 1988-06-02 JP JP7360688U patent/JPH01176923U/ja active Pending