JPH01176438U - - Google Patents

Info

Publication number

JPH01176438U

JPH01176438U JP7156488U JP7156488U JPH01176438U JP H01176438 U JPH01176438 U JP H01176438U JP 7156488 U JP7156488 U JP 7156488U JP 7156488 U JP7156488 U JP 7156488U JP H01176438 U JPH01176438 U JP H01176438U

Authority

JP

Japan

Prior art keywords

catalyst

chamber

constituent members

processing chamber

ozone

Prior art date

1988-05-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000003054 catalyst Substances 0.000 claims description 7
• 230000001877 deodorizing effect Effects 0.000 claims description 5
• 238000006243 chemical reaction Methods 0.000 claims description 3
• CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims 3
• 239000000470 constituent Substances 0.000 claims 3
• 238000003780 insertion Methods 0.000 claims 2
• 230000037431 insertion Effects 0.000 claims 2
• 230000015572 biosynthetic process Effects 0.000 claims 1
• 238000000354 decomposition reaction Methods 0.000 claims 1
• 238000005452 bending Methods 0.000 description 1
• 230000000903 blocking effect Effects 0.000 description 1
• 238000005192 partition Methods 0.000 description 1