JPH01175273A - Piezoelectric plate - Google Patents
Piezoelectric plateInfo
- Publication number
- JPH01175273A JPH01175273A JP62334779A JP33477987A JPH01175273A JP H01175273 A JPH01175273 A JP H01175273A JP 62334779 A JP62334779 A JP 62334779A JP 33477987 A JP33477987 A JP 33477987A JP H01175273 A JPH01175273 A JP H01175273A
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- JP
- Japan
- Prior art keywords
- piezoelectric layer
- piezoelectric
- electrode
- main
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 239000011368 organic material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、圧電可撓性シート、圧電磁器板等の圧電板に
係り、海底地震探査や魚群探知用の送受波器、または超
音波洗浄装置の洗浄液内における音響測定子等に好適に
利用されるものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to piezoelectric plates such as piezoelectric flexible sheets and piezoelectric ceramic plates, and is used in transducers for submarine seismic exploration and fish detection, or ultrasonic cleaning. It is suitably used as an acoustic probe in the cleaning liquid of an apparatus.
〈従来技術〉
ポリ弗化ビニリデン、ポリ弗化ビニール、ポリ塩化ビニ
リデン、ポリ塩化ビニール、ナイロン等の圧電性有機物
もしくは合成ゴムや合成樹脂の有機物中にチタン酸ジル
コニア酸鉛、チタン酸鉛等の強誘電セラミック粒子を混
合してなる圧電性有機セラミック複合物は、一般の焼結
質圧電磁器材料に比し、その音響インピーダンスが水の
音響インピーダンスに近似する特性を有し、このため、
これを圧電送受波器として用いると水中を伝播する音響
波を効率良く受波し、感度を高め得る利点を生じる。ま
た超音波の送波にも良好に用いられる。その他、この種
圧電板を用いた圧電送受波器は、空中での、超音波の送
受波にも好適である。<Prior art> Piezoelectric organic materials such as polyvinylidene fluoride, polyvinyl fluoride, polyvinylidene chloride, polyvinyl chloride, and nylon, or strong organic materials such as lead zirconia titanate and lead titanate in the organic materials of synthetic rubber and synthetic resin. A piezoelectric organic ceramic composite formed by mixing dielectric ceramic particles has a characteristic that its acoustic impedance is close to that of water, compared to general sintered piezoelectric ceramic materials.
When this is used as a piezoelectric transducer, it has the advantage of efficiently receiving acoustic waves propagating in water and increasing sensitivity. It is also well used for transmitting ultrasonic waves. In addition, a piezoelectric transducer using this type of piezoelectric plate is also suitable for transmitting and receiving ultrasonic waves in the air.
この圧電板として、従来は、第４図に示すように、前記
圧電材料よりなる圧電層ａの上下面に電極す、ｃを設け
、電極す、ｃ間に所定の直流電圧を印加して圧電層ａを
厚み方向に分極し、送波器として用いる場合には、この
電極に交番電圧を印加して、超音波を発生し、受波器と
して用いる場合には、圧電層の主表面で反射波を受けて
、電極間に発生した出力信号を該電極から取り出す様に
していた。Conventionally, as shown in FIG. 4, this piezoelectric plate is made by providing electrodes A and C on the upper and lower surfaces of a piezoelectric layer A made of a piezoelectric material, and applying a predetermined DC voltage between the electrodes A and C to generate a piezoelectric layer. When layer a is polarized in the thickness direction and used as a wave transmitter, an alternating voltage is applied to this electrode to generate ultrasonic waves, and when used as a wave receiver, ultrasonic waves are reflected on the main surface of the piezoelectric layer. In response to the waves, an output signal generated between the electrodes was extracted from the electrodes.
〈発明が解決しようとする問題点〉
ところで、前記構成による圧電板にあって、この圧電定
数は次の式により定まる。<Problems to be Solved by the Invention> By the way, in the piezoelectric plate having the above structure, the piezoelectric constant is determined by the following equation.
ｄ ｈ ＝ｄ ｓｓ＋ ２ ｄ ｓ＋
ここで圧電定数ａａａは厚み方向（分極方向）の圧力に
応答する電気変換率を示し、音響波信号はこの定数に基
づく電荷である。また圧電定数ｄ ｓ＋は面方向（分極
軸に垂直な方向）の圧力に応答する電気変換率を示し負
の値を取る。すなわち、圧電定数ｄａｔは、圧電定数ｄ
ｈを減少させる要因となり、ノイズ信号はこの定数に基
づ（。d h =d ss+ 2 d s+ Here, the piezoelectric constant aaa indicates the electrical conversion rate in response to pressure in the thickness direction (polarization direction), and the acoustic wave signal is a charge based on this constant. Further, the piezoelectric constant d s+ indicates the electrical conversion rate in response to pressure in the plane direction (direction perpendicular to the polarization axis) and takes a negative value. That is, the piezoelectric constant dat is the piezoelectric constant d
h, and the noise signal is based on this constant (.
このため、従来の圧電板にあっては、送波器として用い
る場合には、周縁からも副振動が発生し、その指向特性
を低下させる原因となった。For this reason, when the conventional piezoelectric plate is used as a wave transmitter, secondary vibrations are also generated from the periphery, causing a decrease in its directivity characteristics.
また、受波器として用いる場合には、不要な面方向の歪
によって、電荷または電圧を生じ、これがノイズ信号と
なって、音響波に重畳的に加わり、Ｓ／Ｎ比を低下させ
るという欠点があった。In addition, when used as a wave receiver, unnecessary distortion in the plane direction generates charges or voltages, which become noise signals and are superimposed on acoustic waves, reducing the S/N ratio. there were.
特に、水中用ハイドロフオンとして用いる場合には、吹
き流し時の引張応力や水の流動、波立ち等による曲げ応
力が作用するが、これらの機械的応力により圧電板に面
方向の歪を与えることとなる。In particular, when used as an underwater hydropon, tensile stress during windsock and bending stress due to water flow, ripples, etc. act, and these mechanical stresses cause distortion in the plane direction of the piezoelectric plate. .
本発明は、かかる面方向の圧電定数ｄ ３＋成分を可及
的に消去して、圧電板の特性の向上を図ることを目的と
するものである。The present invention aims to improve the characteristics of a piezoelectric plate by eliminating the piezoelectric constant d 3+ component in the plane direction as much as possible.
〈問題点を解決するための手段〉
本発明は、厚み方向に分極してその表裏面に電極を形成
した主圧電層を、一〜複数枚積層し、その側面に、面方
向に分極して内外面に夫々電極を形成した副圧電層を当
接し、主圧電層の一側電極を副圧電層の内面電極に接続
して共通電極とすると共に、各圧電層の分極方向は前記
共通電極に対して同一方向となっていることを特徴とす
るものである。<Means for Solving the Problems> The present invention consists of laminating one or more main piezoelectric layers, which are polarized in the thickness direction and have electrodes formed on their front and back surfaces, and which are polarized in the plane direction on the side surfaces of the main piezoelectric layers. A sub-piezoelectric layer having electrodes formed on its inner and outer surfaces is brought into contact with the sub-piezoelectric layer, and one side electrode of the main piezoelectric layer is connected to an inner surface electrode of the sub-piezoelectric layer to form a common electrode, and the polarization direction of each piezoelectric layer is set to the common electrode. It is characterized by being oriented in the same direction.
〈作用〉
かかる構成にあって、共通電極と、他の電極間に電圧を
印加すると、前記主圧電層は圧電定数ｄ３３に基づき厚
み方向に伸縮し、そのポアソン比の関係で圧電定数ｄ
３１に基づき面方向に逆位相で伸縮する。また、副圧電
層も厚み方向及び面方向に同様の伸縮を生ずる。ところ
で、副圧電層は、主圧電層に対して、分極方向が直交す
る関係となっている。このため、副圧電層の厚み方向は
、主圧電層の面方向と同一方向であるから、その伸縮は
、主圧電層の面方向伸縮と、逆位相で干渉し合うことと
なる。そして、圧電板全体での面方向に置いて、その伸
縮が減殺または消去されることとなる。このことは、受
渡器として用いた場合にあって、面方向に生じる電圧ま
たは電荷の消去に置いても同様に考えることができる。<Function> In such a configuration, when a voltage is applied between the common electrode and the other electrodes, the main piezoelectric layer expands and contracts in the thickness direction based on the piezoelectric constant d33, and the piezoelectric constant d increases due to the Poisson's ratio.
31, it expands and contracts in opposite phases in the plane direction. Further, the sub-piezoelectric layer also undergoes similar expansion and contraction in the thickness direction and in the plane direction. By the way, the polarization direction of the sub piezoelectric layer is orthogonal to the main piezoelectric layer. Therefore, since the thickness direction of the sub-piezoelectric layer is in the same direction as the in-plane direction of the main piezoelectric layer, its expansion and contraction interfere with the in-plane expansion and contraction of the main piezoelectric layer in opposite phases. Then, the expansion and contraction of the entire piezoelectric plate is reduced or eliminated in the plane direction. This can be similarly considered when it comes to erasing voltage or charge generated in the plane direction when used as a transfer device.
上記事実を第１図についてさらに説明する。The above fact will be further explained with reference to FIG.
かかる構成にあって、主圧電層ｌの表裏面には電極２ａ
、２ｂが形成され、その周囲には副圧電層３が配設され
る。前記副圧電層３の内外面には電極４ａ、４ｂが形成
され、その内面電極４ａは、主圧電層ｌの下面電極２ｂ
と接続し、該下面電極２ｂと、内面電極４ａを共通電極
５としている。In such a configuration, electrodes 2a are provided on the front and back surfaces of the main piezoelectric layer l.
, 2b are formed, and a sub-piezoelectric layer 3 is disposed around them. Electrodes 4a and 4b are formed on the inner and outer surfaces of the auxiliary piezoelectric layer 3, and the inner surface electrode 4a is connected to the lower surface electrode 2b of the main piezoelectric layer 1.
The lower surface electrode 2b and the inner surface electrode 4a are used as a common electrode 5.
□ 前記主圧電層ｌと、副圧電層３とは、いずれも共通
電極５に対して同一方向に分極されている。□ The main piezoelectric layer 1 and the sub-piezoelectric layer 3 are both polarized in the same direction with respect to the common electrode 5.
この構成にあって、主圧電層ｌと副圧電層３はその厚さ
ｔが等しいものとする。また各圧電定数は同一材料で形
成されることにより同一とすることができる。In this configuration, the main piezoelectric layer l and the sub piezoelectric layer 3 have the same thickness t. Moreover, each piezoelectric constant can be made the same by being formed of the same material.
ここで圧電板に発生する電荷量をＣとすると、次の一般
式が成立する。Here, if the amount of charge generated on the piezoelectric plate is C, the following general formula holds true.
Ｃ＝ｄ、・５−ｐ（Ｃ／へ−ｌ１１２・Ｎ７ｍ”）また
、圧電定数には既述の様に次の関係がある。C=d, ·5-p (C/he-1112 · N7m'') Also, as stated above, the piezoelectric constant has the following relationship.
ｄ ｎ ”ｄ３３＋２ｄ３１
これから、主圧電層と、副圧電層に発生する電荷量をＣ
，、Ｃ，とじ、主圧電層の表面積を３１とし、副圧電層
の表面積（主圧電層の側面の面積に相当）を３２とする
と、
Ｃ＋ ＝ｄ ｈ・Ｓｌ・ｐ
＝ｄ、３・Ｓ Ｉ−ｐ ＋ ２ ｄ ３１・Ｓｌ・ｐ
■に２＝ ｄ ｈ−３＊・ｐ
＝ｄ３３・Ｓ２・ｐ ＋ ２ ｄ ３＋・Ｓ２・ｐ
■また第１図の構成の圧電板による電荷量はその合ｄ
であり、
ＣＩ＋Ｃ２：ｄｈ・（Ｓｌ＋Ｓ２１ ・ｐとなる。d n ”d33+2d31 From now on, the amount of charge generated in the main piezoelectric layer and the sub piezoelectric layer is C
,, C, binding, assuming that the surface area of the main piezoelectric layer is 31 and the surface area of the sub-piezoelectric layer (corresponding to the area of the side surface of the main piezoelectric layer) is 32, C+ = d h・Sl・p = d, 3・S I-p + 2 d 31・Sl・p
2 = d h-3*・p = d33・S2・p + 2 d 3+・S2・p
■Also, the amount of charge due to the piezoelectric plate with the configuration shown in Figure 1 is the sum d
Then, CI+C2:dh・(Sl+S21・p).
一方、副圧電層の厚さｔは等しいから、Ｓ、＝ ＋ ２
ｄ ３１／ ｄ ３ｓ・Ｓ２ ■の関係
が成立する。On the other hand, since the thickness t of the sub-piezoelectric layer is equal, S, = + 2
The relationship d31/d3s・S2 (2) is established.
そこで、■〜■式より、
Ｃ＋ ＋ Ｃｚ＝ ｄ ａａ・Ｓ、・ｐ ＋ ２ ｄ
ｓ ＋・Ｓ２・ｐとなる。Therefore, from the formulas ■～■, C+ + Cz= d aa・S,・p + 2 d
It becomes s+・S2・p.
この２ｄａ＋’Ｓａ・ｐは、副圧電層の面方向の成分で
あり、圧電板に対しては厚み方向の電荷量である。従っ
て、圧電板の面方向の電荷は、見掛は上、消去されたこ
ととなる。そしてその全体の面積Ｓ＝Ｓ＋＋Ｓｚとすれ
ば、見掛は上従来構造と全く同じ圧電定数ｄｈを実現し
ながら、圧電定数ｄ ａ＋が消去されることとなる。This 2da+'Sa·p is a component in the plane direction of the sub-piezoelectric layer, and is the amount of charge in the thickness direction for the piezoelectric plate. Therefore, the charge in the plane direction of the piezoelectric plate is apparently erased. If the total area is S=S++Sz, the piezoelectric constant d a+ will be eliminated while achieving the piezoelectric constant dh which is apparently exactly the same as the conventional structure.
〈実施例〉
第１図について、圧電可撓性シートまたは圧電磁器板か
らなる圧電板Ａの構成について説明する。<Example> With reference to FIG. 1, the structure of a piezoelectric plate A made of a piezoelectric flexible sheet or a piezoelectric ceramic plate will be described.
１は方形板状からなる主圧電層であって、その表裏面に
は電極２ａ、２ｂが形成されている。また、その周縁に
は該主圧電層ｌを矩形環状に囲んで副圧電層３が配設さ
れる。主圧電層ｌは円板状とすることもでき、この場合
には該副圧電層３は円環状となる。前記副圧電層３の内
外面には電極４ａ、４ｂが形成され、その内面電極４ａ
は、主圧電層ｌの下面電極２ｂと接続し、該下面電極２
ｂと内面電極４ａとを共通電極５としている。Reference numeral 1 denotes a main piezoelectric layer having a rectangular plate shape, and electrodes 2a and 2b are formed on the front and back surfaces of the main piezoelectric layer. Furthermore, a sub-piezoelectric layer 3 is disposed around the periphery of the main piezoelectric layer 1 so as to surround the main piezoelectric layer 1 in a rectangular ring shape. The main piezoelectric layer 1 can also have a disk shape, and in this case, the sub piezoelectric layer 3 has an annular shape. Electrodes 4a and 4b are formed on the inner and outer surfaces of the sub-piezoelectric layer 3, and the inner surface electrode 4a
is connected to the bottom electrode 2b of the main piezoelectric layer l, and the bottom electrode 2b is connected to the bottom electrode 2b of the main piezoelectric layer l.
b and the inner surface electrode 4a are used as a common electrode 5.
前記主圧電層ｌは、上面電極２ａから共通電極５へ向け
てあらかじめ分極され、副圧電層３は内面電極４ａから
共通電極５に向けて分極されている。この分極方向は、
逆転させても良い。The main piezoelectric layer 1 is polarized in advance from the upper surface electrode 2a toward the common electrode 5, and the sub piezoelectric layer 3 is polarized from the inner surface electrode 4a toward the common electrode 5. This polarization direction is
You can also reverse it.
すなわち、いずれも共通電極５に対して同一方向に分極
されていることとなる。That is, they are all polarized in the same direction with respect to the common electrode 5.
前記構成にあって、上面電極２ａと外面電極４ｂを結線
し、前記共通電極５と上面電極２ａ及び外面電極４ｂ間
に交番電圧を印加すると、主圧電層ｌは矢印の様に厚み
方向で圧電定数ｄｓ３に基づいて発振し、面方向で圧電
定数ｄｓ＋に基づいて歪む。このとき、副圧電層３では
、その厚み方向（圧電板Ａの面方向）に沿って矢印の様
に主圧電層１の面方向歪と逆位相で発振する。このため
、相互にキャンセルされる。In the above structure, when the upper surface electrode 2a and the outer surface electrode 4b are connected and an alternating voltage is applied between the common electrode 5 and the upper surface electrode 2a and the outer surface electrode 4b, the main piezoelectric layer l becomes piezoelectric in the thickness direction as shown by the arrow. It oscillates based on the constant ds3 and is distorted in the plane direction based on the piezoelectric constant ds+. At this time, the sub-piezoelectric layer 3 oscillates along its thickness direction (in-plane direction of the piezoelectric plate A) in a phase opposite to the in-plane strain of the main piezoelectric layer 1 as shown by the arrow. Therefore, they cancel each other out.
而で、送波器として用いた場合には、周縁からの副振動
を生じないから、指向性が良（なり、受波器として用い
る場合には、前記したように汲置等の外的応力による電
位の発生は消去されるから音響波に対応する電気信号の
みが抽出され、ノイズが減少する。When used as a wave transmitter, there is no secondary vibration from the periphery, so the directivity is good (and when used as a wave receiver, external stress such as pumping etc. Since the generation of potential caused by the acoustic wave is eliminated, only the electrical signal corresponding to the acoustic wave is extracted, and noise is reduced.
第２図は、他の実施例の圧電板Ｂを示す。FIG. 2 shows a piezoelectric plate B according to another embodiment.
かかる構成にあって、主圧電層１０．１０は電極１１ｂ
を介して上下に二枚積層し、その表裏面に電極１１ａ、
１１ａを露出すると共に、その周囲に、内面電極１３ａ
を介して副圧電層１２を形成し、前記電極１１ｂと電極
１３ａを接続して共通電極１４としている。かかる構成
にあって、副圧電層１２の上下幅は、圧電板Ｂの表裏が
整一な平面となる様に、主圧電層１０．１０の厚みの和
とする。この構成にあっても、各圧電層１０゜１０．１
２は共通電極１４に対して同一分極方向とし、内方へ向
けて分極されている。In such a configuration, the main piezoelectric layer 10.10 is connected to the electrode 11b.
Two sheets are stacked one on top of the other with electrodes 11a,
11a is exposed, and an inner electrode 13a is placed around it.
A sub-piezoelectric layer 12 is formed through the electrode 11b and the electrode 13a are connected to form a common electrode 14. In such a configuration, the vertical width of the sub piezoelectric layer 12 is set to be the sum of the thicknesses of the main piezoelectric layers 10 and 10 so that the front and back surfaces of the piezoelectric plate B form a uniform plane. Even with this configuration, each piezoelectric layer is 10°10.1
2 has the same polarization direction as the common electrode 14, and is polarized inward.
前記圧電板Ｂは第３図に示す様に、副圧電層１２の外面
電極１３ｂを接続して連続させることもできる。ここで
各電極１１ａ、ｌｌａ、１３ｂはリードＩ！ ｌ ５
ａに接続し、共通電極１４はリード！ｉｔ ５ｂに接続
し、その電線端間から、送波器にあっては電圧を印加し
、受波器にあっては出力信号を取り出す。As shown in FIG. 3, the piezoelectric plate B can also be made continuous by connecting the outer surface electrode 13b of the sub-piezoelectric layer 12. Here, each electrode 11a, lla, 13b is a lead I! l 5
a, and the common electrode 14 is a lead! It is connected to 5b, and a voltage is applied to the transmitter and an output signal is extracted from the receiver between the ends of the wire.
〈発明の効果〉
本発明は前記の説明によって明らかにしたように、主圧
電層の周囲に副圧電層を配設して、主圧電層の圧電定数
ｄｓ＋による面方向の歪みまたは電荷を、副圧電層の圧
電定数ｄａｓによる厚み方向の歪または電荷により消去
する様にしたから、送波器に使用した場合には、周囲か
らの副振動がなく、指向性の良い送波を実現でき、受波
器にあっては、面方向からの機械的応力の影響を受けず
、Ｓ／Ｎ比を向上でき、送受波器等に最適に利用し得る
等の優れた効果がある。<Effects of the Invention> As clarified by the above description, the present invention provides a sub-piezoelectric layer around the main piezoelectric layer to reduce the strain or charge in the plane direction due to the piezoelectric constant ds+ of the main piezoelectric layer. Since it is erased by strain or charge in the thickness direction due to the piezoelectric constant das of the piezoelectric layer, when used in a wave transmitter, there is no secondary vibration from the surroundings, it can transmit waves with good directionality, and it can be used for reception. The wave transmitter has excellent effects such as being unaffected by mechanical stress from the surface direction, improving the S/N ratio, and being optimally used in wave transmitters and receivers.
第１図は本発明に係る圧電板Ａの縦断側面図、第２図は
同圧電板Ｂの縦断側面図、第３図は圧電板Ｂの応用例の
縦断側面図、第４図は従来構成の圧電板の縦断側面図で
ある。
Ａ、Ｂ：圧電板 ｌ：主圧電層 ２ａ、２ｂ；電極 ３
：副圧電層 ４ａ、４ｂ：電極 ５：共通電極 ｌＯ：
主圧電層 １１ａ、１１ｂ；電極 １２；副圧電層 １
３ａ、１３ｂ：電極１４、共通電極
第１図
第２図FIG. 1 is a vertical side view of piezoelectric plate A according to the present invention, FIG. 2 is a vertical side view of piezoelectric plate B, FIG. 3 is a vertical side view of an application example of piezoelectric plate B, and FIG. 4 is a conventional configuration. FIG. A, B: Piezoelectric plate l: Main piezoelectric layer 2a, 2b; Electrode 3
: Sub-piezoelectric layer 4a, 4b: Electrode 5: Common electrode lO:
Main piezoelectric layer 11a, 11b; electrode 12; sub-piezoelectric layer 1
3a, 13b: Electrode 14, common electrode Fig. 1 Fig. 2
Claims (1)
電層を、一〜複数枚積層し、その側面に、面方向に分極
して内外面に夫々電極を形成した副圧電層を当接し、主
圧電層の一側電極を副圧電層の内面電極に接続して共通
電極とすると共に、各圧電層の分極方向は前記共通電極
に対して同一方向となっていることを特徴とする圧電板
。One or more main piezoelectric layers that are polarized in the thickness direction and have electrodes formed on their front and back surfaces are laminated, and a sub-piezoelectric layer that is polarized in the planar direction and has electrodes formed on the inner and outer surfaces is brought into contact with the side surface of the main piezoelectric layer. , a piezoelectric device characterized in that one side electrode of the main piezoelectric layer is connected to the inner surface electrode of the auxiliary piezoelectric layer to form a common electrode, and the polarization direction of each piezoelectric layer is in the same direction with respect to the common electrode. Board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62334779A JPH01175273A (en) | 1987-12-28 | 1987-12-28 | Piezoelectric plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62334779A JPH01175273A (en) | 1987-12-28 | 1987-12-28 | Piezoelectric plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01175273A true JPH01175273A (en) | 1989-07-11 |
Family
ID=18281139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62334779A Pending JPH01175273A (en) | 1987-12-28 | 1987-12-28 | Piezoelectric plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01175273A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006174618A (en) * | 2004-12-16 | 2006-06-29 | Kyocera Corp | Piezoelectric actuator and liquid discharging apparatus |
-
1987
- 1987-12-28 JP JP62334779A patent/JPH01175273A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006174618A (en) * | 2004-12-16 | 2006-06-29 | Kyocera Corp | Piezoelectric actuator and liquid discharging apparatus |
| JP4594060B2 (en) * | 2004-12-16 | 2010-12-08 | 京セラ株式会社 | Liquid ejection device |
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