JPH01175225U - - Google Patents
Info
- Publication number
- JPH01175225U JPH01175225U JP1988071849U JP7184988U JPH01175225U JP H01175225 U JPH01175225 U JP H01175225U JP 1988071849 U JP1988071849 U JP 1988071849U JP 7184988 U JP7184988 U JP 7184988U JP H01175225 U JPH01175225 U JP H01175225U
- Authority
- JP
- Japan
- Prior art keywords
- heat exchanger
- air conditioner
- turbo fan
- pitch
- air volume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Air Filters, Heat-Exchange Apparatuses, And Housings Of Air-Conditioning Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988071849U JPH01175225U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988071849U JPH01175225U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-31 | 1988-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01175225U true JPH01175225U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-12-13 |
Family
ID=31297037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988071849U Pending JPH01175225U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-31 | 1988-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01175225U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7270709B2 (en) | 2002-07-17 | 2007-09-18 | Applied Materials, Inc. | Method and apparatus of generating PDMAT precursor |
-
1988
- 1988-05-31 JP JP1988071849U patent/JPH01175225U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7270709B2 (en) | 2002-07-17 | 2007-09-18 | Applied Materials, Inc. | Method and apparatus of generating PDMAT precursor |
| US7429361B2 (en) | 2002-07-17 | 2008-09-30 | Applied Materials, Inc. | Method and apparatus for providing precursor gas to a processing chamber |
| US7569191B2 (en) | 2002-07-17 | 2009-08-04 | Applied Materials, Inc. | Method and apparatus for providing precursor gas to a processing chamber |
| US7588736B2 (en) | 2002-07-17 | 2009-09-15 | Applied Materials, Inc. | Apparatus and method for generating a chemical precursor |
| US7597758B2 (en) | 2002-07-17 | 2009-10-06 | Applied Materials, Inc. | Chemical precursor ampoule for vapor deposition processes |