JPH01174931U - - Google Patents
Info
- Publication number
- JPH01174931U JPH01174931U JP7130388U JP7130388U JPH01174931U JP H01174931 U JPH01174931 U JP H01174931U JP 7130388 U JP7130388 U JP 7130388U JP 7130388 U JP7130388 U JP 7130388U JP H01174931 U JPH01174931 U JP H01174931U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- semiconductor wafer
- head cover
- probe head
- monitors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 239000003550 marker Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 239000008188 pellet Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7130388U JPH01174931U (sh) | 1988-05-30 | 1988-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7130388U JPH01174931U (sh) | 1988-05-30 | 1988-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01174931U true JPH01174931U (sh) | 1989-12-13 |
Family
ID=31296513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7130388U Pending JPH01174931U (sh) | 1988-05-30 | 1988-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01174931U (sh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03280445A (ja) * | 1990-03-28 | 1991-12-11 | Tokyo Electron Ltd | プローブ装置 |
-
1988
- 1988-05-30 JP JP7130388U patent/JPH01174931U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03280445A (ja) * | 1990-03-28 | 1991-12-11 | Tokyo Electron Ltd | プローブ装置 |
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