JPH01174918U - - Google Patents
Info
- Publication number
- JPH01174918U JPH01174918U JP7219688U JP7219688U JPH01174918U JP H01174918 U JPH01174918 U JP H01174918U JP 7219688 U JP7219688 U JP 7219688U JP 7219688 U JP7219688 U JP 7219688U JP H01174918 U JPH01174918 U JP H01174918U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- pressure control
- control valve
- vacuum processing
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7219688U JPH01174918U (me) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7219688U JPH01174918U (me) | 1988-05-31 | 1988-05-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01174918U true JPH01174918U (me) | 1989-12-13 |
Family
ID=31297370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7219688U Pending JPH01174918U (me) | 1988-05-31 | 1988-05-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01174918U (me) |
-
1988
- 1988-05-31 JP JP7219688U patent/JPH01174918U/ja active Pending