JPH01174699U - - Google Patents

Info

Publication number
JPH01174699U
JPH01174699U JP1988071111U JP7111188U JPH01174699U JP H01174699 U JPH01174699 U JP H01174699U JP 1988071111 U JP1988071111 U JP 1988071111U JP 7111188 U JP7111188 U JP 7111188U JP H01174699 U JPH01174699 U JP H01174699U
Authority
JP
Japan
Prior art keywords
bearing
housing
rolling bearing
turbo
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988071111U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988071111U priority Critical patent/JPH01174699U/ja
Publication of JPH01174699U publication Critical patent/JPH01174699U/ja
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/04Ball or roller bearings, e.g. with resilient rolling bodies
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00Engines or pumps
    • F16C2360/44Centrifugal pumps
    • F16C2360/45Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1988071111U 1988-05-31 1988-05-31 Pending JPH01174699U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988071111U JPH01174699U (US20020051482A1-20020502-M00012.png) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988071111U JPH01174699U (US20020051482A1-20020502-M00012.png) 1988-05-31 1988-05-31

Publications (1)

Publication Number Publication Date
JPH01174699U true JPH01174699U (US20020051482A1-20020502-M00012.png) 1989-12-12

Family

ID=31296322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988071111U Pending JPH01174699U (US20020051482A1-20020502-M00012.png) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH01174699U (US20020051482A1-20020502-M00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016084811A (ja) * 2014-10-24 2016-05-19 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
JP2018159340A (ja) * 2017-03-23 2018-10-11 株式会社島津製作所 真空ポンプの制御装置、およびポンプ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016084811A (ja) * 2014-10-24 2016-05-19 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
JP2018159340A (ja) * 2017-03-23 2018-10-11 株式会社島津製作所 真空ポンプの制御装置、およびポンプ装置

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