JPH01174038U - - Google Patents
Info
- Publication number
- JPH01174038U JPH01174038U JP7075188U JP7075188U JPH01174038U JP H01174038 U JPH01174038 U JP H01174038U JP 7075188 U JP7075188 U JP 7075188U JP 7075188 U JP7075188 U JP 7075188U JP H01174038 U JPH01174038 U JP H01174038U
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- bottom gripper
- vacuum
- vacuum device
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7075188U JPH01174038U (en, 2012) | 1988-05-27 | 1988-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7075188U JPH01174038U (en, 2012) | 1988-05-27 | 1988-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01174038U true JPH01174038U (en, 2012) | 1989-12-11 |
Family
ID=31295980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7075188U Pending JPH01174038U (en, 2012) | 1988-05-27 | 1988-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01174038U (en, 2012) |
-
1988
- 1988-05-27 JP JP7075188U patent/JPH01174038U/ja active Pending