JPH01173944U - - Google Patents
Info
- Publication number
- JPH01173944U JPH01173944U JP6801888U JP6801888U JPH01173944U JP H01173944 U JPH01173944 U JP H01173944U JP 6801888 U JP6801888 U JP 6801888U JP 6801888 U JP6801888 U JP 6801888U JP H01173944 U JPH01173944 U JP H01173944U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- equipment
- heat exhaust
- heat
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Description
第１図は本考案の一実施例の機器カバーの縦断
面図である。
１……機器、２……機器カバー、３……吸気口
、４……排気口、５……ラジエター、６……排気
フアン、７……除塵フイルター、８……床。
FIG. 1 is a longitudinal sectional view of an equipment cover according to an embodiment of the present invention. 1... Equipment, 2... Equipment cover, 3... Intake port, 4... Exhaust port, 5... Radiator, 6... Exhaust fan, 7... Dust removal filter, 8... Floor.
Claims (1)
内に設置され熱を発生する機器を覆うカバーの熱
排気口に該熱排気を冷却する手段を設けたことを
特徴とする機器カバー。 An equipment cover, which is installed in a clean room for producing semiconductor devices and the like and covers equipment that generates heat, and the heat exhaust port of the cover is provided with means for cooling the heat exhaust.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6801888U JPH01173944U (en) | 1988-05-25 | 1988-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6801888U JPH01173944U (en) | 1988-05-25 | 1988-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173944U true JPH01173944U (en) | 1989-12-11 |
Family
ID=31293348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6801888U Pending JPH01173944U (en) | 1988-05-25 | 1988-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173944U (en) |
-
1988
- 1988-05-25 JP JP6801888U patent/JPH01173944U/ja active Pending