JPH01173931U - - Google Patents

Info

Publication number
JPH01173931U
JPH01173931U JP6898688U JP6898688U JPH01173931U JP H01173931 U JPH01173931 U JP H01173931U JP 6898688 U JP6898688 U JP 6898688U JP 6898688 U JP6898688 U JP 6898688U JP H01173931 U JPH01173931 U JP H01173931U
Authority
JP
Japan
Prior art keywords
resist
semiconductor wafer
coating device
resist coating
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6898688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6898688U priority Critical patent/JPH01173931U/ja
Publication of JPH01173931U publication Critical patent/JPH01173931U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP6898688U 1988-05-25 1988-05-25 Pending JPH01173931U (US06265458-20010724-C00056.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6898688U JPH01173931U (US06265458-20010724-C00056.png) 1988-05-25 1988-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6898688U JPH01173931U (US06265458-20010724-C00056.png) 1988-05-25 1988-05-25

Publications (1)

Publication Number Publication Date
JPH01173931U true JPH01173931U (US06265458-20010724-C00056.png) 1989-12-11

Family

ID=31294278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6898688U Pending JPH01173931U (US06265458-20010724-C00056.png) 1988-05-25 1988-05-25

Country Status (1)

Country Link
JP (1) JPH01173931U (US06265458-20010724-C00056.png)

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