JPH01173744A - Contactor for semiconductor device manufacturing equipment - Google Patents

Abstract

PURPOSE:To prevent both of a contact piece and a device from damaging by inserting and pulling out the device by a method wherein the contact piece of a contactor is normally opened to be closed by an external force after the device is lowered down to the contact position. CONSTITUTION:A device 2 carried on a device base 1 is lowered as it is pressed down upon the base 1 by a device stay 3 to be stopped on the position wherein the electrode of the device 2 is opposed to the contact piece 4 of a contactor. Later, a plate cam 6 is lowered to forcibly close the contact piece 4 by rollers 5 connected to the sides of the contact piece 4 so that the contact piece 4 may come into contact with the device 2. In such a constitution, the contact piece 4 is in normally open state so that the device 2 being inserted and pulled out may not slide along the contact piece 4 consequently not to be damaged while preventing the contactor from damaging.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a contacting method for a contactor (hereinafter referred to as a contactor) for a semiconductor device manufacturing apparatus.

[Conventional technology]

FIG. 2 is a side view of a conventional contactor. In the figure, (11 is a device stand, (2) is a semiconductor device (hereinafter referred to as a device), +31 is a device holder for inserting the device 121, and 141 is a contact that is closed in a self-supporting state.

Next, the operation will be explained. The device 21 transported onto the device stand +11 is pressed, ! At the same time as it is pressed against the device stand Il+ by tI11, the contact +4 descends together with the device stand and closes in an independent state.
1 i, device (21 expanded, device 12)
and the contactor (41) are in contact. - [Problem to be solved by the invention] Since the conventional contactor is configured as described above,
The device is being rubbed against the contacts, damaging the device.

Furthermore, if a device with a deformed electrode is pushed into the device, there is a problem in that the contactor will be damaged.

This invention was made to solve the above-mentioned problems, and aims to prevent damage to the contactor while not attaching AT to the device.

[Means for solving problems]

In the contactor according to the present invention, the contactor is a plate spring, and in the free standing state, even if the device is pushed in, the contactor does not melt and make contact with the device, and after the contactor is lowered to the device contact position, the contactor is closed and brought into contact with the device. This is what I did.

[Effect]

In the contactor according to the present invention, since the contactor is always open, the device is not damaged when the device is inserted or removed, and the contactor is prevented from being damaged.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
The figures are a front view and a 1111 side view of the contactor. In the figure, 111 is a device stand, 121 is a device, 1
3) is a device holder for inserting the device, 14) is a contact, 16) is a roller connected to the lateral VC of the contact, and (6) is a plate cam for opening and closing the contact.

Next, the operation of the embodiment will be explained.

The device 21 transported onto the device stand 11 descends while being pressed against the device stand 11 by the device presser 13), and stops at a position where the device (the electrodes of 21 and the contacts 14) face each other. Thereafter, the plate cam 16) is lowered, the contactor (4+) connected by the roller 151K is forcibly closed, and the contactor 141 is brought into contact with the device 21.

In addition, in the above embodiment, the plate cam 16) has a roller +51 f
Although the method of pushing and opening/closing the contact 141 has been shown, it is also possible to open/close the contact 1411 directly using the plate cam (61).Also, although the device stand +11 and the plate cam (6) are not connected, The same operation is possible even if they are connected.

〔Effect of the invention〕

As described above, according to the present invention, since the contactor is always open, the probability of the contactor being damaged when a device is inserted or removed is reduced, and the life span of the contactor itself is also extended.

[Brief explanation of the drawing]

FIG. 1 is a front view and a side view of a contactor according to an IM example of the present invention, and FIG. 2 is a side view of a conventional contactor. In the figure, 11 is a device stand, (21 is a device, 13
1 is the device holder, 141 is the contact, ILII is the roller,
(61 is a mechanical cam. In the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] In the function of a contactor for semiconductor device manufacturing equipment, which measures the characteristics of a semiconductor device whose external shape has electrodes in four directions,
A contactor for a semiconductor device manufacturing apparatus, wherein the four-direction contactor is in an open state in which it does not come into contact with the semiconductor device electrode, and comes into contact with the electrode by sustaining an external force.