JPH01173156U - - Google Patents
Info
- Publication number
- JPH01173156U JPH01173156U JP6771288U JP6771288U JPH01173156U JP H01173156 U JPH01173156 U JP H01173156U JP 6771288 U JP6771288 U JP 6771288U JP 6771288 U JP6771288 U JP 6771288U JP H01173156 U JPH01173156 U JP H01173156U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- reactor
- core tube
- tube
- gas transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6771288U JPH01173156U (zh) | 1988-05-23 | 1988-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6771288U JPH01173156U (zh) | 1988-05-23 | 1988-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173156U true JPH01173156U (zh) | 1989-12-08 |
Family
ID=31293071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6771288U Pending JPH01173156U (zh) | 1988-05-23 | 1988-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173156U (zh) |
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1988
- 1988-05-23 JP JP6771288U patent/JPH01173156U/ja active Pending