JPH01172581A - Manufacture of shadow mask - Google Patents
Manufacture of shadow maskInfo
- Publication number
- JPH01172581A JPH01172581A JP33354787A JP33354787A JPH01172581A JP H01172581 A JPH01172581 A JP H01172581A JP 33354787 A JP33354787 A JP 33354787A JP 33354787 A JP33354787 A JP 33354787A JP H01172581 A JPH01172581 A JP H01172581A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- shape
- shadow mask
- uniformly
- carried out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000005530 etching Methods 0.000 claims abstract description 36
- 239000002184 metal Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims abstract 2
- 239000011347 resin Substances 0.000 abstract description 2
- 229920005989 resin Polymers 0.000 abstract description 2
- 230000000873 masking effect Effects 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000001154 acute effect Effects 0.000 description 1
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
CRT、カラーテレビ等の各種表示装置に用いられるシ
ャドウマスクの製造方法に係る。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method of manufacturing a shadow mask used in various display devices such as CRTs and color televisions.
〈従来の技術〉
従来のシャドウマスクのエンチング用パターンとしては
、特公昭51−9264号、特公昭48−42017゜
特公昭60−11418.特公昭5L12986等があ
るが、これらは、第5図に示す様に、すべてかどは角状
となっている。また、特公昭60−11419は、逆に
鋭角状となついる。更に、実公昭58−34675にお
いては、円孔状のパターンが部分的に設けられているが
、その円弧はかどを丸めるものではなく、側部より円弧
がはみ出ているものである。<Prior art> Conventional etching patterns for shadow masks include Japanese Patent Publication No. 51-9264, Japanese Patent Publication No. 48-42017, Japanese Patent Publication No. 60-11418. There are Japanese special public works such as Showa 5L12986, but all of these have square corners, as shown in Figure 5. On the other hand, the Japanese Patent Publication No. 60-11419 has an acute angle shape. Furthermore, in Japanese Utility Model Publication No. 58-34675, a hole-shaped pattern is partially provided, but the arcs are not rounded at the edges, but rather protrude from the sides.
〈発明が解決しようとする問題点〉
しかし、上述の様なエツチングパターンを持った耐エツ
チング被膜では、かど部分からのエンチングが、初めは
他の部分より遅いが、ある程度エツチングが進むと、逆
に他の部分よりエツチング速度が早くなる。従って、第
3図に示す様に耐エツチング被膜形状1が矩型であって
も上部及び下端部ではエンチング速度が早い為、左右に
はみ出す。従ってエンチング形状2は第6図に示す様に
まゆ型なり、シャドウマスクとしての効率が悪くなり、
かつエツチングの打ち切り時間が重要で、均一な製造が
回連であった。<Problems to be Solved by the Invention> However, in an etching-resistant coating having an etching pattern as described above, etching from the corner portions is slower than other portions at first, but once the etching progresses to a certain extent, it reverses. The etching speed is faster than other parts. Therefore, even if the etching-resistant coating 1 has a rectangular shape as shown in FIG. 3, the etching rate is faster at the upper and lower ends, so that it protrudes to the left and right. Therefore, the etching shape 2 becomes a cocoon shape as shown in FIG. 6, and the efficiency as a shadow mask becomes poor.
In addition, the etching cut-off time was important, and uniform production was the key.
く問題を解決する為の手段〉
上述の問題点を解決する為、オーバーエツチングの元と
なるかど状のエンチングパターンをなくし、かどに丸み
をつけてエツチングする。Measures to Solve the Problem> In order to solve the above problem, the corner-shaped etching pattern that causes over-etching is eliminated, and the edges are rounded and etched.
このかどの丸み程度であるが、これはエツチング特性に
よってエツチング等方性が強いものであればかどは僅か
に丸くなっている程度であれば良いが、エツチングの等
方性が悪いものであれば、孔パターンが上下で半円をな
す迄かどを丸める必要がある。Depending on the etching characteristics, if the etching is strongly isotropic, the edges should be slightly rounded, but if the etching is not very isotropic, then the edges should be slightly rounded. It is necessary to round the edges until the hole pattern forms a semicircle at the top and bottom.
〈作用〉
耐エツチング被膜形状がかどで丸みを帯びていれば、サ
イドエツチング方向が近偵値に一方向にのみになり、は
ぼ等速度でエツチングが進行する事となる。従って、上
下何れの位置でも、左右へのエツチング張り出しは、同
じ幅となり、シャドウマスクの製造が安定した。<Function> If the shape of the etching-resistant film is rounded at the edges, the side etching direction will be only in one direction, and the etching will proceed at approximately the same speed. Therefore, the etching protrusion to the left and right has the same width in both the upper and lower positions, and the production of the shadow mask is stabilized.
〈実施例1〉 本発明の実施例につき、図面を用いて詳細に説明する。<Example 1> Embodiments of the present invention will be described in detail with reference to the drawings.
第1図は、本発明の一実施例を示す部分平面図である。FIG. 1 is a partial plan view showing one embodiment of the present invention.
金属板上に感光性樹脂を均一に塗布したのち、パターン
図形が画かれているマスク板を当て、露光する。このマ
スク板には、かどが丸まった孔パターンが無数に設けら
れている。この様なパターンの耐エツチング被膜形状l
が設けられている状態でエツチングを施すと等方エツチ
ングされ、第2図に示す様に、均等にサイドエツチング
される。After uniformly coating a photosensitive resin on a metal plate, a mask plate with a pattern drawn on it is applied and exposed. This mask plate is provided with numerous hole patterns with rounded edges. Etching-resistant coating shape with such a pattern
If etching is performed in a state where the etching is provided, it will be isotropically etched, and as shown in FIG. 2, side etching will be uniformly performed.
従って、左右方向については同じ幅方向だけ均一にエツ
チングされたエンチング上り形状2となる。Therefore, in the left-right direction, the etched upward shape 2 is uniformly etched in the same width direction.
〈実施例2〉
第3図は、別な孔パターンが上下で半円をなしているパ
ターンの耐エンチング被膜形状2である。<Example 2> FIG. 3 shows another anti-etching coating shape 2 in which the hole pattern forms a semicircle at the top and bottom.
これでもエツチング上り形状2は、第4図に示す様に、
左右方向につき同じ幅方向だけ均一にエツチングされる
。Even with this, the etching upward shape 2 is as shown in Fig. 4.
Etching is done uniformly in the same width direction in both left and right directions.
〈発明の効果〉
本発明により、上下何れの位置に於いても、左右へのエ
ンチング張り出しが同じ幅となる。これにより縦方向と
、横方向のエツチングが均一に入る為、シャドウマスク
の製造設計上有用であり、かつ、・シャドウマスクの製
造が安定し、均一なものが得られ、しかも、それ相応の
開口度を維持できる。<Effects of the Invention> According to the present invention, the engraving protrusion to the left and right has the same width regardless of whether it is in the upper or lower position. This allows for uniform etching in both the vertical and horizontal directions, which is useful for manufacturing and designing shadow masks. I can maintain my degree.
第1図は、本発明の一実施例を示す平面図、第2図は、
同上・ノチング形状の平面図、第3図4よ、別な一実施
例を示す平面図、第4図番よ、同上・ンチング形状の平
面図、第5図は、従来例を示す平面図、第6図は、同上
・ノチング形状の平面図、である。
1・・・・・・耐エツチング被膜形状 。
2・・・・・・エンチング上り形状
時 許 出 願 人
凸版印刷株式会社
代表者 鈴木和夫
第1図
第2図
第3図
第5図FIG. 1 is a plan view showing an embodiment of the present invention, and FIG. 2 is a plan view showing an embodiment of the present invention.
4 is a plan view showing another embodiment; FIG. 4 is a plan view of the notching shape; FIG. 5 is a plan view showing a conventional example; FIG. 6 is a plan view of the notching shape. 1...Etching-resistant film shape. 2...When etched up shape Applicant: Toppan Printing Co., Ltd. Representative: Kazuo Suzuki Figure 1 Figure 2 Figure 3 Figure 5
Claims (1)
ッチング被膜を設け、エッチングする事を特徴とするシ
ャドウマスクの製造方法。 2)孔パターンが、上下で半円をなしている事を特徴と
する特許請求の範囲第1項記載のシャドウマスクの製造
方法。[Claims] 1) A method for producing a shadow mask, which comprises providing an etching-resistant film having a hole pattern with rounded corners on a metal plate and etching the film. 2) The method for manufacturing a shadow mask according to claim 1, wherein the hole pattern has a semicircular shape at the top and bottom.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33354787A JPH01172581A (en) | 1987-12-25 | 1987-12-25 | Manufacture of shadow mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33354787A JPH01172581A (en) | 1987-12-25 | 1987-12-25 | Manufacture of shadow mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01172581A true JPH01172581A (en) | 1989-07-07 |
Family
ID=18267268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33354787A Pending JPH01172581A (en) | 1987-12-25 | 1987-12-25 | Manufacture of shadow mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01172581A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006278894A (en) * | 2005-03-30 | 2006-10-12 | Yamaha Corp | Magnetic sensor |
US8178361B2 (en) | 2005-03-17 | 2012-05-15 | Yamaha Corporation | Magnetic sensor and manufacturing method therefor |
-
1987
- 1987-12-25 JP JP33354787A patent/JPH01172581A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8178361B2 (en) | 2005-03-17 | 2012-05-15 | Yamaha Corporation | Magnetic sensor and manufacturing method therefor |
US9054028B2 (en) | 2005-03-17 | 2015-06-09 | Yamaha Corporation | Magnetic sensor and manufacturing method therefor |
JP2006278894A (en) * | 2005-03-30 | 2006-10-12 | Yamaha Corp | Magnetic sensor |
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