JPH01172571A - Apparatus for conveying film - Google Patents

Abstract

PURPOSE:To control tension of a film in the fine small range by arranging a potential difference generator on a roller at the time of depositing electric conductive film on the one side while conveying the film with the roller in a vacuum vessel and also arranging a tension sensor on the adjoining other roller. CONSTITUTION:The film 8 is rewound from rewinding roller 4b in the vacuum vessel 7 and wound to the roller 1 through rollers 3b, 24b and electric conductive material evaporated from an evaporating source 6 is deposited or the outside of the film. Successively, the film is wound to a winding roller 4a through rollers 24a, 3a. In this case, signal from the tension sensor 2b attached to the roller 24b is inputted in a controller 5b and by this output, the suitable potential difference is generated to the roller 3b. Related to the roller 3a, too, the potential difference is generated in the same way, and also in the main roller 1, the potential difference is adjusted with the potential difference generator 9, so that the film 8 can be rotated as the same speed as the roller 1. The tension of the film 8 can be minutely controlled at suitable value and detachment of the film 8 from each roller can be stabilized.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a film conveying device for conveying a film having a conductor on one side.

BACKGROUND OF THE INVENTION Conventionally, a film having a conductor on one side has been conveyed by varying the rotation of unwinding and winding rollers.

Hereinafter, the above-mentioned film transport will be explained using a film transport apparatus for vacuum deposition as an example with reference to one drawing.

FIG. 3 shows the configuration of a conventional film conveying device for vacuum deposition. In FIG. 3, 1sb is an unwinding roller that unwinds the film 2o. 23a, 2
3b is a roller, 14a and 14b are tension sensors, and 16a is a winding roller that winds up the film 20 via the roller 21.

Reference numerals 16a and 16b are slip clutches that control the torque of the motors 15a and 1sb. 1
Controllers 7a and 17b issue commands to the slip clutches 16a and 116b of the rollers 1sa and 16b in response to input signals from the tension sensors 14a and 14b. 18 is an evaporation source for depositing on the film 20, and 19 is a vacuum chamber. 22 is a potential difference generating device that generates a potential difference in the roller 21.

The operation of the film conveying device configured as described above will be explained below.

When the film 2o unwound from the unwinding roller 1sb passes the roller 23b equipped with the tension sensor 14b and comes to the lower part of the roller 21, the film 20b
It is deposited by the evaporation source 18. At this time, the signal inputted by the tension sensor 14b is sent to the controller 17b to issue a command to the slip clutch 16b. roller 2
1 and take-up 1 unwinding rollers 15&, 15b are rotating at arbitrary speeds, and slip clutches 16a, 1
eb to change the speed of the take-up 9 unwinding rollers 1sa and 16b to bring the tension close to an arbitrary value.

Further, the potential difference generating device 22 generates a potential difference necessary for the film 20 to be in complete contact with the roller 21 and run at the same speed as the roller 21 .

After the vapor is deposited on the lower part of the roller 21, the roller having the tensicon sensor 14a attached thereto is wound up by the winding roller 15a. In this case as well, the method is to change the slip clutch 16a under the control of the controller 17a as described above.

Here, a potential difference is generated on the entire circumferential surface of the roller 21.

Problems to be Solved by the Invention However, with the above configuration, the tension value is read and the signal is sent to the slip clutch connected to the drive source of the motor, and the rotational speed of the winding and unwinding rollers is adjusted accordingly. Since the tension changes, the response is poor and minute tension control is not possible. Particularly when the vacuum chamber is inside, the motor, slip clutch, etc. must be exposed to the outside, which creates an unstable frictional load on the connection to the vacuum chamber, making accurate control impossible. Also, the tangent line between the roller that generates the potential difference and the film that has a conductor on one side is unstable.

It is one of the causes of Tenshiran fluctuations.

Means for Solving the Problems In order to solve the above problems, the first invention of the present invention provides a plurality of rollers, a potential difference generating device electrically connected to the rollers, and a potential difference generator provided between the rollers. at least 1
This is a film conveying device characterized in that it is comprised of a tension detector.

Still, a second aspect of the present invention is a film conveying device comprising a roller in which conductive materials and insulating materials are alternately arranged on the outer periphery, and a potential difference generating device electrically connected to the roller. It is.

Function The function of the first aspect of the present invention is to control the frictional force between the film and the roller by increasing/decreasing the potential difference with the above-described configuration, so that a set tension value can always be obtained in a stable state.

The effect of the second aspect of the present invention is that by providing a potential difference only in the part where the film is wrapped around the roller, the edges of the film can be stabilized. This makes it possible to reduce the factors that cause tension fluctuations.

EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings.

FIG. 1 shows the configuration of a film conveying device in a first embodiment of the present invention. 4b in Figure 1
4a is a roller that unwinds the film 8, and 4a is a roller 24a with tension sensors 2a, 2b attached.
4b, a roller that winds up the film 8 via rollers 3a, 3b and roller 1;

6a and sb control rollers 3a by inputting signals from sensors 2a and 2b.

3b is a controller that generates a potential difference.

6 is an evaporation source for depositing on the film 8, and 7 is a vacuum chamber. Reference numeral 9 denotes a mounting for generating a potential difference in the roller 1.

The operation of the film conveying device configured as described above will be explained below.

When the film 8 unwound from the unwinding roller 4b passes through the roller 3b and the roller attached to the tension sensor 2b and reaches the lower part of the roller 1, the film 8 is vapor-deposited by the evaporation source 6. At this time, the input signal from the tension sensor 2b is controlled by the controller 5b, and the roller 3
Generate an arbitrary potential difference at b. Roller 1 and roller 3a.

3b rotates at an arbitrary speed, and by changing the potential difference, the frictional force is changed and the tension is brought to an arbitrary value. Also, the film 8 is attached to the tension sensor 2a after vapor deposition.
It is wound up on a winding roller 4a via a roller with a mark and roller 3a.

In this case as well, the controller 5a performs control in the same manner as described above to change the potential difference of the roller 3a. Also, unwinding roller 4
A means for obtaining a constant tension such as a slip clutch is used between the roller 3b and the roller 3b and between the take-up roller 4a and the roller 3&. or.

The potential difference generating device 9 adjusts a potential difference sufficient to allow the o-roller IKid film 8 to rotate at the same speed as the roller 1. In this example, since the tension before and after vapor deposition is an important part, the control means of the present invention is used at this position.

Note that in this device, the film transport direction can be rotated forward or reverse.

Next, a second embodiment of the present invention will be described with reference to the drawings.

In FIGS. 2a and 2b, the outer circumference of the roller 13 is alternately made of conductors and insulators, on which the conductor 10 acting as a brush is fixed only on the part where a potential difference is to be applied, and the conductor is Even if a potential difference is generated in the roller 10 and the roller 13 rotates as a result, the potential difference is generated only in the potential difference generating portion 12a. 11 is a film.

This second embodiment can be applied to the roller 1 and rollers 3a and 3b in the first embodiment described above.

Effects of the Invention As described above, the first aspect of the present invention includes a plurality of rollers, a potential difference generating device electrically connected to the rollers, and at least one tension detection device provided between the rollers. By providing a container, minute tension control becomes possible, and the effect is remarkable.

Further, according to the second aspect of the present invention, there is provided a roller in which a conductor and an insulator are arranged alternately and insulated from each other on the outer periphery; a conductor inscribed only in a predetermined portion of the roller; By installing an electrically connected potential difference generating device and generating a potential difference only in a part of the roller, it is possible to stabilize the separation between the film and the roller and reduce tension fluctuations, which has a great effect. It is.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a vacuum evaporation apparatus in a first embodiment of the first invention, FIG. 2a is a front sectional view showing a second embodiment of the invention, and FIG. , FIG. 3 is a diagram showing an outline of a conventional vacuum evaporation apparatus. 1...Roller, 2a, 2b...Tension sensor, 3a, 3b...Roller, 4
a... Winding roller, 4b... Unwinding roller, 5a, 5b... Controller, 8.
...Film, 9...Potential difference generator,
10... Conductor, 11... Film,
12a...Potential difference generating section, 12b...
Potential difference generator, 13...Roller.

Claims (2)

[Claims] (1) It is composed of a roller around which the tape is wound and conveyed, a potential difference generating device electrically connected to the roller, and a tension detector provided between the roller and another roller adjacent to the roller. Characteristic film transport device. (2) A roller that carries a conductor and an insulator alternately arranged parallel to the axis on the outer periphery insulated from each other and wrapped with a tape, a conductor inscribed in a predetermined portion of the roller, and a conductor that is inscribed in a predetermined portion of the roller; an electrically connected potential difference generating device;
A film transport device comprising a tension detector provided between the roller and an adjacent roller.