JPH01171757A - Polishing jig - Google Patents

Abstract

PURPOSE:To simplify polishing material attaching and detaching operation to increase workability by providing a chuck part moved in the radial direction by operation of a handle for enlarging and reducing the width of its installing grooves. CONSTITUTION:If a core body 2 is moved down in a hollow 10 of a holding cylinder 1 by operation of a handle 3, blocks 4a in a chuck part 4 move down along a tapered open surface 10a of the holding cylinder 1, moving outward in the radial direction, so as to enlarge the width of installing grooves 14 between the blocks 4a. Subject materials 'a' such as chips are inserted in these installing grooves 14. After this insertion, by moving the core body 2 up in the hollow 10 by operation of the handle 3, the blocks 4a in the chuck part 4 are guided to the tapered open surface 10a to move inward radially to reduce the width of the installing grooves 14. Subject materials 'a' are thus held between the blocks 4a.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Applications) The present invention is a polishing jig, more specifically, a jig for holding a plurality of polished materials such as chips between them when polishing the end face of the polished materials. Regarding jigs for

(Prior Art) FIGS. 7 to 9 show a conventional right-angle polishing jig for semiconductor wafer tips.
(21) and (22) are side plates that are placed on the left and right side surfaces of the jig body (20), and (23) is a bolt that tightens and fixes the three parts.

The jig body (20) K is assembled by temporarily fixing chips (aXa) at regular intervals to the lower ends of both left and right sides of the jig body (20), and then tightening the side plates (21X22) with dowel bolts (23). The chip (aXa) is held between the chips (aXa), and for the temporary fixing, the chip (a) is attached to the jig body (a) via glue (24) as shown in FIG. After adhering the chip (a) and pasting the K tape (25) thereon, the chip (a) is again pasted thereon via m (z4'), and then the tape (25') is pasted thereon.

Thereafter, the side plates (21) and (22) are applied to the jig main body (20) to sandwich the chip (a).

The above-mentioned jig is manually held and slid onto a surface plate covered with abrasive grains to polish the lower end surface of the chip (aXa) and measure the depth of impurities.

Note that (26) in the figure is a concave groove through which abrasive grains flow.

(Problems to be Solved by the Invention) However, according to the above conventional jig, the chips (a) (a)
It takes a lot of effort to attach and detach the..., resulting in poor workability.

That is, temporarily fixing the chip (a) requires gluing and taping, and since a large number of chips are handled, it takes time to perform the work before and after polishing.

In addition, since there is no member to cover the outside of the exposed part of the chip, it is difficult to apply cutting force to the area where the chip is missing or to the entire large number of chips because it is manual work, and it is difficult to maintain the desired perpendicularity (
There were problems such as not being able to obtain polishing accuracy.

Therefore, the technical problem of the present invention is to provide a polishing jig that eliminates the above-mentioned conventional problems, facilitates the operation of attaching and detaching tips, improves workability, prevents chips from chipping, and improves polishing accuracy. It is possible to provide the following.

(Technical Means for Solving the Problems) The polishing jig of the first invention of the present application includes a holding cylinder having a hollow portion with a diameter-expanding tapered opening at the lower end, and A core body that fits vertically and slidably and allows a small diameter core shaft to protrude from the bottom;
Consisting of a handle that engages with the core to move the core up and down within the cavity, and a plurality of split blocks arranged on the outer periphery of the core, with mounting grooves formed between adjacent blocks. and a tapered chuck portion which is attached to a core body so that each block moves in the radial direction as the blocks are moved, and which joins the outer circumferential surface of each block to the opening surface of the holding cylinder. .

Further, the polishing jig of the second invention includes, in addition to the first invention,
It is characterized by comprising an outer cylinder into which the holding cylinder is freely rotatably fitted, and in which grooves are formed at regular intervals at the lower end of the outer cylinder.

(Operation) According to the first invention, when the core body is moved downward within the cavity by operating the handle, each block of the chuck portion moves downward along the tapered opening surface of the holding cylinder, in other words, outward in the radial direction. The mounting groove between each block is widened.

Therefore, insert the material to be polished such as a chip into each of the mounting grooves,
Alternatively, an attachment/detachment operation may be performed to take it out.

After inserting the material to be polished, when the core body is moved upward within the cavity by operating the handle, each block of the chuck part is guided by the tapered opening surface and moves radially inward to narrow the mounting groove. The material to be polished is sandwiched and held between the blocks.

Further, according to the second invention, the holding cylinder holding the material to be polished as described above is fitted into the outer cylinder, grips the outer cylinder, and slides and rotates on the surface plate. While rotating freely within the outer cylinder, each workpiece to be polished is brought into sliding contact with the upper surface of the surface plate while applying a constant force to the workpiece by its own weight.

(Embodiment) An embodiment of the present invention will be explained with reference to the drawings in the case of a jig for right-angle polishing of wafer chips. FIGS. 1 and 2 show the first invention, and FIGS. 2 inventions are shown,
Both inventions have the same configuration except for the presence or absence of an outer cylinder, so for convenience of explanation, the same members are indicated with the same reference numerals and the explanation will be the same.

The first invention is a holding cylinder (1), a core body (2), and a "ndle" (3).
, a chuck part (4).

The holding cylinder (1) forms a hollow part (10) in the lower half of the cylindrical body, the lower end of which is open, and a hollow part (lO) on the center line.
It passes through the shaft hole (11) leading to the hollow part (1G)
The K core body (2) is fitted and accommodated, and the handle (3) is inserted into the shaft hole (11).

The cavity (10) has a circular cross section, and its lower end is tapered to provide an opening surface (10a).

The core (2) has a disc shape that fits into the inner part of the cavity (10) so as to be able to slide vertically, and a small diameter core shaft (2a) is integrally projected downward from the center of the lower surface of the core (2). A chuck part (4) is attached to the outer periphery of the shaft (2a).

The core body (2) has a screw hole (
12) Drill the hole and dovetail-like engagement with the lower curved surface @
(13×13)... are formed at regular intervals, and each groove (13) extends in the radial direction.

The handle (3) has a flange (3b) at the upper end of the rotation shaft (3a).
are integrally formed, and the 70 rotation shaft (3a) is connected to the holding cylinder (1).
), and the lower end of the shaft is screwed into the screw hole (12) of the core body (2), and the lower surface of the flange (3b) is rotatably attached to the upper surface of the holding cylinder (1). It becomes engaged.

Therefore, by rotating the handle (3), the core body (2) spirally moves along the rotation axis (3a), and the hollow part (10
) move up and down.

The chuck part (4) as a whole is composed of split blocks (4aX4a) that can divide the ring body that fits on the core shaft (2a) at equal angles in a plane radial manner, and the adjacent blocks (4a) (4a) A mounting groove (14) corresponding to the gap between the two is formed between the two.

In the drawings of the embodiment, a case is shown in which eight mounting grooves (14) are formed in a block divided into eight parts.

Each block (4a) is provided with a retaining edge (15) on its upper surface that fits into the engaging groove (13) of the core body (2), and the retaining edge is pushed outward into the engaging groove (13). Push it in and hang it on the core body (2), and arrange it around the outer periphery of the core shaft (2a).

Further, each block (4a) has its outer peripheral surface connected to the cavity (l).
It is formed into a tapered shape that joins the tapered opening surface (tOa) of O).

Therefore, each block (4a) is attached to the core (2) and can move up and down in the cavity (10) together with the core (2), and can also move in the radial direction with respect to the core (2). And,
It is possible to move outward in the downward movement state, that is, the mounting groove (14) is widened (see the two-dot chain line in Figs. 2 and 4), and in the upward movement, it is guided by the tapered opening surface (IQa) and inward. Move to narrow the mounting groove (14) (solid line in the figure).

Now, to explain how to use the first invention (FIGS. 1 and 2) having the above-mentioned configuration, the core body (
2) downward to widen the mounting grooves (14) (14) (In actual work, hold the holding cylinder so that the mounting groove (14) is on the top, and turn the nozzle. operation).

In that state, insert Ueno-chip (a) into each mounting groove (14).
After inserting one or more chips, rotate the tip handle (3) in the opposite direction to narrow the installation groove (14X14), and then insert each chip (aX &)... is held between the blocks (4aX4a).

In addition, the amount of protrusion of the chip (l .

Then, the holding cylinder (1) is placed on a surface plate (not shown) covered with abrasive grains so that the chips (a) C&)... are in contact with it, and the operator grips the holding cylinder (1). The chip is polished by sliding it into contact with the surface plate while reciprocating and rotating.

Note that mechanical polishing may be used instead of manual polishing by an operator, and in that case, the holding cylinder (1) may be attached to the movable part of the polishing machine.

Next, the second invention is shown in FIGS. 3 to 6, in which the chip (a)
The chuck structure for attaching and detaching (a) is the same as that of the first invention described above, and an outer cylinder (5) is used during the polishing operation.

The outer cylinder (5) is a cylindrical body with an inner diameter slightly larger than the outer diameter of the holding cylinder (1), and its lower end surface is formed into a tooth shape with concave m (16 x 16) spaced at regular intervals. establish.

Therefore, as mentioned above, the chuck part (4) K chip (aX
a) Insert the holding cylinder (1) holding the... into the outer cylinder (5) so that it can freely rotate, and then insert the holding cylinder (5) and the holding cylinder (1) into the outer cylinder (5).
is placed on the surface plate in the state shown in Fig. 3, and the worker removes the outer cylinder (
5) Grinding the chip while reciprocating and rotating it on the surface plate while sliding the chip.

The abrasive grains on the surface plate flow into the outer cylinder (5) through the concave grooves (16×16) and are supplied to the chips (aXa).

(Effect) According to the first invention of the present application, the mounting groove of the chuck part is widened or narrowed by operating the handle, and the workpiece to be polished is attached to and removed from the groove in the widened state, and the workpiece inserted in the narrowed state is It is possible to clamp and hold materials, eliminating the need for labor-intensive temporary fixing operations such as gluing and taping the materials to be polished, which was required in the past, making it extremely easy to attach and remove the materials to be polished, and improving work efficiency. can be achieved.

Further, since the materials to be polished are arranged radially, even when polishing is done manually, it is possible to reduce the load applied to each material to be polished and variations around the abrasive grains, thereby increasing polishing accuracy.

According to the second invention of the present application, since the outer periphery of the material to be polished is covered and protected by the outer cylinder, chip breakage can be prevented, and when polishing is done manually, the operator can grip the outer cylinder and polish the material. Since the operator does not apply force directly to the holding cylinder during the operation, a uniform load is applied to the entire chip, and polishing accuracy can be further improved.

[Brief explanation of the drawing]

Fig. 1 is a sectional view of the first invention jig of the present application, Fig. 2 is a bottom view thereof, Fig. 3 is a partially cutaway sectional view of the second invention jig, and Fig. 4 is a sectional view of the jig of the first invention.
The figure is a plan view, FIG. 5 is a sectional view taken along the line (V)-(V), FIG. 6 is an isolated sectional view, FIG. 7 is a side view of the conventional jig, and FIG. 8 is its (Vl[) -(~'l1i) line sectional view, 9th
The figure is an enlarged view of part A. In the figure, (1) is a holding cylinder, (2) is a core body, (2a) is a core shaft, (3) is a handle, (4) is a chuck part, (4a) is a block, (5) is an outer cylinder, (10) is a hollow part, (10a
) is a tapered opening surface, (14) is a mounting groove, (16) is a concave groove, and (a) is a wafer chip.

Claims (2)

[Claims] (1) a holding cylinder having a hollow portion with a diameter-expanding tapered opening at its lower end; and a holding cylinder that fits into the hollow portion so as to be vertically slidable;
and a core body from which a small-diameter core shaft can protrude from the lower part, a handle that engages with the core body and moves the core body up and down within the cavity, and a plurality of split blocks arranged on the outer periphery of the core shaft. A taper is configured, in which mounting grooves are formed between adjacent blocks, each block is engaged with a core body so as to move in the radial direction, and the outer circumferential surface of each block is joined to the opening surface of the holding cylinder. A polishing jig consisting of a chuck part formed into a shape. (2) a holding cylinder having a hollow portion with a diameter-expanding tapered opening at the lower end; and a holding cylinder that fits into the hollow portion so as to be vertically slidable;
and a core body from which a small-diameter core shaft can protrude from the lower part, a handle that engages with the core body and moves the core body up and down within the cavity, and a plurality of split blocks arranged on the outer periphery of the core shaft. A taper is configured, in which mounting grooves are formed between adjacent blocks, each block is engaged with a core body so as to move in the radial direction, and the outer circumferential surface of each block is joined to the opening surface of the holding cylinder. A polishing jig comprising a chuck part formed in the shape of a shape, and an outer cylinder into which the holding cylinder is freely rotatably fitted and having grooves formed at regular intervals on the lower edge thereof.