JPH01171646U - - Google Patents

Info

Publication number

JPH01171646U

JPH01171646U JP6861888U JP6861888U JPH01171646U JP H01171646 U JPH01171646 U JP H01171646U JP 6861888 U JP6861888 U JP 6861888U JP 6861888 U JP6861888 U JP 6861888U JP H01171646 U JPH01171646 U JP H01171646U

Authority

JP

Japan

Prior art keywords

layer

thermal head

thin film

wear

insulating substrate

Prior art date

1988-05-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

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• 229910003460 diamond Inorganic materials 0.000 claims description 3
• 239000010432 diamond Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 239000010409 thin film Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 claims description 2
• 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
• 229910052581 Si3N4 Inorganic materials 0.000 claims 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 239000011521 glass Substances 0.000 description 1