JPH01170587U - - Google Patents

Info

Publication number
JPH01170587U
JPH01170587U JP6719588U JP6719588U JPH01170587U JP H01170587 U JPH01170587 U JP H01170587U JP 6719588 U JP6719588 U JP 6719588U JP 6719588 U JP6719588 U JP 6719588U JP H01170587 U JPH01170587 U JP H01170587U
Authority
JP
Japan
Prior art keywords
robot
vacuum
suction device
device connected
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6719588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6719588U priority Critical patent/JPH01170587U/ja
Publication of JPH01170587U publication Critical patent/JPH01170587U/ja
Pending legal-status Critical Current

Links

JP6719588U 1988-05-20 1988-05-20 Pending JPH01170587U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6719588U JPH01170587U (US20100056889A1-20100304-C00004.png) 1988-05-20 1988-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6719588U JPH01170587U (US20100056889A1-20100304-C00004.png) 1988-05-20 1988-05-20

Publications (1)

Publication Number Publication Date
JPH01170587U true JPH01170587U (US20100056889A1-20100304-C00004.png) 1989-12-01

Family

ID=31292578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6719588U Pending JPH01170587U (US20100056889A1-20100304-C00004.png) 1988-05-20 1988-05-20

Country Status (1)

Country Link
JP (1) JPH01170587U (US20100056889A1-20100304-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0584690A (ja) * 1991-09-25 1993-04-06 Shin Meiwa Ind Co Ltd 真空チヤンバ用産業ロボツト装置
JP2010110830A (ja) * 2008-11-04 2010-05-20 Denso Wave Inc クリーンロボット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0584690A (ja) * 1991-09-25 1993-04-06 Shin Meiwa Ind Co Ltd 真空チヤンバ用産業ロボツト装置
JP2010110830A (ja) * 2008-11-04 2010-05-20 Denso Wave Inc クリーンロボット

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